CN104858726A - Device and method for ultra precise polishing of double-frequency acoustic cavitation nanofluid under magnetic control action - Google Patents
Device and method for ultra precise polishing of double-frequency acoustic cavitation nanofluid under magnetic control action Download PDFInfo
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- CN104858726A CN104858726A CN201510038749.XA CN201510038749A CN104858726A CN 104858726 A CN104858726 A CN 104858726A CN 201510038749 A CN201510038749 A CN 201510038749A CN 104858726 A CN104858726 A CN 104858726A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a device and a method for ultra precise polishing of a double-frequency acoustic cavitation nanofluid under the magnetic control action. The device comprises a polishing liquid pool, a hydraulic pump, an ultrasonic reactor, a double-frequency ultrasound device, a nano-abrasive container, an alternating current power supply, an alternating current coil and a workpiece frame. The method is realized mainly through the following steps: (1) a polishing liquid is placed in the polishing liquid pool, and then is sent in the ultrasonic reactor through the hydraulic pump; (2) nano-abrasives are placed in the nano-abrasive container, and flow into the ultrasonic reactor through a third connecting pipe; (3) the polishing liquid and the nano-abrasives are mixed in the ultrasonic reactor into a nano-abrasive and polishing liquid mixed solution, and the mixed solution is subjected to acoustic cavitation under the action of the double-frequency ultrasound device; (4) the mixed solution is ejected under acoustic cavitation and pressure; (5) the alternating current coil generates an alternating current magnetic field, and the ejected nano-abrasive and polishing liquid mixed solution polishes a workpiece under the action of the alternating current magnetic field. According to the device and the method, the plane and the curved surfaces of parts are polished with high precision, high consistency and high surface quality.
Description
Technical field
The present invention relates to equipment manufacture manufacture field, double frequency acoustic cavitation nano-fluid superfinishing burnishing device and finishing method under the magnetic control effect of the specifically high accuracy of a kind of part plane or curved surface, high uniformity and great surface quality.
Background technology
The plane of high accuracy, great surface quality or curved surface are important in equipment manufacture, crucial base parts and components, directly decide the performance of Grand Equipments and main computer boxes, q&r, be widely used in fields such as electronic equipment, precision optical machinery, instrument and meter, optical element, medicine equipments, Abrasive Waterjet Polishing Technology is exactly one of them finishing method.Water jet is penetrated by nozzle to form difform high speed water a fluid stream, and this water stream with enough energy acts on material, can clean material, delamination, cutting, the operation such as pulverizing.Water jet operating efficiency is relevant to the pressure thight of pump, and for making water-jet technology extensive use industrial department, people develop high-pressure generation equipment, but remains high due to high-tension apparatus cost, but also bring hidden danger to safety, therefore its application is also restricted.Simultaneously traditional current impelling is uncontrollable, and not high for surface machining accuracy, surface quality is bad.In recent years along with improving constantly equipment and instrument performance, more and more higher requirement is proposed to plane and surface machining accuracy and surface quality, it is necessary to develop the high accuracy of a kind of plane or curved surface, the finishing method of great surface quality.
Summary of the invention
The object of this invention is to provide double frequency acoustic cavitation nano-fluid superfinishing burnishing device and finishing method under a kind of magnetic control effect.
The present invention will solve the polishing requirement that the plane of existing part or curved surface cannot meet high accuracy, great surface quality, and in traditional water jet polishing technology, current impelling is uncontrollable, not high to surface machining accuracy, the problem that surface quality is bad.
Technical scheme of the present invention is: double frequency acoustic cavitation nano-fluid superfinishing burnishing device under a kind of magnetic control effect, comprise polishing liquid pool, hydraulic pump, ultrasonic reactor, double-frequency ultrasound device, nano-abrasive container, AC power, AC coil and workpiece frame, be connected by the first tube connector between described hydraulic pump and polishing liquid pool, described hydraulic pump and the upper end of ultrasonic reactor are connected by the second tube connector, are provided with polishing fluid in described polishing liquid pool, described nano-abrasive container is located at above described ultrasonic reactor, is connected by the 3rd tube connector, is provided with nano-abrasive in described nano-abrasive container, described workpiece frame is located at the below of described ultrasonic reactor, and described AC coil is located between described ultrasonic reactor and workpiece frame, is provided with workpiece in workpiece frame, and described AC coil is connected with described AC power by the 5th wire, described double-frequency ultrasound device comprises high-frequency ultrasound device and low frequency ultrasound device, be located at the left and right sides of described ultrasonic reactor respectively, described high-frequency ultrasound device comprises high frequency ultrasound generator, first high-frequency transducer, first high frequency ultrasonic transformer, second high-frequency transducer and the second high frequency ultrasonic transformer, described high frequency ultrasound generator connects with the first described high-frequency transducer and the second high-frequency transducer respectively by privates and privates, the first described high frequency ultrasonic transformer and the second high frequency ultrasonic transformer all connect with described ultrasonic reactor, and be located at the same side of ultrasonic reactor, described low frequency ultrasound device comprises low frequency ultrasound generator, the first low-frequency transducer, the first low frequency ultrasonic transformer, the second low-frequency transducer and the second low frequency ultrasonic transformer, described low frequency ultrasound generator connects with the first described low-frequency transducer and the second low-frequency transducer respectively by the first wire and the second wire, the first described low frequency ultrasonic transformer and the second low frequency ultrasonic transformer all connect with described ultrasonic reactor, and are located at the same side of ultrasonic reactor.
Preferably, described hydraulic pump is adjustable, and the pressure of energy regulation output polishing fluid, the second described tube connector is provided with hydralic pressure gauge.
Preferably, described nano-abrasive has magnetic, can produce directed movement under the effect of AC magnetic field.
Preferably, the 3rd described tube connector is provided with flow control valve.
Preferably, described polishing fluid and nano-abrasive mix respectively by the second tube connector and the 3rd tube connector input ultrasonic reactor.
Preferably, the side of described workpiece frame is provided with high-speed camera, is fixed by high-speed camera stand, and described high-speed camera is connected with computer by data wire, and described high-speed camera is just to described AC coil.
The finishing method realized by double frequency acoustic cavitation nano-fluid superfinishing burnishing device under magnetic control effect, is characterized in that the method is realized by following steps:
(1), polishing fluid is placed in polishing liquid pool, by hydraulic pumping in ultrasonic reactor;
(2), nano-abrasive is placed in nano-abrasive container, flows in ultrasonic reactor by the 3rd tube connector;
(3), ultrasonic low-and high-frequency double frequency vibrating is produced by high-frequency ultrasound device and low frequency ultrasound device, polishing fluid and nano-abrasive are mixed into nano-abrasive and polishing fluid mixed solution in ultrasonic reactor, and produce cavitation effect under the effect of double-frequency ultrasound device;
(4), nano-abrasive and polishing fluid mixed solution spray and dish out under the effect of cavitation effect and pressure;
(5), AC coil produces AC magnetic field, sprays the nano-abrasive of dishing out and polishing fluid mixed solution becomes polishing mixed liquor under the effect of AC magnetic field, carries out polishing to workpiece.
Beneficial effect of the present invention is: 1. machining accuracy is relatively little to the dependency degree of equipment precision, and device structure is relatively simple, is easy to transformation and produces; 2. the controllability of the abrasive material of polishing; 3. can process high accuracy, the plane of great surface quality or curved surface; 4. the efficiency of polishing is high.
Accompanying drawing explanation
Fig. 1 is double frequency acoustic cavitation nano-fluid superfinishing burnishing device and burnishing device schematic diagram under magnetic control effect in the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, the invention will be further described.
As shown in Figure 1, the present invention includes polishing liquid pool 1, hydraulic pump 4, ultrasonic reactor 29, double-frequency ultrasound device, nano-abrasive container 8, AC power 19, AC coil 21 and workpiece frame 22, be connected by the first tube connector 3 between described hydraulic pump 4 and polishing liquid pool 1, described hydraulic pump 4 and the upper end of ultrasonic reactor 29 are connected by the second tube connector 5, are provided with polishing fluid 2 in described polishing liquid pool 1, described nano-abrasive container 8 is located at above described ultrasonic reactor 29, is connected by the 3rd tube connector 9, is provided with nano-abrasive 7 in described nano-abrasive container 8, described workpiece frame 22 is located at the below of described ultrasonic reactor 29, described AC coil 21 is located between described ultrasonic reactor 29 and workpiece frame 22, be provided with workpiece 24 in workpiece frame 22, described AC coil 21 is connected with described AC power 19 by the 5th wire 20, described double-frequency ultrasound device comprises high-frequency ultrasound device and low frequency ultrasound device, be located at the left and right sides of described ultrasonic reactor 29 respectively, described high-frequency ultrasound device comprises high frequency ultrasound generator 33, first high-frequency transducer 35, first high frequency ultrasonic transformer 36, second high-frequency transducer 31 and the second high frequency ultrasonic transformer 30, described high frequency ultrasound generator 33 connects with the first described high-frequency transducer 35 and the second high-frequency transducer 31 respectively by privates 34 and privates 32, the first described high frequency ultrasonic transformer 36 and the second high frequency ultrasonic transformer 30 all connect with described ultrasonic reactor 29, and be located at the same side of ultrasonic reactor 29, described low frequency ultrasound device comprises low frequency ultrasound generator 14, first low-frequency transducer 12, first low frequency ultrasonic transformer 11, second low-frequency transducer 16 and the second low frequency ultrasonic transformer 17, described low frequency ultrasound generator 14 connects with the first described low-frequency transducer 12 and the second low-frequency transducer 16 respectively by the first wire 13 and the second wire 15, the first described low frequency ultrasonic transformer 11 and the second low frequency ultrasonic transformer 17 all connect with described ultrasonic reactor 29, and are located at the same side of ultrasonic reactor 29.
In the present embodiment, described hydraulic pump 4 is adjustable, and the pressure of energy regulation output polishing fluid 2, the second described tube connector 5 is provided with hydralic pressure gauge 6, can show the pressure of polishing fluid 2 in the second tube connector 5.
In the present embodiment, described nano-abrasive 7 has magnetic, can produce directed movement under the effect of AC magnetic field.
In the present embodiment, the 3rd described tube connector 9 is provided with flow control valve 10, can control the flow of nano-abrasive 7.
In the present embodiment, described polishing fluid 2 and nano-abrasive 7 input in ultrasonic reactor 29 respectively by the second tube connector 5 and the 3rd tube connector 9 and mix.
In the present embodiment, the side of described workpiece frame 22 is provided with high-speed camera 26, fixed by high-speed camera stand 25, and described high-speed camera 26 is connected with computer 28 by data wire 27, described high-speed camera 26 is just to described AC coil 21.
The finishing method realized by double frequency acoustic cavitation nano-fluid superfinishing burnishing device under magnetic control effect, the method is realized by following steps:
(1), polishing fluid 2 is placed in polishing liquid pool 1, delivers in ultrasonic reactor 29 by hydraulic pump 4;
(2), nano-abrasive 7 is placed in nano-abrasive container 8, flows in ultrasonic reactor 29 by the 3rd tube connector 9;
(3), ultrasonic low-and high-frequency double frequency vibrating is produced by high-frequency ultrasound device and low frequency ultrasound device, polishing fluid 2 and nano-abrasive 7 are mixed into nano-abrasive and polishing fluid mixed solution 18 in ultrasonic reactor 29, and produce cavitation effect under the effect of double-frequency ultrasound device;
(4), nano-abrasive and polishing fluid mixed solution 18 spray and dish out under the effect of cavitation effect and pressure;
(5), AC coil 21 produces AC magnetic field, sprays the nano-abrasive of dishing out and polishing fluid mixed solution 18 becomes polishing mixed liquor 23 under the effect of AC magnetic field, carries out polishing to workpiece 24.
Operation principle: polishing fluid 2 is contained in described polishing liquid pool 1, polishing fluid 2 in described polishing liquid pool 1 enters described hydraulic pump 4 by described first tube connector 3, polishing fluid 2 is pressed in described ultrasonic reactor 29 by the second tube connector 5 by described hydraulic pump 4, and described hydralic pressure gauge 6 can show the pressure of polishing fluid 2 in the second tube connector 5; Nano-abrasive 7 is contained in described nano-abrasive container 8, and nano-abrasive 7 enters in described ultrasonic reactor 29 by described 3rd tube connector 9, and described flow control valve 10 can control nano-abrasive 7 flow; Described polishing fluid 2 and described nano-abrasive 7 are mixed into nano-abrasive and polishing fluid mixed solution 18 in ultrasonic reactor 29.
Described low frequency ultrasound generator 14 produces ultrasonic low frequency electric oscillation, ultrasonic low frequency electric oscillation inputs described first low-frequency transducer 12 by described first wire 13, ultrasonic low frequency electric oscillation is converted to low-frequency mechanical vibrations by described first low-frequency transducer 12, and Amplitude amplification is reached ultrasonic reactor 29 by described first low frequency ultrasonic transformer 11 by low-frequency mechanical vibrations; Ultrasonic low frequency electric oscillation inputs described second low-frequency transducer 16 by the second wire 15, ultrasonic low frequency electric oscillation is converted to low-frequency mechanical vibrations by described second low-frequency transducer 16, and Amplitude amplification is reached ultrasonic reactor 29 by described second low frequency ultrasonic transformer 17 by low-frequency mechanical vibrations; Described high frequency ultrasound generator 33 produces the vibration of ultrasonic high-frequency electrical, ultrasonic high-frequency electrical vibration inputs described first high-frequency transducer 35 by described privates 34, ultrasonic high-frequency electrical vibration is converted to high-frequency mechanical vibration by described first high-frequency transducer 35, and Amplitude amplification is reached ultrasonic reactor 29 by described first high frequency ultrasonic transformer 36 by high-frequency mechanical vibration; Described ultrasonic high-frequency electrical vibration inputs described second high-frequency transducer 31 by described privates 32, ultrasonic low frequency electric oscillation is converted to high-frequency mechanical vibration by described second high-frequency transducer 31, and Amplitude amplification is reached ultrasonic reactor 29 by described second high frequency ultrasonic transformer 30 by high-frequency mechanical vibration.
Nano-abrasive in described ultrasonic reactor 29 and polishing fluid mixed solution 18 produce cavitation effect under ultrasonic low-and high-frequency effect of vibration, and impelling under pressure simultaneously goes out ultrasonic reactor 29.
Described AC power 19 produces alternating current, and by described 5th wire 20 input AC coil 21, described AC coil 21 produces AC magnetic field, and the nano-abrasive that impelling goes out and polishing fluid mixed solution 18 produce directed movement under the effect of AC magnetic field.
Workpiece 24 is arranged in described workpiece frame 22, produces polishing action under the effect of the nano-abrasive that described workpiece 24 goes out in directed movement impelling and polishing fluid mixed solution 18.
Described high-speed camera 26 can record the track of directed movement nano-abrasive 7, the data of record input computer 28 by described data wire 27, described computer 28 analytic record data, can compare with the precision of polishing and surface quality, draw rule, size of current and the direction of described AC coil 21 can be adjusted, the size of adjustment AC magnetic field and direction, and then the direction of motion of adjustment magnetic Nano abrasive particle 7.The quality of polishing and the direction of motion of described nano-abrasive 7 and speed have substantial connection, the direction of motion of nano-abrasive 7 and the controllability of velocity magnitude, the progress of polishing and surface quality is made to have controllability, the flow of the adjustment pressure of polishing fluid 2, ultrasonic frequency and nano-abrasive 7, finally obtains high accuracy, the plane of great surface quality or curved surface.
Claims (7)
1. double frequency acoustic cavitation nano-fluid superfinishing burnishing device under a magnetic control effect, comprise polishing liquid pool, hydraulic pump, ultrasonic reactor, double-frequency ultrasound device, nano-abrasive container, AC power, AC coil and workpiece frame, it is characterized in that being connected by the first tube connector between described hydraulic pump and polishing liquid pool, described hydraulic pump and the upper end of ultrasonic reactor are connected by the second tube connector, are provided with polishing fluid in described polishing liquid pool, described nano-abrasive container is located at above described ultrasonic reactor, is connected by the 3rd tube connector, is provided with nano-abrasive in described nano-abrasive container, described workpiece frame is located at the below of described ultrasonic reactor, and described AC coil is located between described ultrasonic reactor and workpiece frame, is provided with workpiece in workpiece frame, and described AC coil is connected with described AC power by the 5th wire, described double-frequency ultrasound device comprises high-frequency ultrasound device and low frequency ultrasound device, be located at the left and right sides of described ultrasonic reactor respectively, described high-frequency ultrasound device comprises high frequency ultrasound generator, first high-frequency transducer, first high frequency ultrasonic transformer, second high-frequency transducer and the second high frequency ultrasonic transformer, described high frequency ultrasound generator connects with the first described high-frequency transducer and the second high-frequency transducer respectively by privates and privates, the first described high frequency ultrasonic transformer and the second high frequency ultrasonic transformer all connect with described ultrasonic reactor, and be located at the same side of ultrasonic reactor, described low frequency ultrasound device comprises low frequency ultrasound generator, the first low-frequency transducer, the first low frequency ultrasonic transformer, the second low-frequency transducer and the second low frequency ultrasonic transformer, described low frequency ultrasound generator connects with the first described low-frequency transducer and the second low-frequency transducer respectively by the first wire and the second wire, the first described low frequency ultrasonic transformer and the second low frequency ultrasonic transformer all connect with described ultrasonic reactor, and are located at the same side of ultrasonic reactor.
2. double frequency acoustic cavitation nano-fluid superfinishing burnishing device under magnetic control effect according to claim 1, is characterized in that described hydraulic pump is adjustable, and the pressure of energy regulation output polishing fluid, the second described tube connector is provided with hydralic pressure gauge.
3. double frequency acoustic cavitation nano-fluid superfinishing burnishing device under magnetic control effect according to claim 1, is characterized in that described nano-abrasive has magnetic, can produce directed movement under the effect of AC magnetic field.
4. double frequency acoustic cavitation nano-fluid superfinishing burnishing device under magnetic control effect according to claim 1, is characterized in that the 3rd described tube connector is provided with flow control valve.
5. double frequency acoustic cavitation nano-fluid superfinishing burnishing device under magnetic control effect according to claim 1, is characterized in that described polishing fluid and nano-abrasive mix respectively by the second tube connector and the 3rd tube connector input ultrasonic reactor.
6. double frequency acoustic cavitation nano-fluid superfinishing burnishing device under magnetic control effect according to claim 1, it is characterized in that the side of described workpiece frame is provided with high-speed camera, fixed by high-speed camera stand, and described high-speed camera is connected with computer by data wire, described high-speed camera is just to described AC coil.
7. the finishing method realized by double frequency acoustic cavitation nano-fluid superfinishing burnishing device under magnetic control effect according to claim 1, is characterized in that the method is realized by following steps:
(1), polishing fluid is placed in polishing liquid pool, by hydraulic pumping in ultrasonic reactor;
(2), nano-abrasive is placed in nano-abrasive container, flows in ultrasonic reactor by the 3rd tube connector;
(3), ultrasonic low-and high-frequency double frequency vibrating is produced by high-frequency ultrasound device and low frequency ultrasound device, polishing fluid and nano-abrasive are mixed into nano-abrasive and polishing fluid mixed solution in ultrasonic reactor, and produce cavitation effect under the effect of double-frequency ultrasound device;
(4), nano-abrasive and polishing fluid mixed solution spray and dish out under the effect of cavitation effect and pressure;
(5), AC coil produces AC magnetic field, sprays the nano-abrasive of dishing out and polishing fluid mixed solution becomes polishing mixed liquor under the effect of AC magnetic field, carries out polishing to workpiece.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108705384A (en) * | 2018-07-03 | 2018-10-26 | 昆山科森科技股份有限公司 | Burr removal device for medical instrument part |
| CN108789165A (en) * | 2018-06-25 | 2018-11-13 | 南京航空航天大学 | A kind of ultrasonic wave added abradant jet deburring device |
| CN110315397A (en) * | 2019-05-27 | 2019-10-11 | 浙江工业大学 | Ultrasonic cavitation and magnetic field auxiliary low pressure abrasive Flow polishing method and device |
| CN110405620A (en) * | 2019-05-24 | 2019-11-05 | 浙江工业大学 | Burnishing device is homogenized based on micro-nano gas phase and the high-precision of Lorentz force |
| CN111215970A (en) * | 2020-01-24 | 2020-06-02 | 北京理工大学 | Ultrasonic cavitation assisted ultrasonic magnetic polishing method for microstructure mold |
| CN112157596A (en) * | 2020-09-10 | 2021-01-01 | 太原理工大学 | Acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device and using method thereof |
| CN112518436A (en) * | 2020-11-20 | 2021-03-19 | 杭州电子科技大学 | Wood polishing tool grinding and polishing process based on electromagnetic principle |
| CN114248170A (en) * | 2021-12-20 | 2022-03-29 | 湖南理工学院 | Grinding device and method for nano aerosol directional adsorption diamond grinding wheel |
| CN114800060A (en) * | 2022-05-25 | 2022-07-29 | 广东技术师范大学 | Chemical magneto-rheological polishing device and method based on eddy current cavitation |
| CN116038444A (en) * | 2023-03-27 | 2023-05-02 | 四川托璞勒科技有限公司 | Ultrasonic grinder |
| CN117340692A (en) * | 2023-12-05 | 2024-01-05 | 太原理工大学 | Acoustic-magnetic coupling field auxiliary liquid jet polishing device for metal additive manufacturing part |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0779647B1 (en) * | 1995-12-15 | 1998-06-17 | Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft | Method and apparatus for treatment of semiconductor material |
| US5971835A (en) * | 1998-03-25 | 1999-10-26 | Qed Technologies, Inc. | System for abrasive jet shaping and polishing of a surface using magnetorheological fluid |
| CN2756388Y (en) * | 2004-10-29 | 2006-02-08 | 深圳南玻显示器件科技有限公司 | Polishing liquid supply controller |
| CN2875699Y (en) * | 2006-04-04 | 2007-03-07 | 杭州电子科技大学 | Azimuth detection and control system of ultrasonic processing profile tool |
| CN2892232Y (en) * | 2006-01-25 | 2007-04-25 | 侯梦斌 | Biological extracting device |
| CN101434055A (en) * | 2008-12-24 | 2009-05-20 | 哈尔滨工业大学 | Nano colloid flow shooting and polishing device |
| CN101935087A (en) * | 2010-08-16 | 2011-01-05 | 合肥工业大学 | Double-frequency ultrasonic chemical reactor |
| CN201841443U (en) * | 2010-10-14 | 2011-05-25 | 浙江工业大学 | Magnetorheological jet polishing device |
| CN102729101A (en) * | 2012-06-22 | 2012-10-17 | 青岛理工大学 | Solid particle grinding fluid combined machining process and device |
-
2015
- 2015-01-23 CN CN201510038749.XA patent/CN104858726A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0779647B1 (en) * | 1995-12-15 | 1998-06-17 | Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft | Method and apparatus for treatment of semiconductor material |
| US5971835A (en) * | 1998-03-25 | 1999-10-26 | Qed Technologies, Inc. | System for abrasive jet shaping and polishing of a surface using magnetorheological fluid |
| CN2756388Y (en) * | 2004-10-29 | 2006-02-08 | 深圳南玻显示器件科技有限公司 | Polishing liquid supply controller |
| CN2892232Y (en) * | 2006-01-25 | 2007-04-25 | 侯梦斌 | Biological extracting device |
| CN2875699Y (en) * | 2006-04-04 | 2007-03-07 | 杭州电子科技大学 | Azimuth detection and control system of ultrasonic processing profile tool |
| CN101434055A (en) * | 2008-12-24 | 2009-05-20 | 哈尔滨工业大学 | Nano colloid flow shooting and polishing device |
| CN101935087A (en) * | 2010-08-16 | 2011-01-05 | 合肥工业大学 | Double-frequency ultrasonic chemical reactor |
| CN201841443U (en) * | 2010-10-14 | 2011-05-25 | 浙江工业大学 | Magnetorheological jet polishing device |
| CN102729101A (en) * | 2012-06-22 | 2012-10-17 | 青岛理工大学 | Solid particle grinding fluid combined machining process and device |
Cited By (16)
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|---|---|---|---|---|
| CN108789165A (en) * | 2018-06-25 | 2018-11-13 | 南京航空航天大学 | A kind of ultrasonic wave added abradant jet deburring device |
| CN108705384A (en) * | 2018-07-03 | 2018-10-26 | 昆山科森科技股份有限公司 | Burr removal device for medical instrument part |
| CN110405620A (en) * | 2019-05-24 | 2019-11-05 | 浙江工业大学 | Burnishing device is homogenized based on micro-nano gas phase and the high-precision of Lorentz force |
| CN110405620B (en) * | 2019-05-24 | 2021-02-26 | 浙江工业大学 | High-precision homogenizing polishing device based on micro-nano gas phase and Lorentz force |
| CN110315397A (en) * | 2019-05-27 | 2019-10-11 | 浙江工业大学 | Ultrasonic cavitation and magnetic field auxiliary low pressure abrasive Flow polishing method and device |
| CN110315397B (en) * | 2019-05-27 | 2021-01-01 | 浙江工业大学 | Ultrasonic cavitation and magnetic field assisted low-pressure abrasive particle flow polishing method and device |
| CN111215970A (en) * | 2020-01-24 | 2020-06-02 | 北京理工大学 | Ultrasonic cavitation assisted ultrasonic magnetic polishing method for microstructure mold |
| CN112157596A (en) * | 2020-09-10 | 2021-01-01 | 太原理工大学 | Acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device and using method thereof |
| CN112518436A (en) * | 2020-11-20 | 2021-03-19 | 杭州电子科技大学 | Wood polishing tool grinding and polishing process based on electromagnetic principle |
| CN112518436B (en) * | 2020-11-20 | 2021-10-08 | 杭州电子科技大学 | Wood polishing tool grinding and polishing process based on electromagnetic principle |
| CN114248170A (en) * | 2021-12-20 | 2022-03-29 | 湖南理工学院 | Grinding device and method for nano aerosol directional adsorption diamond grinding wheel |
| CN114248170B (en) * | 2021-12-20 | 2023-06-30 | 湖南理工学院 | Grinding device and method for nano aerosol directional adsorption diamond grinding wheel |
| CN114800060A (en) * | 2022-05-25 | 2022-07-29 | 广东技术师范大学 | Chemical magneto-rheological polishing device and method based on eddy current cavitation |
| CN116038444A (en) * | 2023-03-27 | 2023-05-02 | 四川托璞勒科技有限公司 | Ultrasonic grinder |
| CN117340692A (en) * | 2023-12-05 | 2024-01-05 | 太原理工大学 | Acoustic-magnetic coupling field auxiliary liquid jet polishing device for metal additive manufacturing part |
| CN117340692B (en) * | 2023-12-05 | 2024-02-20 | 太原理工大学 | Acoustic-magnetic coupling field auxiliary liquid jet polishing device for metal additive manufacturing part |
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Application publication date: 20150826 |