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Publication numberCN103928831 B
Publication typeGrant
Application numberCN 201410158186
Publication date15 Feb 2017
Filing date18 Apr 2014
Priority date18 Apr 2014
Also published asCN103928831A
Publication number201410158186.3, CN 103928831 B, CN 103928831B, CN 201410158186, CN-B-103928831, CN103928831 B, CN103928831B, CN201410158186, CN201410158186.3
Inventors夏克贵, 李建郎, 王峥
Applicant中国科学院上海光学精密机械研究所
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
基于达曼光栅的点阵输出固体激光器 Dammann grating-based solid-state laser output dot translated from Chinese
CN 103928831 B
Abstract  translated from Chinese
一种基于达曼光栅的点阵输出固体激光器,激光器在光路上依次包括激光器泵浦源、准直透镜、点阵达曼光栅、聚焦透镜、激光介质、输出镜。 Dammann grating of outputting a dot-based solid-state lasers, the laser includes a laser pump source sequentially, a collimator lens, the dot Dammann grating on the optical path, the focusing lens, laser medium, an output mirror. 激光器泵浦源输出端置于所述的准直透镜物方焦点处,所述的点阵达曼光栅工作波长为泵浦光中心波长,置于所述的准直透镜和所述的聚焦透镜中间,所述的激光介质的前表面镀有对激光全反、对泵浦光增透双色膜,作为激光器的前腔镜,激光介质的后表面镀有激光增透膜,所述的输出镜镀有激光部分透过膜,输出镜与激光介质前表面构成激光谐振腔。 The output of the pump source laser collimating lens disposed at the object focus of said lattice work Dammann grating center wavelength of the pump light wavelength, a collimating lens placed in the focus of said lens and said the middle of the front surface of the laser medium to laser all-trans-plated, mirror of said output pump light color antireflection film as the front mirror of the laser, the rear surface of the laser medium of the laser is plated with anti-reflection coating, laser plated portion through the membrane, the front surface constituting a laser resonator mirror and the output of the laser medium. 本发明是点阵输出的固体激光器,仅采用一个激光器泵浦源,使用一套准直、聚焦耦合系统对激光介质进行点阵泵浦,具有结构简单、紧凑和易实现的优点。 The present invention is a solid-state laser output matrix, using only one laser pump source, a collimator, focusing the laser system coupled lattice pumping medium, having a simple and compact structure and easy advantages achieved.
Claims(7)  translated from Chinese
1.一种基于达曼光栅的点阵输出固体激光器,包括栗浦源(I),特征在于其构成是:在输出栗浦光方向依次是同光轴的耦合准直透镜(2)、达曼光栅(3)、耦合聚焦透镜(4)、附有热沉的激光增益介质(5)和输出镜(6),所述的达曼光栅具有与激光增益介质掺杂离子相匹配的工作波长,当采用掺钕离子激光介质时,所述的栗浦源激光器工作波长为808nm,当采用掺镱离子激光介质时,所述的栗浦源激光器中心工作波长则为940nm,所述的栗浦源的输出端位于所述的耦合准直透镜物方焦点,作为栗浦源的半导体激光器发射出栗浦光,经过准直透镜后近似整形为一束平行光,所述的激光增益介质位于所述的耦合聚焦透镜的像方焦点,所述的激光增益介质的前表面镀激光的高反膜和栗浦光的增透膜,该激光增益介质的后表面镀激光的增透膜,所述的输出镜和所述的激光增益介 An output dot Dammann grating-based solid-state lasers, including Li Pu source (the I), characterized in that it is composed of: Li pump light output direction is sequentially coupled with the optical axis of the collimator lens (2), Dammann grating (3 ), coupled to the focusing lens (4), with the heat sink of the laser gain medium (5) and the output mirror (6), the Dammann grating and a laser gain medium having a doping ions matches the operating wavelength when doped using when neodymium ion laser medium, said Li Pu source of laser operating wavelength is 808nm, when using ytterbium-doped ion laser medium, said Li Pu source laser center operating wavelength was 940nm, the output terminal of Li Pu source positioned coupling the quasi collimator lens object focus, as the semiconductor laser Li Pu source emits Li pump light after the collimator lens is approximately shaped into a parallel light beam, said laser gain medium in said coupling focus lens side focal point image, the laser antireflection coating coated front surface of the laser gain medium is a high reflecting film and Li pump light, rear surface of the laser gain medium of laser plating antireflection film, the output mirror and the laser gain medium 质前表面构成激光谐振腔。 Mass constituting the front surface of the laser cavity.
2.根据权利要求1所述的基于达曼光栅的点阵输出固体激光器,其特征在于所述的栗浦源是光纤耦合输出的半导体激光器或其他激光器,工作中心波长与激光增益介质掺杂离子相匹配。 The solid-state laser output based on the dot Dammann grating 1, wherein said Li source is a pump fiber-coupled semiconductor laser or other lasers, the laser gain center wavelength of the working medium as claimed in claim dopant ions matches .
3.根据权利要求1所述的基于达曼光栅的点阵输出固体激光器,其特征在于所述的达曼光栅具有与激光增益介质掺杂离子相匹配的工作波长,其衍射特性根据实际需要选择:采用I X2点阵、2X2点阵、3X3点阵达曼光栅、……、或NXN点阵。 3. Output of claim 1, Dammann grating lattice based solid-state laser, wherein the Dammann grating and a laser gain medium having a doping ions matches the operating wavelength, which is selected according to need diffraction characteristics : I X2 using dot matrix, dot 2X2, 3X3 matrix Dammann grating, ......, or NXN matrix.
4.根据权利要求1所述的基于达曼光栅的点阵输出固体激光器,其特征在于所述的激光增益介质是稀土掺杂的激光晶体、激光玻璃或激光陶瓷。 4. Output of claim 1, Dammann grating lattice based solid-state laser, wherein the laser gain medium is a rare-earth doped laser crystal, a laser or laser glass ceramic.
5.根据权利要求1所述的点阵输出全固态激光器,其特征在于所述的输出镜为平面镜或平凹镜,并镀有信号激光的部分透过膜。 The lattice according to claim 1, said solid state laser output, wherein said output mirror is a plano-concave mirror or plane mirror, and coated with a portion of the laser signal through the membrane.
6.根据权利要求1所述的基于达曼光栅的点阵输出固体激光器,其特征在于所述的准直透镜是一短焦距的球面或非球面透镜,所述的聚焦透镜为焦距大于等于准直透镜的球面镜或非球面镜。 6. A solid-state laser according to claim output based Dammann grating lattice, characterized in that said collimating lens according to a short focal length is a spherical or aspherical lens, a focal length of the focusing lens is not less than the quasi- collimator lens spherical mirror or a spherical mirror.
7.根据权利要求1至6任一项所述的基于达曼光栅的点阵输出固体激光器,其特征是在所述的激光增益介质和输出镜之间还有可饱和吸收体。 According to any one of claims 1 to 6, based on the solid-state laser output Dammann grating lattice, characterized in that between the output of the laser gain medium and saturable absorber mirror as well as the claims.
Description  translated from Chinese
基于达曼光栅的点阵输出固体激光器 Dammann grating-based solid-state laser output dot

技术领域 FIELD

[0001]本发明涉及固体激光器,特别是一种基于达曼光栅的点阵输出固体激光器。 [0001] The present invention relates to a solid-state laser, particularly solid state laser output based on a Dammann grating lattice.

背景技术 Background technique

[0002] 近年来,多地出现的PM2.5超标以及雾霾天气严重影响了城市居民的生活质量和身体健康,而来自以内燃机为动力的各类车辆的尾气排放是城市大气污染物的重要来源。 [0002] In recent years, many appeared excessive and PM2.5 haze weather has seriously affected the quality of life of urban residents and health, while emissions from an internal combustion engine powered vehicles of various types of air pollutants is an important city source. 提高燃料利用率,减少有害尾气的排放量,是新一代内燃机急需解决的问题,但这加大了内燃机的点火难度,传统电火花塞已无法满足更高性能内燃机的需求。 Improve fuel efficiency and reduce harmful exhaust emissions, is a new generation of internal combustion engines need to solve the problem, but it has increased the difficulty of ignition internal combustion engine, the traditional electric spark plug has been unable to meet the demand for higher performance internal combustion engine. 激光诱导火花点火技术具有众多优点,该技术自从被引入到内燃机点火以来,一直是研究的热点之一。 Laser-induced spark ignition technology has many advantages, since the technology was introduced into the internal combustion engine ignition, it has been one of the hot research. 激光诱导火花点火技术几乎可以克服传统火花塞点火的所有缺点:无需电极,不存在电极烧蚀问题,点火位置可离开燃烧室,而且具有多点点火的潜力。 Laser-induced spark ignition technology can overcome almost all the shortcomings of traditional spark ignition: no electrodes, electrode erosion problem does not exist, leaving the combustion chamber ignition position, but also has a multi-point ignition potential. 多点点火能极大缩短燃料燃烧时间而且能产生更高的燃烧压力,从而获得更高的发动机效率,并且能够在某一点损坏的情况下,仍然继续工作,提高了内燃机的安全性和可靠性。 The multipoint ignition can greatly shorten the time and fuel combustion produces higher combustion pressure, resulting in higher engine efficiency, and can still continue to work in the case of a point of damage, improve the safety and reliability of the internal combustion engine . 基于激光点火技术、尤其是多点激光点火技术的火花塞,既使传统电火花塞点火系统面临的诸多问题迎刃而解,还能大幅度提高发动机效率。 Laser-based ignition technology, especially multi-point laser spark plug ignition technology, even if many problems faced by traditional electric spark ignition system is solved, can greatly improve engine efficiency.

[0003]当前,有多种方法可以实现激光诱导多点点火。 [0003] Currently, there are many ways to implement laser-induced multi-point ignition. 但是采用的方法都是使用多个栗浦源同时对激光晶体进行栗浦来获得多束激光的输出,如2011年日本用三个光纤尾纤输出的半导体激光器同时栗浦激光增益晶体,获得了三束具有高峰值功率的纳秒脉冲(参见Nicolaie Pavel等人发表的〃Composite,all-ceramics,high-peak power Nd:YAG/Cr4+:YAG monolithic micro-laser with multiple-beam output for engine ignit1n,,,《Optics Express》19(2011)9378-9384),该方法的不足之处在于使用三路独立栗浦系统使激光器结构相对复杂,还增加系统制作的工艺难度和生产成本。 The methods are used in the same time using a plurality of laser light sources Li Pu Li Pu crystals to obtain an output of the plurality of laser beams, such as the 2011 Japanese three fiber pigtails a semiconductor laser output while the laser gain crystal Li Pu, the three beams obtained nanosecond pulses with high peak power (see Nicolaie Pavel et al's 〃Composite, all-ceramics, high-peak power Nd: YAG / Cr4 +: YAG monolithic micro-laser with multiple-beam output for engine ignit1n ,,, " Optics Express "19 (2011) 9378-9384), the disadvantage of this method is the use of three independent Li pumping system of the laser structure is relatively complex, the system also increases the production cost and difficult process.

发明内容 SUMMARY

[0004]本发明的目的在于提供一种点阵输出固体激光器,该激光器仅采用一个栗浦源,使用一套准直、聚焦耦合系统将所述的栗浦源输出的栗浦光以点阵形式耦合到激光介质,具有结构简单紧凑和易实现的优点。 [0004] The object of the present invention is to provide a dot matrix output solid-state laser that using only a Li Pu source, a collimator, Li pump light focusing coupling system according to Li pump source coupled to the output of the laser medium in a lattice form, having a simple and compact structure and easy implementation advantages.

[0005]本发明的技术解决方案如下: [0005] The technical solutions of the present invention are as follows:

[0006] —种基于达曼光栅的点阵输出固体激光器,包括栗浦源,特点在于其构成是:在输出栗浦光方向依次是同光轴的耦合准直透镜、达曼光栅、耦合聚焦透镜、附有热沉的激光增益介质和输出镜,所述的栗浦源的输出端位于所述的耦合准直透镜物方焦点,所述的激光增益介质位于所述的耦合聚焦透镜的像方焦点,所述的激光增益介质的前表面镀激光的高反膜和栗浦光的增透膜,该激光增益介质的后表面镀激光的增透膜,所述的输出镜和所述的激光增益介质前表面构成激光谐振腔。 [0006] - based on the kind of solid-state laser output Dammann grating lattice, including Li Pu source, characterized by their configuration is: Li pump light output direction followed by coupling with the optical axis of the collimator lens, Dammann grating, the coupling focus lens, with the heat sink and the output mirror of the laser gain medium, the output terminal Pu Li source in said image side focal point coupling side collimator focal lens element, said laser gain medium in said coupling focus lens, said AR film before plating the surface of the laser gain medium of the laser and the high reflecting film Li pump light, rear surface of the laser gain medium of laser plating antireflection film before the laser gain medium and the output mirror of the laser surface configuration resonant cavity.

[0007]所述的栗浦源是光纤耦合输出的半导体激光器或其他激光器,工作中心波长与激光增益介质掺杂离子相匹配。 [0007] Li the pump source is fiber-coupled semiconductor laser or other lasers, the laser gain center wavelength of the working medium to match the dopant ions.

[0008]所述的达曼光栅具有与激光增益介质掺杂离子相匹配的工作波长,其衍射特性根据实际需要选择:采用I X2点阵、2X2点阵、3X3点阵达曼光栅、、或NXN点阵。 Dammann grating [0008] The laser gain medium has a dopant ions matches the operating wavelength, the diffraction characteristics in accordance with the actual need to select: I X2 using dot, lattice 2X2, 3X3 matrix Dammann grating,, or NXN lattice.

[0009]所述的激光增益介质是稀土掺杂的激光晶体、激光玻璃或激光陶瓷。 [0009] The laser gain medium is a rare-earth doped laser crystal, a laser or laser glass ceramic.

[0010]所述的输出镜为平面镜或平凹镜,并镀有信号激光的部分透过膜。 [0010] The output mirror is a plano-concave mirror or plane mirror, and the laser beam signal with a partially coated permeable membrane.

[0011]所述的准直透镜是一短焦距的球面或非球面透镜,所述的聚焦透镜为焦距大于等于准直透镜的球面镜或非球面镜。 Said collimator lens [0011] is a short focal length spherical or aspherical lens, a focusing lens focal length of the collimator lens than or equal to the spherical mirror or a spherical mirror.

[0012]本发明点阵输出的固体激光器以如下方式运转:作为栗浦源的半导体激光器发射出栗浦光,经过准直透镜后近似整形为一束平行光,垂直入射到点阵达曼光栅,经过达曼光栅衍射后的栗浦光分成以不同离轴角度方向传播的多束平行光束,这些平行光束以不同的方向入射到聚焦透镜,在聚焦透镜的焦平面形成尖锐的点阵像点。 [0012] The solid-state laser of the present invention, the dot output operation in the following manner: a semiconductor laser source emits Li Li Pu Pu light after the collimator lens is approximately shaped into a parallel light beam, vertically incident lattice Dammann grating, through Dammann after the diffraction grating Li pump beam into a plurality of parallel light beams propagating at different angles off-axis direction, the parallel light beams incident on the focusing lens in different directions, a sharp point of a dot image in the focal plane of the focusing lens. 在聚焦透镜焦平面形成的高能量密度的栗浦光作为点阵输出的固体激光器的栗浦点,用来栗浦激光增益介质,在激光增益介质输入面和激光器输出镜构成的平平腔中同时形成点阵激光振荡,从而产生连续模式点阵激光输出。 In the focal plane of the focusing lens forming a high energy density as Li Li pump light Pu lattice point of the solid laser output of the laser gain medium for Li Pu, dots are formed while the flat cavity laser gain medium and the input face of the laser output mirror configuration array of laser oscillation, thereby generating a continuous laser output dot pattern.

[0013]为了完成第二目的的第二发明 [0013] In order to accomplish the second object of a second invention

[0014] —种点阵输出的被动调Q脉冲固体激光器,包括栗浦源激光器,特点在于其构成是:在输出栗浦光方向依次是同光轴的耦合准直透镜,达曼光栅,耦合聚焦透镜,加有热沉的激光增益介质,可饱和吸收体和输出镜。 [0014] - bitmapped output passively Q-switched solid-state lasers, including Li Pu source laser, characterized by their configuration is: output Li pump light direction followed by the coupling of the collimator lens with an optical axis, Dammann grating, the coupling focus lens, add a laser gain medium with a heat sink, the saturable absorber and the output mirror. 所述的栗浦源的输出端置于所述的耦合准直透镜物方焦点处,所述的激光增益介质位于耦合聚焦透镜的像方焦点处,所述的激光增益介质的前表面镀激光高反膜和栗浦光增透膜作为前腔镜,该激光的增益介质的后表面镀激光增透膜,所述的可饱和吸收体前后两面都镀有激光的防反膜,所述的输出镜和激光增益介质前表面构成激光谐振腔。 The output of the pump source placed Li coupling a collimator lens at the object focus of said laser gain medium coupled to the image side is located at the focal point of the focusing lens, the front surface of said laser gain medium of laser plating high trans front and rear surfaces may be the saturable absorber film and the antireflective film Li pump light as a front mirror, the rear surface of the laser gain medium of laser plating antireflection coating are coated with the anti-reflection film with a laser beam, and said output mirror the front surface of the laser resonator constituting the laser gain medium.

[0015]所述的栗浦源激光器,包括光纤耦合输出的半导体激光器或其他栗浦源激光器,工作中心波长与激光增益介质掺杂离子相匹配,例如,当采用掺钕离子激光介质时,所述的栗浦源激光器工作波长为808nm,当采用掺镱离子激光介质时,所述的栗浦源激光器中心工作波长则为940nmo [0015] The chestnut pump source laser comprising a semiconductor laser, fiber coupled output or other Li pump source laser operating central wavelength of the laser gain medium dopant ions matches, e.g., when using neodymium ion doped laser medium, said Li Pu source laser 808nm operating wavelength, when using ytterbium-doped laser medium, the laser source Li Pu central operating wavelength was 940nmo

[0016]所述的达曼光栅具有与激光增益介质掺杂离子相匹配的工作波长,其衍射特性可根据实际需要选择,例如可采用1X2点阵、2X2点阵、3X3点阵达曼光栅,以此类推,可扩展至NXN点阵。 Dammann grating [0016] The laser gain medium has a dopant ions matches the operating wavelength, the diffraction characteristics may be selected according to need, for example, can be lattice 1X2, 2X2 matrix, 3X3 matrix Dammann grating, and so on, expandable NXN lattice.

[0017]所述的激光增益介质具有与栗浦光发射谱相匹配的能级,可以是稀土掺杂的激光晶体、激光玻璃或激光陶瓷,包括掺钕离子、掺镱离子或掺铒离子的YAG晶体、玻璃或陶瓷,或者为掺钕离子、掺镱离子或掺铒离子的a切或c切YV04晶体、钒酸钆晶体等。 [0017] The laser gain medium having pump light emission spectrum Li match level, may be a rare earth doped laser crystal, a laser or laser glass ceramics, including neodymium ion doped, doped YAG crystal doped with ytterbium or erbium ions , glass or ceramic, or cut, or c is neodymium ion doped, doped with ytterbium or erbium doped ions cut a YV04 crystal, gadolinium vanadate crystals and the like.

[0018]所述的输出镜可以为平面镜或平凹镜,并镀有信号激光部分透过膜。 [0018] The output of the mirror may be a plano-concave mirror or plane mirror, and plated with a signal of the laser portion through the membrane.

[0019]所述的准直透镜是一短焦距球面或非球面透镜,所述的聚焦透镜为焦距大于等于准直透镜的球面镜或非球面镜。 [0019] The collimator lens is a short focal length spherical or aspherical lens, a focusing lens focal length of the collimator lens than or equal to the spherical mirror or a spherical mirror.

[0020]所述的激光增益介质置于水循环制冷的铜质热沉中。 [0020] copper heat sink of the laser gain medium disposed in the cooling water circulation.

[0021 ]所述的被动调Q器件包括具有可饱和吸收特性的半导体器件。 [0021] The passive Q device includes a semiconductor device having a saturable absorption characteristic.

[0022]所述的点阵输出的被动调Q固体激光器装置的使用方法,特征在于该方法是利用端面栗浦激光增益介质,通过调节输出镜位置来控制谐振腔的长度,或者通过调节激光增益介质的位置来控制栗浦光聚焦点在激光晶体内部的位置,或者通过改变可饱和吸收晶体的位置以及适当的控制栗浦功率的大小。 [0022] Using the method of passively Q matrix output from the solid laser device, characterized in that the end face of Li Pu method using the laser gain medium to control the length of the cavity by adjusting the position of the output mirror, or by adjusting the laser gain Li position of the medium to control the pump light within the focus position of the laser crystal, or by changing the position of the saturable absorption and the appropriate control of the crystalline Li Pu power size. 具体包括下列三种方法: Including the following three methods:

[0023]第一种方法,在输出镜和可饱和吸收晶体的位置都固定的情况下,通过沿光轴方向调节激光增益晶体的位置实现栗浦光聚焦点处于激光增益介质内部不同位置,同时适当调节栗浦功率,从而得到点阵脉冲输出; [0023] The first method, at the output mirror and the position of the saturable absorbing crystals are fixed, the adjustment of the laser gain crystal through the optical axis direction position of the implement Li pump light focusing point is the laser gain of the internal medium in different positions, while appropriately adjusting Li pump power, whereby the pulse output matrix;

[0024]第二种方法,在激光增益介质固定且栗浦光焦点位于激光增益介质前表面附近且可饱和吸收晶体位置固定的情况下,通过沿光轴调节输出镜的位置(谐振腔长度改变),同时适当调节栗浦功率,从而得到点阵脉冲输出; [0024] The second method (changing the cavity length) in a fixed laser gain medium and pump light Li is located in front focal surface of the laser gain medium and the saturable absorption crystal fixed position, the output mirror by adjusting the positions along the optical axis, Li while appropriately adjusting the pump power, whereby the pulse output matrix;

[0025]第三种方法,在激光增益介质固定且栗浦光焦点位于激光增益介质前表面附近且输出镜位置固定的情况下,通过沿光轴方向调节可饱和吸收晶体的位置(谐振腔长度不变),同时适当调节栗浦功率,从而得到点阵脉冲输出。 [0025] The third method, the laser gain medium at a fixed pump light Li and the front surface near the focal point of the laser gain medium and an output mirror fixed position, the adjustment of the position of the saturable absorption by the crystal optical axis direction (the cavity length constant ), while appropriately adjusting the pump power Li, to give a dot pulse output.

[0026]本发明的优点: [0026] The advantages of the present invention:

[0027] 1.将达曼光栅应用于固体激光器领域,实现达曼光栅与激光器技术的有效结合,可扩展至NXN点阵栗浦技术,并且其制备简单,可利用常规的大规模集成技术进行加工,便于产业化 [0027] 1. Field of the solid-state laser applied Dammann grating, to achieve effective binding Dammann grating with laser technology, expandable lattice Li Pu NXN art, and its preparation is simple, using conventional techniques of large scale integration processing, easy to industrialization

[0028] 2.只需一个栗浦源,一套准直、聚焦耦合系统就能实现点阵激光输出,具有结构简单、紧凑和易实现的优点 [0028] 2. Li Pu only one source, a collimator, focusing system can achieve lattice coupled laser output having a simple and compact structure and easy to realize the advantage of

[0029] 3.半导体栗浦的点阵激光器中,由于在一个激光腔内形成了平行的多路激光振荡,因此不同分路的激光波长、偏振以及脉冲宽度等均有所差异或可对它们进行独立控制,可有效拓展端面栗浦固体激光器的应用范围。 [0029] The semiconductor laser dot Li Pu, since the laser cavity is formed in a parallel multi-channel laser oscillation, and therefore has a laser wavelength, polarization and different pulse widths etc. to shunt or difference thereof independently controlled, which can effectively expand the application range of the end face of the solid-state laser pump Li.

[0030] 4.点阵激光器中存在多个振荡区域,激光介质增益区利用率高,有利于高效率激光输出 A plurality of oscillation region is present [0030] 4. The dot laser, high-gain laser medium area utilization, it is conducive to high-efficiency laser output

[0031] 5.半导体栗浦的点阵固体激光器有多个栗浦点,栗浦过程中的晶体热分布更均匀,避免了单光束栗浦时高功率栗浦光所导致的较强的热透镜效应,因此能有效降低激光晶体对冷却系统的需求 [0031] The semiconductor Li pump solid state lasers have many lattice points Pu Li, Li crystal heat pump process more uniformly distributed, avoids a strong thermal lens effect of single high-power pump beam Li Li pump light caused by , it is possible to effectively reduce the need for cooling the laser crystal system

附图说明 BRIEF DESCRIPTION

[0032]图1为本发明第一实施例的光路结构的总体框图。 [0032] FIG. 1 a block diagram showing an overall configuration of an optical path of a first embodiment of the present invention.

[0033]图2为本发明第二实施例的光路结构的总体框图。 [0033] Figure 2 a block diagram showing the overall configuration of the optical path of the second embodiment of the present invention.

具体实施方式 detailed description

[0034]以下结合附图与实施例对本发明作进一步说明,但不应以此限制本发明的保护范围。 [0034] The following embodiments in conjunction with the accompanying drawings and the embodiments of the present invention is further illustrated, but should not be used to limit the scope of the present invention.

[0035]本发明第一实施例 First Embodiment [0035] embodiment of the present invention

[0036]先请参阅图1,图1为本发明第一实施例的光路结构的总体框图。 [0036] Please refer to FIG. 1, FIG. 1 is a general block diagram of the optical path configuration of a first embodiment of the invention embodiment. 由图可见,本发明点阵输出固体激光器,包括栗浦源1,其构成是:在栗浦源I输出的栗浦光方向依次是同光轴的耦合准直透镜2,达曼光栅3,耦合聚焦透镜4,激光增益介质5和输出镜6,所述的激光增益介质5位于耦合聚焦透镜4的像方焦点处,所述的激光增益介质5的前表面镀激光高反射膜和栗浦光增透膜作为前腔镜,该激光的增益介质5的后表面镀激光增透膜,所述的输出镜6和激光增益介质5前表面构成激光谐振腔。 Seen from the figure, the dot output of the present invention solid-state lasers, including Li Pu source 1, which composition is: Li pump light direction Li Pu source I outputted followed by coupling of the collimator lens with an optical axis 2, Dammann grating 3, the coupling focus lens 4, the laser 5 gain medium and the output mirror 6, the laser gain medium 5 located on the image side focal point of the coupling of the focusing lens 4, the laser gain medium front surface 5 and a high-reflection film coated laser pump light chestnut antireflection film as the front chamber mirror, the gain of the laser medium 5 after the surface of the plating film AR laser, the output mirror of the laser gain medium and surface 6 constituting a laser resonator cavity 5 before. 所述的激光增益介质5、输出镜6均具有沿所述的光轴方向移动的调节机构。 The laser gain medium 5, the output mirror 6 has moved along the optical axis direction adjustment mechanism.

[0037]该发明中,达曼光栅3作为分光元件,所选择的达曼光栅3可以为一维或者二维的,根据所需要的光束的数目来选择相应的光栅阵列。 [0037] In this invention, Dammann grating 3 as the spectral element, the selected Dammann grating 3 may be one or two dimensional, according to the desired number to select the corresponding beam raster array. 选择这种分光元件,不仅光束的均匀性好,而且结构简单,操作方便。 Selection of such spectral element, not only a good uniformity of the beam, and the simple structure, convenient operation.

[0038]达曼光栅3作为一种相位光栅,一般相位为O或者31,每一周期内的相位转折点长度是不是固定的,而是由特殊孔径函数决定的。 [0038] 3 Dammann grating as a phase grating, the phase is generally 31 or O, each phase of the cycle length of the inner turning point is not fixed, but is determined by the particular aperture functions. 具有这种特点的达曼光栅3可以使入射的单色光经过耦合聚焦透镜4在焦点激光增益介质5处产生光强为均匀分布的光斑点阵,经过激光增益介质5的增益放大,在谐振腔中来回振荡,从而获得点阵激光的输出。 Dammann grating 3 may be the incident monochromatic light having such characteristics is coupled through the focusing lens 4 is generated in the focus of the laser gain medium light intensity of 5 lattice spots evenly distributed, through the laser gain medium gain amplifier 5, the resonant cavity oscillates back and forth, so as to obtain an output laser light dot.

[0039]首先利用坐标靶屏对栗浦光源I进行准直,栗浦光源I同时作为准直光源及装置的激发光源。 [0039] Firstly, the coordinates of the target screen I Li collimated pump light source, the light source I Li Pu while as the excitation source and a collimated light source apparatus. 利用准直的栗浦光源I对光路中的耦合准直透镜2,达曼光栅3,耦合聚焦透镜4进行共光轴调节。 I Pu Li source by the coupling collimated light path in the collimator lens 2, Dammann grating 3, 4 co-coupling focus lens optical axis adjustment. 调节耦合准直透镜2和耦合聚焦透镜4的水平、俯仰角度,使得只有需要的级次入射到激光增益介质5上的。 Adjusting the coupling level of the collimator lens 2 and the focusing lens 4 of the coupling, pitch angle, so that only required orders incident on the laser gain medium 5. 将装在热沉上的激光增益介质5放在耦合聚焦透镜的焦点处,此时入射到激光增益介质上的光斑最小,光强密度最大。 The heat sink is mounted on the laser gain medium coupled to the focal point of the focusing lens 5 is placed, at this time the spot is incident on the laser gain medium is a minimum, the maximum density of light intensity. 在激光增益介质5后放上处于三维调整架上的输出镜。 After the laser gain medium 5 is placed on the three-dimensional adjustment of the output mirror frame.

[0040]下面是本发明实施例的具体参数: [0040] The following parameters are specific embodiments of the present invention:

[0041 ] 1、其中的激光增益介质5为a切的掺钕钒酸钇晶体,钕离子掺杂浓度为Iat.%,具体尺寸为长l=3mm、宽w=5mm、高d=5mm,前端面镀808nm增透、1064nm高反膜(作为前腔镜),后端面镀1064nm增透膜。 [0041] 1, wherein the laser gain medium 5 is a cut crystal neodymium-doped yttrium vanadate, neodymium ion doping concentration is Iat.%, The specific dimensions of length l = 3mm, width w = 5mm, high d = 5mm, the front end surface AR coating 808nm, 1064nm the high reflection film (mirror as before), the rear end surface AR coating film 1064nm. 晶体置于水循环制冷的铜质热沉中。 Cooling water circulation copper crystal was placed in the heat sink.

[0042] 2、栗浦源为光纤耦合尾纤输出的激光二极管。 [0042] 2, Li Pu source pigtail fiber coupled laser diode output. 尾纤芯径为200um,数值孔径为 Tail core diameter of 200um, a numerical aperture

0.22,发射波长为808nm,为连续栗浦。 0.22, emission wavelength 808nm, continuous Li Pu.

[0043] 3、端面耦合系统包括耦合准直透镜2、耦合聚焦透镜4。 [0043] 3, the coupling system comprises a coupling end surface of the collimator lens 2, the coupling focus lens 4. 透镜的焦长分别为20mm,35mm。 The focal length of the lens are 20mm, 35mm. 栗浦源输出端放置在耦合准直透镜2的物方焦点处,晶体5前表面处于耦合聚焦透镜4的像方焦点处。 Li source output terminal Pu is placed at the object focus of the collimator lens 2, the coupling surface at the image side focal point of the focusing lens 4 before the coupling 5 crystals.

[0044] 4、达曼光栅3为2 X 2光栅点阵。 [0044] 4, Dammann grating 3 is 2 X 2 dot raster.

[0045] 5、输出镜6为平面镜,在1064波长的透射率为10%。 [0045] 5, the output mirror 6 as a plane mirror, a transmittance of 10% at wavelength 1064.

[0046]在本实施例中,对装置进行调节获得点阵连续输出: [0046] In the present embodiment, adjustment of the means to obtain a dot continuous output:

[0047] (I)在输出镜和耦合聚焦透镜距离固定,两者距离为42mm,通过沿光轴调节激光增益晶体的位置,当晶体前表面与耦合聚焦透镜的距离在35mm-38mm之间时,同时调节栗浦功率在3W-5.5W范围内,可以得到点阵连续输出。 [0047] (I) at the output coupling mirror and the focusing lens a fixed distance, both the distance 42mm, for adjusting the position of the laser gain crystal along the optical axis, when the distance between the front surface of the crystal when the focusing lens is coupled between 35mm-38mm while adjusting the pump power of the Li 3W-5.5W range, a continuous output lattice.

[0048] (2)晶体前表面固定在距离耦合聚焦透镜36mm的位置,通过沿光轴方向调节输出镜的位置,当谐振腔长度6mm到15mm之间时,调节栗浦功率在3W-5.5W范围内,可以得到点阵连续输出。 [0048] (2) the surface of the fixed distance of 36mm focus lens position of the coupling, by adjusting the output mirror in the optical axis direction of the front position of the crystal, when the resonant cavity length between 6mm and 15mm, Li adjusting pump power 3W-5.5W in within the range, a continuous output lattice.

[0049]下面为本实施例输出结果: [0049] The following examples of the present embodiment outputs:

[0050]得到四个功率基本相同的连续光束,当晶体前表面距离透镜距离为36mm,谐振腔长为7mm,栗浦功率为5.39W时,可得到599mw的输出功率。 [0050] The resulting four substantially identical continuous beam power, when the front surface of the crystalline lens from the distance of 36mm, the cavity length of 7mm, Li pump power of 5.39W, of 599mw power output can be obtained.

[0051 ]第二发明的实施例 Example [0051] The second invention

[0052]先请参阅图2,图2为本发明第二实施例的光路结构的总体框图。 [0052] Please refer to FIG. 2, FIG. 2 is a block diagram showing the overall configuration of the optical path to a second embodiment of the present invention. 本实施例是用可饱和吸收体7作为被动调Q元件来获得光束质量好,峰值功率高的点阵脉冲输出的方法。 Example 7 of the present embodiment as Passive Q element to obtain good beam quality, high peak power pulses output by the method of dot saturable absorber. 与第一实施例中的固体激光器结构大致相同,区别在于在激光增益介质5和输出镜6之间加入具有沿所述的光轴方向移动的调节机构的可饱和吸收体7。 Structure of the solid-state laser with substantially the same as the first embodiment, except that in the laser gain medium and the output mirror 5 is added with an optical axis direction of the adjustment mechanism is moved between the saturable absorber 6 7. 所述的可饱和吸收体7前后两面都镀有激光的防反膜。 Saturable absorber 7 on both sides of the front coated laser anti-reflection film.

[0053]达曼光栅3使入射的单色光经过耦合聚焦透镜4在焦点激光增益介质5处产生光强为均匀分布的光斑点阵,经过激光增益介质5的增益放大了入射到可饱和吸收体7上。 [0053] 3 Dammann grating coupling the incident monochromatic light through the focusing lens 4 is generated at the focal point of the laser gain medium light intensity of 5 lattice spots evenly distributed, through the laser gain medium gain amplifier 5 incident on the saturable absorber the body 7. 可饱和吸收体7对激光波长有很高的吸收率,它在最开始时阻止激光振荡的发生。 Saturable absorbent body 7 has a laser wavelength of a high absorption rate, which prevents the laser oscillation occurs at the beginning. 随着增益在栗浦脉冲器件的增大,当能量密度达到某一很高的值时,可饱和吸收体7被“漂白“,而产生很高的透射率,改变了腔内光的损耗,Q开关打开,激光谐振腔处于输出激光的状态,而获得点阵脉冲的输出。 As the gain increases in Li pump pulse device, when a high energy density values, the saturable absorber 7 are "bleaching", generated a high transmittance, change the cavity loss of light, Q switch is turned on, the laser output of the laser resonator in the state of the lattice to obtain an output pulse.

[0054]首先利用坐标靶屏对栗浦光源I进行准直,栗浦光源I同时作为准直光源及装置的激发光源。 [0054] Firstly, the coordinates of the target screen I Li collimated pump light source, the light source I Li Pu while as the excitation source and a collimated light source apparatus. 利用准直的栗浦光源I对光路中的耦合准直透镜2,达曼光栅3,耦合聚焦透镜4进行共光轴调节。 I Pu Li source by the coupling collimated light path in the collimator lens 2, Dammann grating 3, 4 co-coupling focus lens optical axis adjustment. 调节耦合准直透镜2和耦合聚焦透镜4的水平、俯仰角度,使得只有需要的级次入射到激光增益介质上5的。 Adjusting the coupling level of the collimator lens 2 and the focusing lens 4 of the coupling, pitch angle, so that only required orders incident on the laser gain medium 5. 将装在热沉上的激光增益介质5放在耦合聚焦透镜的焦点处,此时入射到激光增益介质上的光斑最小,光强密度最大。 The heat sink is mounted on the laser gain medium coupled to the focal point of the focusing lens 5 is placed, at this time the spot is incident on the laser gain medium is a minimum, the maximum density of light intensity. 在激光增益介质5后依次放上处于三维调整架上的可饱和吸收晶体和输出镜。 After the laser gain medium 5 sequentially placed in three-dimensional adjustment rack saturable absorbing crystal and the output mirror.

[0055]下面是本发明实施例的具体参数: [0055] The following parameters are specific embodiments of the present invention:

[0056] 1、其中的激光增益介质5为a切的掺钕钒酸钇晶体,钕离子掺杂浓度为Iat.%,具体尺寸为长l=3mm、宽w=5mm、高d=5mm,前端面镀808nm增透、1064nm高反膜(作为前腔镜),后端面镀1064nm增透膜。 [0056] 1, wherein the laser gain medium 5 is a cut crystal neodymium-doped yttrium vanadate, neodymium ion doping concentration is Iat.%, The specific dimensions of length l = 3mm, width w = 5mm, high d = 5mm, the front end surface AR coating 808nm, 1064nm the high reflection film (mirror as before), the rear end surface AR coating film 1064nm. 晶体置于水循环制冷的铜质热沉中。 Cooling water circulation copper crystal was placed in the heat sink.

[0057] 2、栗浦源为光纤耦合尾纤输出的激光二极管。 [0057] 2, Li Pu source pigtail fiber coupled laser diode output. 尾纤芯径为200um,数值孔径为0.22,发射波长为808nm,为连续栗浦。 Tail core diameter of 200um, a numerical aperture of 0.22, an emission wavelength of 808nm, a continuous Li Pu.

[0058] 3、端面耦合系统包括耦合准直透镜2、耦合聚焦透镜4。 [0058] 3, the coupling system comprises a coupling end surface of the collimator lens 2, the coupling focus lens 4. 透镜的焦长分别为20mm,35mm。 The focal length of the lens are 20mm, 35mm. 栗浦源输出端放置在耦合准直透镜2的物方焦点处,晶体5前表面处于耦合聚焦透镜4的像方焦点处。 Li source output terminal Pu is placed at the object focus of the collimator lens 2, the coupling surface at the image side focal point of the focusing lens 4 before the coupling 5 crystals.

[0059] 4、达曼光栅3为2 X 2光栅点阵。 [0059] 4, Dammann grating 3 is 2 X 2 dot raster.

[0060] 5、可饱和吸收晶体7为Cr4+: YAG,初始透过率为95%。 [0060] 5, 7 crystal saturable absorber Cr4 +: YAG, an initial transmittance of 95%.

[0061] 6、输出镜6为平面镜,在1064波长的透射率为10%。 [0061] 6, the output mirror 6 as a plane mirror, a transmittance of 10% at wavelength 1064.

[0062]在本实施例中,对装置进行调节获得点阵脉冲输出: [0062] In the present embodiment, the means for adjusting the pulse output matrix is obtained:

[0063] (I)在输出镜和耦合聚焦透镜距离固定,两者距离为48mm,可饱和吸收晶体和输出镜的距离固定,两者距离为8mm,通过沿光轴调节激光增益晶体的位置,当晶体前表面与耦合聚焦透镜的距离在35mm-38mm之间时,同时调节栗浦功率在5W_7.5W范围内,可以得到点阵脉冲输出。 [0063] (I) at the output coupling mirror and the focusing lens a fixed distance, the distance between them is 48mm, the saturable absorption mirror and the output from the crystal is fixed, the distance between them is 8mm, adjusting the position of the laser gain crystal along the optical axis, when the distance between the front surface of the focusing lens and the coupling between the crystal 35mm-38mm, while adjusting the pump power in the 5W_7.5W Li range, a dot pulse output.

[0064] (2)晶体前表面固定在距离耦合聚焦透镜36mm的位置,可饱和吸收晶体和晶体前表面的位置固定,为5mm,通过沿光轴方向调节输出镜的位置,当谐振腔长度12mm到14mm之间时,调节栗浦功率在5W-7.5W范围内,可以得到点阵脉冲输出。 [0064] position (2) of the surface of the fixed position of the coupling at a distance of 36mm focusing lens, the saturable absorber and the front surface of the crystal of the crystal before the crystal is fixed, is 5mm, by adjusting the position of the output mirror of the optical axis direction, when the resonator length 12mm to the between 14mm, Li adjusting the pump power range of 5W-7.5W, dot pulse output can be obtained.

[0065] (3)晶体前表面固定在距离耦合聚焦透镜36mm的位置,谐振腔长度为13mm,通过沿光轴调节可饱和吸收晶体距离输出镜的位置,当两者距离为9mm到6mm之间时,调节栗浦功率在5W-7.5W范围内,可以得到点阵脉冲输出。 [0065] (3) fixed to the front surface of the crystal at a distance of 36mm focus lens position of the coupling, the resonator length of 13mm, the crystal adjusting the position of the saturable absorption distance along the optical axis through the output mirror, when both of the distance between 9mm 6mm when adjusting the power Pu Li 5W-7.5W range, a dot pulse output.

[0066]下面为本实施例输出结果: [0066] The following examples of the present embodiment outputs:

[0067]得到四个功率基本相同的脉冲光束,当晶体前表面距离透镜距离为36mm,谐振腔长为13mm,可饱和吸收晶体距离输出镜为8mm,栗浦功率为7.4W时,可得到3 6 6mw的输出功率,重复功率大约为280MHZ,脉冲宽度约为250ns的四个脉冲激光。 [0067] The resulting four beams substantially the same pulse power, when the front surface of the crystalline lens from the distance of 36mm, the resonant cavity length is 13mm, the output from the saturable absorption mirror is a crystal 8mm, Li pump power of 7.4W, obtained 3 6 6mw output power, power is about 280MHZ repeated, four pulse width of 250ns pulse laser.

[0068]综上所述,本发明具有设计简单,可控性强,仅仅引入达曼光栅就可以得到点阵输出。 [0068] In summary, the present invention has a simple design, control, and only the primer Ru Daman dot raster output can be obtained. 体积小,成本低,使用十分简单。 Small size, low cost and very simple to use.

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International ClassificationH01S3/0941
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