CN103364856A - TE (Transverse Electric) polarized vertical-incidence negative-level-one high-efficiency inclined-transmission quartz grating - Google Patents
TE (Transverse Electric) polarized vertical-incidence negative-level-one high-efficiency inclined-transmission quartz grating Download PDFInfo
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Abstract
The invention relates to a TE (Transverse Electric) polarized vertical-incidence negative-level-one high-efficiency inclined-transmission quartz grating for 1550nm wavelength. The quartz grating is characterized in that the grating period of the grating is 1460-1480nm, the duty cycle is 0.328 and the inclination angle is 33-35 degrees and the depth of the grating is 1060-1065nm. When TE polarized light is vertically incident, the negative-level-one diffraction efficiency of transmitted light can be higher than 90 percent. The TE polarized vertical-incidence negative-level-one high-efficiency inclined-transmission quartz grating provided by the invention is manufactured by using an electron beam direct writing device in combination with a microelectronic deep etching process, the materials are convenient to obtain, the manufacturing cost is low, the batch production can be realized and the practical prospect is bright.
Description
Technical field
The present invention relates to the transmission quartz grating, particularly a kind of TE polarization orthogonal incident-1 grade high-level efficiency inclination transmission quartz grating for 1550 nano wave lengths.
Background technology
Light deflector is the primary element in the optical system, and important application is arranged in optical system.In optical communication, optical information processing, photometry calculation, holography etc. system, irreplaceable effect is arranged.Traditional light deflector, because complex process, cost is expensive, and laser-damaged threshold value is not high.The electro-optic crystal that rises this year exists the cost height too as light deflection, makes the shortcomings such as difficulty.Fused quartz is a kind of desirable grating material, and it has high optical quality: stable performance, high damage threshold and from deep ultraviolet to far wide transmission spectrum, and design and produce the high-level efficiency beam-splitting optical grating by fused quartz, simple in structure, technological process is simple.Therefore, the high-density deeply etched fused quartz grating of etching is with a wide range of applications as novel light deflector spare.To quartz grating, a kind of comparatively common light incident mode is vertical incidence, and namely incident angle is zero degree.
The people such as Anduo Hu have designed the high-level efficiency reflection type quartz-1 grade high-level efficiency diffraction grating under a kind of Bragg angle incident, its TE reflection efficiency is higher than 92%[referring to technology 1:Anduo Hu et al. formerly in 200 nanometer wavelength range, J.Opt.14,055705 (2012)].Above grating is based on the rectangular reflective grating of Bragg angle incident, when light vertically impinges upon on the oblique raster, because structurally there is asymmetric characteristic in oblique raster, can there be mal-distribution in the transmitted light energy, can realize-1 grade of high efficiency transmission.
Oblique raster is to utilize microelectronics deep etching technique, the grating with inclination flute profile that processes in substrate.The diffraction theory of high density oblique raster can not be explained by simple scalar optical grating diffraction equation, and must adopt the Maxwell equation of vector form and in conjunction with boundary condition, accurately calculate the result by the computer program of encoding.The people such as Moharam have provided the algorithm [formerly technology 2:M.G.Moharam etal., J.Opt.Soc.Am.A.12,1077 (1995)] of rigorous coupled wave theory, can solve the Diffraction Problems of this class high dencity grating.So far, also nobody is given in the design that realizes vertical incidence-1 grade high-level efficiency transmission on the fused quartz substrate for 1550 nano wave lengths commonly used but as far as we know.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of TE polarization orthogonal incident-1 grade high-level efficiency inclination transmission quartz grating for 1550 nano wave lengths.When TE polarized light vertical incidence, this grating can make incident optical energy mainly be distributed on-1 grade of transmitted light, and the top efficiency of-1 grade of transmitted light is greater than 97%.This grating has important practical value.
Technical solution of the present invention is as follows:
A kind of TE polarization orthogonal incident-1 grade high-level efficiency inclination transmission quartz grating for 1550 nano wave lengths, its characteristics are that the grating cycle of grating is 1460～1480 nanometers, dutycycle is 0.328, pitch angle 33～35 degree, the grating degree of depth is 1060～1065 nanometers.
The described grating cycle is 1469.9 nanometers, and the grating slope angle is 34.14 degree, and dutycycle is 0.328, and the grating degree of depth is 1063.4 nanometers.
Technique effect of the present invention is as follows:
Particularly the grating cycle when grating is 1469.9 nanometers, and the grating slope angle is 34.14 degree, and dutycycle is 0.328, and the grating degree of depth is 1063.4 nanometers.The diffraction efficiency maximal value of-1 grade of transmitted light is greater than 97%.That the present invention has is flexible and convenient to use, homogeneity better, diffraction efficiency is than advantages of higher, it is a kind of ideal diffraction optical element, utilize the electron-beam direct writing device in conjunction with microelectronics deep etching technique, can be in enormous quantities, produce at low cost, grating stable performance after the etching, reliable has important practical prospect.
Description of drawings
Fig. 1 is the geometry of the TE polarization orthogonal incident-1 grade high-level efficiency inclination transmission quartz grating of the present invention's 1550 nano wave lengths.
Among the figure, the regional 1(refractive index of 1 representative is n
1), the regional 2(refractive index of 2 representatives is n
2), 3 represent incident light, and 4 represent the emergent light under the TE polarization mode.D is the grating cycle, and b is that ridge is wide, and h is the grating degree of depth.
Fig. 2 is that TE polarization orthogonal of the present invention incident-1 grade high-level efficiency inclination transmission quartz grating (quartzy refractive index is 1.44462) the grating cycle is 1469.9 nanometers, the grating degree of depth is 1063.4 nanometers, dutycycle is 0.328, and the pitch angle is 34.14 degree, and diffraction efficiency is with the curve of wavelength variations.
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.
See also first Fig. 1, Fig. 1 is the geometry of the TE polarization orthogonal incident-1 grade high-level efficiency inclination transmission quartz grating of the present invention's 1550 nano wave lengths.Among the figure, zone 1,2 all is uniformly, is respectively air (refractive index n
1=1) and fused quartz (refractive index n
2=1.44462).Perpendicular to the plane of incidence, it impinges perpendicularly on grating to the TE polarized incident light corresponding to the direction of vibration of electric field intensity.As seen from the figure, it is the TE polarization orthogonal incident-1 grade high-level efficiency inclination transmission quartz grating of 1550 nano wavebands that the present invention is used for wavelength, and the grating cycle of this grating is 1460～1480 nanometers, and dutycycle is 0.328, pitch angle 33～35 degree, the grating degree of depth is 1060～1065 nanometers.
Under optical grating construction as shown in Figure 1, the present invention adopts rigorous coupled wave theoretical [formerly technology 2] to calculate the inclination quartz grating in the diffraction efficiency of 1550 nano wavebands.We utilize rigorous coupled wave theoretical [formerly technology 2] to obtain the grating initial configuration, and adopt simulated annealing rule [technology 3:W.Goffe et al. formerly, J.Econometrics60,65-99 (1994)] be optimized, thus obtain this-1 grade of high-efficiency quartz transmission grating.
Table 1 has provided a series of embodiment of the present invention, and d is the grating cycle in the table, and b is that ridge is wide, and h is the grating degree of depth, and λ is incident wavelength, and θ is the grating slope angle, and f is dutycycle, and η is diffraction efficiency.Making the present invention and be used for the process of the TE polarization orthogonal incident-1 grade high-level efficiency outgoing quartz transmission grating of 1550 nano wave lengths, suitably selective light grid cycle, ridge are wide, and pitch angle and etching depth just can obtain high-diffraction efficiency in certain bandwidth.
Fig. 2 is that the present invention-1 grade transmitted light diffraction efficiency is with the curve of wavelength variations.
TE polarization orthogonal of the present invention incident-1 grade high-level efficiency outgoing quartz transmission grating, have flexible and convenient to use, homogeneity better, diffraction efficiency is than advantages of higher, it is a kind of ideal diffraction optical element, utilize the electron-beam direct writing device in conjunction with microelectronics deep etching technique, can be in enormous quantities, produce at low cost, grating stable performance after the etching, reliable has important practical prospect.
The TE polarized light of different wave length is in-1 order diffraction efficiency eta during table 1 vertical incidence,
Wherein: the grating dutycycle is that 0.328, h is the grating degree of depth, and d is the grating cycle, and θ is the grating slope angle
Claims (2)
1. TE polarization orthogonal incident-1 grade high-level efficiency inclination transmission quartz grating that is used for 1550 nano wave lengths, the grating cycle that it is characterized in that grating is 1460～1480 nanometers, dutycycle is 0.328, pitch angle 33～35 degree, and the grating degree of depth is 1060～1065 nanometers.
2. TE polarization orthogonal according to claim 1 incident-1 grade high-level efficiency inclination transmission quartz grating is characterized in that the described grating cycle is 1469.9 nanometers, and the grating slope angle is 34.14 degree, and dutycycle is 0.328, and the grating degree of depth is 1063.4 nanometers.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698827A (en) * | 2013-11-06 | 2014-04-02 | 中国科学院上海光学精密机械研究所 | Vertical incidence quartz 1*2 beam-splitting tilted grating for TE (Tangent Elevation) polarization |
| CN107797177A (en) * | 2017-11-17 | 2018-03-13 | 杭州光粒科技有限公司 | A kind of cycle gradual change grating shows waveguide and preparation method thereof and application |
| JP2018185403A (en) * | 2017-04-25 | 2018-11-22 | 日亜化学工業株式会社 | Transmissive grating and laser device including the transmissive grating, and method for manufacturing transmissive grating |
| CN110596802A (en) * | 2019-09-11 | 2019-12-20 | 宁波南大光电材料有限公司 | Manufacturing method of helical tooth pattern grating plate and grating plate |
| CN112394436A (en) * | 2020-11-25 | 2021-02-23 | 中国科学院上海光学精密机械研究所 | Asymmetric structure all-dielectric reflection type beam combination grating with 1064-nanometer waveband |
| CN114253005A (en) * | 2020-09-23 | 2022-03-29 | 中国科学院上海光学精密机械研究所 | Three-dimensional multi-viewpoint display device and manufacturing method |
| CN114442209A (en) * | 2020-11-03 | 2022-05-06 | 暨南大学 | Inclined grating suitable for RGB wave band high-efficiency polarization independence |
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| CN1564050A (en) * | 2004-03-19 | 2005-01-12 | 中国科学院上海光学精密机械研究所 | High density, rectangular deep etched crystal raster |
| CN101515045A (en) * | 2009-04-02 | 2009-08-26 | 重庆文理学院 | Sub-wavelength metal polarization beam splitting grating for 1550 nanometer waveband |
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| CN1564050A (en) * | 2004-03-19 | 2005-01-12 | 中国科学院上海光学精密机械研究所 | High density, rectangular deep etched crystal raster |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698827A (en) * | 2013-11-06 | 2014-04-02 | 中国科学院上海光学精密机械研究所 | Vertical incidence quartz 1*2 beam-splitting tilted grating for TE (Tangent Elevation) polarization |
| JP2018185403A (en) * | 2017-04-25 | 2018-11-22 | 日亜化学工業株式会社 | Transmissive grating and laser device including the transmissive grating, and method for manufacturing transmissive grating |
| CN107797177A (en) * | 2017-11-17 | 2018-03-13 | 杭州光粒科技有限公司 | A kind of cycle gradual change grating shows waveguide and preparation method thereof and application |
| CN107797177B (en) * | 2017-11-17 | 2020-02-11 | 杭州光粒科技有限公司 | Periodic gradient grating display waveguide and manufacturing method and application thereof |
| CN110596802A (en) * | 2019-09-11 | 2019-12-20 | 宁波南大光电材料有限公司 | Manufacturing method of helical tooth pattern grating plate and grating plate |
| CN114253005A (en) * | 2020-09-23 | 2022-03-29 | 中国科学院上海光学精密机械研究所 | Three-dimensional multi-viewpoint display device and manufacturing method |
| WO2022061977A1 (en) * | 2020-09-23 | 2022-03-31 | 中国科学院上海光学精密机械研究所 | Three-dimensional multi-viewpoint display apparatus and manufacturing method |
| CN114442209A (en) * | 2020-11-03 | 2022-05-06 | 暨南大学 | Inclined grating suitable for RGB wave band high-efficiency polarization independence |
| CN112394436A (en) * | 2020-11-25 | 2021-02-23 | 中国科学院上海光学精密机械研究所 | Asymmetric structure all-dielectric reflection type beam combination grating with 1064-nanometer waveband |
| CN112394436B (en) * | 2020-11-25 | 2021-07-06 | 中国科学院上海光学精密机械研究所 | Asymmetric structure all-dielectric reflection type beam combination grating with 1064-nanometer waveband |
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