CN103336053B - A kind of surface acoustic wave gas sensors array of private reference - Google Patents
A kind of surface acoustic wave gas sensors array of private reference Download PDFInfo
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- CN103336053B CN103336053B CN201310241518.XA CN201310241518A CN103336053B CN 103336053 B CN103336053 B CN 103336053B CN 201310241518 A CN201310241518 A CN 201310241518A CN 103336053 B CN103336053 B CN 103336053B
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Abstract
The invention discloses a kind of surface acoustic wave gas sensors array of private reference, comprise n survey sensor and n reference sensor, also comprise a sensor array circuitry plate with 2n oscillation circuit and to be linked closely the air chamber formed on circuit boards by a gas hood, n survey sensor and n reference sensor are arranged in described air chamber simultaneously, along airflow direction, survey sensor and reference sensor line up two row respectively, be in the survey sensor of air-flow equivalent points and reference sensor form 1 right, by exporting n difference frequency signal after circuit mixing.Survey sensor of the present invention and reference sensor due to be in air-flow temperature field etc. on warm spot, effectively can reduce the impact that environmental temperature fluctuation responds sensor array.
Description
Technical field
The invention belongs to electronic technology field, relate to gas sensor, be specifically related to a kind of surface acoustic wave gas sensors array of private reference.
Background technology
Sonic surface wave gas sensors is in SAW (Surface Acoustic Wave) device, deposit one deck sensitive thin film, and forms oscillatory circuit and forming circuit and forming.After object gas to be detected is adsorbed by sensitive thin film, the change of the density, conductance, viscoelasticity etc. of sensitive membrane causes the change of the velocity of sound, is tested out the change of frequency or phase place, thus reach the object of detection by oscillatory circuit.It has the advantages such as highly sensitive, response is fast, volume is little, lightweight, low in energy consumption, is particularly suitable for the detection of the light concentration gas such as poisonous, harmful.But gas to be measured is all in complex environment atmosphere usually, multiple sensor need be adopted, apply different sensitive membrane on each sensor, form sensor array, the signal of Land use models recognizer to sensor array processes, thus realizes identifying in mixed atmosphere and detecting specific object to be measured.
Sonic surface wave gas sensors is except the mass-sensitive to deposition, also very sensitive to the fluctuation of environment temperature etc.For reducing the impact of environment temperature, usual sensor adopts double passage differential structure.Namely sensor coating sensitive membrane forms Measurement channel, and another does not apply sensitive membrane and forms reference channel, and the difference on the frequency of two passages is as the output signal of sensor.
Existing SAW sensor array, bibliographical information be made up of multiple survey sensor and 1 reference sensor mostly, this 1 reference sensor forms differential signal with each survey sensor respectively.Typical document is as follows: 1. Rapp M, Reibel J, Voigt A, et al. New miniaturized SAW-sensor array for organic gas detection driven by multiplexed oscillators, Sensors and Actuators B, 2000,65:169 – 172.8 survey sensors and 1 reference sensor of this article line up two rows, are connected by the gas channel of loop line shape.
For improving the sensitivity of SAW sensor, enricher is set through the front end of SAW sensor array of being everlasting; Or in order to improve the resolution characteristic to mixed gas, the front end of SAW sensor array is provided with chromatography column.All will produce thermal current when enricher and chromatographic column work, when the sensor array of thermal current array structure along the line is propagated, the temperature on each sensor/reference is inevitable to be reduced gradually and produces the temperature difference.But the sensor array structure of shared reference not only cannot eliminate the temperature difference on each channel, and the temperature additional signal that each channel produces is also each unequal.
The temperature coefficient of surface acoustic wave sensor is determined primarily of the material of piezoelectric substrate and cut direction, and the tangential quartz of AT is the tangential of the most frequently used at present Low Drift Temperature, and its frequency-temperature coefficient also has 10 × 10-6/ DEG C.But, the dominant frequency of at present conventional SAW sensor at more than 200MHz, even if the temperature fluctuation of 0.1 DEG C also will cause the signal fluctuation of 200Hz.When SAW sensor front end has enricher or chromatogram, when high temperature gas flow flows through successively along sensor array, between adjacent sensors, the very large temperature difference will be produced.
For eliminating the temperature difference of sensor array, conventional method adopts the initiatively constant temperature measures such as semiconductor chilling plate.In such cases, reference sensor even can get along well gas circuit connect, only play frequency reducing effect and no longer possess balance circumstance of temperature difference effect.See document: 2. Grate J W, Rose-Pehrsson S L, Venezky D L, et al. Smart sensor system for trace organophosphorus and organosulfur vapor detection employing a temperature-controlled array of surface acoustic wave sensors, automated sample preconcentration, and pattern recognition, Anal Chem, 1993,65:1868-1881; 3. Milner G M, Detection/classification/quantification of chemical agents using an array of surface acoustic wave (SAW) devices, SPIE Vol. 5778, (2005), 305-316.But the employing of semiconductor chilling plate inevitably increases the power consumption of sensor, very unfavorable for battery-powered hand-held gas detector.
Summary of the invention
For above-mentioned prior art, the technical problem to be solved in the present invention is: the surface acoustic wave gas sensors array how providing a kind of private reference, when not increasing biosensor power consumption, eliminate the temperature difference on each channel, the signal that each sensor is exported is not by the impact of temperature fluctuation.
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of surface acoustic wave gas sensors array of private reference, comprise n survey sensor and n reference sensor, it is characterized in that, also comprise a sensor array circuitry plate with 2n oscillation circuit and to be linked closely the air chamber formed on circuit boards by a gas hood; Described survey sensor and reference sensor are all arranged in described air chamber, ambient atmos enters from one end of air chamber, and discharge from the other end, along the direction of air-flow, n survey sensor and n reference sensor line up two row, be in the survey sensor of equivalent points and reference sensor form 1 right, by exporting n difference frequency signal after circuit board mixing.
According to the surface acoustic wave gas sensors array of a kind of private reference that such scheme provides, it is characterized in that, the left and right sides of described gas hood has 1-2 air intake opening and exhausr port, the complete hollow of inner chamber of gas hood, or be made up of two row's loculuses, often arrange loculus and gang up common n each other, two row's loculuses lay survey sensor and reference sensor respectively.
The material of described gas hood is the metal such as aluminium, copper.
According to the surface acoustic wave gas sensors array of a kind of private reference that such scheme provides, it is characterized in that, n >=3, under normal circumstances, n≤10.
According to the surface acoustic wave gas sensors array of a kind of private reference that such scheme provides, it is characterized in that, n survey sensor is coated with different sensitive thin films, reference sensor does not apply sensitive membrane, the type of sensitive thin film mainly contains: nonconducting polymkeric substance is (as PIB, PEI etc.), conducting polymer is (as polyaniline, polythiophene etc.), molecular sieve and molecularly imprinted polymer, carbon nano-tube and Graphene, inorganic, metal oxide semiconductor is (as SnO2, ZnO etc.), Inorganic whisker film is (as polypyrrole/In2O3, carbon black/polymkeric substance, carbon pipe/polymkeric substance etc.).
According to the surface acoustic wave gas sensors array of a kind of private reference that such scheme provides, it is characterized in that, described piezoelectric substrate is various quartz, LiNbO tangentially
3, LiTaO
3and ZnO, AlN piezoelectric membrane on Si substrate.
According to the surface acoustic wave gas sensors array of a kind of private reference that such scheme provides; it is characterized in that; n survey sensor and n reference sensor are made up of discrete device; removing the separation SAW device after metal coating lid is reference sensor; SAW device interdigitated metal electrode IDT applied after sensitive membrane is survey sensor, adopts the metal base of TO-39 type to insert connection on circuit boards to realize device.
Compared with prior art, the present invention has following beneficial effect:
One, survey sensor of the present invention and reference sensor due to be in air-flow temperature field etc. on warm spot, effectively can reduce the impact that environmental temperature fluctuation responds sensor array;
Two, surface acoustic wave gas sensors array provided by the invention adopts substrate to be convenient to integrated as substrate, and preparation method is simple, adopts traditional micro-processing technology just can realize.
Accompanying drawing explanation
Fig. 1 is the structural representation of the surface acoustic wave gas sensors array of private reference of the present invention;
Fig. 2 is the differential principle schematic diagram of the surface acoustic wave gas sensors array of private reference of the present invention;
Fig. 3 is the private reference surface acoustic wave gas sensors array of single-chip integration formula of the present invention;
Fig. 4 is the surface acoustic wave gas sensors array of the private reference be made up of discrete device of the present invention;
Reference numeral is: 1 is gas hood, and 2 is reference sensor, and 3 is survey sensor, and 4 is circuit board, and 5 is sound absorption glue, and 6 is quartz base plate, and 7 is the loculus in gas hood, and 8 is TO-39 pedestal.
Embodiment
There is provided description referring to accompanying drawing to help complete understanding by claim and equivalents thereof.Following examples are only exemplary, and therefore those of ordinary skill in the art will recognize, the various change made embodiment without departing from the scope and spirit of the present invention and amendment, all fall into protection scope of the present invention.
Embodiment 1
As shown in Figure 3, the surface acoustic wave gas sensors array of the present embodiment has 4 survey sensors 3 and 4 reference sensor 2, they are all prepared on quartz base plate 6 that same AT cuts, quartz base plate 6 is fixing on the circuit board 4, define the sensor array of single-chip integration formula, be coated with sound absorption glue 5 between each sensor to prevent each sensor acoustic crosstalk operationally.The size (comprising pad) of single SAW device electrode is 12mm × 3mm, and the substrate area of whole 4 × 2 arrays is 60mm × 8mm.4 survey sensors and 4 reference sensor line up two rows respectively, and the frequency of i-th reference sensor of upper row and i-th survey sensor of lower row exports after frequency mixer difference frequency.Aluminum gas hood 1 is strip, and inner hollow completely, covers quartz base plate 6 and link closely on the circuit board 4, forming gas test room.Be respectively equipped with an air intake opening and an exhausr port in the left and right sides central authorities of gas hood 1, the external air pump (not shown) of exhausr port, makes gas to be measured uniflux in air chamber.When air-flow passes through reference sensor and the survey sensor of equivalent locations, temperature is equal, thus reduces gas temperature fluctuation to the impact of sensor response.
Embodiment 2
As different from Example 1, embodiment 2 adopts the SAW (Surface Acoustic Wave) device and SAW device structure sensor array that are separated.SAW device is used as wave filter in a large number at communication field; the SAW filter of buying 433.94MHz, TO-39 encapsulation; after its metal coating lid is removed, just become the reference sensor of embodiment 2, and then just define survey sensor apply sensitive membrane on the IDT of SAW device after.In the same manner as in Example 1, same 4 survey sensors 3 and 4 reference sensor 2 of adopting form sensor array, as shown in Figure 4.Difference has 2 points: one is that the metal gas hood 1 of the present embodiment is containing 8 cavitys, when its fastening on the circuit board 4 time, 8 SAW sensors are just in time filled in these cavitys, thus define the electromagnetic screen between SAW device, can prevent the electromagnetic interference (EMI) between device; Two is in these 8 cavitys, and 4 cavitys of upper row communicate with each other, and 4 cavitys of lower row communicate with each other, and form two gas channels, and therefore whole gas hood 1 has two air intake openings and two exhausr ports.The gentle opening of cavity of two rows is just the same, therefore has identical temperature in the position of equity.
For checking reference sensor is positioned at the effective inhibiting effect of equivalent points to Sensor temperature drift of warm field, test sensor front end when being connected to enricher, private reference SAW sensor array and shared reference SAW sensor array are to the response of the thermal current that enricher produces.Sharing reference sensor array is alignment structure, can lay 1 reference and 3 survey sensors.Control methods is as follows: adopt same group of measurement/reference sensor, and be first arranged on No. 1 position and No. 4 positions of shared reference sensor array, spacing is approximately 30mm, and for the thermal current that enricher produces, test obtains the peak value of response of 430Hz.And when this group measurement/reference sensor being arranged on a 50-50 basis No. 1 position of private reference SAW sensor array, the peak value of thermal current only has about 50Hz.Visible, private reference SAW sensor array provided by the invention can balance the impact that extraneous temperature fluctuation responds sensor significantly.
Claims (6)
1. the surface acoustic wave gas sensors array of a private reference, comprise n survey sensor and n reference sensor, it is characterized in that, also comprise a sensor array circuitry plate with 2n oscillation circuit and to be linked closely the air chamber formed on circuit boards by a gas hood; Described survey sensor and reference sensor are all arranged in described air chamber, ambient atmos enters from one end of air chamber, and discharge from the other end, along the direction of air-flow, n survey sensor and n reference sensor line up two row, be in the survey sensor of equivalent points and reference sensor form 1 right, by exporting n difference frequency signal after circuit board mixing; The left and right sides of gas hood has air intake opening and exhausr port, the complete hollow of inner chamber of gas hood or be made up of two evacuation chambers, and gang up common n between every evacuation chamber each other, two evacuation chambers lay survey sensor and reference sensor respectively; Wherein, n survey sensor and n reference sensor are made up of discrete device, and removing the separation SAW device after metal coating lid is reference sensor, and SAW device interdigitated metal electrode IDT applied after sensitive membrane is survey sensor.
2. require the surface acoustic wave gas sensors array of the private reference described in 1 according to power place, it is characterized in that, the material of described gas hood is aluminium, copper metal.
3. require the surface acoustic wave gas sensors array of the private reference described in 1 according to power place, it is characterized in that, n >=3.
4. require the surface acoustic wave gas sensors array of the private reference described in 1 according to power place, it is characterized in that, survey sensor and reference sensor are produced on the sensor array same piezoelectric substrate being formed single-chip integration formula.
5. require the surface acoustic wave gas sensors array of the private reference described in 4 according to power place, it is characterized in that, described piezoelectric substrate is various quartz, lithium niobate LiNbO tangentially
3, lithium tantalate LiTaO
3and ZnO, AlN piezoelectric membrane on Si substrate.
6. the surface acoustic wave gas sensors array of the private reference described in 1 is required according to power place, it is characterized in that, n survey sensor applies different sensitive thin films, reference sensor does not apply sensitive membrane, described sensitive thin film is nonconducting polymkeric substance, conducting polymer, molecular sieve and molecularly imprinted polymer, carbon nano-tube and Graphene, inorganic, metal oxide semiconductor, Inorganic whisker film.
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| CN110554155A (en) * | 2019-10-22 | 2019-12-10 | 深圳市无眼界科技有限公司 | Constant temperature gas detection system |
| US11533558B2 (en) | 2020-03-30 | 2022-12-20 | Beijing Boe Technology Development Co., Ltd. | Acoustic transducer and driving method thereof |
| CN115628765B (en) * | 2022-10-27 | 2023-11-07 | 中船重工安谱（湖北）仪器有限公司 | Surface acoustic wave measuring device |
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