CN103268013A - Deformable mirror - Google Patents
Deformable mirror Download PDFInfo
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- CN103268013A CN103268013A CN2013102239239A CN201310223923A CN103268013A CN 103268013 A CN103268013 A CN 103268013A CN 2013102239239 A CN2013102239239 A CN 2013102239239A CN 201310223923 A CN201310223923 A CN 201310223923A CN 103268013 A CN103268013 A CN 103268013A
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Abstract
The invention discloses a deformable mirror which comprises an actuating mechanism and a mirror body, wherein a plurality of propellers are arranged on the actuating mechanism, the mirror body is arranged above the actuating mechanism, a plurality of mirror legs are arranged on the mirror body and are respectively connected with the plurality of propellers through connecting heads, and glue introducing channels communicated with the side walls of the connecting heads are formed in at least one of the mirror legs and the propellers. According to the deformable mirror disclosed by the invention, through arranging the glue introducing channels, glue is capable of flowing into the side walls of the connecting heads and the propellers along the glue introducing channels, and thus axial contraction and pulling are not caused after the glue is cured, and the axial contraction and pulling of the actuating mechanism are effectively reduced.
Description
Technical field
The present invention relates to optical technical field, especially relate to a kind of distorting lens.
Background technology
Distorting lens, claim deformation reflection mirror again, mainly apply among the various ADAPTIVE OPTICS SYSTEMS, proofread and correct wavefront error as the wavefront correction device, in ADAPTIVE OPTICS SYSTEMS, play an important role, be one of vitals in the ADAPTIVE OPTICS SYSTEMS, the research and development of distorting lens is related to calibration capability and the correction accuracy of whole ADAPTIVE OPTICS SYSTEMS.
The deformation reflection mirror formula is come phase distortion before the compensated wave by changing own surperficial face shape, can be divided into two types of continuous surface shape and discrete surface.Continuous surface deformable mirror, its advantage are to obtain continuous face shape, the correction accuracy height, and its shortcoming is that the deflection of face shape is smaller.The deformation reflection mirror of continuous surface can be divided into whole the actuating and two kinds of discrete actuatings again.The whole actuating mainly contains two piezoelectric deforming mirrors and deformation of thin membrane mirror, be characterized in when control voltage acts on a certain actuating unit, the entire emission minute surface all will produce distortion, and this class distorting lens is mainly used in cooperating with the curvature Wavefront sensor low step mode part of proofreading and correct wavefront distortion.Characteristics of discrete actuating distorting lens are when control voltage acts on an actuator, have only this actuator adjacent area to produce local deformation.When wherein direction of actuation was parallel to minute surface, actuator acted on the catoptron edge, can only be used for proofreading and correct particular aberration such as out of focus and astigmatism, and therefore the application in ADAPTIVE OPTICS SYSTEMS has been subjected to limitation.Direction of actuation can be proofreaied and correct each rank aberration perpendicular to the continuous surface deformable mirror of minute surface, and can reach very high correction accuracy, therefore becomes a kind of wave-front corrector most widely used in the ADAPTIVE OPTICS SYSTEMS.
The research of domestic deformable mirror system aspects in high degree of regulation early, namely set up the first cover laser corrugated corrective system in 1986 and (seen the academic report document for details, Jiang Wenhan, adaptive optical technique, " Chinese Academy of Engineering is academician's conference academic report compilation for the second time ", July nineteen ninety-five), its adjusting bore is 70mm*70mm.On using, up to the present, what application was the most successful in this respect is exactly the laser nuclear fusion system of U.S. Lao Lunsilifei More National Laboratory.They adopt the deformable mirror system of the 400mm*400mm that is succeeded in developing by Beamlet company.This system adopts the mode of electromagnetic brake braking, and actuator adopts the hexagonal arrangement mode, has realized the performance of heavy caliber (400mm*400mm) and higher degree of regulation.The mode that its displacement transmission system adopts is, the direct contact resilient reed of actuator, and elastic spring and active optics minute surface are sticked together.The positive movement displacement of actuator is reacted directly on the optical mirror plane like this, and its negative sense displacement then realizes because of the restoring force of elastic spring.
Mirror body and the actuating mechanism of traditional distorting lens need glue to be connected, though it is zero structure glue that contraction coefficient is arranged, yet, use in the installation process in reality, can less amount of contraction appear because of the fluctuation of temperature also, this small amount of contraction acts on will produce many places mirror body deformability on the mirror body, because the primary face shape to the mirror body is had relatively high expectations in the actual use of distorting lens, small amount of contraction all can reduce the face shape quality of distorting lens.
In addition, the mirror leg of mirror body can not be worked into the degree of highly in full accord and level in actual use.The inconsistent meeting of height of mirror body leg on show and connector produce the slit of highly differing, and at this moment again to direct gluing between mirror leg and the connector, the thickness of glue will be inconsistent.Not only producing contraction after glue curing, and more seriously respectively the amount of contraction of the glue of actuating point is inconsistent, the actuating point amount of contraction that glue is many is big, and the actuating point amount of contraction that glue is few is little, makes mirror dignity shape pull more serious.
Summary of the invention
The present invention is intended to solve at least one of technical matters that exists in the prior art.For this reason, one object of the present invention is to propose a kind of the distorting lens that the shape quality is high.
Distorting lens according to the embodiment of the invention comprises: actuating mechanism, and described actuating mechanism is provided with a plurality of thrusters; With the mirror body, described mirror body is located at the top of described actuating mechanism, described mirror body is provided with a plurality of mirror legs, and described a plurality of mirror leg links to each other with described a plurality of thrusters by connector respectively, wherein said mirror leg and describedly angle of rakely be formed with the logical glue passage that is communicated with the sidewall of described connector at least one.
Distorting lens according to the embodiment of the invention, by logical glue passage is set, glue can flow into connector and angle of rake sidewall along the path of logical glue passage, does not pull thereby do not produce axial contraction after the glue curing, and the contraction that has reduced effectively on actuating mechanism is axial is pullled.
In addition, mirror also can have following additional technical feature according to a modification of this invention:
According to one embodiment of present invention, described logical glue passage is formed on an end of the described mirror body of described angle of rake vicinity.Thus, make glue have adhesive effect preferably, and saved the consumption of glue.
Particularly, described logical glue passage comprises glue-feeder and the gum outlet that is formed on the described angle of rake periphery wall, and described glue-feeder and described gum outlet lay respectively at described thruster and be in place between the bottom surface of below, described angle of rake upper surface and described connector of the described connector in back.Thus, when mirror body and actuating mechanism were installed, the handled easily person fed glue from glue-feeder, and the glue that flows into from logical glue passage can enter connector and angle of rake sidewall from gum outlet, pullled thereby reduced the contraction of actuating mechanism on axially.
Further, described distorting lens further comprises: cemented joint, described cemented joint are located at described glue-feeder place and communicate with described logical glue passage.Thus, by cemented joint is set, when needs feed glue in the logical glue passage, can connect a logical sebific duct, in order to after laying the mirror body, can pull out logical sebific duct after logical glue is finished and finish encapsulating work at the logical glue of a side of pedestal.
Alternatively, described gum outlet is that a plurality of and described a plurality of gum outlets are arranged along described angle of rake circumferential each interval.Thus, by a plurality of gum outlets are set, can improve connector and angle of rake bonding force.
Further alternatively, described gum outlet is that four and described four gum outlets are evenly distributed on the described angle of rake periphery wall.Thus, make not only connector and thruster bonding firm, and make glue to enter between thruster and the connector by each gum outlet equably respectively that the contraction that has further reduced on actuating mechanism is axial is pullled.
Particularly, described logical glue passage comprises: advance the glue passage, describedly advance the glue passage and link to each other with described glue-feeder; With the plastic emitting passage, described plastic emitting passage advances the glue passage and communicates and link to each other with described gum outlet with described.Thus, by arranging glue passage and plastic emitting passage, glue can enter into glue passage, plastic emitting passage by glue-feeder successively, enters between thruster and the connector by gum outlet then.
Further, describedly advance the glue passage and comprise: first passage, described first passage along continuous straight runs extends and an end links to each other with described glue-feeder; Second channel, described second channel communicates with described first passage, and described second channel communicates along vertical extension and with described plastic emitting passage.
Alternatively, described second channel and the coaxial setting of described thruster.
Alternatively, the end that described plastic emitting passage links to each other with described gum outlet is provided with bonding passage, and the lateral dimension of described bonding passage is greater than the lateral dimension of described plastic emitting passage and less than described angle of rake lateral dimension.Thus, by bonding passage is set, the glue that feeds from logical glue passage can be deposited in the bonding passage, thereby can improve the bonding force of thruster and connector.
Alternatively, described plastic emitting passage is that a plurality of and described a plurality of plastic emitting passage links to each other with a plurality of described gum outlets respectively.
According to one embodiment of present invention, described a plurality of thruster passes pedestal and links to each other with described a plurality of mirror legs.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
Above-mentioned and/or additional aspect of the present invention and advantage are from obviously and easily understanding becoming the description of embodiment in conjunction with following accompanying drawing, wherein:
Fig. 1 is the sectional view of distorting lens according to an embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein identical or similar label is represented identical or similar elements or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment that is described with reference to the drawings, only be used for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, close the orientation of indications such as term " " center ", " laterally ", " on ", D score, " preceding ", " back ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", " outward " or position is based on orientation shown in the drawings or position relation; only be the present invention for convenience of description and simplify and describe; rather than the device of indication or hint indication or element must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second " only are used for describing purpose, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the invention, except as otherwise noted, the implication of " a plurality of " is two or more.
In description of the invention, need to prove that unless clear and definite regulation and restriction are arranged in addition, term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be fixedly connected, also can be to removably connect, or connect integratedly; Can be directly to link to each other, also can link to each other indirectly by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand above-mentioned term concrete implication in the present invention.
Describe distorting lens 100 according to the embodiment of the invention below with reference to Fig. 1, this distorting lens 100 is mainly used in the various ADAPTIVE OPTICS SYSTEMS, as wave-front corrector to proofread and correct wavefront error.
As shown in Figure 1, the distorting lens 100 according to the embodiment of the invention comprises: actuating mechanism and mirror body 2.
Actuating mechanism (scheming not shown) is provided with a plurality of thrusters 11.Mirror body 2 is located at the top of actuating mechanism, and mirror body 2 is provided with a plurality of mirror legs 21, and a plurality of mirror leg 21 links to each other with a plurality of thrusters 11 by connector 3 respectively.Particularly, with reference to Fig. 1, pedestal 6 is located at the below of mirror body 2, and the bottom surface of mirror body 2 is provided with a plurality of mirror legs 21, and a plurality of mirror legs 21 are corresponding one by one with a plurality of thrusters 11, and a plurality of thrusters 11 that are positioned at the below can pass pedestal 6 and link to each other with a plurality of mirror legs 21 that are positioned at the top.
In the example of Fig. 1, the two ends up and down of connector 3 are formed with link slot respectively, two link slots inwardly concave from the respective end of connector 3 respectively, that is to say, the link slot that links to each other with mirror leg 21 is recessed downwards from the upper surface of connector 3, the link slot that links to each other with thruster 11 from the lower surface of connector 3 to being recessed on, further, the link slot that links to each other with mirror leg 21 forms the shape adaptive with the external surface shape of mirror leg 21, the link slot that links to each other with thruster 11 forms the shape adaptive with the external surface shape of thruster 11, mirror leg 21, thruster 11 and its corresponding link slot can be respectively for example structure glue is bonding is integral by glue.
Wherein, be formed with the logical glue passage that is communicated with the sidewall of connector 3 at least one of mirror leg 21 and thruster 11.That is to say, be formed with the logical glue passage (scheming not shown) that is communicated with the sidewall of connector 3 in the mirror leg 21, perhaps be formed with the logical glue passage (as shown in Figure 1) that is communicated with the sidewall of connector 3 in the thruster 11, perhaps all be formed with the logical glue passage (scheming not shown) that is communicated with the sidewall of connector 3 in mirror leg 21 and the thruster 11.Alternatively, the shape of cross section of logical glue passage rounded, oval, Long Circle or at least greater than the polygon on three limits etc. roughly.
Distorting lens 100 according to the embodiment of the invention, by logical glue passage is set, glue can flow into the sidewall of connector 3 and thruster 11 along the path of logical glue passage, does not pull thereby do not produce axial contraction after the glue curing, and the contraction that has reduced effectively on actuating mechanism is axial is pullled.
In one embodiment of the invention, logical glue passage is formed on an end of the contiguous mirror body 2 of thruster 11.As shown in Figure 1, logical glue passage is formed in the thruster 11 and is positioned at the upper end of thruster 11, particularly, is positioned at an end that links to each other with connector 3 of thruster 11, can make that like this glue has adhesive effect preferably, and save the consumption of glue.
Particularly, logical glue passage comprises glue-feeder and the gum outlet on the periphery wall that is formed on thruster 11.
Glue-feeder be positioned at thruster 11 be in place the back connector 3 the below.For example in the example of Fig. 1, the contiguous pedestal 6 of glue-feeder arranges, and between the lower surface of the upper surface of pedestal 6 and connector 3, further, the periphery wall setting of the contiguous pedestal 6 of glue-feeder, thereby be very easy to the operator glue is fed in the logical glue passage from glue-feeder, alternatively, the lower surface of the contiguous connector 3 of glue-feeder arranges.
Gum outlet is between the bottom surface of the upper surface of thruster 11 and connector 3.For example in the example of Fig. 1, the corresponding setting of internal perisporium of gum outlet and its corresponding link slot, further, the upper surface of the contiguous thruster 11 of gum outlet, can enter the sidewall of connector 3 and thruster 11 from gum outlet from the glue of logical glue passage feeding, thereby thruster 11 and connector 3 can be linked together securely, and reduce the contraction of actuating mechanism on axially and pullled.It will be appreciated that, in actual encapsulating process, can calculate the encapsulating amount in advance, flow to the end face of thruster 11 and connector 3 and cause the axial contraction that produces after the glue curing to pull to avoid pouring into too much glue, the glue that pours into can not reach glue-joint strength very little.It should be noted that the temperature that in the process of injecting glue, will note assembly environment, guarantee temperature ripple disable the process from injecting glue to curing as far as possible.
Further, with reference to Fig. 1, distorting lens 100 further comprises: cemented joint 4, cemented joint 4 is located at the glue-feeder place, and cemented joint 4 communicates with logical glue passage.Like this, when needs feed glue in the logical glue passage, can connect a logical sebific duct (scheme not shown), so that can be at the logical glue of a side of pedestal 6 after laying mirror body 2, can pull out after logical glue is finished and lead to sebific duct and finish encapsulating work.
Alternatively, to be a plurality of and a plurality of gum outlets be arranged along the circumferential each interval of thruster 11 gum outlet.In the example of Fig. 1, a plurality of gum outlets can all roughly be located in the same horizontal plane.Thus, by a plurality of gum outlets are set, can improve the bonding force of connector 3 and thruster 11.Certainly, the invention is not restricted to this, in other examples of the present invention, a plurality of gum outlets also can thruster 11 axially on each interval be arranged (scheming not shown), with the bonding reliability of further raising thruster 11 and connector 3.
Further, gum outlet is that four and four gum outlets are evenly distributed on the periphery wall of thruster 11.As shown in Figure 1, angle between two adjacent gum outlets roughly is 90 °, make that so not only connector 3 and thruster 11 are bonding firm, and making glue to enter between thruster 11 and the connector 3 by each gum outlet equably respectively, the contraction that has further reduced on actuating mechanism is axial is pullled.
Particularly, logical glue passage comprises: advance glue passage 51 and plastic emitting passage 52, advance glue passage 51 and link to each other with glue-feeder.Further, advance glue passage 51 and comprise: first passage 511 and second channel 512, first passage 511 along continuous straight runs extend and an end links to each other with glue-feeder.Second channel 512 communicates with first passage 511, and second channel 512 communicates along vertical extension and with plastic emitting passage 52.
For example in the example of Fig. 1, first passage 511 along continuous straight runs extend, and an end of first passage 511 is connected with glue-feeder so that glue feeds in the first passage 511 by glue-feeder, its other end is connected with the lower end of second channel 512, second channel 512 extends along the vertical direction, and the upper end of second channel 512 is connected with plastic emitting passage 52, thereby the glue in the first passage 511 can be by flowing in the second channel 512.Alternatively, first passage 511 and second channel 512 can distinguish in the horizontal direction with above-below direction upper edge straight line, along broken line or along curve for example camber line extend.It will be appreciated that the concrete shape of first passage 511 and second channel 512 and size can require to arrange according to reality, better lead the glue effect to have.
Plastic emitting passage 52 communicates with advancing glue passage 51, and plastic emitting passage 52 links to each other with gum outlet.For example in the example of Fig. 1, plastic emitting passage 52 along continuous straight runs extend, and an end of plastic emitting passage 52 is connected with the upper end of advancing glue passage 51, its other end is connected with gum outlet, thereby the glue in the first passage 511 can enter between thruster 11 and the connector 3 by gum outlet via plastic emitting passage 52.
Alternatively, second channel 512 and thruster 11 coaxial settings.That is to say, the dead in line of the axis of second channel 512 and thruster 11, as shown in Figure 1.
Alternatively, the end that plastic emitting passage 52 links to each other with gum outlet is provided with bonding passage 521, and the lateral dimension of bonding passage 521 is greater than the lateral dimension of plastic emitting passage 52 and less than the lateral dimension of thruster 11.With reference to Fig. 1, bonding passage 521 is located at the end away from second channel 512 of plastic emitting passage 52, when the shape of cross section of thruster 11, logical glue passage and bonding passage 521 is circle, the diameter of bonding passage 521 is greater than the diameter of plastic emitting passage 52, and the external diameter less than thruster 11, the glue that feeds from logical glue passage can be deposited in the bonding passage 521, thereby can improve the bonding force of thruster 11 and connector 3.Alternatively, bonding passage 521 is one-body molded with plastic emitting passage 52.
Alternatively, plastic emitting passage 52 is that a plurality of and a plurality of plastic emitting passages 52 link to each other with a plurality of gum outlets respectively.As shown in Figure 1, a plurality of plastic emitting passages 52 are corresponding one by one with a plurality of gum outlets respectively.
Installation process according to the distorting lens 100 of the embodiment of the invention is as follows: at first, mirror body 2 workplaces are placed on the standard flat down, make mirror body 2 obtain the good face shape consistent with standard flat under the effect of gravity.Then, with mirror leg 21 end face gluings, again with being placed on mirror leg 21 end faces with the adaptive end of mirror leg 21 of connector 3, move down at the effect lower union joint 3 of gravity, glue between mirror leg 21 and the connector 3 is flattened, wait for that then the connector 3 on each mirror leg 21 glueds joint firmly.Because each mirror leg 21 of mirror body 2 highly can not be in full accord in actual the use, an end that links to each other with thruster 11 that glueds joint back connector 3 can not remain in the same surface level.The mirror body 2 that will have connector 3 is placed on the thruster 11, because thruster 11 upper surfaces and connector 3 lower surface height are also inconsistent, so in entire mechanism, necessarily have several places connector 3 to contact with thruster 11, have several places connector 3 not contact with thruster 11 again.Lay the level that will guarantee mirror body 2 after finishing.The logical glue passage projection that again each is activated point connects one respectively than the long sebific duct that pushes away, in order to can pull out logical sebific duct and finish encapsulating work after logical glue is finished at the logical glue of pedestal 6 one sides after laying mirror body 2.
Here, need to prove, in the process of injecting glue in logical glue passage, should be noted that the temperature of assembly environment, guarantee temperature ripple disable the process from injecting glue to curing as far as possible.The amount of glue can just satisfy fills thruster 11 and connector 3 side space.Glue can flow along the trend of logical glue passage in the progradation, until being full of whole logical glue passage, flows to thruster 11 and connector 3 side space then.Because the injecting glue amount calculated in advance, and the gum outlet place of thruster 11 is provided with bonding passage 521, therefore do not have between the upper surface that unnecessary glue flows to the lower surface of connector 3 and thruster 11.After injecting glue finishes, pull out the injected rubber hose that each activates point, treat that distorting lens 100 is namely accused after the glue curing to install.
Other formations and operation according to the distorting lens 100 of the embodiment of the invention all are known to those skilled in the art, are not described in detail here.
In the description of this instructions, concrete feature, structure, material or characteristics that the description of reference term " embodiment ", " some embodiment ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means in conjunction with this embodiment or example description are contained at least one embodiment of the present invention or the example.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete feature, structure, material or the characteristics of description can be with the suitable manner combination in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: can carry out multiple variation, modification, replacement and modification to these embodiment under the situation that does not break away from principle of the present invention and aim, scope of the present invention is limited by claim and equivalent thereof.
Claims (12)
1. a distorting lens is characterized in that, comprising:
Actuating mechanism, described actuating mechanism is provided with a plurality of thrusters; With
The mirror body, described mirror body is located at the top of described actuating mechanism, described mirror body is provided with a plurality of mirror legs, and described a plurality of mirror leg links to each other with described a plurality of thrusters by connector respectively, wherein said mirror leg and describedly angle of rakely be formed with the logical glue passage that is communicated with the sidewall of described connector at least one.
2. distorting lens according to claim 1 is characterized in that, described logical glue passage is formed on an end of the described mirror body of described angle of rake vicinity.
3. distorting lens according to claim 2, it is characterized in that, described logical glue passage comprises glue-feeder and the gum outlet that is formed on the described angle of rake periphery wall, and described glue-feeder and described gum outlet lay respectively at described thruster and be in place between the bottom surface of below, described angle of rake upper surface and described connector of the described connector in back.
4. distorting lens according to claim 3 is characterized in that, further comprises:
Cemented joint, described cemented joint are located at described glue-feeder place and communicate with described logical glue passage.
5. distorting lens according to claim 3 is characterized in that, described gum outlet is that a plurality of and described a plurality of gum outlets are arranged along described angle of rake circumferential each interval.
6. distorting lens according to claim 5 is characterized in that, described gum outlet is that four and described four gum outlets are evenly distributed on the described angle of rake periphery wall.
7. distorting lens according to claim 3 is characterized in that, described logical glue passage comprises:
Advance the glue passage, describedly advance the glue passage and link to each other with described glue-feeder; With
The plastic emitting passage, described plastic emitting passage advances the glue passage and communicates and link to each other with described gum outlet with described.
8. distorting lens according to claim 7 is characterized in that, describedly advances the glue passage and comprises:
First passage, described first passage along continuous straight runs extends and an end links to each other with described glue-feeder;
Second channel, described second channel communicates with described first passage, and described second channel communicates along vertical extension and with described plastic emitting passage.
9. distorting lens according to claim 8 is characterized in that, described second channel and the coaxial setting of described thruster.
10. distorting lens according to claim 7, it is characterized in that, the end that described plastic emitting passage links to each other with described gum outlet is provided with bonding passage, and the lateral dimension of described bonding passage is greater than the lateral dimension of described plastic emitting passage and less than described angle of rake lateral dimension.
11., it is characterized in that described plastic emitting passage is that a plurality of and described a plurality of plastic emitting passage links to each other with a plurality of described gum outlets respectively according to each described distorting lens among the claim 7-10.
12. distorting lens according to claim 1 is characterized in that, described a plurality of thrusters pass pedestal and link to each other with described a plurality of mirror legs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310223923.9A CN103268013B (en) | 2013-06-06 | 2013-06-06 | Distorting lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310223923.9A CN103268013B (en) | 2013-06-06 | 2013-06-06 | Distorting lens |
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| CN103268013A true CN103268013A (en) | 2013-08-28 |
| CN103268013B CN103268013B (en) | 2015-08-12 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104407435A (en) * | 2014-12-08 | 2015-03-11 | 中国科学院光电技术研究所 | High-correcting value low-order deformable mirror |
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| EP1376191A1 (en) * | 2002-06-21 | 2004-01-02 | Nikon Corporation | Deformable mirror actuation system |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
| CN103091834A (en) * | 2013-02-20 | 2013-05-08 | 清华大学 | Deformation mirror |
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| US6384952B1 (en) * | 1997-03-27 | 2002-05-07 | Mems Optical Inc. | Vertical comb drive actuated deformable mirror device and method |
| US5940203A (en) * | 1997-12-02 | 1999-08-17 | Raytheon Company | High-energy-burst deformable mirror |
| EP1376191A1 (en) * | 2002-06-21 | 2004-01-02 | Nikon Corporation | Deformable mirror actuation system |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
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| CN104407435A (en) * | 2014-12-08 | 2015-03-11 | 中国科学院光电技术研究所 | High-correcting value low-order deformable mirror |
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| CN103268013B (en) | 2015-08-12 |
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