CN103245340A - Single-chip tri-axial gyroscope - Google Patents
Single-chip tri-axial gyroscope Download PDFInfo
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- CN103245340A CN103245340A CN2012100222065A CN201210022206A CN103245340A CN 103245340 A CN103245340 A CN 103245340A CN 2012100222065 A CN2012100222065 A CN 2012100222065A CN 201210022206 A CN201210022206 A CN 201210022206A CN 103245340 A CN103245340 A CN 103245340A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
Abstract
The invention relates to a single-chip tri-axial gyroscope. The single-chip tri-axial gyroscope has the advantages of small volume, low cost and low power consumption. The single-chip tri-axial gyroscope comprises: a mass block comprising mutually-coupled principal mass blocks and a coupling mass block, wherein the number of the principal mass blocks is an even number, and the principal mass blocks are symmetrically arranged at two sides of the coupling mass block along the Y-axis; electrode layer groups comprising first electrode layer groups, second electrode layer groups and third electrode layer groups, wherein there is a gap between each of the first and second electrode layer groups and the mass block, the first electrode layer groups are symmetrically arranged at two sides of the second electrode layer groups along the Y-axis, the first electrode layer groups are positioned in the orthographic projection of the mass block, the second electrode layer groups are positioned in the orthographic projection of the coupling mass block, the third electrode layer group comprises a group of static slender flats and a group of movable slender flats, and the third electrode layer groups are connected with the principal mass blocks through elastic parts; and a driving comb group, wherein the driving comb group is connected with the principal mass blocks to input a signal and drive the principal mass blocks to move.
Description
Technical field
The present invention relates to a kind of 3 axis MEMS gyroscope, be applied to the product such as blind area navigation, automobile of smart mobile phone, panel computer, game paddle, GPS, belong to MEMS (micro electro mechanical system) (MEMS) field.
Background technology
Compare with traditional gyroscope, the MEMS gyroscope has that volume is little, integrability, low, the low power consumption and other advantages of cost.And the MEMS gyroscope mainly utilizes the coriolis force effect to detect the size of angular velocity, when a mass when a constant direction is done simple harmonic oscillation, if the angular velocity input on another vertical direction is arranged, then produce coriolis force in the 3rd direction that is orthogonal on above 2 directions, this masterpiece is used for namely producing displacement deformation on the mass, can obtain the coriolis force size by detecting this displacement deformation, and then obtain the size of input angular velocity.In the existing product, mainly produce the needed power of simple harmonic oscillation by static broach exciting, adopt capacitance change to weigh the size of displacement variable, and then obtain the size of angular velocity.
And along with the gyrostatic continuous development of MEMS, the integrated of three-axis gyroscope also is the main trend that consumer and industrial class is used.Present three-axis gyroscope is mainly realized by the form of encapsulation combination, the gyroscope chip that is about to 3 independent single shafts is packaged into an integral body, or a single shaft gyro and a twin shaft gyro be packaged into an integral body jointly, and such major defect is that volume is big, the packaging cost height.
In recent years, new three-axis gyroscope integrated approach was sought by many research institutions, had produced the single-chip tri-axis MEMS gyroscope of consumer application as more external MEMS companies.This gyrostatic major advantage is that volume is little, and cost is low, and is low in energy consumption, so single-chip integrated form MEMS gyroscope is the developing direction of three-axis gyroscope.
Summary of the invention
The object of the present invention is to provide that a kind of volume is little, with low cost, the single-chip tri-axis gyroscope of low-power consumption.
For realizing aforementioned purpose, the present invention adopts following technical scheme: a kind of single-chip tri-axis gyroscope comprises:
Mass, described mass comprise parenchyma gauge block and the coupling mass piece that intercouples, and described parenchyma gauge block is even number and is symmetricly set in described coupling mass piece both sides along Y-axis;
The electrode layer group, described electrode layer group comprises the first electrode layer group, the second electrode lay group and third electrode layer group, the described first electrode layer group, has the gap between the second electrode lay group and the described mass, and the described first electrode layer group is symmetricly set in the both sides of described the second electrode lay group along Y-axis, the described first electrode layer group is positioned at the orthogonal projection of described mass, described the second electrode lay group is positioned at the orthogonal projection of described coupling mass piece, described third electrode layer group comprises one group of elongated flat board of silent oscillation and one group of elongated flat board of active type, and described third electrode layer group is connected with described parenchyma gauge block by elastomeric element;
The driving comb group, described driving comb group is connected with the parenchyma gauge block, in order to input signal and drive described parenchyma gauge block and move.
As a further improvement on the present invention, described single-chip tri-axis gyroscope also comprises first anchor point and second anchor point, and described first anchor point is connected with the parenchyma gauge block, and described second anchor point is connected with the coupling mass piece.
As a further improvement on the present invention, be connected by first elastomeric element between described first anchor point and the parenchyma gauge block, be connected by second elastomeric element between described second anchor point and the coupling mass piece.
As a further improvement on the present invention, described first elastomeric element comprises long straight beam and short beam, is connected by long straight beam between described first elastomeric element and the parenchyma gauge block, is connected by short beam between described first elastomeric element and described first anchor point.
As a further improvement on the present invention, described single-chip tri-axis gyroscope also comprises the detection comb group, and described detection comb group and described driving comb group are formed closed loop negative feedback system.
As a further improvement on the present invention, the described first electrode layer group is positioned at the orthogonal projection of described parenchyma gauge block.
As a further improvement on the present invention, the described first electrode layer group is positioned at the orthogonal projection of described coupling mass piece.
As a further improvement on the present invention, described third electrode layer group is symmetricly set in the described parenchyma gauge block along Y-axis.
As a further improvement on the present invention, described elastomeric element comprises brace summer.
As a further improvement on the present invention, comprise several driving combs in the described driving comb group, comprise a driving activity broach and a driving stationary comb-tooth in described each driving comb.
As a further improvement on the present invention, adopt coupled beams to realize coupling between described parenchyma gauge block and the coupling mass piece.
The present invention has that volume is little, with low cost, advantage of low power consumption.Parenchyma gauge block and coupling mass piece and the electrode layer group of the present invention by intercoupling single-chip setting, changed the capacitance of electrode layer group and parenchyma gauge block or coupling mass interblock respectively by the displacement of parenchyma gauge block, coupling mass piece, realize detection to coriolis force by detecting above-mentioned capacitance again, and then by the size of coriolis force reaction three axles (X-axis, Y-axis, Z axle) angular velocity input signal.
Description of drawings
Fig. 1 is the single-chip tri-axis gyroscope arrangement synoptic diagram of embodiment one in the specific embodiment of the invention.
Fig. 2 is the gyrostatic structural representation that has cutting plane of single-chip tri-axis among Fig. 1.
Fig. 3 is the gyrostatic general frame of the single-chip tri-axis of embodiment one in the specific embodiment of the invention (drive part) synoptic diagram.
Fig. 4 is the gyrostatic general frame of the single-chip tri-axis of embodiment one in the specific embodiment of the invention (drive part and test section) synoptic diagram.
Fig. 5 is the gyrostatic general frame of the single-chip tri-axis of the another kind of structure of coupled beams (drive part and test section) synoptic diagram among the embodiment one in the specific embodiment of the invention.
Fig. 6, Fig. 7 are the gyrostatic general frame synoptic diagram of the single-chip tri-axis of embodiment two in the specific embodiment of the invention.
Fig. 8 is the gyrostatic general frame synoptic diagram of the single-chip tri-axis of embodiment three in the specific embodiment of the invention.
Embodiment
The gyrostatic principle of work of single-chip tri-axis of the present invention is: drive quality and do simple harmonic oscillation at an axle, when another has the angular velocity signal input perpendicular to this direction of vibration, will with on the direction of 2 quadratures produce force signal, be called coriolis force.This coriolis force is directly proportional with the angular velocity signal that drives quality, vibration velocity and input, when driving quality when constant with vibration velocity, can react the size of angular velocity input signal by the size of detection coriolis force.Then (F=m*a=k*x, F are the size of acting force to the size of coriolis force, and m is the size of mass by acting on a constant-quality, a is the angular velocity size, k is elastic stiffness, and x is displacement), the electric capacitance change of bringing by detection mass change in displacement obtains.
The driving detection mode that it adopts is: static broach drives (driving comb group), and capacity plate antenna (electrode layer group) detects, and the present invention realizes 3 measurement of angle on axially by only applying driving voltage at a mass.Among the present invention, one has 2 masses (parenchyma gauge block and coupling mass piece), one of them mass (parenchyma gauge block) loads by voltage, and static drives to realize simple harmonic oscillation, and another mass (coupling mass piece) is realized simple harmonic oscillation under the coupling of a last mass drives.Therefore in this three-axis gyroscope, have 2 angular velocity on the axle to realize measuring by same mass (parenchyma gauge block), the angular velocity on the 3rd axle is realized measurement by the mass (coupling mass piece) of another coupling.
For the ease of understanding, below by specific embodiment foregoing is explained in detail.
Embodiment one:
See also Fig. 1 ~ 3, coupling mass piece 2, first anchor point 6 that is directly connected in substrate 100 and this first anchor point 6 of the second anchor point 7(and second anchor point 7 that a kind of single-chip tri-axis gyroscope comprises the first parenchyma gauge block 1a that constitutes the parenchyma gauge block and the second parenchyma gauge block 1b, intercouple with the first parenchyma gauge block 1a and the second parenchyma gauge block 1b can be considered stationary part) and first elastomeric element 5 and second elastomeric element 4, described first elastomeric element 5 has high resiliency in Y direction, has high rigidity in X-direction.
The described first parenchyma gauge block 1a and the second parenchyma gauge block 1b are symmetrical set in coupling mass piece 2 both sides along Y-axis, along Y direction reversal of vibrations (this mode of vibration as shown in phantom in FIG.).In the present embodiment, described first anchor point 6 is a plurality of, for supporting the motion anchor point of the first parenchyma gauge block 1a and the second parenchyma gauge block 1b, first elastomeric element, 5 one ends are connected with first anchor point 6, the other end is connected with the first parenchyma gauge block 1a, the second parenchyma gauge block 1b, in order to support the double vibrations of the first parenchyma gauge block 1a and the second parenchyma gauge block 1b, this first elastomeric element 5 is equally along the Y-axis left-right symmetric.And since the first parenchyma gauge block 1a and the second parenchyma gauge block 1b, first elastomeric element 5 all along the Y-axis left-right symmetric, first elastomeric element 5 has high resiliency in Y direction, has high rigidity in X-direction, so the first parenchyma gauge block 1a and the second parenchyma gauge block 1b are only along producing displacement on the Y direction.Therefore Y-axis is gyrostatic first driving shaft of this single-chip tri-axis, and the first parenchyma gauge block 1a and the second parenchyma gauge block 1b are the corresponding mass that drives
Under the vibration of the first parenchyma gauge block 1a and the second parenchyma gauge block 1b drives, described coupling mass piece 2 is reciprocal twisting motion (shown in the arrow in the coupling mass piece 2), namely reverse along the Z axle, so the harmonic moving that reverses along the Z axle is as gyrostatic second driving shaft of this single-chip tri-axis, coupling mass piece 2 is the corresponding mass that drives.The first parenchyma gauge block 1a and the second parenchyma gauge block 1b realize coupling by coupled beams 3a, 3b and coupling mass piece 2 respectively, because the first parenchyma gauge block 1a and the second parenchyma gauge block 1b need drive coupling mass piece 2 and reverse, so this coupled beams 3a, 3b need certain rigidity to be arranged transmitting the displacement load that electrostatic force causes in Y direction, to such an extent as to also need the harmonic moving that its rigidity can not excessive inhibition coupling mass piece 2.And because coupled beams 3a, 3b distortion can produce stress influence to parenchyma gauge block and coupling mass piece (i.e. the first parenchyma gauge block 1a, the second parenchyma gauge block 1b and coupling mass piece 2), so can reduce the effect of stress by optimization coupled beams 3a, 3b version, its coupled beams 3a, 3b can be I-shaped structure, as shown in Figure 5, also can be optimized to other shapes certainly.Described second anchor point 7 is for supporting the motion anchor point of coupling mass piece 2, and second elastomeric element, 4 one ends link to each other with second anchor point 7, and the other end links to each other with coupling mass piece 2, to support reversing of coupling mass piece 2.
Described first elastomeric element 5 so first elastomeric element 5 has direct relation with resonance rigidity, can be regulated resonance frequency in order to connect first anchor point 6 and the first parenchyma gauge block 1a and the second parenchyma gauge block 1b by the physical dimension of regulating first elastomeric element 5.And in order to reduce stress influence and anchor point loss, in the present embodiment, this first elastomeric element 5 comprises long straight beam 5a and short beam 5b, is connected by long straight beam 5a between first elastomeric element 5 and the first parenchyma gauge block 1a and the second parenchyma gauge block 1b, and is connected by short beam 5b between first anchor point 6.Described second elastomeric element 4 is in order to connect second anchor point 7 and coupling mass piece 2, it mainly reverses along X-axis and Y direction in order to support coupling mass piece 2, in the present embodiment, described second elastomeric element 4 is 4 beam forms along X-axis and Y-axis symmetry, certainly except this kind structure, second elastomeric element 4 also can be beam-shaped structure or the similar structure among Fig. 5.The resonance frequency of described coupling mass piece 2 can namely by regulating the size of second elastomeric element 4, perhaps also can be regulated by size and the Size Distribution situation of regulating coupling mass piece 2 by regulating torsional rigidity control.
See also Fig. 2,4, described single-chip tri-axis gyroscope also comprises driving comb group and electrode layer group, described driving comb group comprises several driving combs, comprise a driving activity broach 8 and a driving stationary comb-tooth 9 in each driving comb, described driving stationary comb-tooth 9 is in order to input signal and drive the parenchyma gauge block and move, and is direct current and the voltage signal that exchanges at this its input signal.Described electrode layer group comprises the first electrode layer group (15a ~ 15d), the second electrode lay group (16a, 16b) and third electrode layer group (13,14).The described first electrode layer group (has gap 101 between 15a ~ 15d), the second electrode lay group (16a, 16b) and the mass, the first electrode layer group (15a ~ 15d) be symmetricly set in the orthogonal projection of the first parenchyma gauge block 1a and the second parenchyma gauge block 1b along Y-axis, the second electrode group (16a, 16b) then is positioned at the orthogonal projection of coupling mass piece 2, and (15a ~ 15d) is symmetricly set in the both sides of the second electrode lay group (16a, 16b) to this first electrode layer group along Y-axis.Described third electrode layer group comprises one group of elongated dull and stereotyped 14 and one groups of active type elongated dull and stereotyped 13 of silent oscillation, described third electrode layer group is symmetricly set in the first parenchyma gauge block 1a and the second parenchyma gauge block 1b along Y-axis, and be connected with the second parenchyma gauge block 1b with the first parenchyma gauge block 1a respectively by brace summer 12, this brace summer 12 is used for supporting and controls active type elongated dull and stereotyped 13 in the X-direction top offset.
Because the size of coriolis force and the proportional relation of Oscillation Amplitude of driving shaft, therefore, the variation meeting of the Oscillation Amplitude of driving shaft directly influences the size of MEMS gyroscope output angle speed, thereby the constant Oscillation Amplitude of keeping driving shaft is for the gyrostatic performance important influence of MEMS.In this single-chip tri-axis gyroscope, adopt the mode of close loop negative feedback to realize constant amplitude oscillation.See also Fig. 4, described single-chip tri-axis gyroscope also comprises the detection comb group, and this detection comb group and driving comb group are formed closed loop negative feedback system.This detection comb group comprises driving detection comb 10 and stationary comb-tooth 11.After applying direct current and ac voltage signal in driving stationary comb-tooth 9, can produce one on the Y direction and drive electrostatic force, the first parenchyma gauge block 1a and the second parenchyma gauge block 1b produce a displacement signal under the effect of this electrostatic force, stationary comb-tooth 11 is as corresponding test side, be used for the input signal that drives stationary comb-tooth 9 ports is detected in real time, keep the constant amplitude vibration of driving comb port with the form of feedback.
See also Fig. 4, below the gyrostatic detection mode of above-mentioned single-chip tri-axis is set forth.
When the angular velocity input is arranged in X-direction, the first parenchyma gauge block 1a and the second parenchyma gauge block 1b make reciprocal vibrate in opposite phase as driving mass in Y direction, then there is the coriolis force on the reverse direction to produce in Z-direction, under the effect of first elastomeric element 5, the first parenchyma gauge block 1a has a displacement away from substrate at Z axle forward, the second parenchyma gauge block 1b has a displacement near substrate at Z axle negative sense, above-mentioned displacement makes the principal mass piece 1a that wins, the second parenchyma gauge block 1b and the first parenchyma gauge block 1a, dotted portion among the first parenchyma gauge block 1a and the second parenchyma gauge block 1b among electrode layer 15a ~ 15d(figure in the first electrode layer group of second parenchyma gauge block 1b below) electric capacity between changes, be electrode layer 15a, 15b has a displacement away from substrate at Z axle forward, electric capacity diminishes, meanwhile, electrode layer 15c, 15d has a displacement near substrate at Z axle negative sense, and the electric capacity quantitative change is big.Realize detection to coriolis force by detecting above-mentioned electric capacitance change, thus the size by X-axis angular velocity input signal in three axles of coriolis force reaction.Above-mentioned detection can be adopted differential capacitance to detect and realize.
When the angular velocity signal input is arranged on the Y direction, coupling mass piece 2 conducts around the twisting motion of Z axle always drive mass, can produce coriolis force around the X-axis rotation direction, under the effect of second elastomeric element 4, coupling mass piece 2 has a displacement away from substrate at Z axle forward, at Z axle negative sense one displacement near substrate is arranged, above-mentioned displacement makes the electrode layer 16a in the second electrode lay group of coupling mass piece 2 and coupling mass piece 2 belows, dotted portion on the coupling mass piece 2 among the 16b(figure) electric capacity between changes, be that electrode layer 16a has a displacement away from substrate at Z axle forward, electric capacity diminishes, electrode layer 16b has a displacement near substrate at Z axle negative sense, and the electric capacity quantitative change is big.Realize detection to coriolis force by detecting above-mentioned electric capacitance change, thus the size by Y-axis angular velocity input signal in three axles of coriolis force reaction.Above-mentioned detection can be adopted differential capacitance to detect and realize.
When the angular velocity signal input is arranged on the Z-direction, remain the first mass 1a on the Y direction and the second mass 1b as driving mass, transversely produce the opposite coriolis force of direction in X-axis, under the effect of brace summer 12, active type elongated dull and stereotyped 13 will produce certain displacement at directions X, silent oscillation elongated dull and stereotyped 14 is transfixion then, thereby can be by detecting: the electric capacitance change of being brought by change in displacement between active type elongated dull and stereotyped 13 and the silent oscillation elongated dull and stereotyped 14 realizes the detection to coriolis force, and then reacts the size of Z axis angular rate input signal in three axles by coriolis force.And by appropriate design active type elongated dull and stereotyped 13 and elongated dull and stereotyped 14 the size of silent oscillation and placement location, can realize Differential Detection.
And because performances such as gyrostatic detection sensitivity, bandwidth and driving shaft and the difference on the frequency that detects axle have certain relation, namely frequency difference is more little, and sensitivity is more big, and corresponding bandwidth is more narrow, and sensitivity and bandwidth are 2 parameters of mutual inhibition.Therefore can rationally regulate according to the difference of gyrostatic application places.And resonance frequency is main and the rigidity size of mass correspondence, and the quality size is relevant, and rigidity then is to be determined by relevant elastomeric element.Therefore, can be by the shape of appropriate design first elastomeric element 4, second elastomeric element 5 and brace summer 12 and the performance that size is adjusted this device.
Embodiment two
See also Fig. 6, be second kind of embodiment of the present invention, in the present embodiment, described parenchyma gauge block is four (the first parenchyma gauge block 21a, the second parenchyma gauge block 21b, the 3rd parenchyma gauge block 30a, the 4th parenchyma gauge block 30b), is symmetricly set in described coupling mass piece 22 both sides in twos along Y-axis.Identical with embodiment one, under the effect of driving activity broach 28, make win principal mass piece 21a and the second parenchyma gauge block 21b produce vibrate in opposite phase (mode of vibration is shown in dotted line) along Y direction.First anchor point 26 is directly connected in substrate (not shown), be considered as stationary part, first elastomeric element, 25 1 ends link to each other with first anchor point 26, the other end links to each other with the first parenchyma gauge block 21a, the second parenchyma gauge block 21b, in order to support the double vibrations of the first parenchyma gauge block 21a and the second parenchyma gauge block 21b, comprise long straight beam 25a and short beam 25b at this first elastomeric element 25, long straight beam 25a is used for connecting the parenchyma gauge block, and short beam 25b is used for connecting first anchor point 26.Because the first parenchyma gauge block 21a and the second parenchyma gauge block 21b, first elastomeric element 25 are all along the Y-axis left-right symmetric, first elastomeric element 25 has high resiliency in Y direction again, has high rigidity in X-direction, so the first parenchyma gauge block 21a, the second parenchyma gauge block 21b only have change in displacement in Y direction.Therefore Y-axis is gyrostatic first driving shaft of this single-chip tri-axis, and the first parenchyma gauge block 21a, the second parenchyma gauge block 21b are the corresponding mass that drives.
Under the vibration of the first parenchyma gauge block 21a and the second parenchyma gauge block 21b drives, the 3rd parenchyma gauge block 30a, the 4th parenchyma gauge block 30b is and the first parenchyma gauge block 21a, the second parenchyma gauge block 21b is similarly along the reciprocal counter motion of Y-axis, as shown in phantom in FIG., meanwhile, at the 3rd parenchyma gauge block 30a, the vibration of the 4th parenchyma gauge block 30b drives down, coupling mass piece 22 is reciprocal twisting motion, namely reverse along the Z axle, similar with embodiment one, the harmonic moving that reverses along the Z axle is gyrostatic second driving shaft of this single-chip tri-axis, and coupling mass piece 22 is the corresponding mass that drives.Realize coupling by coupled beams 23a, 23b between the 3rd parenchyma gauge block 30a, the 4th parenchyma gauge block 30b and the coupling mass piece 22, second anchor point 27 is for supporting the anchor point of coupling mass piece 22 motions, second elastomeric element, 24 1 ends link to each other with second anchor point 27, the other end links to each other with coupling mass piece 22, to support reversing of coupling mass piece 22.
See also Fig. 7, be the synoptic diagram of the gyrostatic general frame of the single-chip tri-axis of present embodiment two (drive part and test section).Below the gyrostatic detection mode of above-mentioned single-chip tri-axis is set forth, this detection mode and embodiment one are similar.
When the angular velocity input is arranged in X-direction, the first parenchyma gauge block 21a and the second parenchyma gauge block 21b make reciprocal vibrate in opposite phase as driving mass in Y direction, then there is the coriolis force on the reverse direction to produce in Z-direction, under the effect of first elastomeric element 25, the first parenchyma gauge block 21a has a displacement away from substrate at Z axle forward, the second parenchyma gauge block 21b has a displacement near substrate at Z axle negative sense, above-mentioned displacement makes the principal mass piece 21a that wins, the second parenchyma gauge block 21b and the first parenchyma gauge block 21a, electrode layer 33a in the first electrode layer group of second parenchyma gauge block 21b below, dotted portion among the first parenchyma gauge block 21a and the second parenchyma gauge block 21b among the 33b(figure) electric capacity between produces and changes, be that electrode layer 33a has a displacement away from substrate at Z axle forward, electric capacity diminishes, meanwhile, electrode layer 33b has a displacement near substrate at Z axle negative sense, and the electric capacity quantitative change is big.Realize detection to coriolis force by detecting above-mentioned electric capacitance change, thus the size by X-axis angular velocity input signal in three axles of coriolis force reaction.Above-mentioned detection can be adopted differential capacitance to detect and realize.
When the angular velocity signal input is arranged on the Y direction, coupling mass piece 22 conducts around the twisting motion of Z axle always drive mass, can produce coriolis force around the X-axis rotation direction, under the effect of second elastomeric element 24, coupling mass piece 22 has a displacement away from substrate at Z axle forward, at Z axle negative sense one displacement near substrate is arranged, above-mentioned displacement makes the electrode layer 34a in the second electrode lay group of coupling mass piece 22 and coupling mass piece 22 belows, electric capacity between the 34b (among the figure on the coupling mass piece 22 dotted portion) changes, be that electrode layer 34a has a displacement away from substrate at Z axle forward, electric capacity diminishes, electrode layer 34b has a displacement near substrate at Z axle negative sense, and the electric capacity quantitative change is big.Realize detection to coriolis force by detecting above-mentioned electric capacitance change, thus the size by Y-axis angular velocity signal in three axles of coriolis force reaction.Above-mentioned detection can be adopted differential capacitance to detect and realize.
When the angular velocity signal input is arranged on the Z-direction, remain the first parenchyma gauge block 21a on the Y direction and the second parenchyma gauge block 21b as driving mass, to transversely produce the opposite coriolis force of direction in X-axis, at brace summer 29a, under the effect of 29b, the elongated dull and stereotyped 31a of active type, 31b will produce certain displacement at directions X, and the elongated dull and stereotyped 32a of silent oscillation, 32b is transfixion then, thereby can pass through the elongated dull and stereotyped 1a of active type and the elongated dull and stereotyped 32a of silent oscillation, the electric capacitance change of being brought by change in displacement between the elongated dull and stereotyped 31b of active type and the elongated dull and stereotyped 32b of silent oscillation realizes the detection to coriolis force, and then the size by Z axis angular rate signal in three axles of coriolis force reaction.By size and the placement location of the elongated dull and stereotyped 31a of appropriate design active type, 31b and the elongated dull and stereotyped 32a of silent oscillation, 32b, can realize Differential Detection.
Embodiment three
Fig. 8 is the third embodiment of the present invention, in the present embodiment, the parenchyma gauge block is divided into the first parenchyma gauge block 40a, the second parenchyma gauge block 40b, this first parenchyma gauge block 40a and the second parenchyma gauge block 40b are symmetricly set in described coupling mass piece 41 both sides along Y-axis, and this first parenchyma gauge block 40a and the second parenchyma gauge block 40b and coupling mass piece 41 intercouple, it realizes that the mode of coupling adopts coupled beams (not indicating) equally, the first electrode group layer (43a ~ 43d) and the second electrode group layer (42a, 42b) all be positioned at the orthogonal projection of coupling mass piece 41, this first electrode group layer (43a ~ 43d) be symmetricly set in the second electrode lay group (42a along Y-axis, both sides 42b).Driving detection mode on Y-axis and the Z-direction and embodiment one are similar in the present embodiment, do not repeat them here.Be with the difference of embodiment one: X-direction angular velocity drives detection mode, its by among the embodiment one with Z axis angular rate common drive shaft change in this embodiment with Y-axis angular velocity common drive shaft.Be specially: when the angular velocity input is arranged in X-direction, coupling mass piece 41 is reciprocal twisting vibration as driving mass, then make coupling mass piece 41 produce the motion of rotating around Y-axis, coupling mass piece 41 has a displacement away from substrate at Z axle forward, at Z axle negative sense one displacement near substrate is arranged, be the electrode layer 43a in the electrode layer group, 43b has one away from the displacement of substrate at Z axle forward, electrode layer 43c in the electrode layer group, 43d has a displacement near substrate at Z axle negative sense, above-mentioned displacement will make the electrode layer (43a in the first electrode layer group of coupling mass piece 41 and coupling mass piece 41 belows, 43b, 43c, 43d) electric capacity between (the part dotted portion among the figure on the coupling mass piece 41) produces and changes, electrode layer 43a, when the electric capacity of 43b diminishes, electrode layer 43c, the electric capacity quantitative change of 43d is big, and realize detection to coriolis force by detecting above-mentioned electric capacitance change, and then the size by X-axis angular velocity input signal in three axles of coriolis force reaction.Among the figure, electrode layer 42a, the 42b in the second electrode lay group is as the detecting electrode layer of Y-axis angular velocity.
Although be the example purpose, preferred implementation of the present invention is disclosed, but those of ordinary skill in the art will recognize that under situation about not breaking away from by the disclosed scope and spirit of the present invention of appending claims, various improvement, increase and replacement are possible.
Claims (11)
1. single-chip tri-axis gyroscope, it is characterized in that: described single-chip tri-axis gyroscope comprises:
Mass, described mass comprise parenchyma gauge block and the coupling mass piece that intercouples, and described parenchyma gauge block is even number and is symmetricly set in described coupling mass piece both sides along Y-axis;
The electrode layer group, described electrode layer group comprises the first electrode layer group, the second electrode lay group and third electrode layer group, the described first electrode layer group, has the gap between the second electrode lay group and the described mass, and the described first electrode layer group is symmetricly set in the both sides of described the second electrode lay group along Y-axis, the described first electrode layer group is positioned at the orthogonal projection of described mass, described the second electrode lay group is positioned at the orthogonal projection of described coupling mass piece, described third electrode layer group comprises one group of elongated flat board of silent oscillation and one group of elongated flat board of active type, and described third electrode layer group is connected with described parenchyma gauge block by elastomeric element;
The driving comb group, described driving comb group is connected with the parenchyma gauge block, in order to input signal and drive described parenchyma gauge block and move.
2. single-chip tri-axis gyroscope according to claim 1, it is characterized in that: described single-chip tri-axis gyroscope also comprises first anchor point and second anchor point, and described first anchor point is connected with the parenchyma gauge block, and described second anchor point is connected with the coupling mass piece.
3. single-chip tri-axis gyroscope according to claim 2 is characterized in that: be connected by first elastomeric element between described first anchor point and the parenchyma gauge block, be connected by second elastomeric element between described second anchor point and the coupling mass piece.
4. single-chip tri-axis gyroscope according to claim 3, it is characterized in that: described first elastomeric element comprises long straight beam and short beam, be connected by long straight beam between described first elastomeric element and the parenchyma gauge block, be connected by short beam between described first elastomeric element and described first anchor point.
5. single-chip tri-axis gyroscope according to claim 1, it is characterized in that: described single-chip tri-axis gyroscope also comprises the detection comb group, described detection comb group and described driving comb group are formed closed loop negative feedback system.
6. single-chip tri-axis gyroscope according to claim 1, it is characterized in that: the described first electrode layer group is positioned at the orthogonal projection of described parenchyma gauge block.
7. single-chip tri-axis gyroscope according to claim 1, it is characterized in that: the described first electrode layer group is positioned at the orthogonal projection of described coupling mass piece.
8. according to claim 1 or described single-chip tri-axis gyroscope, it is characterized in that: described third electrode layer group is symmetricly set in the described parenchyma gauge block along Y-axis.
9. single-chip tri-axis gyroscope according to claim 1, it is characterized in that: described elastomeric element comprises brace summer.
10. single-chip tri-axis gyroscope according to claim 1 is characterized in that: comprise several driving combs in the described driving comb group, comprise a driving activity broach and a driving stationary comb-tooth in described each driving comb.
11. single-chip tri-axis gyroscope according to claim 1 is characterized in that: adopt coupled beams to realize coupling between described parenchyma gauge block and the coupling mass piece.
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| CN201210022206.5A CN103245340B (en) | 2012-02-01 | 2012-02-01 | A kind of single-chip tri-axial gyroscope |
| US13/561,278 US20130192365A1 (en) | 2012-02-01 | 2012-07-30 | Monolithic triaxial gyro with improved main masses and coupling mass coupled with the each other |
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| CN201210022206.5A CN103245340B (en) | 2012-02-01 | 2012-02-01 | A kind of single-chip tri-axial gyroscope |
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| US20130192365A1 (en) | 2013-08-01 |
| CN103245340B (en) | 2016-07-13 |
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