CN103182698A - Auxiliary installing and detaching device for ion source - Google Patents
Auxiliary installing and detaching device for ion source Download PDFInfo
- Publication number
- CN103182698A CN103182698A CN201110452438XA CN201110452438A CN103182698A CN 103182698 A CN103182698 A CN 103182698A CN 201110452438X A CN201110452438X A CN 201110452438XA CN 201110452438 A CN201110452438 A CN 201110452438A CN 103182698 A CN103182698 A CN 103182698A
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- Prior art keywords
- ion source
- slide bar
- linear bearing
- ionogenic
- bearing
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Abstract
The invention discloses an auxiliary installing and detaching device for an ion source. The auxiliary installing and detaching device for the ion source mainly comprises a sliding rod (1), a linear bearing (2), a bearing mounting seat (3), an ion source (4), a source mounting flange (5) and the like, and is characterized in that the sliding rod (1) is installed on the source mounting flange (5); the ion source (4) is indirectly driven by the relative sliding between the sliding rod (1) and the linear bearing (2) so as to slide on the sliding rod (1); therefore important parts on the ion source are prevented from being damaged in the installing and detaching process; and the accurate positioning of the ion source in the installation process is guaranteed. The working principle of the device is explained in detail by a specification, and a specific implementation plan is given.
Description
Technical field
The present invention relates to the auxiliary installation and removal device in a kind of semiconductor manufacturing equipment ion implantation apparatus intermediate ion source, be particularly suitable for the ion implantation apparatus in the semiconductor manufacturing equipment.
Technical background
Ion gun is a vitals of ion implantation apparatus, its role is to make the atomic ionization of the material (as boron, phosphorus, arsenic) that needs injection to become ion, its performance quality to machine performance influence greatly, especially the stability that intensity, quality, beam energy and the complete machine of line injected has decisive influence.Ionogenic performance, outside the Pass having with the filament supply, grid bias power supply and the arc voltage power supply that make gas ionization produce ion, also the structural design with itself has very big relation.The ribbon beam ion beam that the component requirement sends from ion gun of wandering about as a refugee has bigger width, the related ion gun line width of this patent has surpassed 300mm, in order to make ion gun produce line comparatively uniformly, satisfy the requirement of integrated circuit technology and production, need to guarantee the nearest reasonability of ionogenic structural design.
Summary of the invention
The present invention relates to the auxiliary installation and removal device in a kind of semiconductor manufacturing equipment ion implantation apparatus intermediate ion source, can guarantee reliably that important spare part is not damaged and guarantees the accurate positioning of ion gun in installation process on the ion gun in the installation and removal process.The present invention realizes by following scheme:
1. ionogenic auxiliary installation and removal device, this device mainly comprises: slide bar (1), linear bearing (2), bearing mount pad (3), ion gun (4) and source mounting flange (5) etc.
2. a kind of ionogenic auxiliary installation and removal device as claimed in claim 1 should, device characteristic is, can realize relative slip between slide bar (1) and the linear bearing (2), the drive ion gun (4) indirect by linear bearing (2) and the relative slip between the slide bar (1) slides at slide bar (1).
The present invention has following distinguishing feature:
1. can effectively protect the parts on the ion gun in assembling and unloading process, not to be damaged, and can be implemented in the accurate positioning when installing;
2. simple in structure, be convenient to processing and manufacturing.
Description of drawings
Fig. 1 is a kind of stereogram of ionogenic auxiliary installation and removal device.
Fig. 2 is a kind of cutaway view of solid of ionogenic auxiliary installation and removal device.
The specific embodiment
The invention will be described further below in conjunction with the drawings and specific embodiments, but not as the restriction to patent of the present invention.
As depicted in figs. 1 and 2, this device mainly comprises: slide bar (1), linear bearing (2), bearing mount pad (3), ion gun (4) and source mounting flange (5) etc.
Slide bar (1) is fixed on source mounting flange (5) by being threaded, bearing mount pad (3) is positioned on the ion gun (4), connect by interference fit between bearing mount pad (3) and the linear bearing (2), can slide relatively between linear bearing (2) and the slide bar (1), the drive ion gun (4) indirect by linear bearing (2) and the relative slip between the slide bar (1) slides at slide bar (1).Slide bar (1) adopts intensity and the high material manufacturing of hardness, and smooth surface.
Specific embodiment of the present invention elaborates content of the present invention.For persons skilled in the art, any apparent change that it is done all constitutes the infringement to patent of the present invention, with corresponding legal responsibilities without departing from the premise in the spirit of the present invention.
Claims (4)
1. ionogenic auxiliary installation and removal device, this device mainly comprises: slide bar (1), linear bearing (2), bearing mount pad (3), ion gun (4) and source mounting flange (5) etc.
2. a kind of ionogenic auxiliary installation and removal device as claimed in claim 1 should, this device characteristic is, can realize relative slip between slide bar (1) and the linear bearing (2), the drive ion gun (4) indirect by linear bearing (2) and the relative slip between the slide bar (1) slides at slide bar (1).
3. a kind of ionogenic auxiliary installation and removal device as claimed in claim 2 is somebody's turn to do, and its device characteristic is that bearing mount pad (3) connects by interference fit between bearing mount pad (3) and the linear bearing (2) on ion gun (4).
4. a kind of ionogenic auxiliary installation and removal device as claimed in claim 2 is somebody's turn to do, and its device characteristic is that slide bar (1) adopts intensity and the high material manufacturing of hardness, and smooth surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110452438XA CN103182698A (en) | 2011-12-30 | 2011-12-30 | Auxiliary installing and detaching device for ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110452438XA CN103182698A (en) | 2011-12-30 | 2011-12-30 | Auxiliary installing and detaching device for ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103182698A true CN103182698A (en) | 2013-07-03 |
Family
ID=48674273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110452438XA Pending CN103182698A (en) | 2011-12-30 | 2011-12-30 | Auxiliary installing and detaching device for ion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103182698A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108573842A (en) * | 2017-03-09 | 2018-09-25 | 日新离子机器株式会社 | The mounting and dismounting method of ion beam irradiation apparatus and ion source |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2512110Y (en) * | 2001-11-27 | 2002-09-18 | 陕西百纳科技发展有限责任公司 | Supporter for solid ion source |
| CN2714221Y (en) * | 2004-03-02 | 2005-08-03 | 陈宪廷 | Feeding sliding headstock for thread rolling machine |
| CN2788345Y (en) * | 2005-04-22 | 2006-06-14 | 北京中科信电子装备有限公司 | Ion source outlet device capable of being adjusted in X direction |
| US20080067412A1 (en) * | 2006-05-19 | 2008-03-20 | Axcelis Technologies, Inc. | Ion source |
| CN201495278U (en) * | 2009-08-14 | 2010-06-02 | 熊剑辉 | Electric striking-arc indirect cooling-type cathode electric-arc ion source |
| CN101866802A (en) * | 2009-04-14 | 2010-10-20 | 中芯国际集成电路制造(上海)有限公司 | Ion source loading and unloading device |
| CN202067764U (en) * | 2011-04-29 | 2011-12-07 | 北京大学 | Mounting platform device for mass-spectrum double ion sources |
-
2011
- 2011-12-30 CN CN201110452438XA patent/CN103182698A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2512110Y (en) * | 2001-11-27 | 2002-09-18 | 陕西百纳科技发展有限责任公司 | Supporter for solid ion source |
| CN2714221Y (en) * | 2004-03-02 | 2005-08-03 | 陈宪廷 | Feeding sliding headstock for thread rolling machine |
| CN2788345Y (en) * | 2005-04-22 | 2006-06-14 | 北京中科信电子装备有限公司 | Ion source outlet device capable of being adjusted in X direction |
| US20080067412A1 (en) * | 2006-05-19 | 2008-03-20 | Axcelis Technologies, Inc. | Ion source |
| CN101866802A (en) * | 2009-04-14 | 2010-10-20 | 中芯国际集成电路制造(上海)有限公司 | Ion source loading and unloading device |
| CN201495278U (en) * | 2009-08-14 | 2010-06-02 | 熊剑辉 | Electric striking-arc indirect cooling-type cathode electric-arc ion source |
| CN202067764U (en) * | 2011-04-29 | 2011-12-07 | 北京大学 | Mounting platform device for mass-spectrum double ion sources |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108573842A (en) * | 2017-03-09 | 2018-09-25 | 日新离子机器株式会社 | The mounting and dismounting method of ion beam irradiation apparatus and ion source |
| CN108573842B (en) * | 2017-03-09 | 2019-10-15 | 日新离子机器株式会社 | The mounting and dismounting method of ion beam irradiation apparatus and ion source |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: Notification that Application Deemed to be Withdrawn |
|
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130703 |