CN103128602A - Workpiece shaft numerical control motion platform device for ultraprecision machining - Google Patents

Workpiece shaft numerical control motion platform device for ultraprecision machining Download PDF

Info

Publication number
CN103128602A
CN103128602A CN2012105979067A CN201210597906A CN103128602A CN 103128602 A CN103128602 A CN 103128602A CN 2012105979067 A CN2012105979067 A CN 2012105979067A CN 201210597906 A CN201210597906 A CN 201210597906A CN 103128602 A CN103128602 A CN 103128602A
Authority
CN
China
Prior art keywords
protective cover
cover plate
straight line
workbench
organ protective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012105979067A
Other languages
Chinese (zh)
Other versions
CN103128602B (en
Inventor
陈明君
刘赫男
于霖
郭占玥
余波
彭慧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201210597906.7A priority Critical patent/CN103128602B/en
Publication of CN103128602A publication Critical patent/CN103128602A/en
Application granted granted Critical
Publication of CN103128602B publication Critical patent/CN103128602B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Machine Tool Units (AREA)

Abstract

The invention discloses a workpiece shaft numerical control motion platform device for ultraprecision machining, and belongs to the technical field of polishing machining. The workpiece shaft numerical control motion platform device for the ultraprecision machining aims at solving the problems that an existing workpiece main shaft system is complex in structure and large in size, can not sufficiently meet the requirements of dust prevention, magnetism prevention and cutting fluid prevention for a high-precision linear motor, and is not suitable for being applied to a small-bore and non-ball curved surface machining lathe. An XY precision mobile platform is arranged in a containing cavity of a lathe base. A working platform is installed on an X axis straight line unit of the XY precision mobile platform. Cover plates are arranged on the periphery of the containing cavity. An organ-liked protective cover is arranged between the edge of the working platform and each cover plate. The workpiece main shaft is installed on the working platform through a workpiece main shaft support, and the axis of the workpiece main shaft is parallel to the motion axis of the X axis straight line unit. A liquid returning groove is formed in the working platform for recycling working fluid. A charge coupled device (CCD) tool setting device is installed on the cover plates. Safety protection of motion components is fully taken into consideration. A smear metal prevention device, a dust prevention device and a cutting fluid prevention device are arranged, and safe operation of the straight line motion unit is ensured.

Description

A kind of ultraprecise processing workpiece Shaft and NC Machining Test exemplary motion stage device
Technical field
The present invention relates to a kind of ultraprecise processing with workpiece Shaft and NC Machining Test exemplary motion stage device, belong to the polishing processing technique field.
Technical background
Growing along with modern science and technology, in fields such as national defence, Aero-Space and electron trade, biologic medicals, the small-bore aspheric surface part of various high accuracy great surface qualities is used widely.Its face type of these parts requires to reach the form accuracy of submicron order, nano level surface roughness and minimum subsurface stratum damage, needs could satisfy the requirement of its precision and surface quality through superfine grinding and polishing processing.For the high-precision part of this Surfaces of Unusual Shape, its processing and manufacturing need to adopt the high accuracy Multi-axis simultaneous machining to equip to realize.Can there be multiple different distribution form in this Multi-axis simultaneous machining system, the system of processing of a five-axle linkage for example, mostly adopt and consisted of by three traveling priority axles and two rotating shafts, be that three-dimensional X, Y, Z axis moves, workpiece spindle rotates and the swing of tool spindle unit, can be by the moving workpiece spindle feeding of two axial Sports bands of straight line of X, Y of controlling quadrature on lathe, position and the corner of control tool unit are completed processing simultaneously.
The general linear electric motors unit drives that adopts of the straight-line feed of workpiece spindle system XY worktable motion wherein, linear electric motors are stricter to the requirement of working environment, be strictly on guard against magnetic conductor absorption dust, powder, be inhaled into as these particulates in the stator and the space between mover of linear electric motors, therefore motor need to effectively protect cisco unity malfunction the magnetic texure link of linear electric motors.Present stage, in the processing of the small-bore aspheric surface part of development with in multi-axis linkage processing machine tool, when adopting High Precision Linear Motor to make its parts moving linearly, to its protection shortcoming to some extent still, can not fully satisfy dustproof, every magnetic, prevent the requirement of cutting fluid; In addition, be installed on the work spindle system on the XY two-dimentional work bench, its speed of gyration is far below speed of cutter spindle, and the requirement to its rotating accuracy is also higher, due to the common complex structure of work spindle system of routine, bulky, be not easy to use on small-bore aspheric curve machining tool.
Summary of the invention
The present invention utilizes existing work spindle system to have complex structure, bulky in order to solve, and for High Precision Linear Motor can not fully satisfy dustproof, every magnetic, anti-cutting fluid requirement, be unsuitable for the problem used on small-bore aspheric curve machining tool, and then provide a kind of ultraprecise processing with workpiece Shaft and NC Machining Test exemplary motion stage device.
The present invention solves the problems of the technologies described above the technical scheme of taking to be:
A kind of ultraprecise processing of the present invention comprises XY precise mobile platform, lathe base, cover plate, organ protective cover, workbench, work spindle support, work spindle, CCD tool setting device and liquid return trough with workpiece Shaft and NC Machining Test exemplary motion stage device; The XY precise mobile platform contains X-axis straight line units and Y-axis straight line units, and the X-axis straight line units is placed on the Y-axis straight line units; Lathe base is provided be used to the cavity volume that holds the XY precise mobile platform, the XY precise mobile platform is placed in the cavity volume of lathe base, workbench is arranged on the upper surface of X-axis straight line units of XY precise mobile platform, the surrounding of cavity volume is provided with cover plate, be provided with the organ protective cover between work edge of table and cover plate, the open topped of cavity volume covers by the cover plate of workbench, workbench surrounding and the organ protective cover between workbench and cover plate, and described XY precise mobile platform is encapsulated in cavity volume; Work spindle is arranged on workbench by the work spindle support, and the axis of work spindle is parallel with the axis of movement of X-axis straight line units, and liquid return trough is arranged on and is used for reclaiming working fluid on workbench; The CCD tool setting device is installed on the cover board.
The invention has the beneficial effects as follows:
The present invention is directed to the needs of small-bore aspheric curve part superfine grinding and polishing processing, a kind of high-precision workpiece Shaft and NC Machining Test XY exemplary motion stage device is provided, this device adopts high-precision linear electric motors moving cell as main motion parts, and has designed the necessary safety guards such as dustproof, anti-cutting fluid sputter; Design and installation has high-precision small electrical axis system on the XY workbench, can carry out the high accuracy rectilinear motion of X, Y direction under the drive of XY workbench.Utilize high-precision multi-axis motion controller to realize multi-shaft interlocked, complete the movement locus that aspheric curve part machining needs.
On probation to be proved to be effect remarkable through manufacturing experimently for described device, reaches designing requirement fully, X-Y axle stroke 100mm * 100mm, and in main range of work 50mm * 50mm, linearity≤3 μ m, the positioning accuracy after closed loop≤± 0.3 μ m; Beating≤1 μ m of work spindle.
Concrete advantage of the present invention is:
A) take into full account the security protection of moving component, be provided with anti-smear metal, dustproof and cutting fluid protector, guaranteed the safe operation of linear motion unit;
B) workpiece rotational motion adopts the high precision small electric chief axis system, and rotating accuracy is high, and flexible configuration is suitable for small-sized ultra-precision processing apparatus;
C) adopt high-precision linear electric motors moving cell as main motion parts, and be equipped with multi-axis controller and carry out closed-loop control, make device have very high kinematic accuracy, can be used for the ultraprecise processing of small-bore high accuracy complex curved surface parts.
D) device key structure spare---pedestal etc. all adopt grouan material to make, and can well absorb vibration, thereby the serviceability of raising device that can be larger.
Description of drawings
Fig. 1 is front view of the present invention, and Fig. 2 is the left view (removing liquid return trough and liquid return trough support) of Fig. 1, and Fig. 3 is the top view of Fig. 1.
Fig. 4 is the stereogram that the magnetorheological grinding and polishing device of the present invention and vertical axis turntable reversely hung Yong inclined shaft consists of a kind of small-bore aspheric surface permanent magnet type magnetic current variable polishing lathe; Fig. 5 is the front view of Fig. 4; Fig. 6 is the left view of Fig. 5, Fig. 6-1st, and the A of Fig. 6 is to partial view; Fig. 7 is the top view of Fig. 5.
The specific embodiment
The specific embodiment one: as shown in Fig. 1~7, the described a kind of ultraprecise processing of present embodiment comprises XY precise mobile platform, lathe base 1, cover plate 2, organ protective cover 3, workbench 4, work spindle support 7, work spindle 8, CCD tool setting device 17 and liquid return trough 18 with workpiece Shaft and NC Machining Test exemplary motion stage device; The XY precise mobile platform contains X-axis straight line units 6 and Y-axis straight line units 5, and X-axis straight line units 6 is placed on Y-axis straight line units 5; Lathe base 1 is provided be used to the cavity volume 1-1 that holds the XY precise mobile platform, the XY precise mobile platform is placed in the cavity volume 1-1 of lathe base 1, workbench 4 is arranged on the upper surface of X-axis straight line units 6 of XY precise mobile platform, the surrounding of cavity volume 1-1 is provided with cover plate 2, be provided with organ protective cover 3 between the edge of workbench 4 and cover plate 2, the open topped of cavity volume 1-1 covers by the cover plate 2 of workbench 4, workbench 4 surroundings and the organ protective cover 3 between workbench 4 and cover plate 2, and described XY precise mobile platform is encapsulated in cavity volume 1-1; Work spindle 8 is arranged on workbench 4 by work spindle support 7, and the axis of work spindle 8 is parallel with the axis of movement of X-axis straight line units 6, and liquid return trough 18 is arranged on and is used for reclaiming working fluid on workbench 4; CCD tool setting device 17 is arranged on cover plate 2.
The specific embodiment two: as shown in Fig. 1~7, the described XY precise mobile platform of present embodiment adopts the linear electric motors platform 404T01LXR of U.S. Parker company.Other composition and annexation are identical with the specific embodiment one.
The specific embodiment three: as shown in Fig. 1~7, the described work spindle of present embodiment 8 adopts the accurate electric main shaft NR50-5100ATC of Japanese NSK company.Other composition and annexation are identical with the specific embodiment one or two.
The specific embodiment four: as shown in Fig. 1~7, the described lathe base 1 of present embodiment is made by grouan material.Other composition and annexation are identical with the specific embodiment three.
The specific embodiment five: as shown in Fig. 1~7, the described lathe base 1 of present embodiment is made of pedestal 1-13, left block 1-9, right block 1-14, positive stop 1-6 and backstop 1-12, left block 1-9, right block 1-14, positive stop 1-6 and backstop 1-12 are connected to the surrounding of the upper surface of pedestal 1-13, are formed for holding the cavity volume 1-1 of XY precise mobile platform.Other composition and annexation are identical with the specific embodiment one.
The specific embodiment six: as shown in Fig. 1~7, the described cover plate 2 of present embodiment is made of left side cover plate 2-7, right side cover plate 2-2, front side cover plate 2-5, rear side cover plate 2-11, and the surrounding that is used for holding the cavity volume 1-1 of XY precise mobile platform is respectively equipped with left side cover plate 2-7, right side cover plate 2-2, front side cover plate 2-5, rear side cover plate 2-11.Other composition and annexation are identical with the specific embodiment five.
The specific embodiment seven: as shown in Fig. 1~7, the described organ protective cover 3 of present embodiment is made of front side X-direction organ protective cover 3-4, rear side X-direction organ protective cover 3-10, left side Y-direction organ protective cover 3-8 and right side Y-direction organ protective cover 3-3, and front side X-direction organ protective cover 3-4, rear side X-direction organ protective cover 3-10, left side Y-direction organ protective cover 3-8, right side Y-direction organ protective cover 3-3 are arranged on around the edge of workbench 4.Other composition and annexation are identical with the specific embodiment six.
The specific embodiment eight: as shown in Fig. 1~7, the described work spindle 8 of present embodiment is arranged on work spindle support 7 by main shaft clamper 35.Other composition and annexation are identical with the specific embodiment one.
The specific embodiment nine: as shown in Fig. 1~7, the described liquid return trough 18 of present embodiment is arranged on workbench 4 by liquid return trough support 34.Other composition and annexation are identical with the specific embodiment seven.
the specific embodiment ten: as shown in Fig. 1~7, the processing of the described ultraprecise of present embodiment also comprises two lower side stand components 40 and the organ cover carriage 41 that is positioned at cavity volume 1-1 with workpiece Shaft and NC Machining Test exemplary motion stage device, the cross section of lower side stand component 40 takes the shape of the letter U, organ cover carriage 41 is four frame shapeds, two lower side stand components 40 are positioned at the left and right sides of X-axis straight line units 6, fixed part on the lower surface at X-axis straight line units 6 two ends is connected with lower side stand component 40 bottoms respectively, the surrounding of organ cover carriage 41 respectively with front side X-direction organ protective cover 3-4, rear side X-direction organ protective cover 3-10, left side Y-direction organ protective cover 3-8, right side Y-direction organ protective cover 3-3 connects, organ cover stent 41 is connected with two lower side stand components 40, X-axis straight line units 6 drives organ cover carriage 41 by two lower side stand components 40 and does translational motion, thereby driving organ protective cover 3 does to shrink or extensional deformation.Other composition and annexation are identical with the specific embodiment seven or nine.
In the specific embodiment one, pedestal 1-13 is a large platform of being made by grouan material, and on it, surrounding is by being that " fence " that right block 1-14, positive stop 1-6, left block 1-9 and backstop 1-12 that grouan material is made form surrounds equally.Four blocks are connected on pedestal 1-13 by soket head cap screw 38, soket head cap screw 39 and soket head cap screw 43 etc.; can play certain protective effect to the linear electric motors moving component that is arranged on the centre position, also required machining tool device can be installed thereon simultaneously.Have the performance of good absorption vibration due to granite, thereby can improve the dynamic property of device.Zone line at pedestal 1-13 upper surface is provided with Y-axis straight line units 5, and Y-axis straight line units 5 can be connected in by the soket head cap screw 31 of below on pedestal 1-13, also can use screw 32 to coordinate pressing plate 33 to be pressed on pedestal 1-13 from the top.X-axis straight line units 6 is installed on the moving component of Y-axis linear motion unit 5.Two straight line units drive by the electromagnetic push of its inner linear electric motors, can be respectively along X-axis and the freely back and forth translation of Y direction of device.In order to guarantee the precision of workpiece processing, in installation process, X-axis straight line units 6 is fixedly connected by alignment pin with Y-axis straight line units 5, and axis of movement both must guarantee strict vertical.Workbench 4 followed in the moving component first line of a couplet in X-axis straight line units 6, is provided with liquid return trough support 34 and spindle carrier 7 on workbench 4.Liquid return trough 18 is arranged on liquid return trough support 34, in order to reclaim the working fluid of workpiece area.Main shaft clamper 35 with screw attachment on spindle carrier 7, work spindle 8 is arranged in the endoporus of main shaft clamper 35, can adjust the gap of endoporus and work spindle 8 external cylindrical surfaces of main shaft clamper 35 by screwing screw 42, utilize frictional force to compress electric main shaft.In installation process, must strictly control the size of thrust, damage to prevent work spindle 8.Main shaft decelerator 36 and spindle motor 37 are arranged on work spindle 8 rears successively, form a small electrical axis system, the high rotating speed that is provided by spindle motor 37 drives by after 36 decelerations of main shaft decelerator, can make work spindle 8 obtain a lower rotating speed, satisfy the rotating requirement of workpiece low speed.This small electrical axis system simple installation, volume is little, can be on workbench flexible configuration, have again higher running accuracy simultaneously, it is beated less than 1 μ m, is well suited for being applied to the ultraprecise processing of small-bore aspheric curve part.
On the installation step that the step trough of right block 1-14, positive stop 1-6, left block 1-9 and backstop 1-12 inside upper surface surrounds, be furnished with respectively right side cover plate 2-2, front side cover plate 2-5, left side cover plate 2-7 and rear side cover plate 2-11, the empty part of middle surrounding divided carry out capping.The lower surface fixed part first line of a couplet in X-axis straight line units 6 is connected to two lower side stand components 40, and organ cover carriage 41 is installed on it.Between two medial surfaces of organ cover carriage 41 and workbench 4, Y-direction organ protective cover 3-3 and 3-8 are installed, are separately installed with X-direction organ protective cover 3-4 and 3-10 between two lateral surfaces and front side cover plate 2-5, rear side cover plate 2-11.Cover plate and organ protective cover are in order to play dustproof effect to following linear electric motors moving component; simultaneously also can protect splashing of some working fluids; thus serviceability and the service life of High Precision Linear Motor are played a very good protection, this is also a key link place of the present invention.
Operation principle of the present invention and method of operating:
Above-mentioned workpiece spindle numerical control exemplary motion stage device comprises two linear axis and a workpiece electricity main shaft, each traveling priority axle and electric main shaft have independently driver, wherein the driver of two traveling priority axles and its feedback signal line all connect with multi-axis controller, this multi-axis controller can be to the control of controlling separately or link of each traveling priority axle, and multi-axis controller and each universal driving shaft, driver etc. have consisted of the control system of a closed loop.Send machining code or control signal to multi-axis controller by host computer, realize working motion.
At first, each linear motion unit of device and drive wire and the holding wire of electric main shaft are connected with corresponding driver respectively, again the feedback line of straight line units and the holding wire of driver are connected with multi-axis controller, again multi-axis controller is connected with host computer at last, to consist of a complete hardware system.Secondly, clamping workpiece to work spindle 8, in clamping process, must be guaranteed effective location and the reliable grip of clamping.Again, whole control system is powered on, and each shifting axle is returned Z-operation.The workpiece machining code is imported to host computer, begin to carry out the processing of workpiece.Workpiece is done the low speed gyration with work spindle 8, completes the motion of machining locus under the drive of X, Y-axis straight line units, coordinates other to be placed in the processing unit (plant) of platform top, as grinding attachment or grinding and polishing device, can complete the required processing of workpiece.
The magnetorheological grinding and polishing device of the present invention and vertical axis turntable reversely hung Yong inclined shaft consists of a kind of small-bore aspheric surface permanent magnet type magnetic current variable polishing lathe; Be that described lathe comprises ultraprecise processing workpiece Shaft and NC Machining Test exemplary motion stage device and the magnetorheological grinding and polishing device of vertical axis turntable reversely hung Yong inclined shaft;
Ultraprecise processing comprises XY precise mobile platform, lathe base 1, cover plate 2, organ protective cover 3, workbench 4, work spindle support 7, work spindle 8, CCD tool setting device 17 and liquid return trough 18 with workpiece Shaft and NC Machining Test exemplary motion stage device; The XY precise mobile platform contains X-axis straight line units 6 and Y-axis straight line units 5, and X-axis straight line units 6 is placed on Y-axis straight line units 5;
Lathe base 1 is provided be used to the cavity volume 1-1 that holds the XY precise mobile platform, the XY precise mobile platform is placed in the cavity volume 1-1 of lathe base 1, workbench 4 is arranged on the upper surface of X-axis straight line units 6 of XY precise mobile platform, the surrounding of cavity volume 1-1 is provided with cover plate 2, be provided with organ protective cover 3 between the edge of workbench 4 and cover plate 2, the open topped of cavity volume 1-1 covers by the cover plate 2 of workbench 4, workbench 4 surroundings and the organ protective cover 3 between workbench 4 and cover plate 2, and described XY precise mobile platform is encapsulated in cavity volume 1-1; Work spindle 8 is arranged on workbench 4 by work spindle support 7, and the axis of work spindle 8 is parallel with the axis of movement of X-axis straight line units 6, and liquid return trough 18 is arranged on and is used for reclaiming magnetic flow liquid on workbench 4; CCD tool setting device 17 is arranged on cover plate 2;
The magnetorheological grinding and polishing device of vertical axis turntable reversely hung Yong inclined shaft comprises portal frame 9, Z axis straight line units 10, right angle link 11, turntable 12, two-dimentional Precision trimming displacement platform 13, rubbing head main shaft 14, rubbing head spindle carrier 15 and polishing tool 16; Polishing tool 16 is comprised of magneto rubbing head 16-1 and rubbing head connecting rod 16-2;
Z axis straight line units 10 is arranged on portal frame 9, turntable 12 is arranged on Z axis straight line units 10 by right angle link 11, the axle head of the turning cylinder in turntable 12 is connected with rubbing head spindle carrier 15 by two-dimentional Precision trimming displacement platform 13, rubbing head spindle carrier 15 has certain inclination angle, and to make the rubbing head main shaft 14 that is arranged on rubbing head spindle carrier 15 and the angle of horizontal plane be that 40 degree are to 45 degree, the end of rubbing head connecting rod 16-2 is arranged on the chuck of rubbing head main shaft 14, and the other end of rubbing head connecting rod 16-2 is connected with magneto rubbing head 16-1;
Z axis straight line units 10 consists of three-dimensional system of coordinate with the XY precise mobile platform; Portal frame 9 is arranged on lathe base 1; Utilize two-dimentional Precision trimming displacement platform 13 and CCD tool setting device 17 to adjust the locus of magneto rubbing head 16-1, the centre of sphere of magneto rubbing head 16-1 is positioned on the axis of rotation of turntable 12, the real relative position of adjusting both when CCD tool setting device 17 is used for observing magneto rubbing head 16-1 with respect to the Working position of workpiece and passes through Z axis straight line units 10, XY precise mobile platform is completed the tool setting before workpiece is processed.

Claims (10)

1. a ultraprecise is processed with workpiece Shaft and NC Machining Test exemplary motion stage device, it is characterized in that: described ultraprecise processing comprises XY precise mobile platform, lathe base (1), cover plate (2), organ protective cover (3), workbench (4), work spindle support (7), work spindle (8), CCD tool setting device (17) and liquid return trough (18) with workpiece Shaft and NC Machining Test exemplary motion stage device; The XY precise mobile platform contains X-axis straight line units (6) and Y-axis straight line units (5), and X-axis straight line units (6) is placed on Y-axis straight line units (5);
lathe base (1) is provided be used to the cavity volume that holds the XY precise mobile platform (1-1), the XY precise mobile platform is placed in the cavity volume (1-1) of lathe base (1), workbench (4) is arranged on the upper surface of X-axis straight line units (6) of XY precise mobile platform, the surrounding of cavity volume (1-1) is provided with cover plate (2), be provided with organ protective cover (3) between the edge of workbench (4) and cover plate (2), the open topped of cavity volume (1-1) is by workbench (4), organ protective cover (3) between the cover plate (2) of workbench (4) surrounding and workbench (4) and cover plate (2) covers, described XY precise mobile platform is encapsulated in cavity volume (1-1), work spindle (8) is arranged on workbench (4) by work spindle support (7), and the axis of work spindle (8) is parallel with the axis of movement of X-axis straight line units (6), and liquid return trough (18) is arranged on the upper recovery working fluid that is used for of workbench (4), CCD tool setting device (17) is arranged on cover plate (2).
2. a kind of ultraprecise according to claim 1 is processed with workpiece Shaft and NC Machining Test exemplary motion stage device, and it is characterized in that: described XY precise mobile platform adopts the linear electric motors platform 404T01LXR of U.S. Parker company.
3. a kind of ultraprecise processing according to claim 1 and 2 with workpiece Shaft and NC Machining Test exemplary motion stage device, is characterized in that: described work spindle (8) adopts the accurate electric main shaft NR50-5100ATC of Japanese NSK company.
4. a kind of ultraprecise according to claim 3 is processed with workpiece Shaft and NC Machining Test exemplary motion stage device, and it is characterized in that: described lathe base (1) is made by grouan material.
5. a kind of ultraprecise according to claim 1 is processed with workpiece Shaft and NC Machining Test exemplary motion stage device, it is characterized in that: described lathe base (1) is made of pedestal (1-13), left block (1-9), right block (1-14), positive stop (1-6) and backstop (1-12), left block (1-9), right block (1-14), positive stop (1-6) and backstop (1-12) are connected to the surrounding of the upper surface of pedestal (1-13), are formed for holding the cavity volume (1-1) of XY precise mobile platform.
6. a kind of ultraprecise according to claim 5 is processed with workpiece Shaft and NC Machining Test exemplary motion stage device, it is characterized in that: described cover plate (2) is made of left side cover plate (2-7), right side cover plate (2-2), front side cover plate (2-5), rear side cover plate (2-11), and the surrounding that is used for holding the cavity volume (1-1) of XY precise mobile platform is respectively equipped with left side cover plate (2-7), right side cover plate (2-2), front side cover plate (2-5), rear side cover plate (2-11).
7. a kind of ultraprecise according to claim 6 is processed with workpiece Shaft and NC Machining Test exemplary motion stage device, it is characterized in that: described organ protective cover (3) is by front side X-direction organ protective cover (3-4), rear side X-direction organ protective cover (3-10), left side Y-direction organ protective cover (3-8) and right side Y-direction organ protective cover (3-3) consist of, front side X-direction organ protective cover (3-4), rear side X-direction organ protective cover (3-10), left side Y-direction organ protective cover (3-8), right side Y-direction organ protective cover (3-3) is arranged on around the edge of workbench (4).
8. a kind of ultraprecise according to claim 1 is processed with workpiece Shaft and NC Machining Test exemplary motion stage device, and it is characterized in that: described work spindle (8) is arranged on work spindle support (7) by main shaft clamper (35).
9. a kind of ultraprecise according to claim 7 is processed with workpiece Shaft and NC Machining Test exemplary motion stage device, and it is characterized in that: described liquid return trough (18) is arranged on workbench (4) by liquid return trough support (34).
10. according to claim 7 or 9 described a kind of ultraprecises are processed with workpiece Shaft and NC Machining Test exemplary motion stage device, it is characterized in that: described ultraprecise processing also comprises with workpiece Shaft and NC Machining Test exemplary motion stage device two lower side stand components (40) and the organ cover carriage (41) that is positioned at cavity volume (1-1), the cross section of lower side stand component (40) takes the shape of the letter U, organ cover carriage (41) is four frame shapeds, two lower side stand components (40) are positioned at the left and right sides of X-axis straight line units (6), fixed part on the lower surface at X-axis straight line units (6) two ends is connected bottom a lower side stand component (40) respectively, the surrounding of organ cover carriage (41) respectively with front side X-direction organ protective cover (3-4), rear side X-direction organ protective cover (3-10), left side Y-direction organ protective cover (3-8), right side Y-direction organ protective cover (3-3) connects, organ cover stent (41) is connected with two lower side stand components (40), X-axis straight line units (6) drives organ cover carriage (41) by two lower side stand components (40) and does translational motion, thereby driving organ protective cover (3) does to shrink or extensional deformation.
CN201210597906.7A 2012-12-26 2012-12-26 Workpiece shaft numerical control motion platform device for ultraprecision machining Active CN103128602B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210597906.7A CN103128602B (en) 2012-12-26 2012-12-26 Workpiece shaft numerical control motion platform device for ultraprecision machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210597906.7A CN103128602B (en) 2012-12-26 2012-12-26 Workpiece shaft numerical control motion platform device for ultraprecision machining

Publications (2)

Publication Number Publication Date
CN103128602A true CN103128602A (en) 2013-06-05
CN103128602B CN103128602B (en) 2015-01-28

Family

ID=48489390

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210597906.7A Active CN103128602B (en) 2012-12-26 2012-12-26 Workpiece shaft numerical control motion platform device for ultraprecision machining

Country Status (1)

Country Link
CN (1) CN103128602B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104715670A (en) * 2015-02-11 2015-06-17 重庆大学 High-speed motorized spindle dynamic loading device based on magnetorheological fluid
CN108177087A (en) * 2018-01-08 2018-06-19 曹婉丽 A kind of grinding attachment abrasive dust collection device
CN108188575A (en) * 2018-03-28 2018-06-22 深圳市思博威激光科技有限公司 A kind of totally enclosed type noble metal cutting machine
CN109622258A (en) * 2019-02-01 2019-04-16 内蒙古工业大学 A kind of plane window sealing structure applied between spraying
CN109622280A (en) * 2019-02-01 2019-04-16 内蒙古工业大学 Equipment for electrostatic powder coating clean manufacturing

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994004313A1 (en) * 1992-08-14 1994-03-03 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
US5839944A (en) * 1995-10-16 1998-11-24 Byelocorp, Inc. Apparatus deterministic magnetorheological finishing of workpieces
EP1018398A2 (en) * 1999-01-06 2000-07-12 QED Technologies, Inc. System for magnetorheological finishing of substrates
CN1613605A (en) * 2004-11-23 2005-05-11 哈尔滨工业大学 Ultrasonic magnetic rheological composite polishing method and polisher thereof
CN101224556A (en) * 2008-02-04 2008-07-23 东华大学 Precise magnetic flowage polishing system for optics parts and method thereof
CN102161168A (en) * 2011-01-19 2011-08-24 湖南大学 Small-caliber aspherical composite precise processing machine tool

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994004313A1 (en) * 1992-08-14 1994-03-03 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
US5839944A (en) * 1995-10-16 1998-11-24 Byelocorp, Inc. Apparatus deterministic magnetorheological finishing of workpieces
EP1018398A2 (en) * 1999-01-06 2000-07-12 QED Technologies, Inc. System for magnetorheological finishing of substrates
CN1613605A (en) * 2004-11-23 2005-05-11 哈尔滨工业大学 Ultrasonic magnetic rheological composite polishing method and polisher thereof
CN101224556A (en) * 2008-02-04 2008-07-23 东华大学 Precise magnetic flowage polishing system for optics parts and method thereof
CN102161168A (en) * 2011-01-19 2011-08-24 湖南大学 Small-caliber aspherical composite precise processing machine tool

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104715670A (en) * 2015-02-11 2015-06-17 重庆大学 High-speed motorized spindle dynamic loading device based on magnetorheological fluid
CN108177087A (en) * 2018-01-08 2018-06-19 曹婉丽 A kind of grinding attachment abrasive dust collection device
CN108177087B (en) * 2018-01-08 2019-12-06 南京白下高新技术产业园区投资发展有限责任公司 Grinding bits collection device for grinding device
CN108188575A (en) * 2018-03-28 2018-06-22 深圳市思博威激光科技有限公司 A kind of totally enclosed type noble metal cutting machine
CN109622258A (en) * 2019-02-01 2019-04-16 内蒙古工业大学 A kind of plane window sealing structure applied between spraying
CN109622280A (en) * 2019-02-01 2019-04-16 内蒙古工业大学 Equipment for electrostatic powder coating clean manufacturing

Also Published As

Publication number Publication date
CN103128602B (en) 2015-01-28

Similar Documents

Publication Publication Date Title
CN103072047B (en) Small-caliber non-spherical permanent magnet magnetorheological polishing processing machine tool
CN103128602B (en) Workpiece shaft numerical control motion platform device for ultraprecision machining
CN101870063B (en) Vertical five axle interlocked gantry digital control milling machining center
CN102922286B (en) Macro-micro combined precision micro composite machining tool
CN202640099U (en) Bridge type numerical-control planar universal grinder structure
CN106826474A (en) Small size thin wall complex structure part superfine grinding lathe
CN207840929U (en) A kind of casting automatically grinding high rigidity robot
CN204397367U (en) A kind of dynamic post and beam gantry Five-axis NC Machining Center
CN206153762U (en) Three -dimensional optic fibre laser cutting machine
CN106181599A (en) Five-shaft numerical control cutter and tool grinding machine
CN106272054A (en) The grinding head device of five-shaft numerical control cutter and tool grinding machine
CN104526364A (en) Vertical machining centre machine tool
CN203696618U (en) Five-axis tool sharpener
CN105127819A (en) Five-axis parallel machine tool
CN206047108U (en) Bloom turning machine
CN210968236U (en) Desktop multi-axis milling and grinding microcomputer machine
CN205381073U (en) Five spool little engravers
CN202317699U (en) Moving pillar vertical type five-shaft linked high-speed drill milling machining center rotating table
CN102990500B (en) Magnetorheological polishing device with vertical shaft and tilting shaft with rotary table hung upside down
CN203357009U (en) Ultraprecise fly-cutter turning and milling machine
CN109228767A (en) A kind of dynamic pillar automatic loading/unloading glass carving machine and its working method
CN205817308U (en) A kind of five-axle linkage mechanism of Digit Control Machine Tool
CN111037315B (en) Vertical machine tool
CN106272061A (en) The clamping workpiece device of five-shaft numerical control cutter and tool grinding machine
CN102825508B (en) Test device capable of achieving 600m/s ultrahigh-speed grinding process

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant