CN103028840A - Device for adjusting laser output and method thereof - Google Patents
Device for adjusting laser output and method thereof Download PDFInfo
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- CN103028840A CN103028840A CN2012103619052A CN201210361905A CN103028840A CN 103028840 A CN103028840 A CN 103028840A CN 2012103619052 A CN2012103619052 A CN 2012103619052A CN 201210361905 A CN201210361905 A CN 201210361905A CN 103028840 A CN103028840 A CN 103028840A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to a device for adjusting laser output and a method thereof, wherein the device for adjusting laser output comprises a laser unit (100) generating laser beam (10); an optical unit (200) providing a laser beam path (10); a machining unit (300) irradiating the laser beam passing through the optical unit (200) to a substrate (20); a first measuring unit (400) arranged between the laser unit (100) and the optical unit (200) and used for measuring the output energy of the laser beam (10) of the laser unit (100); a second measuring unit (500) arranged inside the optical unit (200) and measuring the output energy of the laser beam (10) passing through the optical unit (200); a control unit (600) receiving the output signals of the laser beam measured by the first measuring unit (400) and the second measuring unit (500) and transmitting the signals to the laser unit (100), in order to adjust the output energy of the laser beam (10) generated at the laser unit (100).
Description
Technical field
The present invention relates to a kind of Laser output adjusting device and method.Be specially, by by the first determination part and the second determination part the laser beam that generates in laser section being measured Laser output adjusting device and the method that can easily adjust the output energy that is radiated at the laser beam on the substrate.
Background technology
In recent years, along with flat display devices, especially in the increase of the demand of liquid crystal display (LCD) and the trend of maximization, its level of application, the speed that size increases and resolution ratio increases are also being accelerated, and for enhancing productivity and realizing cheapization of price, paying a lot of effort aspect simplified manufacturing technique and the raising earning rate.The basic structure of liquid crystal display, by the upper substrate that is formed with black matrix", color filter film and common electrode, and be formed with the lower basal plate of pixel region, pixel electrode, switch element and circuit, and the liquid crystal that is filled between described upper substrate and the following substrate consists of.
This structure constituent that forms in lower basal plate, cause in manufacturing process, occurring the bad phenomenon such as the broken string of circuit or short circuit, and the maximization with the image component display area, this defective is also more and more, therefore, for improving quality and the stability of liquid crystal display, need to eliminate repairing (Repair) technology of these defectives.
The repairing technique that always gets most of the attention is to possess the extension wire of repairing usefulness, when defective occurs, connect the method that extension wire is repaired broken string, if but repairing circuit is when long, signal level can reduce because of the line electricity resistance, thereby the acting characteristic of liquid crystal panel is had a negative impact.
Therefore, more welcome recently is the repairing circuit method of using the laser chemical vapor deposition method.Namely, basically be to adopt when finding defective, utilize laser to cut off a certain position of rejected region, and deposit repairing circuit and form the method for pattern by chemical vapour deposition technique, or when circuit breaking, by laser chemical vapor deposition method (Laser CVD) plated metal, thus the mode that the line electricity of disconnection is connected, and then finish repairing work.The advantage of this laser chemical vapor deposition method method for repairing and mending is, can be immediately during broken string at the broken string position shape growing metal circuit by the expected, its repair technology is simple, and can comprise the various repairing works of grating circuit and data circuit.And the laser chemical vapor deposition method not only can be repaired the defective of substrate, also can be used for the depositing operation of microfine circuit.
With reference to Fig. 1, in the existing laser chemical vapor deposition subtraction unit, the laser beam 10 process optics sections 200 in that laser section 100 generates shining the process of substrate 20 from processing department 300, are measured its output valve by processing department analyzer 310.But when the phenomenon that laser beam 10 output energy reduce occurs, then be difficult to judge the position of causing laser beam 10 output energy to reduce.In addition, also exist the output energy be difficult to the laser beam that will reduce to readjust the difficult problem of desirable strength.
In addition, except the laser chemical vapor deposition subtraction unit, the general laser aid that the bad circuit that cut-out is short-circuited is repaired defective, and with the defect pixel of Ear Mucosa Treated by He Ne Laser Irradiation display the high pixel of defective being repaired behind its dim spot is repaired (HPR) device grade, accurately keep the desired laser output intensity of user, guarantee the technique reproducibility and stable aspect, particularly important.
Summary of the invention
Therefore, the present invention is intended to solve the variety of issue that above-mentioned prior art exists, and it is a kind of in the deposition and repair technology of laser that purpose is to provide, and makes the output energy of laser beam remain consistent Laser output adjusting device and method.
In addition, the present invention also aims to, a kind of Laser output adjusting device and method that can identify easily the laser aid part that causes the minimizing of laser beam output energy is provided.
In addition, the bright purpose of we also is, provides a kind of when Laser Processing, Laser output adjusting device and the method that can measure the output energy of laser beam in real time.
Also have, the object of the invention is to, provide a kind of in technique the output energy of laser beam occur when unusual, can automatically adjust the output energy of laser beam, to strengthen Laser output adjusting device and the method for reliability of technology and stability.
For achieving the above object, the characteristics of Laser output adjusting device provided by the invention are, comprising: laser section generates laser beam; Optics section, provide above-mentioned laser beam the path of process; Processing department makes laser beam irradiation through above-mentioned optics section to substrate; The first determination part is arranged between above-mentioned laser section and the above-mentioned optics section, is used for being determined at the output energy of the laser beam that above-mentioned laser section generates; The second determination part is arranged in the above-mentioned optics section, is used for measuring the output energy through the laser beam of above-mentioned optics section; Control part receives the output signal of the laser beam of being measured by above-mentioned the first determination part and above-mentioned the second determination part, passes the signal to above-mentioned laser section, thereby is adjusted at the output energy of the laser beam that above-mentioned laser section generates.
In addition, for achieving the above object, the characteristics of Laser output method of adjustment of the present invention are, the laser section that generates laser beam and provide laser beam the first determination part is set between the optics section in path of process, and the output signal of the laser beam that generates in above-mentioned laser section that will measure at the first determination part, be sent to above-mentioned laser section with the output signal of the laser beam of the above-mentioned optics of the process section that measures at the second determination part that is arranged at above-mentioned optics section inside, thereby be adjusted at the output energy of the laser beam that above-mentioned laser section generates.
As mentioned above, the effect of structure provided by the invention is: in the technique of utilizing laser to deposit, repair, can make the output energy of desired laser beam remain consistent.
In addition, effect of the present invention also is: can easily determine the laser aid part that causes laser beam output energy to reduce,
In addition, effect of the present invention also is: when Laser Processing, can measure the output energy of laser beam in real time.
In addition, effect of the present invention also is: the output energy of laser beam occurs when unusual in the technique, can automatically adjust the output energy of laser beam, and then strengthens the reliability and stability of technique.
Description of drawings
Fig. 1 is the schematic diagram of existing laser output device.
Fig. 2 is the structural representation of the Laser output adjusting device shown in the embodiments of the invention.
Fig. 3 is the schematic diagram of on the first determination part the output energy of laser beam being measured shown in one embodiment of the invention.
Fig. 4 is the schematic diagram of on the second determination part the output energy of laser beam being measured shown in one embodiment of the invention.
Fig. 5 is the schematic diagram of the laser beam diffusion on scatterer shown in one embodiment of the invention.Reference numeral:
10,11,12,12 ': laser beam
20: substrate
100: laser section
200: optics section
300: processing department
310: the processing department analyzer
400: the first determination parts
410: the first beam splitters
420: overlay
500: the second determination parts
510: the second beam splitters
520: scatterer
530: charge-coupled device (CCD)
600: control part
The specific embodiment
Below, will illustrate the enforceable specific embodiment of the present invention and with reference to accompanying drawing, invention will be described in detail.For making industry personnel can fully implement the present invention, will be described in detail these embodiment.Though various embodiment of the present invention is different, does not repel each other.For example, the given shape of putting down in writing here, ad hoc structure is relevant with an embodiment with characteristic, and without departing from the spirit and scope of the present invention, also can be embodied by other embodiment.In addition, separately position or the configuration of the discrete structure part among the disclosed embodiment also can change without departing from the spirit and scope of the present invention.Therefore, aftermentioned describes in detail and the meaning of indefinite, as long as rationally explanation, scope of the present invention then only is defined in all scopes that the content advocated with its claim is equal to and additional claim.Similar with reference to the label multi-angle on the accompanying drawing, be identical in fact, have in other words similar function, and for simplicity, also might show turgidly length, area, thickness and the form of accompanying drawing illustrated embodiment.
Below, for making the technical staff who possesses general knowledge in the technical field of the invention, can both implement easily the present invention, be described with reference to the accompanying drawings most preferred embodiment of the present invention.
Laser output adjusting device provided by the present invention is not limited to the dim spot metallization processes etc. of defect repair process, depositing operation and the defective pixel of graphical technique, the circuit deposition of substrate or circuit cut-out etc., industry personnel can be applied to it according to ability in all spectra that uses laser output device.Below, to use Laser output adjusting device provided by the present invention as example in laser chemical vapor deposition method technique, be illustrated.
The formation of Laser output adjusting device:
Fig. 2 is the structural representation of the Laser output adjusting device shown in the embodiments of the invention.
With reference to Fig. 2, the laser output device shown in the embodiments of the invention is by laser section 100, optics section 200, and processing department 300, the first determination parts, 400, the second determination parts 500 and control part 600 consist of.
In addition, for example, laser section 100 can utilize several laser beams to enhance productivity, and this is well-known technology, so do not elaborate in this specification.The number of the laser beam that uses in the present embodiment can be carried out various changes according to the size of substrate size.In addition, the wavelength of all laser beams can be identical, also can use by process conditions the laser beam of different wave length.In addition, laser beam can send from laser generator (without diagram) separately, also can utilize suitable optical system (without diagram) and generate several laser beams by a laser generator.
The first determination part 400 is arranged between laser section 100 and the optics section 200.The first determination part 400 can be measured the output energy that is created on laser section 100 and shines the laser beam in the optics section 200, and it can comprise luminous energy is transformed into a kind of in the components of photo-electric conversion of electric energy, i.e. photodiode (photo diode).
The second determination part 500 can be arranged at the inside of optics section 200.500 pairs of the second determination parts are measured through optics section 200 and the output energy that shines the laser beam 10 on the processing department 300, and the first determination part 400 is same, also can comprise photodiode.
The mensuration of Laser output energy:
Fig. 3 is the schematic diagram of on the first determination part 400 the output energy of laser beam 11 being measured shown in the embodiments of the invention.
The first determination part 400 shown in one embodiment of the invention before the laser beam 10 that is created on laser section 100 shines optics section 200, can directly be measured the output energy of laser beam 10.
On the one hand, shown in other embodiment, the output energy of laser beam 10 can be at the first determination part 400 indirectly testings.Shown in Figure 3 is, the output energy of laser beam 10 is by beam splitter (beam splitter) 410 and overlay 420 reflections, and the schematic diagram of indirectly measuring at the first determination part 400.
With reference to Fig. 3, be provided with the first beam splitter 410 between laser section 100 and the optics section 200.
The first beam splitter 410 can separate the laser beam 10 through the first beam splitter 410.A part that is laser beam 10 is reflected by the first beam splitter 410, and remainder then shines optics section 200 by original path.If through the first beam splitter 410 separate and the output energy of the laser beam 11 that is reflected excessive, then the output energy of employed laser beam 10 will be too small on the technique, do not reach the present invention and keep all the time consistent purpose of laser beam 10, if the output energy of the laser beam 11 through separating and reflecting is too small, when then on the first analyzer 400, laser beam 11 being measured, it is large that error range can become, therefore, through separate and the output energy of the laser beam 11 of reflection account for whole output energy 1% to 2% the time for best.
In addition, between laser section 100 and optics section 200, except the first determination part 400 and the first beam splitter 410, also may comprise overlay 420.Overlay 420 reflexes on the first determination part 400 laser beam 11 through 410 separation of the first beam splitter and reflection again, and then makes the output energometry of 400 pairs of laser beams 11 of the first determination part become easy.The material of overlay 420 so long as material that can reflect beams of laser light 11 can use by without stint.For describing better, illustrate 420 parts that cover open side of overlay among Fig. 3, but the area that covers can utilize form and difference according to what invent.
Fig. 4 is the schematic diagram of on the second determination part 500 the output energy of laser beam 12 being measured shown in the embodiments of the invention.
As shown in Figure 4, second determination part 500 of one embodiment of the invention can be directly to shining optics section 200 from laser section 100 and measuring through the output energy of the laser beam 10 of optics section 200.
In addition, according to other embodiment, the output energy of laser beam 10 can come indirect determination by the second determination part 500.What Fig. 4 showed is, the output of laser beam 10 is after 510 reflections of the second beam splitter, through scatterer 520 and the schematic diagram that carries out indirect determination at the second determination part 500.
With reference to Fig. 4, be provided with the second beam splitter 510 in the optics section 200.
The second beam splitter 510 can separate the laser beam 10 by the second beam splitter 510.That is, part laser beam 10 is by 510 reflections of the second beam splitter, and remainder shines on the processing department 300 through optics section 200 by original path.If the output energy by the laser beam 12 of 510 separation of the second beam splitter and reflection is excessive, the output energy of employed laser beam 10 will be too small on the technique, do not reach so all the time consistent purpose of maintenance laser beam 11 of the present invention, if the output energy of the laser beam 12 through separating and reflecting is too small, when then on the first analyzer 500, laser beam being measured, it is large that error range can become, therefore, the output energy of the laser beam 12 of preferred separated and reflection accounts for 1% to 2% of whole output energy.
In addition, between the second determination part 500 and the second beam splitter 510, namely in the side of the second analyzer 500 scatterer (diffuser) 520 can be installed.The inside of optics section 200 can be provided with charge-coupled device (CCD:charge coupled device) 530, for preventing that the surface that reflexes to the second determination part 500 from the laser beam 12 that the second beam splitter 510 is separated to the second determination part 500 is mapped to charge-coupled device 530, installs scatterer 520.In addition, the effect of scatterer 520 is, can more critically measure the output energy of laser beam 12.
Fig. 5 is the schematic diagram of the laser beam diffusion on scatterer of one embodiment of the invention.
With reference to Fig. 5,, through scatterer 520 time, after scatterer 520 inside fully spread 12 ', shone on the surface of the second determination part 500 by the laser beam 12 of 510 separation of the second beam splitter and reflection.Because laser beam 10 is separated and reflection by the second separator 510, therefore, laser beam 12 has less output energy, evaluated error might occur, but the laser beam 12 ' through scatterer 520 is distributed on the surface of the second determination part 500 widely, thereby the degree of accuracy that can improve mensuration.
The size of scatterer 520 is preferably made according to the size of the second determination part 500, to cover the side of the second determination part 500 fully.In addition, the material of scatterer 520 can be vitreous silica (fused silica, FS).Vitreous silica has excellent optical property and resisting laser damage, therefore, and as being widely used based on the optical component in the optical system of laser.The one or both sides of scatterer 520 can be processed into every 1mm 240 sand (grit), so in use, and can be more obvious to the diffusion effect of laser beam 12.
In addition, the side that is installed into the second determination part 500 of preferred scatterer 520 is predetermined angular A.On the side of the second determination part 500, directly to install in the situation (when predetermined angular A is 0 °) of scatterer 520, laser beam 12 slightly reflects on scatterer 520 surfaces and is transferred on the charge-coupled device 530.For preventing the generation of this phenomenon, scatterer 520 preferably is installed into and is greater than 0 ° with the second determination part 500 sides and tilts less than 45 ° angle A, more preferably tilts 20 °.If scatterer 520 is installed with the angle A that surpasses 45 °, the output energy of the laser beam 12 of measuring through scatterer 520 and at the second determination part 500 might reduce.
The adjustment of Laser output energy:
Below, the process of laser output device provided by the present invention being adjusted in real time the Laser output energy is illustrated.
The user of Laser output adjusting device can be on the data input part (without diagram) of control part 600, and input will shine the output valve of the laser beam 10 on the substrate 20.Generation and the irradiation laser beam 10 consistent with the output valve of user's input in laser section 100.
Before laser beam 10 shines optics section 200, can be measured by 400 pairs of output of the first determination part energy.At this moment, if the output energy of the laser beam 11 of being measured by the first determination part is less than the output energy of the laser beam 10 of user's input, namely do not have to generate the laser light velocity with the output energy equivalence of the laser beam of setting at laser beam 100, and then can determine that problem has appearred in laser section 100.Therefore, after the output energy of the laser beam 11 of measuring on 600 pairs of the first determination parts 400 of control part compares with the output energy that presets (user's input) laser beam 10, if the output energy of laser beam 11 is less than the output energy of laser beam 10, the display part of control part 600 (without diagram) show laser section 100 exist unusual in, the output energy of the laser beam 10 that raising generates in laser section 100 is with the output energy that is adjusted to the laser beam 11 of measuring on the first determination part 400 and the output energy coincidence of predefined laser beam 10.On the one hand, if further be provided with the first beam splitter 410,1% to 2% of the output energy of laser beam 10 can reflex on the first determination part 400, and therefore, control part 600 should be considered this point, does computing again.
Lift an example explanation, what the user inputted is the energy of laser beam 10 output 100J, but in the first determination part 400 mensuration are 11 energy that possess 90J of laser beam, control part 600 display part (without diagram) demonstration laser section 100 exist unusual in, transmit signal to laser section 100, make the energy of laser beam 10 output 110J, and adjust the energy that makes the laser beam 11 of measuring on the first determination part 400 possess 100J.
Next, the laser beam 10 of process optics section 200 was measured by 500 pairs of output of the second determination part energy before exposing to substrate 20 by processing department 300.At this moment, if the laser beam 10 that the output energy of the laser beam 12 of measuring at the second determination part 500 is inputted less than the user, think that then laser beam 10 output energy through optics section 200 time reduces, and can determine that problem has appearred in the laser beam path of optics section 200 inside.It is the signal that control part 600 receives the first determination part 400 and the second determination part 500, when the output energy of the laser beam 11 of measuring at the first analyzer 400 and the output energy coincidence of predefined laser beam 10, and the output energy of the laser beam 12 of measuring on the second determination part 500 is during less than the output energy of predefined laser beam 10, should be that laser section 100 does not exist unusually, and optics section 200 has unusually, therefore, the upper display light department of the Chinese Academy of Sciences 200 of the display part of control part 600 (without diagram) exist unusual in, the output energy of the laser beam 10 that raising generates in laser section 100, and be adjusted to the output energy of the laser beam 12 of measuring at the second analyzer 500 and the output energy coincidence of predefined laser beam 10.In addition, if further be provided with the second beam splitter 510, only have 1% to 2% to reflex on the second determination part 500 in the output energy because of laser beam 10, control part 600 needs the consideration this point to do computing again.
Lift an example explanation, what the user inputted is the energy of laser beam 10 output 100J, but in the first determination part 400 mensuration are energy that laser beam 11 possesses 100J, and 12 energy that possess 90J of laser beam of measuring on the second determination part 500, then control part 600 display part (without diagram) show laser section 100 without unusually and optics section 200 have unusual in, transmit signal to laser section 100, make the energy of laser beam 10 output 110J, thereby be adjusted to the energy that the laser beam 12 of measuring on the second determination part 500 possesses 100J.
As mentioned above, the present invention is on the technique of using laser, but the real time measure Laser output energy, make desired laser beam output energy remain consistent, and determine more easily the laser aid part that causes problem to occur, and automatically adjust the output energy of laser beam, the effectively reliability and stability of strengthening process.
In sum, be described in detail in conjunction with most preferred embodiment and accompanying drawing, but not as limit, all technical staff who possesses general knowledge in the technical field of the invention all can in the scope that does not break away from spirit of the present invention, carry out various distortion and change.These variation and change example all are counted as being included within the present invention and the claim scope.
Claims (12)
1. a Laser output adjusting device is characterized in that, comprising:
Laser section generates laser beam;
Optics section provides the path of described laser beam process;
Processing department makes laser beam irradiation through described optics section to substrate;
The first determination part is arranged between described laser section and the described optics section, measures the output energy of the laser beam that is created on described laser section;
The second determination part is arranged at the inside of described optics section, measures the output energy through the laser beam of described optics section;
Control part receives the output signal of the laser beam of being measured by described the first determination part and described the second determination part, passes the signal to described laser section, thereby adjusts the output energy of the laser beam that is created on described laser section.
2. Laser output adjusting device according to claim 1 is characterized in that:
When the output energy of the laser beam of being measured by described the first determination part during less than the output energy of predefined laser beam, when described control part shows that described laser section goes wrong, output energy to the laser beam that is created on described laser section is adjusted, so that the output energy of the laser beam that described the first determination part is measured and the output energy coincidence of described predefined laser beam
When the output energy of the laser beam of being measured by described the first determination part and the output energy coincidence of described predefined laser beam, and the data of the laser beam of being measured by described the second determination part are during less than the output energy of described predefined laser beam, when described control part shows that described optics section goes wrong, output energy to the laser beam that is created on described laser section is adjusted, so that the output energy of the laser beam that described the second determination part is measured and the output energy coincidence of described predefined laser beam.
3. Laser output adjusting device according to claim 1 is characterized in that, also comprises:
The first beam splitter, this first beam splitter are installed between described laser section and the described optics section, for separating of the laser beam that is created on described laser section.
4. Laser output adjusting device according to claim 3 is characterized in that:
The laser beam that described the first beam splitter separates account for the laser beam that is created on described laser section the output energy 1% to 2%.
5. Laser output adjusting device according to claim 3 is characterized in that, also comprises:
Overlay is used for the isolated laser beam of described the first beam splitter is reflexed to described the first determination part.
6. Laser output adjusting device according to claim 1 is characterized in that, also comprises:
It is inner that the second beam splitter, this second beam splitter are arranged at described optics section, and the laser beam through described optics section is separated.
7. Laser output adjusting device according to claim 6 is characterized in that:
The laser beam that described the second beam splitter separates accounts for through 1% to 2% of the output energy of the laser beam of described optics section.
8. Laser output adjusting device according to claim 1 is characterized in that:
Side at described the second determination part is equipped with scatterer.
9. Laser output adjusting device according to claim 8 is characterized in that:
Described scatterer is installed into, and is greater than 0 ° with the side of the second determination part and tilts less than 45 ° angle.
10. according to claims 9 described Laser output adjusting devices, it is characterized in that:
The material of described scatterer is vitreous silica.
11. a Laser output method of adjustment is characterized in that:
The output signal of the laser beam of the described optics of the process section that will measure by the output signal of the laser beam of the described laser of being created on of measuring of the first determination part section and by the second determination part is sent to described laser section, thereby the output energy to the laser beam that is created on described laser section is adjusted, wherein, described the first determination part is arranged between the optics section in the laser section that generates laser beam and the path that the laser beam process is provided, and described the second determination part is arranged on described optics section inside.
12. Laser output method of adjustment according to claim 11 is characterized in that:
When the output energy of the laser beam of being measured by described the first determination part during less than the output energy of predefined laser beam, show the described in-problem while of laser section at described control part, the laser beam that is created on described laser section is adjusted, so that the output energy of the laser beam of being measured by described the first determination part and the output energy coincidence of described predefined laser beam
When the output energy of the laser beam of being measured by described the first determination part and the output energy coincidence of described predefined laser beam, and the data of the laser beam of being measured by described the second determination part are during less than the output energy of described predefined laser beam, when described control part shows that described optics section goes wrong, output energy to the laser beam that is created on described laser section is adjusted, so that the output energy of the laser beam that described the second determination part is measured and the output energy coincidence of described predefined laser beam.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110098501A KR20130034474A (en) | 2011-09-28 | 2011-09-28 | Device for controlling laser output and method thereof |
| KR10-2011-0098501 | 2011-09-28 |
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| Publication Number | Publication Date |
|---|---|
| CN103028840A true CN103028840A (en) | 2013-04-10 |
| CN103028840B CN103028840B (en) | 2015-11-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210361905.2A Active CN103028840B (en) | 2011-09-28 | 2012-09-25 | Laser output adjusting device and method |
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| KR (1) | KR20130034474A (en) |
| CN (1) | CN103028840B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113649694A (en) * | 2021-08-12 | 2021-11-16 | 武汉逸飞激光股份有限公司 | Welding method for current collector of cylindrical battery |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6067306A (en) * | 1997-08-08 | 2000-05-23 | Cymer, Inc. | Laser-illuminated stepper or scanner with energy sensor feedback |
| US20010042840A1 (en) * | 2000-03-16 | 2001-11-22 | Uwe Stamm | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser |
| CN1596492A (en) * | 2001-11-30 | 2005-03-16 | 西默股份有限公司 | Timing control for two-chamber gas discharge laser system |
| US6970492B2 (en) * | 2002-05-17 | 2005-11-29 | Lambda Physik Ag | DUV and VUV laser with on-line pulse energy monitor |
| US20050279946A1 (en) * | 2003-04-08 | 2005-12-22 | Cymer, Inc. | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source |
| CN1886872A (en) * | 2003-11-26 | 2006-12-27 | Tcz股份有限公司 | Laser thin film poly-silicon annealing system |
-
2011
- 2011-09-28 KR KR1020110098501A patent/KR20130034474A/en not_active IP Right Cessation
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- 2012-09-25 CN CN201210361905.2A patent/CN103028840B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6067306A (en) * | 1997-08-08 | 2000-05-23 | Cymer, Inc. | Laser-illuminated stepper or scanner with energy sensor feedback |
| US20010042840A1 (en) * | 2000-03-16 | 2001-11-22 | Uwe Stamm | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser |
| CN1596492A (en) * | 2001-11-30 | 2005-03-16 | 西默股份有限公司 | Timing control for two-chamber gas discharge laser system |
| US6970492B2 (en) * | 2002-05-17 | 2005-11-29 | Lambda Physik Ag | DUV and VUV laser with on-line pulse energy monitor |
| US20050279946A1 (en) * | 2003-04-08 | 2005-12-22 | Cymer, Inc. | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source |
| CN1886872A (en) * | 2003-11-26 | 2006-12-27 | Tcz股份有限公司 | Laser thin film poly-silicon annealing system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113649694A (en) * | 2021-08-12 | 2021-11-16 | 武汉逸飞激光股份有限公司 | Welding method for current collector of cylindrical battery |
| CN113649694B (en) * | 2021-08-12 | 2024-02-27 | 武汉逸飞激光股份有限公司 | Welding method for cylindrical battery current collector |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103028840B (en) | 2015-11-04 |
| KR20130034474A (en) | 2013-04-05 |
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