Search Images Maps Play YouTube News Gmail Drive More »
Sign in
Screen reader users: click this link for accessible mode. Accessible mode has the same essential features but works better with your reader.

Patents

  1. Advanced Patent Search
Publication numberCN103028840 A
Publication typeApplication
Application numberCN 201210361905
Publication date10 Apr 2013
Filing date25 Sep 2012
Priority date28 Sep 2011
Also published asCN103028840B
Publication number201210361905.2, CN 103028840 A, CN 103028840A, CN 201210361905, CN-A-103028840, CN103028840 A, CN103028840A, CN201210361905, CN201210361905.2
Inventors郑薰, 尹星进, 金俊来, 李伦在, 金铉洙, 池泳洙
Applicant灿美工程股份有限公司
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
Device for adjusting laser output and method thereof
CN 103028840 A
Abstract
The present invention relates to a device for adjusting laser output and a method thereof, wherein the device for adjusting laser output comprises a laser unit (100) generating laser beam (10); an optical unit (200) providing a laser beam path (10); a machining unit (300) irradiating the laser beam passing through the optical unit (200) to a substrate (20); a first measuring unit (400) arranged between the laser unit (100) and the optical unit (200) and used for measuring the output energy of the laser beam (10) of the laser unit (100); a second measuring unit (500) arranged inside the optical unit (200) and measuring the output energy of the laser beam (10) passing through the optical unit (200); a control unit (600) receiving the output signals of the laser beam measured by the first measuring unit (400) and the second measuring unit (500) and transmitting the signals to the laser unit (100), in order to adjust the output energy of the laser beam (10) generated at the laser unit (100).
Claims(12)  translated from Chinese
1. 一种激光输出调整装置,其特征在于,包括: 激光部,生成激光光束; 光学部,提供所述激光光束经过的路径; 加工部,使经过所述光学部的激光光束照射到基板上; 第一測定部,设置于所述激光部与所述光学部之间,測定生成于所述激光部的激光光束的输出能量; 第二測定部,设置于所述光学部的内部,测定经过所述光学部的激光光束的输出能量; 控制部,接收由所述第一測定部和所述第二測定部測定的激光光束的输出信号,将信号传送到所述激光部,从而调整生成于所述激光部的激光光束的输出能量。 A laser output adjusting means, characterized by comprising: a laser unit for generating a laser beam; an optical unit providing a path through which the laser beam; processing unit, so that after a laser beam is irradiated onto the optical portion of the substrate ; first measurement section, disposed between the laser portion and the optical portion, measured at the laser beam generating portion of the laser output power; second measuring section, provided inside the optical unit, after measurement the output energy of the laser beam of the optical portion; the control unit, is received by the first measurement unit and the second measurement unit measuring the output signal of the laser beam, the signal is transmitted to the laser unit, thereby to generate adjusted The output energy of the laser beam laser unit.
2.根据权利要求1所述的激光输出调整装置,其特征在于: 当由所述第一測定部測定的激光光束的输出能量小于预先设定的激光光束的输出能量时,在所述控制部显示所述激光部出现问题的同时,对生成于所述激光部的激光光束的输出能量进行调整,以使所述第一測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致, 当由所述第一測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致,而由所述第二測定部測定的激光光束的数据小于所述预先设定的激光光束的输出能量时,在所述控制部显示所述光学部出现问题的同时,对生成于所述激光部的激光光束的输出能量进行调整,以使所述第二測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致。 The laser output adjustment apparatus according to claim 1, characterized in that: when the output power measured by the first measuring portion of the laser beam is smaller than the pre-set output energy of the laser beam when the control unit The problem of simultaneously displaying a laser unit for generating a laser beam to the portion of the laser output energy is adjusted so that the output power of the first measurement unit measuring laser beam with the predetermined laser beam consistent energy output, when the output power of the output by the first measurement unit measuring a laser beam of a predetermined uniform laser beam energy, and the measurement by the second measuring section of the laser beam is less than the data when said output energy of the laser beam is preset in the control unit of the display unit while the optical problems, for generating a laser beam to the laser output energy portion is adjusted, so that the second measurement consistent output energy of the laser beam energy of the laser beam output section of the measuring preset.
3.根据权利要求1所述的激光输出调整装置,其特征在于,还包括: 第一射束分离器,该第一射束分离器被安装在所述激光部和所述光学部之间,用于分离生成于所述激光部的激光光束。 3. The laser output adjustment apparatus according to claim 1, characterized by further comprising: a first beam splitter, the first beam splitter is mounted between the laser portion and the optical portion, generating a laser beam for separating the laser unit.
4.根据权利要求3所述的激光输出调整装置,其特征在于: 所述第一射束分离器分离的激光光束占生成于所述激光部的激光光束的输出能量的1% 至2% o The laser output adjusting device according to claim 3, wherein: said first beam splitter for separating the laser beam 1% of the laser beam generated in the laser portion of the output energy to 2% o
5.根据权利要求3所述的激光输出调整装置,其特征在于,还包括: 覆盖板,用于将所述第一射束分离器分离出的激光光束反射到所述第一測定部。 5. The laser output adjusting device according to claim 3, characterized in that, further comprising: a cover plate, means for separating the first beam splitter reflecting the laser beam to the first measurement unit.
6.根据权利要求1所述的激光输出调整装置,其特征在于,还包括: 第二射束分离器,该第二射束分离器设置于所述光学部内部,并对经过所述光学部的激光光束进行分离。 6. The laser output adjustment apparatus according to claim 1, characterized by further comprising: a second beam splitter, the second beam splitter disposed inside the optical unit, the optical unit and through The laser beam is separated.
7.根据权利要求6所述的激光输出调整装置,其特征在于: 所述第二射束分离器分离的激光光束占经过所述光学部的激光光束的输出能量的1%至2%。 7. The laser output adjusting means according to claim 6, wherein: said second beam splitter after accounting for separating the laser beam of the laser beam of the optical portion of the output energy from 1 to 2%.
8.根据权利要求1所述的激光输出调整装置,其特征在于: 在所述第二測定部的侧面安装有散射器。 8. The laser output adjustment apparatus according to claim 1, wherein: said second side surface of the measuring portion is mounted diffuser.
9.根据权利要求8所述的激光输出调整装置,其特征在于: 所述散射器被安装成,与第二測定部的侧面呈大于0且小于45的角度傾斜。 9. The laser output adjustment apparatus according to claim 8, wherein: said diffuser is mounted, is greater than 0 and smaller than 45 angle with the side of the second measuring section is inclined.
10.根据权利要求书9所述的激光输出调整装置,其特征在于:所述散射器的材质为熔融石英。 10. The laser output adjusting means 9 according to the claims, wherein: said diffuser material is fused silica.
11. 一种激光输出调整方法,其特征在干: 将由第一測定部測定的生成于所述激光部的激光光束的输出信号以及由第二測定部測定的经过所述光学部的激光光束的输出信号传送至所述激光部,从而对生成于所述激光部的激光光束的输出能量进行调整,其中,所述第一測定部设置在生成激光光束的激光部与提供激光光束经过的路径的光学部之间,所述第二測定部设置在所述光学部内部。 11. A method of adjusting the laser output, characterized in that dry: measured by the first measurement unit generates the output signal of the laser beam by the laser unit and the laser measurement unit through the second measurement of the optical portion of the beam output signal to the laser unit, thereby generating a laser beam of the laser unit to adjust the energy output, wherein the first measurement portion provided in the laser generating a laser beam and providing a laser beam through the portion of the path between the optical unit, the second measuring portion is disposed inside the optical unit.
12.根据权利要求11所述的激光输出调整方法,其特征在于: 当由所述第一測定部測定的激光光束的输出能量小于预先设定的激光光束的输出能量时,在所述控制部显示所述激光部存在问题的同时,对生成于所述激光部的激光光束进行调整,以使由所述第一測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致, 当由所述第一測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致,而由所述第二測定部測定的激光光束的数据小于所述预先设定的激光光束的输出能量时,在所述控制部显示所述光学部出现问题的同时,对生成于所述激光部的激光光束的输出能量进行调整,以使所述第二測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致。 12. The laser output adjusting method according to claim 11, wherein: when the output power measured by the first measuring portion of the laser beam is smaller than the pre-set output energy of the laser beam when the control unit The problem of simultaneously displaying a laser unit for generating laser light to the portion of the laser beam is adjusted, so that by the first measuring unit measuring laser beam with the output energy of the laser beam of a predetermined output consistent energy, when the output power measured by the first measuring portion of the laser beam with the predetermined laser light output energy is consistent, and the measurement by the second measuring section of the laser beam is smaller than the pre-data When setting the output energy of the laser beam, at the same time, the display control unit of the optical unit in question, to generate a laser beam to the portion of the laser output energy is adjusted such that the second measuring unit measuring output energy of the laser beam coincides with the preset laser beam output power.
Description  translated from Chinese

激光输出调整装置及方法技术领域[0001] 本发明涉及一种激光输出调整装置及方法。 Laser output adjusting device and method TECHNICAL FIELD [0001] The present invention relates to an apparatus and method for adjusting the laser output. 具体为,通过由第一测定部和第二测定部对在激光部生成的激光光束进行测定,可容易地对照射在基板上的激光光束的输出能量进行调整的激光输出调整装置及方法。 Specifically, by adjusting the laser output measuring apparatus and method of the first portion and the second portion of the laser measurement unit generates a laser beam was measured, the energy output can be easily irradiated with laser beam on the substrate adjusted. 背景技术[0002] 近年来,随着平板显示器装置,尤其是在液晶显示器(LCD)的需求的增加和大型化的趋势,其应用程度、尺寸增大及分辨率增加的速度也在加快,且为提高生产效率并实现价格的低廉化,在简化制造工艺和提高收益率方面付出了很多努力。 [0002] In recent years, along with a flat panel display device, particularly an increase in the trend and large liquid crystal display (LCD) requirements, the application level, increase in the size and resolution of the rate of increase is accelerating, and In order to improve productivity and achieve the low prices of, in simplifying the manufacturing process and improve the rate of return paid a lot of effort. 液晶显示器的基本结构, 由形成有黑色矩阵、彩色滤光膜和共同电极的上部基板,及形成有像素区域、像素电极、开关元件和线路的下部基板,以及填充于所述上部基板和下述基板之间的液晶所构成。 The basic structure of a liquid crystal display, a black matrix is formed, the upper substrate color filter and a common electrode and a pixel region is formed, the lower portion of the pixel electrode substrate, and the circuit switching element, and the upper substrate and filled in the following composed of liquid crystal between the substrates. [0003] 这种在下部基板上形成的结构组成成分,导致在制造工艺中出现线路的断线或短路等不良现象,且随图像元件显示面积的大型化,这种缺陷也越来越多,因此,为提高液晶显示器的质量和稳定性,需要可消除这些缺陷的修补(R印air)技术。 [0003] This structure is formed on the lower substrate composition, line break or short circuit resulting in other negative phenomena in the manufacturing process, and with the picture elements of the display area of large-scale, more and more of this defect, Therefore, in order to improve the quality and stability of liquid crystal displays, the need to eliminate these defects repair (R India air) technology. [0004] 一直备受瞩目的修补技术是,具备修补用的备用线路,在发生缺陷时,连接备用线路对断线进行修补的方法,但若修补线路过长时,信号水平会因线路电阻值而降低,从而对液晶面板的动作特性产生不利影响。 [0004] has been highly anticipated repair technique is used with the patch backup line in the event of defects, the spare line connection method for repairing broken, but if the line is too long when the repair, the signal level due to line resistance value reduced, thereby adversely affecting the operating characteristics of the liquid crystal panel. [0005] 因此,最近较受欢迎的是使用激光化学气相沉积法的修补线路法。 [0005] Therefore, the recent more popular is the use of laser chemical vapor deposition method of repair line. 即,基本上是采用在发现缺陷时,利用激光来切断缺陷部位的某一部位,并通过化学气相沉积法来沉积修补线路并形成图案的方法,或是在线路断线时,通过激光化学气相沉积法(Laser CVD)沉积金属,从而使断开的线路电连接的方式,进而完成修补作业。 That is, which is basically when a defect is discovered, using a laser to cut off the defective portion of a site, and the repair line is deposited by chemical vapor deposition method and the method for forming a pattern, or a break in the line, by laser chemical vapor Deposition (Laser CVD) deposition of metal, so that the line is connected electrically disconnected, and then complete the repair job. 这种激光化学气相沉积法修补方法的优点在于,断线时可立即在断线部位按所期望的形状生长金属线路,其修补工艺简单,且可进行包括光栅线路和数据线路在内的各种修补作业。 The advantage of this laser chemical vapor deposition method of repair that is disconnected immediately broken parts in a desired shape by growth of the metal line, which repair process is simple, and can include a variety of raster lines and data lines, including repair work. 而且,激光化学气相沉积法不仅可修补基板的缺陷,还可用于微细线路的沉积工艺。 Moreover, the laser chemical vapor deposition method can not only repair the defective substrate, the deposition process can be used to fine lines. [0006] 参照图1,现有的激光化学气相沉积法装置中,在激光部100生成的激光光束10经过光学部200,在从加工部300照射到基板20的过程中,由加工部测定器310对其输出值进行测定。 [0006] Referring to FIG. 1, a conventional laser chemical vapor deposition apparatus, the laser unit 100 generates a laser beam 10 through the optical unit 200, the processing unit 300 in the process from the exposure to the substrate 20, the processing unit by the measuring device 310 its output value is measured. 但激光光束10输出能量减少的现象发生时,则很难判断造成激光光束10输出能量减少的部位。 However, the laser beam 10 output energy reduction is occurring, it is difficult to judge the cause of the laser beam 10 output energy reduction site. 另外,还存在难以将减少的激光光束的输出能量重新调整所需强度的难题。 In addition, there is also difficult to reduce the energy of the laser beam output intensity required readjustment problems. [0007] 另外,除了激光化学气相沉积法装置之外,对切断发生短路的不良线路对缺陷进行修补的一般激光装置,及用激光照射显示器的缺陷像素使其暗点化后对缺陷进行修补的高像素修补(HPR)装置等来说,准确保持使用者所期望的激光输出强度,在确保工艺可再现性和稳定性方面,尤为重要。 [0007] Further, in addition to laser chemical vapor deposition apparatus, a short circuit cut off for bad line of conventional laser device defect repair, and defect pixel so that after dark enchant repair a defect display of laser irradiation Patch for high resolution (HPR) device or the like, the user desires to maintain an accurate laser output intensity, in the process to ensure stability and reproducibility, is particularly important. 发明内容[0008] 因此,本发明旨在解决上述现有技术存在的各种问题,目的在于提供一种在激光的沉积和修补工艺中,使激光光束的输出能量始终保持一致的激光输出调整装置及方法。 [0008] Accordingly, the present invention is directed to solving the above problems of the prior art, the aim of the laser output adjustment means to provide a deposition and laser repair process, the laser beam output power is always consistent and methods. [0009] 此外,本发明的目的还在于,提供一种能够容易识别出造成激光光束输出能量减少的激光装置组成部分的激光输出调整装置及方法。 [0009] Further object of the present invention is to provide a way to easily identify the cause of the reduction in the laser beam output power of the laser part of the laser output adjusting device and method. [0010] 另外,本方明的目的还在于,提供一种在激光加工时,可实时对激光光束的输出能量进行测定的激光输出调整装置及方法。 [0010] Another object of the invention lies in the party, to provide a laser processing, real-time output laser energy of the laser beam output adjustment apparatus and method for assay. [0011] 还有,本发明的目的在于,提供一种在工艺中激光光束的输出能量出现异常时,可自动调整激光光束的输出能量,以增强工艺可靠性和稳定性的激光输出调整装置及方法。 [0011] Still another object of the present invention is to provide an output power of the laser beam in the process of abnormal, can automatically adjust the output energy of the laser beam, the laser output adjusting means to enhance process reliability and stability and Methods. [0012] 为达到上述目的,本发明提供的激光输出调整装置的特点在于,包括:激光部,生成激光光束;光学部,提供上述激光光束所经过的路径;加工部,使经过上述光学部的激光光束照射到基板上;第一测定部,设置于上述激光部与上述光学部之间,用于测定在上述激光部生成的激光光束的输出能量;第二测定部,设置于上述光学部内,用于测定经过上述光学部的激光光束的输出能量;控制部,接收由上述第一测定部和上述第二测定部测定的激光光束的输出信号,将信号传送到上述激光部,从而调整在上述激光部生成的激光光束的输出能量。 [0012] To achieve the above object, the laser output characteristic adjusting means of the present invention is provided comprising: a laser unit for generating a laser beam; an optical unit, provided above the path through which the laser beam; processing unit, so that the optical portion via a laser beam is irradiated onto the substrate; a first measuring section, provided between the laser section and the optical portion, for measuring the energy output of the laser unit generates a laser beam; a second measuring section, provided inside the optical unit, After the laser beam is used to determine the portion of the optical output power; control unit, received by the first measurement unit and the second measuring unit measuring the output signal of the laser beam, the signal is transmitted to the laser unit, thereby adjusting the above the output energy of the laser unit generates a laser beam. [0013] 另外,为达到上述目的,本发明的激光输出调整方法的特点在于,在生成激光光束的激光部和提供激光光束所经过的路径的光学部之间设置第一测定部,并将在第一测定部上测定的在上述激光部生成的激光光束的输出信号,和在设置于上述光学部内部的第二测定部所测定的经过上述光学部的激光光束的输出信号发送至上述激光部,从而调整在上述激光部生成的激光光束的输出能量。 [0013] In addition, in order to achieve the above object, a method of adjusting the laser output characteristics of the present invention is disposed between the first measurement unit generates a laser beam of a laser unit and optical unit providing a laser beam path through, and will in measuring the first measurement portion is sent to the laser unit in the laser unit generates a laser beam output signals, and the output portion of the optical signal through the laser beam in the optical portion disposed inside said second measuring section measured , thereby adjusting the output energy of the laser beam generated by the laser unit. [0014] 如上所述,本发明提供的结构的效果在于:在利用激光进行沉积、修补的工艺中, 可使所期望的激光光束的输出能量始终保持一致。 [0014] As described above, the effect of the present invention provides a structure comprising: using laser deposition repair process, allows a desired output of the laser beam energy is always consistent. [0015] 此外,本发明的效果还在于:可容易地确定出造成激光光束输出能量减少的激光装置组成部分,[0016] 另外,本发明的效果还在于:在激光加工时,可实时对激光光束的输出能量进行测定。 [0015] In addition, the effect of the present invention is: You can easily determine the cause of the laser beam output energy reduction part of a laser device, [0016] In addition, the effect of the present invention is further characterized by: In the laser processing, real-time laser The output beam energy is measured. [0017] 此外,本发明的效果还在于:工艺中激光光束的输出能量出现异常时,可自动调整激光光束的输出能量,进而增强工艺的可靠性和稳定性。 [0017] In addition, the effect of the present invention is further characterized by: the output power of the laser beam process is abnormal, it can automatically adjust the output energy of the laser beam, thus enhancing the reliability and stability of the process. 附图说明[0018] 图1为现有的激光输出装置的示意图。 BRIEF DESCRIPTION OF DRAWINGS [0018] Figure 1 is a schematic view of a conventional laser output unit. [0019] 图2为本发明的实施例所示的激光输出调整装置的结构示意图。 Schematic diagram of the laser output adjustment apparatus embodiment [0019] FIG. 2 is a schematic of the example shown. [0020] 图3为本发明的一实施例所示的在第一测定部上对激光光束的输出能量进行测定的示意图。 On the first measurement unit of output energy of the laser beam is measured schematic diagram of one embodiment of the [0020] FIG. 3 embodiment of the present invention shown in FIG. [0021] 图4为本发明的一实施例所示的在第二测定部上对激光光束的输出能量进行测定的示意图。 On the second measurement unit output energy of the laser beam is a schematic view of an embodiment of the measurement [0021] Figure 4 embodiment of the present invention shown in Fig. [0022]图5为本发明的一实施例所示的在散射器上的激光光束扩散的示意图。 Laser on the diffuser, according to an embodiment [0022] FIG. 5 embodiment of the present invention shown in the schematic beam spread. 附图标记:[0023] 10、11、12、12,:激光光束[0024] 20 :基板[0025] 100 :激光部[0026] 200 :光学部[0027] 300 :加工部[0028] 310 :加工部测定器[0029] 400 :第一测定部[0030] 410 :第一射束分离器[0031] 420 :覆盖板[0032] 500 :第二测定部[0033] 510 :第二射束分离器[0034] 520 :散射器[0035] 530 :电荷耦合器(CXD)[0036] 600 :控制部具体实施方式[0037] 下面,将举例说明本发明可实施的特定实施例并参照附图,对发明作以详细说明。 Numerals: [0023] 10,11,12,12 ,: laser beam [0024] 20: a substrate [0025] 100: Laser unit [0026] 200: Optical unit [0027] 300: the processing unit [0028] 310: processing of the measuring device [0029] 400: the first measurement unit [0030] 410: The first beam splitter [0031] 420: the cover plate [0032] 500: the second measurement unit [0033] 510: The second beam splitter is [0034] 520: diffuser [0035] 530: charge-coupled device (CXD) [0036] 600: controller DETAILED DESCRIPTION [0037] Hereinafter, specific examples of the present invention may be implemented embodiments and with reference to the accompanying drawings, of the invention will be described in detail. 为使本行业人员能够充分实施本发明,将对这些实施例作以详细说明。 In order for this industry to take full embodiment of the present invention, it will be made to these embodiments described in detail. 本发明的各种实施例虽有所不同,但相互之间并不排斥。 Various embodiments of the present invention, although different, but not mutually exclusive. 例如,这里所记载的特定形状,特定结构和特性与一实施例相关,且在不脱离本发明精神和范围的情况下,也可由其他的实施例来体现。 For example, a particular shape, structure and specific features herein described and related to one embodiment, and without departing from the spirit and scope of the present invention, other embodiments can also be embodied. 另外, 各自公开的实施例中的个别结构组成部分的位置或配置,在不脱离本发明精神和范围的情况下也可进行变动。 In addition, the position of each disclosed embodiment or the configuration of the individual elements of the structure, without departing from the spirit and scope of the invention can also be changed. 因此,后述详细说明并无限定之意,只要合理说明,本发明的范围则仅限定于与其权利要求所主张的内容等同的所有范围以及附加的权利要求。 Therefore, the above description is not intended to define the details as long as reasonable, the scope of the present invention is only limited scope and the appended claims all its claims to stand for the content equivalent requirements. 附图上相似的参照标号多角度而言,其实是相同的,或者说具有相似的功能,且为方便起见,也有可能会夸张地表现附图所示实施例的长度、面积、厚度及形态。 Drawings like reference numerals on more perspective, in fact, is the same, or have similar functions, and for convenience, there may be an exaggeration to show the length, size, thickness and shape of the embodiment shown in the drawings. [0038] 下面,为使具备本发明所属技术领域内一般知识的技术人员,都能够轻而易举地实施本发明,结合附图详细说明本发明的最佳实施例。 [0038] Next, in order to have ordinary skill in the art to which this invention is general knowledge in the art, are able to easily implement the present invention, with reference detailed description of preferred embodiments of the present invention. [0039] 本发明所提供的激光输出调整装置并不限定于基板的图形化工艺、线路沉积或线路切断等的缺陷修补工艺、沉积工艺和不合格像素的暗点化工艺等,本行业人员在使用激光输出装置的所有领域内,可根据能力对其加以应用。 [0039] laser output adjustment apparatus of the present invention provides a patterning process is not limited to the substrate, deposition or line defects such as line disconnection repair process, the deposition process and fail to enchant technology and other dark pixels, the staff in the industry all areas of laser output device can be applied according to their ability. 以下,以在激光化学气相沉积法工艺上使用本发明所提供的激光输出调整装置为例,加以说明。 The following, in order to use the laser output adjustment apparatus of the present invention provides the laser chemical vapor deposition process, for example, will be described. [0040] 激光输出调整装置的构成:[0041] 图2为本发明的实施例所示的激光输出调整装置的结构示意图。 Schematic diagram of the laser output adjustment device [0041] FIG. 2 embodiment of the present invention shown in: [0040] the laser output adjusting means constituted. [0042] 参照图2,本发明的实施例所示的激光输出装置由激光部100,光学部200,加工部300,第一测定部400,第二测定部500和控制部600构成。 [0042] Referring to Figure 2, the illustrated embodiment of the present invention means a laser output portion 100 constituted by a laser, the optical unit 200, the processing unit 300, a first measuring section 400, the second measuring section 500 and the control unit 600. [0043] 激光部100生成激光光束10,例如可生成Nd = YAG激光或二极管激光并照射到光学部200上。 [0043] Laser unit 100 generates a laser beam 10, for example, generate Nd = YAG laser or a laser diode and is irradiated onto the optical portion 200. 此外,激光部100接收由控制部600传送的信号,对生成的激光光束10的输出进行调整。 In addition, the laser unit 100 is received by the signal transmission control unit 600, the output of the generated laser beam 10 is adjusted. [0044] 此外,例如,激光部100可利用若干个激光光束提高生产效率,这是众所周知的技术,故在本说明书内不做详细说明。 [0044] In addition, for example, the laser unit 100 may use a number of laser beams to improve production efficiency, it is well known technology, it described in detail in this specification do. 本实施例中使用的激光光束的个数可根据基板尺寸的大小进行各种变动。 The number of cases of the laser beam used in this embodiment can be variously change according to the size of the board size. 另外,所有的激光光束的波长可相同,也可按工艺条件来使用不同波长的激光光束。 In addition, the wavelength of the laser beam can be all the same, in accordance with conditions to use different wavelengths of laser beams. 此外,激光光束可从各自的激光发生器(无图示)发出,也可利用合适的光学系(无图示)并由一个激光发生器生成若干个激光光束。 In addition, the laser beam can be emitted from the respective laser generator (not shown) may also be using a suitable optical system (not shown) by a laser generator generates a plurality of laser beams. [0045] 光学部200设置于激光部100和加工部300之间,可提供激光光束10所经过的路径。 [0045] The optical unit 200 is disposed between the laser unit 100 and processing unit 300 may be provided through which the laser beam path 10. 另外,聚焦激光光束10以形成焦点。 In addition, 10 to form a focused laser beam focus. 这时,根据聚焦强度,角度,聚焦效率等,有可能利用一个或若干个光学系(无图示)。 In this case, according to the focusing strength, angle, focus and efficiency, it is possible to use one or several optical system (not shown). [0046] 加工部300可使经过光学部200的激光光束10照射到基板20上。 [0046] The processing unit 300 may go through a laser beam optical unit 200 of 10 irradiated to the substrate 20. 激光光束10 从加工部300照射到基板20上,可修补基板20的缺陷,还能在激光光速的照射部位进行微细线路的沉积。 The laser beam 10 from the processing unit 300 is irradiated onto the substrate 20, the substrate 20 can repair the defect, but also the speed of light in a laser irradiated parts of the deposition of fine lines. [0047] 第一测定部400设置于激光部100与光学部200之间。 [0047] The first measuring portion 400 disposed between the laser unit 100 and the optical portion 200. 第一测定部400可对生成在激光部100且照射到光学部200上的激光光束的输出能量进行测定,其可包括将光能变换成电能的光电变换元件中的一种,即光电二极管(photo diode)。 A first measuring section 400 may generate a laser unit 100, and the laser beam irradiated to the optical portion 200 on the output power was measured, which may include converting light energy into electrical energy in a photoelectric conversion element, a photodiode ( photo diode). [0048] 第二测定部500可设置于光学部200的内部。 [0048] The second measuring section 500 may be provided inside the optical unit 200. 第二测定部500对经过光学部200 并照射到加工部300上的激光光束10的输出能量进行测定,和第一测定部400同样,还可包括光电二极管。 500 pairs of the second measurement unit 200 through the optical unit and is irradiated to the laser beam processing unit 300 on the output energy was measured 10, and the same first measuring section 400 also includes a photodiode. [0049] 控制部600接收第一测定部400和第二测定部500测定的激光光束10的输出信号,对接收的输出信号进行分析,从而为调整在激光部100生成的激光光束10的输出能量而向激光部100发送信号。 [0049] The control unit 600 receives the first measurement and the second measurement unit 400 measuring unit 500 of the laser beam output signal 10, the output signal of the received analysis, so as to adjust the output energy of the laser unit 100 generates a laser beam 10 and sends a signal to the laser unit 100. [0050] 控制部600还包括显示部(无图示),其可对从第一测定部400和第二测定部500接收到的激光光束的输出信号,和向激光部100发送的信号进行数值化处理并予以显示。 [0050] The control unit 600 further includes a display unit (not shown), its output signal can be received from the first measurement and the second measurement portion 400 to the portion 500 of the laser beam, and the numerical signal transmitted to the laser unit 100 processing and displayed. 另外,还可包括数据输入部(无图示),该数据输入部用于从使用激光调整装置的使用者接收所期望的激光光束输出值。 Further, the data input unit may also include (not shown), the data input unit for receiving a desired laser trimming apparatus from a user using a laser beam output value. 控制部600优选是一种可进行运算、输入并输出数据的诸如计算机的装置。 The control unit 600 is preferably an operation can be performed, input and output devices such as a computer data. [0051] 激光输出能量的测定:[0052] 图3为本发明的实施例所示的在第一测定部400上对激光光束11的输出能量进行测定的示意图。 [0051] Determination of the laser output power: Example [0052] FIG. 3 of the present invention is shown at a first measuring section 400 of the laser beam output power 11 is a schematic diagram of measurement. [0053] 本发明的一实施例所示的第一测定部400,在生成于激光部100的激光光束10照射到光学部200之前,可直接对激光光束10的输出能量进行测定。 The first measurement unit to an embodiment [0053] The present invention shown in 400, before generating the laser unit 10 of the laser beam 100 is irradiated to the optical unit 200 can be directly output energy of the laser beam 10 was measured. [0054] 一方面,依照其他实施例所示,激光光束10的输出能量可在第一测定部400间接测试。 [0054] In one aspect, in accordance with other embodiments, the laser output energy beam 10 may first measurement portion 400 in an indirect test. 图3所示的是,激光光束10的输出能量被射束分离器(beam splitter) 410和覆盖板420反射,而间接地在第一测定部400测定的示意图。 FIG. 3 is a laser beam output energy is a beam splitter 10 (beam splitter) 420 and the reflective cover plate 410, 400 in schematic indirectly measuring the first measurement portion. [0055] 参照图3,激光部100和光学部200之间设置有第一射束分离器410。 [0055] Referring to Figure 3, disposed between the laser 100 and the optical portion 200 has a first beam splitter 410. [0056] 第一射束分离器410可对经过第一射束分离器410的激光光束10进行分离。 [0056] The first beam splitter 410 may pass a first beam splitter 410, the laser beam 10 to be separated. 即激光光束10的一部分通过第一射束分离器410被反射,其余部分则按原来的路径而照射到光学部200。 That portion of the laser beam 10 through the first beam splitter 410 is reflected, the remainder of the original path to press the optical portion 200 is irradiated. 若经第一射束分离器410分离并被反射的激光光束11的输出能量过大,则工艺上所使用的激光光束10的输出能量就会过小,达不到本发明保持激光光束10始终一致的目的,若经分离并反射的激光光束11的输出能量过小,则在第一测定器400上对激光光束11进行测定时,误差范围会变大,因此,经分离并反射的激光光束11的输出能量占全部输出能量的1%至2%时为最佳。 If the output by 410 separating the first beam splitter and the reflected laser beam 11 can be excessive, the laser beam on the process used energy output 10 will be too small, amounting to less than the present invention, the laser beam 10 is always maintained unity of purpose, if isolated and reflected laser beam output power 11 is too small, the measurement device 400 when the first laser beam 11 is measured, the error range becomes larger, so isolated and the reflected laser beam for the best 11 of the total energy output energy output at 1-2%. [0057] 另外,在激光部100和光学部200之间,除了第一测定部400和第一射束分离器410外,还可能包括覆盖板420。 [0057] In addition, between the laser 100 and the optical element portion 200, in addition to the first measuring section 400 and the first beam splitter 410, but may also include a cover plate 420. 覆盖板420使经第一射束分离器410分离并反射的激光光束11再次反射到第一测定部400上,进而使第一测定部400对激光光束11的输出能量测定变得容易。 So that the cover plate 420 through the first beam splitter 410 and the reflected laser beam separator 11 again reflected onto the first measuring section 400, thereby enabling the output energy of the laser beam 400 pairs of the first measurement determination section 11 becomes easy. 覆盖板420的材质只要是可以反射激光光束11的材质,即可不加限制地使用。 The material of the cover plate 420 as long as the material can reflect the laser beam 11 can be used without restriction. 图3中为更好地进行说明,图示了覆盖板420只覆盖开放侧面的一部分,但覆盖的面积可根据发明的利用形态而不同。 For better Figure 3 illustrates, illustrates a portion 420 cover the open side of the cover plate, but the area covered by the invention, according to different use form. [0058] 图4为本发明的实施例所示的在第二测定部500上对激光光束12的输出能量进行测定的示意图。 On the second measurement section 500 of the laser beam output power was measured 12 a schematic embodiment [0058] Figure 4 embodiment of the present invention shown in Fig. [0059] 如图4所示,本发明一实施例的第二测定部500可直接对从激光部100照射到光学部200并经过光学部200的激光光束10的输出能量进行测定。 [0059] As shown in Figure 4, one embodiment of the present invention is an example of the second measurement unit 500 can be directly from the laser unit 100 is irradiated to the optical section 200 and section 200 through the laser beam optical output power 10 were measured. [0060] 另外,根据其他实施例,激光光束10的输出能量可由第二测定部500来间接测定。 [0060] Further, according to other embodiments, the laser beam 10 is output by the second energy measuring section 500 can be determined indirectly. 图4显示的是,激光光束10的输出经第二射束分离器510反射后,经过散射器520并在第二测定部500进行间接测定的示意图。 Figure 4 shows that the laser beam 10 output by the second beam splitter 510 is reflected through the diffuser 520 and the measurement is carried out in a schematic view of the second indirect measurement portion 500. [0061] 参照图4,光学部200内设有第二射束分离器510。 [0061] Referring to Figure 4, the optical unit 200 equipped with a second beam splitter 510. [0062] 第二射束分离器510可对通过第二射束分离器510的激光光束10进行分离。 [0062] The second beam splitter 510 through the second beam splitter 510 of the laser beam 10 to be separated. 即, 部分激光光束10被第二射束分离器510反射,其余部分按原来的路径经过光学部200而照射到加工部300上。 That is, part of the laser beam 10 is reflected by the second beam splitter 510, and the rest according to the original path through the optical unit 200 is irradiated onto the processing unit 300. 若被第二射束分离器510分离并反射的激光光束12的输出能量过大, 工艺上所使用的激光光束10的输出能量就会过小,这样达不到本发明的保持激光光束11 始终一致的目的,若经分离并反射的激光光束12的输出能量过小,则在第一测定器500上对激光光束进行测定时,误差范围会变大,因此,优选被分离并反射的激光光束12的输出能量占全部输出能量的1%至2%。 If they are separated from the second beam splitter 510 and the reflected laser beam output 12 can be excessive, the laser beam on the process used energy output 10 will be too small, so not up to keep the laser beam 11 is always present invention the same purpose, if isolated and the reflected laser beam output power 12 is too small, the first measuring device 500 when the laser beam was measured, the error becomes large range, therefore, preferably it is separated and the reflected laser beam 12 of the total energy output of the output energy of 1 to 2%. [0063] 另外,在第二测定部500和第二射束分离器510之间,即在第二测定器500的侧面可安装散射器(diffuser) 520。 [0063] Further, between the second measuring section 500 and the second beam splitter 510, which may be mounted diffuser (diffuser) 520 in the side of the second measuring device 500. 光学部200的内部可设置有电荷耦合器(CCD :charge coupled device)530,为防止从第二射束分离器510分离到第二测定部500的激光光束12 反射到第二测定部500的表面而被射到电荷耦合器530,安装散射器520。 Internal optical portion 200 may be provided with a charge coupled device (CCD: charge coupled device) 530, 510 in order to prevent the separation from the second beam splitter 12 into the laser beam reflected by the second measuring section 500 to the surface 500 of the second measurement unit charge-coupled device 530 is incident, the diffuser 520 installed. 另外,散射器520 的作用在于,可更精密地测定激光光束12的输出能量。 In addition, the role of the diffuser 520 is that the laser beam output power can be measured more precisely 12. [0064]图5为本发明一实施例的在散射器上的激光光束扩散的示意图。 [0064] FIG. 5 a schematic diagram of an example of the laser beam on the diffuser diffusion in one embodiment. [0065] 参照图5,被第二射束分离器510分离并反射的激光光束12在经过散射器520时, 在散射器520内部充分扩散12'后,照射到第二测定部500的表面上。 After [0065] Referring to FIG. 5, is separated from the second beam splitter 510 and the reflected laser beam 12 through the diffuser 520, 520 sufficiently diffused inside of the diffuser 12 ', is irradiated onto the surface of the second measuring section 500 . 因激光光束10被第二分离器510分离和反射,因此,激光光束12具有较小的输出能量,有可能出现测定误差, 但经过散射器520的激光光束12'广泛地分布在第二测定部500的表面上,从而可提高测定的准确度。 510 due to the laser beam 10 is separated from the second separator and the reflector, and therefore, the laser beam 12 having a smaller energy output, there may be a measurement error, but after scattering laser beam 12 520 'are widely distributed in the second measurement unit 500 on the surface, which can improve the accuracy of measurement. [0066] 散射器520的尺寸优选根据第二测定部500的大小而制作,以完全覆盖第二测定部500的侧面。 [0066] The diffuser 520 is preferably sized according to the size of the second measuring section 500 and made to completely cover the side surface portion 500 of the second measurement. 另外,散射器520的材质可为熔融石英(fused silica,FS)。 Further, the diffuser 520 may be made of fused silica (fused silica, FS). 熔融石英具有优异的光学性质及抗激光损伤性,因此,作为基于激光的光学系统中的光学构件而被广泛使用。 Fused silica has excellent optical properties and resistance to laser damage resistance, therefore, as an optical system in a laser-based optical components are widely used. 将散射器520的一面或两面可加工成每Imm有240沙(grit),这样在使用时,对激光光束12的扩散效果会更加明显。 520 of the diffuser one or both sides can be processed into 240 per Imm sand (grit), so that in use, the laser beam diffusion effect will be more evident 12. [0067] 另外,优选散射器520被安装成与第二测定部500的侧面呈规定角度A倾斜。 [0067] In addition, the diffuser 520 is preferably mounted to the side of the second measuring section 500. A predetermined angle is inclined. 在第二测定部500的侧面上,直接安装散射器520的情况(规定角度A为0时)下,激光光束12在散射器520表面上轻微反射并被传到电荷耦合器530上。 On the side of the second measuring section 500, the direct installation of the diffuser 520 (predetermined angle A is 0 ), the laser beam 12 reflected and transmitted light on the CCD 530 on 520 surface diffuser. 为防止这种现象的发生,散射器520优选被安装成与第二测定部500侧面呈大于0且小于45的角度A倾斜,更优选倾斜20。 To prevent this from occurring, the diffuser 520 is preferably mounted to the side of the second measuring section 500 was greater than 0 and smaller than 45 tilt angle A, and more preferably is inclined 20 . 散射器520若以超过45的角度A安装,经过散射器520且在第二测定部500 测定的激光光束12的输出能量有可能会减少。 In terms of the diffuser exceeds 520 A mounting angle of 45 , through the diffuser 520 and possibly a second measuring section 500 by a laser beam output power 12 is reduced. [0068] 激光输出能量的调整:[0069] 以下,对本发明所提供的激光输出装置实时调整激光输出能量的过程加以说明。 [0068] The laser output energy adjustment: [0069] Hereinafter, a laser output means of the present invention provides a real-time adjustment of output energy of the laser process will be described. [0070] 激光输出调整装置的使用者可在控制部600的数据输入部(无图示)上,输入将要照射到基板20上的激光光束10的输出值。 [0070] means users can adjust the laser output control unit data input unit (not shown) on the 600, input laser beam to be irradiated to the output value of 20 on the substrate 10. 在激光部100上生成并照射与使用者输入的输出值一致的激光光束10。 Build and irradiated with user input in the laser section 100 consistent output value of the laser beam 10. [0071] 在激光光束10照射到光学部200之前,可由第一测定部400对输出能量进行测定。 Before [0071] In the laser beam 10 is irradiated to the optical part 200, section 400 by first measuring the output power is measured. 这时,若由第一测定部测定的激光光束11的输出能量小于使用者输入的激光光束10的输出能量,即没有生成与在激光光束100上设定的激光光束的输出能量相当的激光光速, 进而可确定激光部100出现了问题。 At this time, if the output power measured by the first measurement unit of the laser beam 11 is smaller than the laser beam 10 output energy input by a user, i.e., does not generate the laser beam with the laser beam 100 is set corresponding to the laser output energy of light and then the laser unit 100 may determine there is a problem. 因此,控制部600对第一测定部400上所测定的激光光束11的输出能量与预先设定(使用者输入的)激光光束10的输出能量进行比较后,若激光光束11的输出能量小于激光光束10的输出能量,在控制部600的显不部(无图不)显不激光部100存在异常的同时,提高在激光部100生成的激光光束10的输出能量,以调整至第一测定部400上测定的激光光束11的输出能量与预先设定的激光光束10的输出能量一致。 Therefore, the control unit 400 of the 600 pairs of the first measurement unit measuring the output power of the laser beam 11 and a preset laser beam output power (user input) 10 are compared, if the output energy of the laser beam 11 is smaller than the laser output energy of the beam 10, there is an abnormality in the control unit was not portion 600 (FIG no no) no significant portion of the laser 100, while increasing the output power of the laser unit 100 generates a laser beam 10, to adjust to the first measurement section consistent output energy of the laser beam 10 on the output energy was measured with the laser beam 11 400 set in advance. 一方面,若进一步设有第一射束分离器410,激光光束10的输出能量的1%至2%会反射到第一测定部400上,因此,控制部600应考虑这一点,再做运算。 On the one hand, if further provided with a first beam splitter 410, the laser beam output power of 10 of 1-2 percent will be reflected on the first measuring section 400. Therefore, the control unit 600 should take this into account, do arithmetic . [0072] 举一例说明,使用者输入的是激光光束10输出100J的能量,但在第一测定部400 上测定的是激光光束11只具备90J的能量,控制部600在显示部(无图示)上显示激光部100存在异常的同时,向激光部100传送信号,使激光光束10输出IlOJ的能量,并进行调整使第一测定部400上测定的激光光束11具备100J的能量。 [0072] One example shows that the user input is the output of the laser beam 10 100J of energy, but in the first measuring section 400 is measured by the laser beam 11 have energy 90J, the control unit 600 in the display unit (not illustrated display) on laser unit 100 is abnormal while 100 transmits a signal to the laser unit, the output of the laser beam 10 IlOJ energy, and make adjustments so that the first measurement unit 400 by a laser beam 11 with 100J energy. [0073] 接下来,经过光学部200的激光光束10在通过加工部300照射至基板20之前,通过第二测定部500对输出能量进行测定。 [0073] Next, after the laser beam 10 in the optical unit 200 by the processing unit 300 is irradiated to the substrate 20 before the second measuring section 500 by the output energy is measured. 这时,如果在第二测定部500上测定的激光光束12的输出能量小于使用者所输入的激光光束10,则认为是激光光束10在经过光学部200 时输出能量减少,可确定光学部200内部的激光光束路径出现了问题。 In this case, if the second measuring section 500 by a laser beam output power of the laser beam 12 is less than the user input 10, is considered the laser beam 10 at the output of the optical unit 200 through energy reduction, may determine the optical unit 200 the laser beam path inside there is a problem. 即控制部600接收第一测定部400和第二测定部500的信号,当在第一测定器400上测定的激光光束11的输出能量与预先设定的激光光束10的输出能量一致,而第二测定部500上测定的激光光束12 的输出能量小于预先设定的激光光束10的输出能量时,应是激光部100不存在异常,而光学部200有异常,因此,在控制部600的显示部(无图示)上显示光学部200存在异常的同时,提高在激光部100生成的激光光束10的输出能量,并调整至在第二测定器500上测定的激光光束12的输出能量与预先设定的激光光束10的输出能量一致。 Receiving a first signal measurement unit 400 and the second measurement portion 500, i.e., the control unit 600, when the output power at the output of the first measuring device 400 measured by the laser beam 11 with a predetermined laser beam 10 coincides energy, while the first When measured on the second measuring unit 500 output energy of the laser beam 12 is smaller than the preset output energy of the laser beam 10, the laser should be no abnormal portion 100, and the optical unit 200 is abnormal, and therefore, the control unit 600 of the display there is an abnormality of the optical portion 200 on the display unit (not shown) at the same time, increasing the output power of the laser unit 100 generates a laser beam 10, and adjustments to the second measuring device 500 measured by the laser output energy beam 12 and the pre- the output of the laser beam 10 is set consistent energy. 另外,若进一步设有第二射束分离器510,因激光光束10的输出能量中仅有1%至2%反射到第二测定部500 上,控制部600需考虑这一点再做运算。 In addition, if further provided with a second beam splitter 510, because only 1-2% of the laser beam 10 reflected output energy to the second measuring section 500, the control unit 600 to do this operation should be considered. [0074] 举一例说明,使用者输入的是激光光束10输出100J的能量,但在第一测定部400 上测定的是激光光束11具备100J的能量,而第二测定部500上测定的激光光束12只具备90J的能量,则控制部600在显示部(无图示)上显示激光部100无异常而光学部200有异常的同时,向激光部100传送信号,使激光光束10输出IlOJ的能量,从而调整至第二测定部500上测定的激光光束12具备100J的能量。 [0074] give one example, the user inputs a laser beam 10 output 100J of energy, but in the first measuring section 400 determination of a laser beam 11 has 100J of energy, measured on a 500 second measurement unit laser beam 90J 12 with energy, the power control unit 600 displayed on the display unit (not shown) of the laser portion 100 and 200 has no abnormality, while abnormal optical portion 100 transmits a signal to the laser unit, the laser beam 10 in the output IlOJ to adjust to the determination of the 500 second measurement unit 12 includes a laser beam energy of 100J. [0075] 如上所述,本发明在使用激光的工艺上,可实时测定激光输出能量,使所期望的激光光束输出能量始终保持一致,且更加容易地确定出导致问题发生的激光装置组成部分, 并自动调整激光光束的输出能量,有效加强工艺的可靠性和稳定性。 [0075] As described above, the present invention is in the use of laser technology, the laser output energy can be measured in real time, so that the desired output energy of the laser beam is always consistent and more easily determine the components of the laser apparatus cause problems occur, and automatically adjusts the output power of the laser beam, effectively strengthen the reliability and stability of the process. [0076] 综上所述,结合最佳实施例及附图而作以详细说明,但并不以此为限,凡具备本发明所属技术领域内一般知识的技术人员,均可在不脱离本发明精神的范围内,进行各种变形和变动。 [0076] In summary, the combination of the preferred embodiments and the accompanying drawings as to a detailed description, but not limited thereto, who have the technique of the present invention is within their field of general knowledge in the art, can be made without departing from the present within the spirit of the invention, various modifications and changes. 这些变形例和变动例均被看作包含在本发明及权利要求范围之内。 Such modifications and variations are considered cases included in the present invention and claims range.

Patent Citations
Cited PatentFiling datePublication dateApplicantTitle
CN1596492A *23 Oct 200216 Mar 2005西默股份有限公司Timing control for two-chamber gas discharge laser system
CN1886872A *12 Nov 200427 Dec 2006Tcz股份有限公司Laser thin film poly-silicon annealing system
US6067306 *19 May 199823 May 2000Cymer, Inc.Laser-illuminated stepper or scanner with energy sensor feedback
US6970492 *14 May 200329 Nov 2005Lambda Physik AgDUV and VUV laser with on-line pulse energy monitor
US20010042840 *16 Mar 200122 Nov 2001Uwe StammMethod and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser
US20050279946 *8 Jun 200522 Dec 2005Cymer, Inc.Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source
Classifications
International ClassificationB23K26/03
Legal Events
DateCodeEventDescription
10 Apr 2013C06Publication
8 May 2013C10Entry into substantive examination
4 Nov 2015C14Grant of patent or utility model