CN103028560A - Spray head washing device - Google Patents
Spray head washing device Download PDFInfo
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- CN103028560A CN103028560A CN2011103051849A CN201110305184A CN103028560A CN 103028560 A CN103028560 A CN 103028560A CN 2011103051849 A CN2011103051849 A CN 2011103051849A CN 201110305184 A CN201110305184 A CN 201110305184A CN 103028560 A CN103028560 A CN 103028560A
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- cleaning brush
- spray head
- cleaning
- manipulator
- glove box
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Abstract
The embodiment of the invention provides a spray head washing device, which is used for washing the surface of a spray head. The spray head washing device comprises a washing brush, a washing brush manipulator and an adsorption device, wherein the washing brush is provided with brush hair; the washing brush manipulator is used for clamping and moving the washing brush so as to enable the washing brush and/or the brush hair to do relative motion with the surface of the spray head; through the utilization of the relative motion, the surface of the spray head is washed; and the adsorption device is used for adsorbing pollutants during the washing process. With the adoption of the spray head washing device, the problem that the surface of the spray head is impossibly washed is solved; and therefore, the pollutants on the surface of the spray head are prevented from affecting the next sedimentation technology.
Description
Technical field
The present invention relates to chemical vapour deposition (CVD) (CVD) technical field, particularly the cleaning device of spray head.
Background technology
MOCVD (Metal-Organic Chemical Vapor Deposition) is a kind of Novel air phase epitaxy depositing operation that grows up on the basis of vapor phase epitaxial growth (VPE).It is with the source material as the crystal growth such as the hydride of the organic compound of III family, II family element and V, VI family element, carry out depositing operation in the pyrolysis mode at pedestal, the thin layer monocrystal material of grow various III-V family, II-VI compound semiconductor and their multivariate solid solution.
The below describes the principle of existing depositing operation.Particularly, take MOCVD as example, please refer to the structural representation of existing precipitation equipment shown in Figure 1.
Be formed with the spray head 11 and the pedestal 12 that are oppositely arranged in the glove box 10.Described spray head 11 is interior can to arrange a plurality of apertures, and described spray head 11 is used for providing source gas.Usually place multi-disc substrate 121 on the described pedestal 12, the material of described substrate 121 is generally expensive sapphire.The below of described pedestal 12 also is formed with heating unit 13, and 13 pairs of described substrates 121 of described heating unit heat, so that the temperature on described substrate 121 surfaces reaches the temperature that epitaxy technique needs.
When carrying out MOCVD technique, source gas enters the conversion zone (position on the surface of close substrate 121) of pedestal 12 tops from the aperture of spray head 11, described substrate 121 is owing to the heat radiation effect of heating unit 13 has certain temperature, thereby this temperature is so that carry out chemical reaction between the gas of source, thereby at substrate 121 surface deposition epitaxial material layers.
Owing to the certain distance that has between spray head 11 and the pedestal 121, pre-reaction can just occur before not arriving substrate 121 between the gas of part source, the portion of product of pre-reaction can cause the surface contamination of spray head 11, and the pollutant on pedestal 12 or the substrate 121 volatilizees in heating process, the surface contamination that also may cause spray head 11, after thereby the depositing operation of a collection of substrate 121 is finished, need to clean the surface of spray head 11, can not exert an influence to depositing operation next time with the pollutant on the surface that guarantees spray head 11.
Prior art utilizes person skilled to adopt manual mode cleaning spray head usually, owing to lack the cleaning device of effective spray head, so that the cleaning performance on spray head surface is bad.
Summary of the invention
The problem that the embodiment of the invention solves has provided a kind of spray header cleaning device, has solved the problem that the surface of spray head can't be cleaned, and avoids the pollutant on spray head surface on the next time impact of depositing operation.
For addressing the above problem, the embodiment of the invention provides a kind of spray header cleaning device, is used for the surface of spray head is cleaned, and comprising:
Cleaning brush has bristle;
The cleaning brush manipulator is used for clamping and mobile cleaning brush, so that described cleaning brush and/or bristle can carry out relative motion with the surface of spray head, utilizes this relative motion to clean the surface of spray head;
Adsorbent equipment is used for adsorbing the pollutant of cleaning process.
Alternatively, the working method of described spray header cleaning device is the Automatic Control mode, also comprises:
The manipulator control unit is used for controlling described cleaning brush manipulator, adjusts track and the speed of relative motion on the surface of described cleaning brush manipulator and described spray head.
Alternatively, described manipulator control unit comprises:
Power unit is used for providing power, and this power is so that described cleaning brush manipulator and/or cleaning brush can carry out relative motion with the surface of described spray head;
Gear unit, one section is connected with described power unit, is used for receiving the power from power unit, and the other end is connected with described cleaning brush manipulator, with power transmission extremely described cleaning brush manipulator and/or cleaning brush;
Sub-control unit is used for controlling described power unit, gear unit, controls the motion of described cleaning brush manipulator and/or cleaning brush by described power unit, gear unit;
Described spray header cleaning device is used for depositing device, and described depositing device comprises: glove box, transmission chamber and loading and unloading chamber, and described spray head is positioned at described glove box, and described glove box is connected with described transmission chamber and/or loading and unloading chamber; Described cleaning brush and cleaning brush manipulator are positioned at outside described glove box, transmission chamber, loading and unloading chamber or the glove box;
After depositing operation is finished, described sub-control unit is controlled described gear unit and power unit described cleaning brush and cleaning brush manipulator is moved to surperficial relative position with described spray head, or described sub-control unit controls the position relative with described cleaning brush, surface that described spray head moves to spray head, utilizes described cleaning brush that the surface of described spray head is cleaned; After the cleaning of spray head was finished, described sub-control unit also can be used for controlling the surface of described spray head and separates with described cleaning brush, with described cleaning brush and cleaning brush manipulator be positioned in the glove box, glove box is outer, in loading and unloading chamber or the transmission chamber.
Alternatively, also comprise:
Image acquisition units is for the image on the surface that gathers spray head;
Image analyzing unit is used for the image that described image acquisition units collects is analyzed, and judges the situation of the cleanliness factor on spray head surface;
Feedback unit is used for the analysis result according to image analyzing unit, obtains control signal, and described control signal is as the foundation of the relative motion of the described cleaning brush manipulator of the adjustment of described sub-control unit and cleaning brush.
Alternatively, the working method of described spray header cleaning device is the semiautomatic control mode, also comprises: power unit, gear unit;
Described power unit is used for providing power, this power so that described cleaning brush and/or bristle can rotate;
One end of described gear unit is connected with described power unit, be used for to receive the power from power unit, and the other end is connected with described cleaning brush manipulator, with this power transmission extremely described cleaning brush manipulator and/or cleaning brush;
Described depositing device comprises: glove box, transmission chamber and loading and unloading chamber, and described spray head is positioned at described glove box, and described glove box is connected with described transmission chamber and/or loading and unloading chamber; Described cleaning brush cleaning device is positioned at outside described glove box, transmission chamber, loading and unloading chamber or the glove box;
After depositing operation is finished, operating personnel control described gear unit and power unit described cleaning brush and cleaning brush manipulator are moved to surperficial relative position with described spray head, or operating personnel control the position relative with described cleaning brush, surface that described spray head moves to spray head, utilize described cleaning brush that the surface of described spray head is cleaned; Separate with described cleaning brush on the surface that operating personnel control described spray head after cleaning is finished, with described cleaning brush and cleaning brush manipulator be positioned in the glove box, glove box is outer, in loading and unloading chamber or the transmission chamber.
Alternatively, the part that described gear unit is connected with described cleaning brush manipulator is rigid structure, it is hand-held that described rigid structure is used for operating personnel, the part that is connected with described power unit of described gear unit is flexible structure, carries out relative motion so that described gear unit can drive the surface of described cleaning brush and described spray head.
Alternatively, also comprise:
Image acquisition units is for the image on the surface that gathers spray head;
Display unit, the image that is used for image acquisition units is gathered shows that operating personnel adjust the relative motion of described cleaning brush manipulator and cleaning brush according to the image of display unit.
Alternatively, described spray header cleaning device is positioned at the glove box of described depositing device, and described cleaning brush manipulator comprises:
The guide supporting parts, it is outside to be positioned at described spray head;
Movable guiding rail, an end is connected by fixture with described guide supporting parts, and described movable guiding rail can carry out circular motion by relatively described guide supporting parts, and the track of the circular motion of this movable guiding rail covers the surface of described spray head at least;
Slide block, be arranged on the described movable guiding rail, described slide block is used for being flexibly connected described movable guiding rail and cleaning brush, so that described cleaning brush can carry out radial motion along with described slide block and described movable guiding rail, the direction of described radial motion is the radial direction along described circular motion, described radial motion cooperates with described circular motion, so that the movement locus of described cleaning brush covers the surface of whole spray head.
Alternatively, described guide supporting parts are connected with power unit, and described guide supporting parts are given described movable guiding rail with power transmission, control speed, direction, the track of described movable guiding rail circular motion.
Alternatively, also comprise:
Image acquisition units is for the image on the surface that gathers spray head;
Image analyzing unit is used for the image that described image acquisition units collects is analyzed, and judges the situation of the cleanliness factor on spray head surface;
Feedback unit is used for the analysis result according to image analyzing unit, obtains control signal, and described control signal is as the input signal of described power source.
Alternatively, the material of described cleaning brush and bristle is identical or different.
Alternatively, described cleaning brush comprises the first cleaning brush and the second cleaning brush, and the bristle of described the first cleaning brush is thicker than the bristle of the second cleaning brush, and described the first cleaning brush is used for carrying out the thick cleaning of spray head, and described the second cleaning brush is used for the seminal plasma of spray head and washes.
Alternatively, also comprise: elastic seal ring, around the to be cleaned surperficial side of described cleaning brush near described spray head, when described elastic seal ring is used for cleaning, form the environment of relative closure on the surface to be cleaned of described cleaning brush and described spray head,
Described adsorbent equipment comprises: absorption pipeline and vavuum pump, one end of described absorption pipeline is connected with the surface with the relative side in described spray head surface to be cleaned of described cleaning brush, the other end is connected with described vavuum pump, described vavuum pump be used for so that an end pressure of described absorption pipeline less than the pressure of the other end, the pollutant in cleaning process since the pressure differential of absorption pipe ends along with described absorption pipeline is pulled out between described cleaning brush and the spray head.
Alternatively, the material of described elastic seal ring is a kind of or combination wherein in rubber, metal, pottery, the plastics.
Compared with prior art, the present invention has the following advantages:
The spray header cleaning device that the embodiment of the invention provides utilizes cleaning brush manipulator clamping and mobile cleaning brush, the relative motion that utilizes cleaning brush and/or bristle to carry out with the surface of spray head, clean the surface of spray head, thereby realize the cleaning on spray head surface, because the embodiment of the invention is utilized cleaning brush manipulator clamping cleaning brush, operating personnel need not with hand clamping spray head, need not to wait for that the temperature on spray head surface is reduced to safe temperature (being the temperature that operating personnel's hand can not be burned), thereby reduced the time of cleaning, provide spray head to be used for the time of depositing operation and the utilization rate of depositing device; And because the present invention utilizes the relative motion on the surface of bristle and spray head to clean the surface of spray head, thereby with chemical modes such as using plasmas the spray head surface is cleaned and to be caused the damage of spray head to compare, the embodiment of the invention can not damaged spray head, thereby can improve the service life of spray head;
Further optimally, the working method of described spray header cleaning device is the Automatic Control mode, need not operating personnel operates spray head, can utilize track and the speed of relative motion on the surface of manipulator control unit controls cleaning brush manipulator and described spray head, can reach simultaneously better cleaning performance and clean labor-saving;
Further optimally, described spray header cleaning device also comprises: image acquisition units, image analyzing unit and feedback unit, thereby can monitor the image on the surface of spray head, thereby judge the situation of the cleanliness factor on spray head surface according to described image, automatically control the motion of cleaning brush manipulator and cleaning brush, obtain better cleaning performance;
Further optimally, described spray header cleaning device can comprise the first cleaning brush and the second cleaning brush, wash thereby can slightly clean with seminal plasma spray head, thick cleaning can be quickly with most of pollutant removal on spray head surface, shorten the time that spray head cleans, seminal plasma is washed then can with the pollutant removal that is difficult to remove of spray head remained on surface, guarantee the cleanliness factor that spray head cleans;
Further optimally, described spray header cleaning device also comprises around the elastic seal ring of described cleaning brush near a to be cleaned surperficial side of described spray head, when cleaning, described elastic seal ring forms the environment of relative closure on the surface to be cleaned of described cleaning brush and described spray head, thereby prevents the miscellaneous part of the particle contaminant glove box in the cleaning process;
Further optimally, described spray header cleaning device is positioned at described glove box, described cleaning brush manipulator comprises: guide supporting parts, movable guiding rail and slide block, utilize the motion of slide block and movable guiding rail, so that cleaning brush and spray head surface are cleaned, the volume of described guide supporting parts, movable guiding rail and slide block is little, thereby so that whole spray header cleaning device is simple in structure, compact, has also reduced the cost of spray header cleaning device.
Description of drawings
Fig. 1 is the structural representation of the MOCVD device of prior art;
Fig. 2 is the structural representation of the MOCVD equipment of first embodiment of the invention;
Fig. 3 is the internal structure schematic diagram of the spray header cleaning device of first embodiment of the invention;
Fig. 4 is the principle schematic when cleaning of spray header cleaning device shown in Figure 3;
Fig. 5 is the internal structure schematic diagram of the spray header cleaning device of second embodiment of the invention;
Fig. 6 is the internal structure schematic diagram of the spray header cleaning device of third embodiment of the invention;
Fig. 7 is the structural representation of the MOCVD equipment of second embodiment of the invention;
Fig. 8 is the internal structure schematic diagram of the spray header cleaning device of fourth embodiment of the invention.
The specific embodiment
Prior art is owing to the cleaning device that lacks effective spray head, so that the cleaning performance on spray head surface is bad.The inventor considers that the mode of the Chemical cleaning such as using plasma cleans the surface of spray head.When but plasma is removed the pollutant on spray head surface, can damage the surface of spray head and the hole in the spray head, cause the coarse of hole internal diameter, and the mode of the Chemical cleaning such as described plasma also can be damaged the sidewall of thin film deposition chamber.How not damage spray head and deposition chambers in the surface of cleaning spray head, be the problem that those skilled in the art need to solve.
In order to address the above problem, the present invention proposes a kind of device of surface clean of spray head, comprising:
Cleaning brush has bristle;
The cleaning brush manipulator is used for clamping and mobile cleaning brush, so that described cleaning brush and/or bristle can carry out relative motion with the surface of spray head, utilizes this relative motion to clean the surface of spray head;
Adsorbent equipment is used for adsorbing the pollutant of cleaning process.
Below in conjunction with embodiment technical scheme of the present invention is described in detail.The described spray header cleaning device of the embodiment of the invention is used for depositing device, and described depositing device can be MOCVD equipment, also can be other any equipment with spray head such as CVD, PVD.As an embodiment, described spray header cleaning device is used for MOCVD equipment.Described spray header cleaning device can be used for the internal washing of the glove box of MOCVD equipment, also can be used for the cleaning on the surface of the spray head in the glove box.
For technical scheme of the present invention is described better, please refer to shown in Figure 2ly, be the structural representation of the MOCVD equipment of one embodiment of the invention.The layout of described MOCVD equipment is the polygon layout, comprising: loading and unloading chamber 24, vacuum transmission chamber 21, a plurality of glove box and buffer table 23.In the present embodiment, described vacuum transmission chamber 21 be shaped as polygon, in other embodiment, the shape of described vacuum transmission chamber also can be linearity.The number of described glove box is a plurality of, is respectively: first-hand casing 221, second-hand's casing 222, the 3rd glove box 223 and the 4th glove box 224 all have a spray head in each glove box.In other embodiment, the number of glove box can be for more or less, and those skilled in the art can carry out concrete setting as required.Substrate from outside toilet is positioned over described loading and unloading chamber 24, and transfers in the corresponding glove box through vacuum transmission chamber 21, and after depositing operation was finished, substrate arrived loading and unloading chamber 21 by described vacuum transmission chamber 21.Certainly, substrate is before vacuum transmission chamber 21 enters deposition chambers, can in buffer table 23, carry out corresponding preliminary treatment (such as the pollutant of cleaning treatment with the removal substrate surface, or the pre-heat treatment is so that the temperature of substrate is consistent with the temperature of the deposition chambers that will carry out), also can be after depositing operation be finished, in buffer table 23, carry out subsequent treatment (processing such as cooling), be not described in detail at this.
Please in conjunction with the internal structure schematic diagram of the spray header cleaning device of one embodiment of the invention shown in Figure 3.For spray header cleaning device is described better, also schematically show the part-structure of MOCVD equipment among Fig. 3, in Fig. 3, adopt identical label, hereby explanation with structure identical among Fig. 2.
Described spray header cleaning device 30 is positioned at the transmission chamber 21 of MOCVD equipment, one side of described transmission chamber 21 is adjacent with glove box 222, be formed with heating unit 2223 in the described glove box 222, graphite base 2222 and spray head 2221, wherein said graphite base 2222 is used for placing substrate, described heating unit 2223 is used for described graphite base 2222 is heated, described spray head 2221 is positioned at the top that described graphite base 2222 is placed with a side of substrate, and the surface towards described substrate and graphite base 2,222 one sides of described spray head 2221 is surface to be cleaned.As an embodiment, described glove box 222 has door 2224.When carrying out depositing operation, door 2224 is closed, so that glove box 222 forms the relatively environment of sealing, move to described graphite base 2222 with described spray head 2221, so that between graphite base 2222 and spray head 2221, form certain space, be used for carrying out depositing operation (such as MOCVD technique) in this space.After depositing operation is finished, door 2224 is opened, glove box 222 can exchange substrates with loading and unloading chamber (not shown) or transmission chamber 21, after depositing operation is finished the exchange substrate before or the exchange substrate in, spray header cleaning device 30 work are cleaned the surface to be cleaned of spray head 2221 or the surface to be cleaned of glove box 222.
The below is described in detail the structure of spray header cleaning device 30.Particularly, please continue with reference to figure 3, spray header cleaning device 30 comprises:
Cleaning brush 31 has bristle face 311, and this bristle face 311 to be cleaned surperficial relative with the surface to be cleaned of spray head 2221 or glove box 222 when cleaning has the bristle (not shown) on this bristle face 311;
Cleaning brush manipulator 33, be connected with bristle face 311 relative side surfaces of described spray head 31, described cleaning brush manipulator 33 is used for clamping and mobile cleaning brush 31, so that described cleaning brush 31 and/or bristle can carry out relative motion with the surface to be cleaned of spray head 2221 or the surface to be cleaned of glove box 222, utilize this relative motion to clean the surface of spray head 2221 or glove box 222;
Adsorbent equipment is used for adsorbing the pollutant of cleaning process.
Particularly, as an embodiment, described cleaning brush 31 be shaped as cylinder.In other embodiment, the shape of described cleaning brush 31 can also be irregularly shaped for cuboid, the regular shape such as stepped or other.
In the present embodiment, the bristle face 331 of described cleaning brush 31 is cylindrical bottom surface.In other embodiment, the bristle face 331 of described cleaning brush 31 can also be cylindrical side.As an embodiment, the area of the bristle face 331 of described cleaning brush 31 and the surface to be cleaned of spray head 2221 approach, can equal the area on the surface to be cleaned of spray head 2221 such as the area of the bristle face 331 of described cleaning brush 31, also can be slightly larger than or be slightly less than the area on the surface to be cleaned of described spray head 2221.Certainly, the area of the bristle face 331 of described cleaning brush 31 also can be 1/3,1/5,1/2 or 2/3 etc. of the area on the surface to be cleaned of described spray head 2221.Certainly, in order to accelerate to clean the speed of spray head, the area of the bristle face 331 of described cleaning brush 31 can approach with the size on the surface to be cleaned of spray head 2221, is 0.95 times, 1 times, 1.05 times of surface to be cleaned of spray head 2221 etc. such as the area of the bristle face 331 of cleaning brush 31.
Cleaning is as one embodiment of the invention, described cleaning brush 31 perpendicular to the directional ring of bristle face 311 around elastic seal ring 312, described elastic seal ring 312 has certain elasticity perpendicular to bristle face 311 directions, when cleaning, when described bristle face 311 and the surface to be cleaned of spray head 2221 or other the Surface Contact to be cleaned in the glove box 222, described elastic seal ring 312 can so that form the environment of relative closure between other surfaces to be cleaned in the surface to be cleaned of described bristle face 311 and described spray head 2221 or the glove box 2221, avoid the pollutant in the cleaning process that the miscellaneous parts (such as heating unit 2223 and graphite base 2222) in the glove box 222 are polluted.The thickness of described elastic seal ring 312 can be slightly larger than the thickness (the described thickness of the embodiment of the invention refer to spray head 31 along the size perpendicular to the direction of the bristle face 311 of spray head 31) of described spray head 31.The material of described elastic seal ring 312 is rubber, metal, pottery, plastics.In an embodiment of invention, the material of described elastic seal ring 312 is silica gel; In another embodiment of the present invention, the material of described elastic seal ring 312 is Teflon; Certainly, the material of described elastic seal ring 312 can also be stainless steel.
The number of the cleaning brush 31 shown in the figure is 1.In other embodiment, the number of described cleaning brush 31 also can be two even a plurality of.Two or more cleaning brush 31 can clean (area of the bristle face of cleaning brush 31 is less than the surface to be cleaned of spray head 2221 at this moment) to the surface of spray head 2221 simultaneously, also can clean separately.As an optional embodiment, the number of described cleaning brush 31 is two, respectively the first cleaning brush and the second cleaning brush, the bristle of described the first cleaning brush is thicker than the bristle of the second cleaning brush, described the first cleaning brush carries out the thick cleaning of spray head, this first cleaning brush can move fast, most of pollutant removal with the surface to be cleaned of spray head, accelerate the speed of cleaning, after thick the cleaning, the seminal plasma that described the second cleaning brush carries out spray head is washed, and the bristle of described the second cleaning brush is thin, its rotating speed is fast, can will residue in the pollutant removal on the surface to be cleaned of spray head after slightly cleaning.
The material of described cleaning brush 31 can select to bear the material of high temperature, after depositing operation is finished, need not to wait for that the temperature of spray head reduces like this, and this cleaning brush can directly clean the surface to be cleaned of spray head.In one embodiment of the invention, the material of described cleaning brush 31 is metal material, such as common stainless steel, the stainless steel (with performances such as service life of improving cleaning brush 31, hardness) that has added rare earth element, graphite, Teflon, metal or alloy etc.
The material of described bristle can be identical with the material of cleaning brush 31, also can be different.In the present embodiment, the material of described bristle is identical with the material of described cleaning brush 31.The shape of described bristle, size, arrange and to arrange as required.When the number of cleaning brush 31 when being two or more, the material of the bristle of each cleaning brush, size, shape and arrange can be identical also can be different.
As an embodiment, be formed with the hole on two relative surfaces running through described cleaning brush 31 on the described cleaning brush 31, this hole is used for being connected with adsorbent equipment, and the particle of the surface removal of described spray head 2221 or glove box 222 arrives described adsorbent equipment by described hole when cleaning.As shown in Figure 3, described adsorbent equipment further comprises: the first pipeline 32, one ends are connected with hole on the cleaning brush 31, and the other end is connected with an end of second pipe 37, and the other end of described second pipe 37 is connected with vavuum pump 34; The part that described the first pipeline 32 is connected with second pipe 37 is formed with filter 331, and this filter 331 is used for filtering the particle under brush 31 brushes of being cleaned of cleaning process.Described vavuum pump 34 is used for vacuumizing, so that the pressure of the pressure of described the first pipeline 32, second pipe 37 deposition chambers 2221 when cleaning, thereby the particle in the assurance cleaning process can enter by the hole on the cleaning brush 31 the first pipeline 32, and is filtered by the filter 331 between the first pipeline 32 and the second pipe 37.Vavuum pump 34 of the present invention can be vavuum pump independently, also can with MOCVD equipment in miscellaneous part (for example miscellaneous part in the vavuum pump in the glove box 222 or loading and unloading chamber or the transmission chamber 21) share a vavuum pump.As one embodiment of the present of invention, described the first pipeline 32 is integrated in the inside of described cleaning brush manipulator 33, at this moment, the shape and size of described cleaning brush manipulator 33 should design, on the one hand, so that described cleaning brush manipulator 33 can satisfy clamping cleaning brush 31, on the other hand, described cleaning brush manipulator 33 should be the tubulose of hollow, and its inside can hold described the first pipeline 32, thereby can save the space that spray header cleaning device takies.Certainly, in other embodiment, described the first pipeline 32 and cleaning brush manipulator 33 also can be distinguished independent the setting, and those skilled in the art can carry out flexible choice and setting as required.The hard material of selecting to have some strength and hardness of the material of described cleaning brush manipulator 33, to satisfy the requirement in its service life, described cleaning brush manipulator 33 can adopt any possible machining process such as welding, riveted joint to be connected with the back side of cleaning brush 31.
Need to prove that the adsorbent equipment of the embodiment of the invention has adopted the first pipeline 32 and second pipe 37, described adsorbent equipment for convenience detach like this, and conveniently the first pipeline 32 and second pipe 37 are cleaned and filter 331 is in time changed.In other embodiment, also can directly adopt a pipeline, an end of this pipeline is connected with the hole in the cleaning brush, and the other end is connected with vavuum pump 34.
As one embodiment of the present of invention, the working method of described spray header cleaning device is the Automatic Control mode, and described spray header cleaning device also comprises:
The manipulator control unit, be used for controlling described cleaning brush manipulator 33, adjust described cleaning brush manipulator 33 and cleaning brush 31, adjust track and the speed of described spray cleaning brush 31 and the relative motion on the surface to be cleaned of described spray head 222, thereby can obtain better cleaning performance.
In one embodiment of the invention, described manipulator control unit comprises:
The sub-control unit (not shown), be used for controlling described power unit 36, gear unit 35, by the relative motion of described power unit 36, the gear unit 35 described cleaning brush manipulators 33 of control and spray head 31, control the relative position relation of described cleaning brush manipulator 33 and spray head 31.
As an embodiment, described gear unit 35 is tubular structure, its material should select to have the material of certain flexibility, in the future the power transmission of ultromotivity unit 35 is to power unit 35 for described like this gear unit 35, and the length of described gear unit 35 should be able to be supported cleaning brush 31 and cleaning brush manipulator 33.As optional embodiment, part the first pipeline 32 and second pipe 37 these inside at described gear unit 35, can save the space that spray header cleaning device takies like this, certainly, described the first pipeline 32 and second pipe 37 also can independently arrange with described gear unit 35.
As another embodiment of the present invention, described spray header cleaning device 30 also comprises:
Image acquisition units (not shown), the image that is used for the surface of collection spray head 2221, described image acquisition units can be camera, it can be fixedly installed in any position that can monitor spray head 2221 surfaces in the glove box 2221, also can be installed on any position on cleaning brush 31 surface to be cleaned, for example described image acquisition units can be installed on the bristle face 311 of cleaning brush 31 (position of image acquisition units be arranged on hole on the bristle face 311 near, its surface can arrange protective device, avoids the surperficial image that can't gather the spray head surface because the particle in the cleaning process damages or stains);
Image analyzing unit, be used for the image that described image acquisition units collects is analyzed, judge the situation of the cleanliness factor on spray head surface, described image analyzing unit compares based on the image of standard picture (being the satisfactory image of cleanliness factor on the surface of spray head 2221) with the image acquisition units collection, judge and identification based on computer, can obtain the situation of the cleanliness factor on spray head surface;
Feedback unit is used for the analysis result according to image analyzing unit, obtains control signal, and described control signal is as the foundation of the motion of the described cleaning brush manipulator 33 of the adjustment of described sub-control unit and cleaning brush 31.
Certainly, as yet another embodiment of the invention, also image acquisition units and display unit can only be set in spray header cleaning device 30, this image acquisition units is used for the image on the surface of collection spray head 2221, this display unit is positioned at the outside of MOCVD equipment, it shows the image that image acquisition units obtains, personnel judge for associative operation, work to spray header cleaning device 30 is adjusted, and judges whether to proceed to clean or adjust relative motion and the relative position relation on cleaning brush 31 and the surface of spray head 2221.
As an embodiment, when carrying out depositing operation, cleaning brush 31 and the cleaning brush manipulator 33 of described spray header cleaning device 30 are positioned at transmission chamber 21, after depositing operation was finished, described cleaning brush 31 and cleaning brush manipulator 33 moved to the position relative with the surface to be cleaned of spray head 2221 in the glove box 222 under the driving of sub-control unit; In other embodiment, when carrying out depositing operation, the cleaning brush of described spray header cleaning device 30 and cleaning brush manipulator 33 can also be arranged in loading and unloading chamber glove box, even described spray header cleaning device can also be positioned at outside the glove box.The described spray header cleaning device of the embodiment of the invention is positioned at outside the glove box, specifically refer to, the cleaning brush of described spray header cleaning device is arranged in the independent chamber that is connected with glove box with the cleaning brush manipulator, and (purpose is to prevent that cleaning brush from forming pollution with the cleaning brush manipulator owing to contacting with outside toilet, this chamber has chamber door, can be so that cleaning brush and cleaning brush manipulator can pass in and out described glove box by this chamber door.In other embodiment, described spray header cleaning device also can have more part (even all) to be positioned at outside glove box, transmission chamber, loading and unloading device or the glove box.In other embodiment, also can keep the relative position of cleaning brush and cleaning brush tractor driver and glove box 222 constant, and the position of mobile spray head 2221, certainly, need to adjust accordingly and upgrade this moment to the machine assembly of position of control spray head 2221 and control module, can move to the position relative with the cleaning surface of cleaning brush, its surface to satisfy spray head 2221.
The present invention cleans as example (with reference to figure 3) take the spray heads 2221 in 31 pairs of glove boxes of cleaning brush 222 and describes, and in fact, described cleaning brush 31 can also clean the spray head in other glove boxes; The present invention is applied to the polygon layout take spray header cleaning device 30 MOCVD equipment (referring to Fig. 2) describes as example, and in practice, described spray header cleaning device 30 can also be applied in the linear MOCVD equipment; The present invention is installed in the transmission chamber 21 with spray header cleaning device 30, and in other embodiment, described spray header cleaning device 30 can also be installed in loading and unloading chamber 24 or each glove box; Should not limit protection scope of the present invention at this.
The below please refer to the principle schematic when cleaning of the spray header cleaning device among Fig. 3 shown in Figure 4.The surface to be cleaned of spray head 2221 and the bristle face of cleaning brush 31 31 are fitted, elastic seal ring 312 is with the surface to be cleaned of spray head 2221 and bristle face 311 sealings (forming the environment of relative sealing to prevent the miscellaneous part in the particle contamination glove box in the cleaning process) of cleaning brush 31, cleaning brush 31 rotates under the cooperation of power unit 36, gear unit 35, spray head manipulator 33, for the effect that guarantees to clean, can also between cleaning brush 31 and spray head 2221, apply certain pressure.In cleaning process, can also constantly adjust rotating speed, relative position, pressure and other parameters between described cleaning brush 31 and the spray head 2221, to obtain better cleaning performance.
Please refer to the structural representation of the spray header cleaning device of second embodiment of the invention shown in Figure 5.There is shown the part-structure of MOCVD.The structure identical with the first embodiment adopts identical label, hereby explanation.
Have heating unit 2223, graphite base 2222 and spray head 2221 in second-hand's casing 222, wherein said graphite base 2222 is used for placing substrate, described heating unit 2223 is used for described graphite base 2222 is heated, described spray head 2221 is positioned at the top that described graphite base 2222 is placed with a side of substrate, and the surface towards described substrate and graphite base 2,222 one sides of described spray head 2221 is surface to be cleaned.
The difference of present embodiment and last embodiment is that described spray header cleaning device 30 is positioned at second-hand's casing 222, need to be optimized design to the size of second-hand's casing 2222, to hold spray header cleaning device 30.When cleaning, the position relative with the bristle face of cleaning brush 31 311 that can be described spray head 2221 surface to be cleaned that moves to this spray head 2221 also can be that cleaning brush 31 moves to its bristle face position relative with the surface to be cleaned of spray head 2221.Certainly, described spray header cleaning device 30 can also be installed on respectively in other each glove box, perhaps described spray head cleans and fills 30 and also can be installed in one of them glove box, and this spray header cleaning device 30 is mobile between each glove box, and the spray head in each glove box is cleaned.
The below please refer to the structural representation of the spray header cleaning device of the third embodiment of the present invention shown in Figure 6.The structure identical with the first embodiment adopts identical label.Described spray header cleaning device comprises:
Cleaning brush 31 has bristle face 311, and this bristle face 311 to be cleaned surperficial relative with the surface to be cleaned of spray head 2221 or second-hand's casing 222 when cleaning has on this bristle face 311 the bristle (not shown) is arranged;
Cleaning brush manipulator 33, be connected with bristle face 311 relative side surfaces of described spray head 31, described cleaning brush manipulator 33 is used for clamping and mobile cleaning brush 31, so that described cleaning brush 31 and/or bristle can carry out relative motion with the surface to be cleaned of spray head or the surface to be cleaned of glove box, utilize this relative motion to clean the surface of spray head or glove box.
The described spray header cleaning device 30 of present embodiment can be arranged in the glove box or outside the glove box, can certainly be arranged in transmission chamber or the loading and unloading chamber.The difference of the described spray header cleaning device of present embodiment and the first two embodiment is, the working method of described spray header cleaning device is the semi-automatic work mode, namely in cleaning process, need person skilled to carry out the manual operation spray header cleaning device, manually operated principle will describe follow-up.
This spray header cleaning device also comprises:
Described power unit 36 is used for providing power, this power so that described cleaning brush 31 and/or bristle can rotate;
One end of described gear unit 35 is connected with described power unit 36, be used for to receive the power from power unit 36, and the other end is connected with described cleaning brush manipulator 33, with this power transmission to cleaning brush manipulator 33.
As optional embodiment, described spray header cleaning device 30 also comprises: driving shaft unit 38, and be used for operating personnel and adjust the position of cleaning brush 31 by this driving shaft unit 38, can avoid like this that the component of cleaning brush is overweight to be not easy to move and to change its position.。As shown in Figure 6, described driving shaft unit 38 comprises: the first driving shaft 381, and the one end is connected with cleaning brush manipulator 33, and described connection can be welding or the riveted joint by rivet etc., and its other end is free end; The second driving shaft 382, the middle part of described the second driving shaft 382 is connected with the middle part of the first driving shaft 381, describedly is connected to riveted joint, and this second driving shaft 382 and the first driving shaft 382 are respectively applied to drive described cleaning brush 31 motions.Can realize the semi-automation work of spray header cleaning device 30 by described driving shaft unit 38, namely person skilled can utilize this driving shaft unit 38 manually to change the position of cleaning brush 31.Certainly, operating personnel also can directly move and change the position of cleaning brush by adjusting described cleaning brush manipulator 33.
The semi-automatic work principle of the described spray header cleaning device of present embodiment is as follows: after depositing operation is finished, operating personnel control described gear unit 36 and power unit 35 described cleaning brush 31 and cleaning brush manipulator 33 are moved to surperficial relative position with described spray head 31, or operating personnel control the relative position of surface that described spray head moves to spray head and described cleaning brush 31, utilize the surface of 31 pairs of described spray heads of described cleaning brush to clean; Separate with described cleaning brush 31 on the surface that operating personnel control described spray head after cleaning is finished, with described cleaning brush 31 and cleaning brush manipulator 33 be positioned in the glove box, glove box is outer, in loading and unloading chamber or the transmission chamber.
As an embodiment, the part that described gear unit 35 is connected with described cleaning brush manipulator 33 is rigid structure (being denoted as 351 among the figure), it is hand-held that described rigid structure is used for operating personnel, the part that is connected with described power unit 36 of described gear unit 35 is flexible structure (being denoted as 352 among the figure), carries out relative motion so that described gear unit 35 can drive described cleaning brush 31 with the surface of described spray head.As an embodiment, the first pipeline 32, second pipe 37 also are set in the described gear unit 35, one end of described the first pipeline 32 is connected with hole on the cleaning brush 31, and the other end is connected with an end of second pipe 37, and the other end of described second pipe 37 is connected with vavuum pump 34; The part that described the first pipeline 32 is connected with second pipe 37 is formed with filter 331, and this filter 331 is used for filtering the particle under brush 31 brushes of being cleaned of cleaning process.Described vavuum pump 34 is used for vacuumizing, so that the pressure of the pressure of described the first pipeline 32, second pipe 37 deposition chambers 2221 when cleaning, thereby the particle in the assurance cleaning process can enter by the hole on the cleaning brush 31 the first pipeline 32, and is filtered by the filter 331 between the first pipeline 32 and the second pipe 37.The structure of the first pipeline 32 of the present invention, second pipe 37, vavuum pump 34 and filter 331 is identical with the first embodiment, please refer to the first embodiment, does not do at this and gives unnecessary details.
Embodiment is identical with the first two, and the described spray header cleaning device of present embodiment can also comprise image acquisition units and display unit, and the effect of described image acquisition units and display unit and structure please refer to the first two embodiment, does not do at this and gives unnecessary details.
Please refer to Fig. 7, be the structural representation of the MOCVD of second embodiment of the invention.The layout of described MOCVD equipment is the aircraft shape.Adopt same numeral with parts identical in the MOCVD equipment of the first embodiment shown in Figure 2.Particularly, described MOCVD equipment comprises: loading and unloading chamber 24, the first transmission chamber 211, the second transmission chamber 212, a plurality of glove box and test buffer chamber 25.In the present embodiment, being shaped as of described the first transmission chamber 211 and the second transmission chamber 212 is square.As an embodiment, the both sides of a direction of described the first transmission chamber 211 are connected with second-hand's casing 2222 with first-hand casing 2221; One side of another direction of described the first transmission chamber 211 is connected with loading and unloading chamber 24, and opposite side is connected with a side of a direction of described test buffer chamber 25; The opposite side of a direction of described test buffer chamber 25 is connected with a side of a direction of the second transmission chamber 212; The both sides of another direction of described the second transmission chamber 212 are connected with the 3rd transmission chamber 2223 and the 4th transmission chamber 2224.Substrate from outside toilet enters MOCVD equipment by loading and unloading chamber 25, the then transmission between described loading and unloading chamber 24, each glove box and test buffer chamber 25 by described the first transmission chamber 211 and the second transmission chamber 212.Described test buffer chamber 25 can arrange in-situ test module and refrigerating module at least, and the complete substrate of technique can cool off in test buffer chamber 25 in each glove box, and the characterisitic parameter of on-chip epitaxial material layer is tested.
As one embodiment of the present of invention, described spray header cleaning device is installed in each glove box.Certainly, described spray header cleaning device also can be installed in described loading and unloading chamber 24, the first transmission chamber 211, the second transmission chamber 212, the test buffer chamber 25.
MOCVD equipment shown in Fig. 7 has 4 glove boxes, two transmission chambers, 1 in-situ test chamber, in other embodiment, according to actual needs, can be optimized setting to the number of glove box, transmission chamber and in-situ test chamber.
Please in conjunction with the internal structure schematic diagram of the spray header cleaning device of fourth embodiment of the invention shown in Figure 8.Described spray header cleaning device comprises:
Cleaning brush 41 has the bristle face (not shown), and this bristle face to be cleaned surperficial relative with the surface to be cleaned of spray head 40 or glove box (not shown) when cleaning has the bristle (not shown) on this bristle face;
The cleaning brush manipulator is used for clamping and mobile cleaning brush 41, so that described cleaning brush 41 and/or bristle can carry out relative motion with the surface of spray head 40, utilizes this relative motion to clean the surface of spray head 40;
The adsorbent equipment (not shown) is used for adsorbing the pollutant of cleaning process.
Particularly, as an embodiment, the area of the bristle face of described cleaning brush 41 is less than the surface to be cleaned of described spray head 40, and certainly, the area of the bristle face of described cleaning brush 41 also can equal the surface to be cleaned of described spray head 40.In this example, the shape of described cleaning brush 41 is circular, and in other embodiment, the shape of described cleaning brush 41 also can be square, triangle, rhombus or other rules or irregular figure.Usually, the area of cleaning brush 41 is larger, and the speed of cleaning is faster, but it is larger to clean the power that needs, and the cost of spray header cleaning device is also higher, and those skilled in the art can select as required.
As an embodiment, the material of the bristle of described cleaning brush 41 can be metal, the bristle face outside of described cleaning brush 41 also can arrange elastic seal ring, and also image acquisition units, image analyzing unit and feedback unit can be set in the described spray header cleaning device, specifically please refer to the first to the 3rd embodiment, do not do at this and give unnecessary details.
Please continue with reference to figure 8, as an embodiment, described cleaning brush manipulator 43 comprises:
Movable guiding rail 43, one end and described guide supporting parts 40 are connected by fixture, described movable guiding rail 43 can carry out circular motion by relatively described guide supporting parts 40, and the track of the circular motion of this movable guiding rail 43 covers the surface of described spray head 40 at least;
As an embodiment, described guide supporting parts 44 can be connected with power unit, and described guide supporting parts 44 are given described movable guiding rail 43 with power transmission, control speed, direction, the track of described movable guiding rail 43 circular motion.
The radial motion of described slide block 42 can be passed through the various ways such as flexible axle, belt pulley and realize.As an embodiment, the flexible axle that moves through of described slide block 42 is realized, one end of this flexible axle is connected with slide block 42, the other end is connected with power unit, pass through flexible axle, power unit can be controlled the speed of the motion of described slide block 42, by controlling the speed of described slide block, can control the speed of cleaning brush.As another embodiment of the present invention, can also at described guide supporting parts 44 interior installation belt pulleys, utilize the described slide block 42 of rotation of belt pulley to move along described movable guiding rail 43.
The length of described movable guiding rail 43 should be at least greater than the diameter on the surface to be cleaned of described spray head 41.
Below in conjunction with Fig. 8 the operation principle of described spray header cleaning device is described.
When carrying out epitaxial deposition process, described movable guiding rail 43 moves to A position or C position among the figure, and the movement of described movable guiding rail 43 can be carried out under the driving of power source; The surface to be cleaned of A position or C position and spray head 40 has certain angle among the figure, this angle can be carried out concrete setting according to the area on the surface to be cleaned of spray head 40, the length of movable guiding rail 43, but should satisfy can be not influential to each structure of spray header cleaning device when not affecting epitaxial deposition process and carrying out epitaxial deposition process A position or C position among the figure, at this moment, cleaning brush 41 is positioned at the position away from described spray head 40 and its surface to be cleaned;
After epitaxial deposition process finishes, it is relative with the surface to be cleaned of described spray head 40 that described movable guiding rail 43 moves to the bristle face of described cleaning brush 41, and bristle forms with the surface to be cleaned of described spray head 40 and contacts, during with 41 rotation of box lunch spray cleaning brush, described bristle can form relative friction with the surface to be cleaned of described spray head 40, certainly, in order to guarantee cleaning performance, this pressure of certain pressure (this pressure can apply by movable guiding rail 43) can also be between described spray head 40 and cleaning brush 41, applied and fixation pressure can be, also can arrange flexibly according to the clean level of spray head or the behaviour in service of technological requirement or spray head, described cleaning brush 41 carries out radial motion along movable guiding rail 43 under the drive of described slide block 42, and described movable guiding rail 43 carries out circular motion between A position and C position; As shown in the figure, slide block 42 in the A position, B position, C position be positioned at the diverse location of described movable guiding rail 43, only for signal, should not limit protection scope of the present invention at this among the figure.
Need to prove, in the present embodiment, the circular motion of described movable guiding rail 43 on the surface to be cleaned of described spray head 41 is half circular motion, namely the center of circle of this circular motion is arranged at beyond the spray head 41, and the angle of this circular motion is less than 360 degree, in other embodiment, also can be with guide supporting parts 44, movable guiding rail 43 moves to the correspondence position on the surface to be cleaned of described spray head 41, such as described guide supporting parts 44, the top at the center on the surface to be cleaned of movable guiding rail 43 and spray head 41, so that described movable guiding rail 41 (is the position of top at the center on the surface to be cleaned that is arranged at spray head 41, the center of circle of circular motion along carrying out full circle Zhou Yundong on the surface to be cleaned of described spray head, the angle of circular motion is more than or equal to 360 degree), at this moment, the length of described movable guiding rail 43 can be less than the diameter on the surface to be cleaned of described spray head 41.
The described spray header cleaning device of present embodiment is positioned at described glove box, described cleaning brush manipulator comprises: guide supporting parts, movable guiding rail and slide block, utilize the motion of slide block and movable guiding rail, so that cleaning brush and spray head surface are cleaned, the volume of described guide supporting parts, movable guiding rail and slide block is little, thereby so that whole spray header cleaning device is simple in structure, compact, also reduced the cost of spray header cleaning device.
To sum up, the spray header cleaning device that the embodiment of the invention provides utilizes cleaning brush manipulator clamping and mobile cleaning brush, the relative motion that utilizes cleaning brush and/or bristle to carry out with the surface of spray head, clean the surface of spray head, thereby realize the cleaning on spray head surface, because the embodiment of the invention is utilized cleaning brush manipulator clamping cleaning brush, operating personnel need not with hand clamping spray head, need not to wait for that the temperature on spray head surface is reduced to safe temperature (being the temperature that operating personnel's hand can not be burned), thereby reduced the time of cleaning, provide spray head to be used for the time of depositing operation and the utilization rate of depositing device; And because the present invention utilizes the relative motion on the surface of bristle and spray head to clean the surface of spray head, thereby with chemical modes such as using plasmas the spray head surface is cleaned and to be caused the damage of spray head to compare, the embodiment of the invention can not damaged spray head, thereby can improve the service life of spray head;
Further optimally, the working method of described spray header cleaning device is the Automatic Control mode, need not operating personnel operates spray head, can utilize track and the speed of relative motion on the surface of manipulator control unit controls cleaning brush manipulator and described spray head, can reach simultaneously better cleaning performance and clean labor-saving;
Further optimally, described spray header cleaning device also comprises: image acquisition units, image analyzing unit and feedback unit, thereby can monitor the image on the surface of spray head, thereby judge the situation of the cleanliness factor on spray head surface according to described image, automatically control the motion of cleaning brush manipulator and cleaning brush, obtain better cleaning performance;
Further optimally, described spray header cleaning device can comprise the first cleaning brush and the second cleaning brush, wash thereby can slightly clean with seminal plasma spray head, thick cleaning can be quickly with most of pollutant removal on spray head surface, shorten the time that spray head cleans, seminal plasma is washed then can with the pollutant removal that is difficult to remove of spray head remained on surface, guarantee the cleanliness factor that spray head cleans;
Further optimally, described spray header cleaning device also comprises around the elastic seal ring of described cleaning brush near a to be cleaned surperficial side of described spray head, when cleaning, described elastic seal ring forms the environment of relative closure on the surface to be cleaned of described cleaning brush and described spray head, thereby prevents the miscellaneous part of the particle contaminant glove box in the cleaning process;
Further optimally, described spray header cleaning device is positioned at described glove box, described cleaning brush manipulator comprises: guide supporting parts, movable guiding rail and slide block, utilize the motion of slide block and movable guiding rail, so that cleaning brush and spray head surface are cleaned, the volume of described guide supporting parts, movable guiding rail and slide block is little, thereby so that whole spray header cleaning device is simple in structure, compact, has also reduced the cost of spray header cleaning device.
Although oneself discloses the present invention as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art without departing from the spirit and scope of the present invention, all can make various changes or modifications, so protection scope of the present invention should be as the criterion with the claim limited range.
Claims (14)
1. a spray header cleaning device is used for the surface of spray head is cleaned, and it is characterized in that comprise: cleaning brush has bristle;
The cleaning brush manipulator is used for clamping and mobile cleaning brush so that described cleaning brush and/or bristle can with
Relative motion is carried out on the surface of spray head, utilizes this relative motion to clean the surface of spray head;
Adsorbent equipment is used for adsorbing the pollutant of cleaning process.
2. spray header cleaning device as claimed in claim 1 is characterized in that, the working method of described spray header cleaning device is the Automatic Control mode, also comprises:
The manipulator control unit is used for controlling described cleaning brush manipulator, adjusts track and the speed of relative motion on the surface of described cleaning brush manipulator and described spray head.
3. spray header cleaning device as claimed in claim 2 is characterized in that, described manipulator control unit comprises:
Power unit is used for providing power, and this power is so that described cleaning brush manipulator and/or cleaning brush can carry out relative motion with the surface of described spray head;
Gear unit, one section is connected with described power unit, is used for receiving the power from power unit, and the other end is connected with described cleaning brush manipulator, with power transmission extremely described cleaning brush manipulator and/or cleaning brush;
Sub-control unit is used for controlling described power unit, gear unit, controls the motion of described cleaning brush manipulator and/or cleaning brush by described power unit, gear unit;
Described spray header cleaning device is used for depositing device, and described depositing device comprises: glove box, transmission chamber and loading and unloading chamber, and described spray head is positioned at described glove box, and described glove box is connected with described transmission chamber and/or loading and unloading chamber; Described cleaning brush and cleaning brush manipulator are positioned at outside described glove box, transmission chamber, loading and unloading chamber or the glove box;
After depositing operation is finished, described sub-control unit is controlled described gear unit and power unit described cleaning brush and cleaning brush manipulator is moved to surperficial relative position with described spray head, or described sub-control unit controls the position relative with described cleaning brush, surface that described spray head moves to spray head, utilizes described cleaning brush that the surface of described spray head is cleaned; After the cleaning of spray head was finished, described sub-control unit also can be used for controlling the surface of described spray head and separates with described cleaning brush, with described cleaning brush and cleaning brush manipulator be positioned in the glove box, glove box is outer, in loading and unloading chamber or the transmission chamber.
4. spray header cleaning device as claimed in claim 3 is characterized in that, also comprises:
Image acquisition units is for the image on the surface that gathers spray head;
Image analyzing unit is used for the image that described image acquisition units collects is analyzed, and judges the situation of the cleanliness factor on spray head surface;
Feedback unit is used for the analysis result according to image analyzing unit, obtains control signal, and described control signal is as the foundation of the relative motion of the described cleaning brush manipulator of the adjustment of described sub-control unit and cleaning brush.
5. spray header cleaning device as claimed in claim 1 is characterized in that, the working method of described spray header cleaning device is the semiautomatic control mode, also comprises: power unit, gear unit;
Described power unit is used for providing power, this power so that described cleaning brush and/or bristle can rotate;
One end of described gear unit is connected with described power unit, be used for to receive the power from power unit, and the other end is connected with described cleaning brush manipulator, with this power transmission extremely described cleaning brush manipulator and/or cleaning brush;
Described depositing device comprises: glove box, transmission chamber and loading and unloading chamber, and described spray head is positioned at described glove box, and described glove box is connected with described transmission chamber and/or loading and unloading chamber; Described cleaning brush cleaning device is positioned at outside described glove box, transmission chamber, loading and unloading chamber or the glove box;
After depositing operation is finished, operating personnel control described gear unit and power unit described cleaning brush and cleaning brush manipulator are moved to surperficial relative position with described spray head, or operating personnel control the position relative with described cleaning brush, surface that described spray head moves to spray head, utilize described cleaning brush that the surface of described spray head is cleaned; Separate with described cleaning brush on the surface that operating personnel control described spray head after cleaning is finished, with described cleaning brush and cleaning brush manipulator be positioned in the glove box, glove box is outer, in loading and unloading chamber or the transmission chamber.
6. spray header cleaning device as claimed in claim 5, it is characterized in that, the part that described gear unit is connected with described cleaning brush manipulator is rigid structure, it is hand-held that described rigid structure is used for operating personnel, the part that is connected with described power unit of described gear unit is flexible structure, carries out relative motion so that described gear unit can drive the surface of described cleaning brush and described spray head.
7. spray header cleaning device as claimed in claim 6 is characterized in that, also comprises:
Image acquisition units is for the image on the surface that gathers spray head;
Display unit, the image that is used for image acquisition units is gathered shows that operating personnel adjust the relative motion of described cleaning brush manipulator and cleaning brush according to the image of display unit.
8. such as the described spray header cleaning device of arbitrary claim in the claim 3,5, it is characterized in that, described spray header cleaning device is positioned at the glove box of described depositing device, and described cleaning brush manipulator comprises: the guide supporting parts, and it is outside to be positioned at described spray head;
Movable guiding rail, an end is connected by fixture with described guide supporting parts, and described movable guiding rail can carry out circular motion by relatively described guide supporting parts, and the track of the circular motion of this movable guiding rail covers the surface of described spray head at least;
Slide block, be arranged on the described movable guiding rail, described slide block is used for being flexibly connected described movable guiding rail and cleaning brush, so that described cleaning brush can carry out radial motion along with described slide block and described movable guiding rail, the direction of described radial motion is the radial direction along described circular motion, described radial motion cooperates with described circular motion, so that the movement locus of described cleaning brush covers the surface of whole spray head.
9. spray header cleaning device as claimed in claim 8, it is characterized in that, described guide supporting parts are connected with power unit, and described guide supporting parts are given described movable guiding rail with power transmission, control speed, direction, the track of described movable guiding rail circular motion.
10. spray header cleaning device as claimed in claim 8 is characterized in that, also comprises:
Image acquisition units is for the image on the surface that gathers spray head;
Image analyzing unit is used for the image that described image acquisition units collects is analyzed, and judges the situation of the cleanliness factor on spray head surface;
Feedback unit is used for the analysis result according to image analyzing unit, obtains control signal, and described control signal is as the input signal of described power source.
11. spray header cleaning device as claimed in claim 1 is characterized in that, the material of described cleaning brush and bristle is identical or different.
12. spray header cleaning device as claimed in claim 1, it is characterized in that, described cleaning brush comprises the first cleaning brush and the second cleaning brush, the bristle of described the first cleaning brush is thicker than the bristle of the second cleaning brush, described the first cleaning brush is used for carrying out the thick cleaning of spray head, and described the second cleaning brush is used for the seminal plasma of spray head and washes.
13. spray header cleaning device as claimed in claim 1, it is characterized in that, also comprise: elastic seal ring, around the to be cleaned surperficial side of described cleaning brush near described spray head, when described elastic seal ring is used for cleaning, form the environment of relative closure on the surface to be cleaned of described cleaning brush and described spray head, described adsorbent equipment comprises: absorption pipeline and vavuum pump, one end of described absorption pipeline is connected with the surface with the relative side in described spray head surface to be cleaned of described cleaning brush, the other end is connected with described vavuum pump, described vavuum pump be used for so that an end pressure of described absorption pipeline less than the pressure of the other end, the pollutant in cleaning process since the pressure differential of absorption pipe ends along with described absorption pipeline is pulled out between described cleaning brush and the spray head.
14. spray header cleaning device as claimed in claim 13 is characterized in that, the material of described elastic seal ring is a kind of or combination wherein in rubber, metal, pottery, the plastics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103051849A CN103028560A (en) | 2011-10-10 | 2011-10-10 | Spray head washing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103051849A CN103028560A (en) | 2011-10-10 | 2011-10-10 | Spray head washing device |
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| CN103028560A true CN103028560A (en) | 2013-04-10 |
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| CN2011103051849A Pending CN103028560A (en) | 2011-10-10 | 2011-10-10 | Spray head washing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107961931A (en) * | 2017-12-29 | 2018-04-27 | 信利（惠州）智能显示有限公司 | Cleaning device |
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| CN107961931B (en) * | 2017-12-29 | 2019-06-04 | 信利（惠州）智能显示有限公司 | Cleaning device |
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Application publication date: 20130410 |