CN102997834A - Non-conducting medium film thickness online detecting device of coplane capacitive sensor - Google Patents
Non-conducting medium film thickness online detecting device of coplane capacitive sensor Download PDFInfo
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- CN102997834A CN102997834A CN2012105355612A CN201210535561A CN102997834A CN 102997834 A CN102997834 A CN 102997834A CN 2012105355612 A CN2012105355612 A CN 2012105355612A CN 201210535561 A CN201210535561 A CN 201210535561A CN 102997834 A CN102997834 A CN 102997834A
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Abstract
The invention discloses a non-conducting medium film thickness online detecting device of a coplane capacitive sensor. The non-conducting medium film thickness online detecting device comprises a detecting circuit, a data collecting card, an interface converter and a computer. The detecting circuit comprises a measuring exciting circuit, a reference capacitor, a main amplifier, a sensor measuring capacitor, a signal demodulator circuit, a signal separating circuit and a correcting amplifying circuit. The non-conducting medium film thickness online detecting device has the advantages of being good in adaptability, free of radial pollution, good in dynamic response, capable of achieving non-contact measuring, small in self temperature coefficient and the like and has wide application in online measuring of the non-conducting medium film thickness.
Description
Technical field
The present invention relates to the plastic film thickness detection field, relate in particular to the coplanar capacitive transducer of a kind of employing the non-conductive medium film thickness is carried out on-line measuring device.
Background technology
In the plastic sheeting manufacturing, thickness is most important physical index.The homogeneity of film thickness is directly connected to product usability, the rate of classification of product, price and the performance of enterprises.The direct quality that affects product in uneven thickness, for packing film POF, the packaging film of tableware for example, thin easier the breaking in place when being subjected to thermal shrinkage; For coated film, such as awning film (PVC Polyvinylchloride), its surface can be coated with one deck antifoggant, and uneven film thickness is even can to cause the in uneven thickness of coating, reduces the serviceable life of film.Research and development film production on-line thickness measurement system is very essential observing and controlling means, and the parameter that can regulate timely and correct production line reduces defect rate, saves starting material.The development of coplanar condenser type thickness measuring system is one of important method that realizes on-line measurement with using, and will play a decisive role with the consumption of raw materials that reduces product to improving non-conductive medium film product quality.
The thicknessmeter ratio that present domestic non-conductive medium thin film fabrication industry is equipped with is extremely low, and mainly supporting is external product, because the import thickness-measuring equipment is expensive, only has the larger manufacturer of minority economic strength and scale to be equipped with.Be not equipped with the producer of Thinner Films system can only be by rule of thumb or artificial way measure, can't guarantee the quality of product.
In the precision measurement field, minute sized delicate metering and detection are important research directions, and non-cpntact measurement is a kind of Perfected process of micro-size measurement.The capacitance measurement technology has obtained large-scale popularization in recent years as the important method of non-cpntact measurement micrometric displacement.The employed capacitive transducer of coplanar condenser type non-conductive medium Thinner Films system has simple in structure, strong adaptability; Dynamic response is good; Measured value has the advantages such as self average effect, temperature coefficient be little, is widely used in the measurement of micron order size non-conductive medium film line.
At present the detection technique of online film thickness mainly contains following several mode: 1. infrared sensing detection method, and utilize specific infrared ray wave band in specific plastic sheeting, to be measured the thickness of film by the principle of strong absorption.This sensor detects stable, is not subjected to the impact of environmental change.But to the sensitive of adjuvant and color, can not adapt on the same production line, producing multiple product.2. β ray or gamma-rays detection method are to be used for the earliest the sensor that film thickness detects, and it uses radioactive source (as: Pm147, Kr85, Si90) as signal source, technology maturation.But its environmental pollution is harmful, need to handle the radioactive source occupancy permit, imports and exports the formality more complicated.Accuracy of detection can reduce along with the decay of radioactive source.3. capacitance sensing detection method: capacitance type sensor produces electric field and penetrates film substrate with certain angle, reads the thickness of film according to the difference of specific inductive capacity corresponding to different film thicknesses.Capacitive transducer has following advantage: do not have the nucleon ray, the restriction that not put rules into practice by relevant nuclear device, and low price.Contrast the blown film production line of a same production scale and resin kind, a cover nuclear-magnetism thicknessmeter exceeds 30%～100% than capacitive price.Also have in addition the measuring method of optics, this method is not suitable for the thickness measuring of blown film, forms because the film bubble is the gas inflation, and its shape is not the circle of rule, adds the vibrations of machine itself, can make the film bubble that small size swing is radially being arranged, and causes it to measure and loses efficacy.
It is external that what adopt the earliest thickness that the capacitance detecting method measures film is Germany and Switzerland, in 20 end of the centurys, control (Plast Control) is moulded by Germany and Switzerland elder brother base of a fruit lattice (KUNDIG) company has just released on-line automatic thickness measuring system, realizes online, in real time detection to film thickness.Now the production line of European many blown film factory all is equipped with automatic thickness control system.
With abroad compare, domestic research and development in the non-conductive medium THICKNESS GAUGE FOR THE MEASUREMENT OF THIN FOILS are just at the early-stage, far lag behind Europe and the U.S., domestic non-conductive medium film line all is the external thickness-measuring equipment of import.The bright plastic cement equipment of Guangdong gold company limited is domestic professional plastics machinery manufacturer, and it adopts the on-line automatic thickness measuring system of Switzerland elder brother base of a fruit lattice (KUNDING) company.More domestic scientific research institutions also do not have the product of typing at present on the market in the positive research and development of carrying out non-conductive medium Thinner Films product yet.Present domestic non-conductive medium film line Measurement Technique mainly adopts X-ray measurement, easily human body is damaged; Germany relies on the electric capacity edge effect to realize the non-conductive medium measured film thickness, but detect thickness is very little, in 200 microns, can't meet the demands.Along with the development of science and technology, plastic sheeting production and processing field is in the urgent need to the online non-conductive medium measured film thickness of precision control system.
Summary of the invention
Technical matters to be solved by this invention has provided a kind of strong adaptability,, measurement range low without ray contamination, cost can reach millimetre-sized non-conductive medium film thickness on-line measuring device based on coplanar capacitive transducer.
For achieving the above object, the invention provides a kind of non-conductive medium film thickness on-line measuring device of coplanar capacitive transducer, comprise testing circuit, data collecting card, interface convertor, computing machine;
Testing circuit comprises the measurement exciting circuit
, reference capacitance
, main amplifier, sensor measures capacitance
, signal demodulating circuit, demultiplexing circuit
, the calibration amplifying circuit; Measure exciting circuit
For generation of sinusoidal carrier signal, with main amplifier, reference capacitance
, sensor measures capacitance
Consist of the arithmetic expression metering circuit, it is converted into the voltage signal that is easy to transmit with the variation of electric capacity, realizes the conversion of capacitance-voltage, and voltage signal is modulated, and reduces the noise in the transmission course; Main amplifier is used for faint signal is amplified, with the coupling subsequent conditioning circuit; Signal solution mediation demultiplexing circuit
Be used for the output signal of amplifying circuit is carried out demodulation, take out the DC component that changes voltage; The calibration amplifying circuit is sent into data collecting card after the DC component that changes voltage is calibrated amplification;
The DC component signal of the variation voltage that data collecting card is received for achieving a butt joint carries out the A/D conversion;
Interface convertor is used for realizing the communication of data collecting card and computing machine.
Sensor measures capacitance
Comprise active electrode 1 and active electrode 22, be the donut arranged in form in same plane, below, the plane at two active electrode places consists of the measurement surface of sensor, and tested mold 5 is placed on measures on the surface.
Sensor measures capacitance
Outermost layer is provided with external shielding layer 9, this screen layer effective grounding.
Add an internal shield 8 between effect electrode 1 and the active electrode 22, internal shield 8 structurally is one with external shielding layer 9; Between active electrode 1 and the internal shield 8, between internal shield 8 and the active electrode 22, all pass through insulation course 7 isolation between active electrode 22 and the external shielding layer 9.
When increasing according to the thickness of tested non-conductive medium film, corresponding increase sensor measures capacitance
Diameter.
Also comprise wireless digital broadcasting station between interface convertor and computing machine, wireless digital broadcasting station comprises main frame and slave, is used for the wireless data both-way communication of data collecting card and computing machine.
Also comprise the forward reset switch, the counter-rotating reset switch that are installed on the non-conductive medium film line, the data transmission of collection is to data collecting card, so with making the sensor measures capacitance that shows on the computing machine
On swing circle and the production line actual swing circle synchronously and sense of rotation consistent.
Also comprise optical fiber film bubble detecting sensor, whether the data transmission of collection is adjacent to sensor to data collecting card for detection of the film bubble.
Also comprise and be installed in respectively sensor measures capacitance
Inner probe temperature sensor and the circuit temperature sensor that is installed in inside circuit, the temperature data of collection is transferred to data collecting card, is used for temperature compensation.
Desired value 11, lower limit 12, the upper limit 13 according to the definite non-conductive medium film thickness of design show in the concentric circles mode on computers, the actual non-conductive medium film thickness 10 that detects online is presented at wherein in proportion, the coordinate that also shows on the computing machine can clearly calculate thickness and the variation relation of non-conductive medium film.
The development of coplanar condenser type thickness measuring system is to guarantee accuracy and reliability and realize one of important method of on-line measurement with using, and will play a decisive role with the consumption of raw materials that reduces product to improving non-conductive medium film product quality.The employed capacitive transducer of coplanar condenser type non-conductive medium THICKNESS GAUGE FOR THE MEASUREMENT OF THIN FOILS has simple in structure, strong adaptability; Dynamic response is good; Can realize non-cpntact measurement, have average effect; The advantage such as self temperature coefficient is little is widely used in micro-size measurement.
Description of drawings
Fig. 1 is electric capacity non-conductive medium film thickness sensor measuring principle synoptic diagram;
Fig. 2 is the equivalent measurement surface section figure of electric capacity non-conductive medium film thickness sensor probe;
Fig. 3 is the side sectional view of electric capacity non-conductive medium film thickness sensor;
Fig. 4 is the vertical view of Fig. 3;
Fig. 5 is for detecting mechanism circuit part hardware block diagram;
Fig. 6 is the hardware composition frame chart of electric capacity non-conductive medium film thickness on-line detecting system;
Fig. 7 is the figure that the on-line measurement data show on computers.
Among the figure: 1, active electrode one, 2, active electrode two, 3, correcting electrode, 4, screen layer, 5, mold, 6, cable, 7, insulation course, 8, internal shield, 9, external shielding layer, 10, the non-conductive medium film thickness, 11, desired value, 12, lower limit, 13, the upper limit.
Embodiment
1. measuring principle
The form of the electric capacity non-conductive medium film thickness sensor that this problem adopts is by capacity plate antenna malformation, and it is coplanar formula capacitive transducer.Coplanar formula capacitive transducer is that two potential electrode with common plane-parallel capacitor are the donut form and are placed in the same plane.Form electric capacity between two effective potential electrode active electrodes 1, the active electrode 22, electric field line is the chrysanthemum shape and connects two electrode surfaces, as shown in Figure 1.The below, plane at two active electrode places has namely consisted of the measurement surface of sensor.Measured the surface when upper when tested mold 5 is placed on, the non-conductive medium film just with the specific inductive capacity of operation interval by dielectric constant of air
Become dielectric constant of air
With the thin-film dielectric constant
Compound, namely changed the size of electric capacity, make between the measurement capacitance of capacitive transducer and the film thickness and formed the funtcional relationship of determining, thereby can detect the one-tenth-value thickness 1/10 of film.
Under certain temperature conditions, the specific inductive capacity of establishing air is
, the specific inductive capacity of film is
, the two can regard constant as, and the effective dielectric constant that contains so the film air is:
Wherein:
In order to simplify the Modeling Calculation process, set up idealized model, now the annulus of electric capacity non-conductive medium film thickness sensor probe vertical view is measured unfolded surface, equivalence be among Fig. 2 shown in rectangle structure, Figure 3 shows that this equivalence meter face sectional view, simulate the electric force lines distribution situation of this equivalence meter face among the figure with donut.
In actual measurement, because generally there is temperature variation in the scene,
With
Can variation with temperature and change, finally cause measurement result to be drifted about with temperature, thereby cause measuring error.
Can in intelligent analysis system, introduce thus the temperature variation of the online Test Field of temperature sensor, demarcate link in characteristic, the data and the on-line measurement data that obtain after the relation of the relative dielectric constant of air and film and temperature measured by envelope test are carried out the match correction, adopt computer data to process and carry out temperature compensation, realize the high precision work operation of measuring and analysis system.
Wherein:
C T : sensor measures capacitance;
K: the sensor severity factor;
δ: the non-conductive medium film thickness.
2. the design of electric capacity non-conductive medium film thickness sensor probe
The design's measuring sonde is shown in Fig. 4,5, and in the measurement of reality, the capacitance of sensor is very little, and extraneous electromagnetic interference (EMI) can make measurement result produce very large error.For the antijamming capability that improves probe and the precision of measurement, at external shielding layer 9 of probe outermost layer design, this screen layer must effective grounding.
The electric field line that desirable plane-parallel capacitor forms is parallel lines, but in fact, because the edge effect of electric capacity, the line of electric force at pole plate edge is crooked, and the closer to the edge, line of electric force is more severe with regard to bending.The present invention is the edge effect that utilizes electric capacity, and the dispersing as much as possible of the line of electric force between two active electrodes is to pass measured medium; This just need to add an internal shield 8 between two active electrodes, correct the path of line of electric force interaction between the two, and internal shield 8 structurally is one with external shielding layer 9; All pass through insulation course 7 isolation between each active electrode and the screen layer.
Because the electric capacity of capacitive transducer is smaller, to adopt special driving cable technology to be connected between probe and the circuit, with antijamming capability in advance.In general, the size of sensor is larger, and capacitance is larger, and electric field intensity is larger, and the penetration capacity of line of electric force is just stronger, so the diameter of sensor probe will be according to the Thickness Design of measured mold film.Generally, the non-conductive medium film of measurement thicker needs the transmission capacity of electric field of probe stronger, and the diameter of probe is larger.
3. the hardware of electric capacity non-conductive medium film thickness on-line detecting system
The hardware of electric capacity non-conductive medium film thickness on-line detecting system mainly comprises, as shown in Figure 7:
(1) detects the mechanism circuit part: measure exciting circuit
, reference capacitance
, main amplifier, sensor measures capacitance
, signal demodulating circuit, demultiplexing circuit
, the accurate stabilized voltage supply of calibration amplifying circuit and low noise forms, hardware block diagram is as shown in Figure 6.
Measure exciting circuit
Produce sinusoidal carrier signal, with main amplifier, reference capacitance
, sensor measures capacitance
Consist of the arithmetic expression metering circuit.It is converted into the voltage signal that is easy to transmit with the variation of electric capacity, realizes the conversion of capacitance-voltage, and voltage signal is modulated, and reduces the noise in the transmission course.
The effect of main amplifier is that faint signal is amplified, to mate subsequent conditioning circuit and to strengthen antijamming capability.Main amplifier has high input impedance, adopts the method for driving cable technology to eliminate the impact that stray capacitance causes, and guarantees enough large open-loop gain to realize high-accuracy arithmetic, and it is output as a modulated wave, and the variation of amplitude is with corresponding by the variation of Thickness Measurement by Microwave.
The signal solution be in harmonious proportion demodulator circuit that demultiplexing circuit consists of with the output signal of amplifying circuit by detection and demultiplexer and carrier separation.By signal demodulating circuit, demultiplexing circuit demodulation is carried out in the measured signal of amplifying, taken out the DC component that changes voltage, to satisfy dynamically and the requirement of static measurement.
(2) GAM7011 data collecting card
The GAM7011 data collecting card is realized the A/D conversion to voltage signal, and and computer communication, realize that data are to the transmission of host computer.
(3) RS485/232 interface convertor ADAM4520
The effect of ADAM4520 interface convertor is the bi-directional conversion that realizes the RS232 interface of the RS485 interface of GAM7011 and wireless digital broadcasting station, to guarantee the communication of computing machine and capture card.
(4) ZigBee wireless digital broadcasting station
The ZigBee wireless digital broadcasting station comprises ZigBee data radio station main frame, ZigBee data radio station slave, the ZigBee wireless digital broadcasting station is realized the wireless data both-way communication of data collecting card and host computer, overcome the restriction of sensor circuit part and host computer wire transmission, realize the remote of data, accessible transmission.For short-distance transmission, can directly connect transmission with cable.
(5) ancillary hardware
Ancillary hardware mainly comprises forward reset switch, counter-rotating reset switch, optical fiber film bubble detecting sensor, temperature sensor.
The rotating reset switch is mounted in two limit switches on the non-conductive medium film line, it has two effects: the one, and make the swing circle of the swing circle of pointer on the software and production line synchronous, make the thickness point that shows on the software can correct corresponding on the film hook bolt; The 2nd, the direction of steering needle rotation is consistent with the direction of rotating disk, when the initial point on the rotating disk is run into the reset switch of forward, pointer on host computer polar coordinates profile diagram and the trend map resets, and continue according to the clockwise direction rotation of (forward), the rotating disk of one direction rotation only need be installed a switch and get final product.
Film bubble detecting sensor adopts E32-D12 Fibre Optical Sensor and the E3X-ZD fiber amplifier of Omron, its effect is to detect the film bubble whether to be adjacent to sensor, when electric capacity non-conductive medium film thickness sensor was measured less than film, the output voltage values of upper computer software record circuit this moment was as zero point.Its course of work is: when not having the film bubble, and fiber amplifier output low level signal, when gathering this low level signal on the software, record output voltage at this moment is as zero-point voltage
, fiber amplifier output high level when detecting the film bubble, the voltage of this moment is
, the voltage that film thickness is corresponding is
Temperature sensor adopts two AD590, they are installed in respectively the inner probe temperature sensor of probe and are installed in the circuit temperature sensor of inside circuit, the temperature of probe and the temperature of circuit are measured, and the temperature data of collection is used for temperature compensation.
(6) computer PC
Computing machine adopts industrial computer, and it mainly contains display, main frame, keyboard and mouse composition, and operating system adopts Windows Xp sp3, is the platform of upper computer software operation.
The online testing result of electric capacity non-conductive medium film thickness on-line detecting system shows on computers, shows the result as shown in Figure 8.According to the figure that shows, can be very intuitively and find out accurately the relation of non-conductive medium film thickness 10 and desired value 11, lower limit 12, the upper limit 13, according to the coordinate that shows on the computing machine, can very clearly calculate thickness and the variation relation of non-conductive medium film simultaneously.
Along with the development of science and technology, plastic sheeting production and processing field is in the urgent need to the online non-conductive medium measured film thickness of precision control system.The development of coplanar condenser type thickness measuring system is to guarantee accuracy and reliability and realize one of important method of on-line measurement with using, and will play a decisive role with the consumption of raw materials that reduces product to improving non-conductive medium film product quality.The employed capacitive transducer of coplanar condenser type non-conductive medium THICKNESS GAUGE FOR THE MEASUREMENT OF THIN FOILS has simple in structure, strong adaptability; Dynamic response is good; Can realize non-cpntact measurement, have average effect; The advantage such as self temperature coefficient is little is widely used in micro-size measurement.
Although the present invention discloses as above with preferred embodiment; so it is not to limit the present invention; in the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make according to the present invention various corresponding changes and distortion, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (10)
1. the non-conductive medium film thickness on-line measuring device of a coplanar capacitive transducer comprises testing circuit, data collecting card, interface convertor, computing machine, it is characterized in that:
Testing circuit comprises the measurement exciting circuit
, reference capacitance
, main amplifier, sensor measures capacitance
, signal demodulating circuit, demultiplexing circuit
, the calibration amplifying circuit; Measure exciting circuit
For generation of sinusoidal carrier signal, with main amplifier, reference capacitance
, sensor measures capacitance
Consist of the arithmetic expression metering circuit, it is converted into the voltage signal that is easy to transmit with the variation of electric capacity, realizes the conversion of capacitance-voltage, and voltage signal is modulated, and reduces the noise in the transmission course; Main amplifier is used for faint signal is amplified, with the coupling subsequent conditioning circuit; Signal solution mediation demultiplexing circuit
Be used for the output signal of amplifying circuit is carried out demodulation, take out the DC component that changes voltage; The calibration amplifying circuit is sent into data collecting card after the DC component that changes voltage is calibrated amplification;
The DC component signal of the variation voltage that data collecting card is received for achieving a butt joint carries out the A/D conversion;
Interface convertor is used for realizing the communication of data collecting card and computing machine.
2. the non-conductive medium film thickness on-line measuring device of a kind of coplanar capacitive transducer according to claim 1 is characterized in that: sensor measures capacitance
Comprise active electrode one (1) and active electrode two (2), be the donut arranged in form in same plane, below, the plane at two active electrode places consists of the measurement surface of sensor, and tested mold (5) is placed on measures on the surface.
3. the non-conductive medium film thickness on-line measuring device of a kind of coplanar capacitive transducer according to claim 2 is characterized in that: sensor measures capacitance
Outermost layer is provided with external shielding layer (9), this screen layer effective grounding.
4. the non-conductive medium film thickness on-line measuring device of a kind of coplanar capacitive transducer according to claim 3, it is characterized in that: add an internal shield (8) between effect electrode one (1) and the active electrode two (2), internal shield (8) structurally is one with external shielding layer (9); Between active electrode one (1) and the internal shield (8), between internal shield (8) and the active electrode two (2), all pass through insulation course (7) isolation between active electrode two (2) and the external shielding layer (9).
5. the non-conductive medium film thickness on-line measuring device of a kind of coplanar capacitive transducer according to claim 4 is characterized in that: when increasing according to the thickness of tested non-conductive medium film, and corresponding increase sensor measures capacitance
Diameter.
6. the non-conductive medium film thickness on-line measuring device of a kind of coplanar capacitive transducer according to claim 4, it is characterized in that: between interface convertor and computing machine, also comprise wireless digital broadcasting station, wireless digital broadcasting station comprises main frame and slave, is used for the wireless data both-way communication of data collecting card and computing machine.
7. the non-conductive medium film thickness on-line measuring device of a kind of coplanar capacitive transducer according to claim 4, it is characterized in that: also comprise the forward reset switch, the counter-rotating reset switch that are installed on the non-conductive medium film line, the data transmission that gathers is to data collecting card, so with making the sensor measures capacitance that shows on the computing machine
On swing circle and the production line actual swing circle synchronously and sense of rotation consistent.
8. the non-conductive medium film thickness on-line measuring device of a kind of coplanar capacitive transducer according to claim 4, it is characterized in that: also comprise optical fiber film bubble detecting sensor, whether the data transmission that gathers is adjacent to sensor to data collecting card for detection of the film bubble.
9. the non-conductive medium film thickness on-line measuring device of a kind of coplanar capacitive transducer according to claim 4 is characterized in that: also comprise being installed in respectively sensor measures capacitance
Inner probe temperature sensor and the circuit temperature sensor that is installed in inside circuit, the temperature data of collection is transferred to data collecting card, is used for temperature compensation.
10. the non-conductive medium film thickness on-line measuring device of a kind of coplanar capacitive transducer according to claim 4, it is characterized in that: desired value (11), lower limit (12), the upper limit (13) according to the definite non-conductive medium film thickness of design show in the concentric circles mode on computers, the actual non-conductive medium film thickness (10) that detects online is presented at wherein in proportion, the coordinate that also shows on the computing machine can clearly calculate thickness and the variation relation of non-conductive medium film.
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| CN104897239A (en) * | 2015-05-28 | 2015-09-09 | 深圳麦开网络技术有限公司 | Non-contact liquid level sensor and intelligent water cup comprising the same |
| CN105806206A (en) * | 2016-03-25 | 2016-07-27 | 威海华菱光电股份有限公司 | Thickness detection device |
| CN107272947A (en) * | 2017-06-09 | 2017-10-20 | 奇酷互联网络科技（深圳）有限公司 | Determination method, device and the terminal of adhesive film of touch screen thickness |
| CN109510533A (en) * | 2018-11-26 | 2019-03-22 | 浙江大学 | A kind of human-computer interaction stepper motor control pulse is adjustable, and area thin film stretches control system and method |
| CN113636393A (en) * | 2021-07-02 | 2021-11-12 | 中国船舶重工集团公司第七一三研究所 | Full-automatic micron-sized transparent film casting winding end face leveling control device |
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| CN113636393A (en) * | 2021-07-02 | 2021-11-12 | 中国船舶重工集团公司第七一三研究所 | Full-automatic micron-sized transparent film casting winding end face leveling control device |
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