CN102944980A - Microchecker having permanent magnet gravity support structure - Google Patents
Microchecker having permanent magnet gravity support structure Download PDFInfo
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- CN102944980A CN102944980A CN2012104345312A CN201210434531A CN102944980A CN 102944980 A CN102944980 A CN 102944980A CN 2012104345312 A CN2012104345312 A CN 2012104345312A CN 201210434531 A CN201210434531 A CN 201210434531A CN 102944980 A CN102944980 A CN 102944980A
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Abstract
The invention discloses a microchecker having a permanent magnet gravity support structure, mainly used in lithography machine stage system. The microchecker comprises a microchecker stator, a microchecker mover and at least three permanent magnet gravity support units, wherein the at least three permanent magnet gravity support units are uniformly arranged at the edge of the microchecker around the Z-axis of the microcheckerl; each permanent magnet gravity support unit comprises a fixed part and a support part; the fixed part is a hollow cylinder permanent magnet, the lower bottom of axially magnetized hollow cylinder permanent magnet is south pole, and the upper bottom is north pole; the support part comprise two coaxial circular ring permanent magnets which are magnetized along the radius and points to the center of the circle; the hollow cylinder permanent magnets of the fixed part are coxially arranged with the double-layer circular ring permanent magnets, and arranged above the double-layer circular ring permanent magnets. According to the invention, the support structure can reduce the rigidity in the stroke range along the axis direction, and simultaneously raise the bearing capability.
Description
Technical field
The present invention relates to a kind of micropositioner of permanent magnetism Gravity support structure, the ultra precise workbench that particularly integrated circuit is processed and testing equipment is used belongs to ultraprecise processing and fields of measurement.
Background technology
In a lot of commercial units, demand motive workpiece or work stage are carried out multifreedom motion, and it is accurately located, equipment such as the work stage in the litho machine, mask platform.For realizing multifreedom motion and accurate location thereof, if directly provide supporting with drive motor, will so that the drive motor load increases, cause that the motor feels hot increases.In a lot of ultra precise workbenchs, it is excessive that the motor feels hot, will affect environment temperature, causes the non-contact measurement error, finally affects bearing accuracy.Adopt the contactless gravity compensation structure of permanent magnetism to have the advantages such as simple in structure, that component surface need not Precision Machining, be applicable to use in the vacuum environment.For non-contact permanent magnetic Gravity support structure, need to have less rigidity and larger bearing capacity along axis direction between fixed part and the supporting part.
Sven Antoin Johan Hol is at patent " Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby " (US 6831285 B2 Dec.2004) proposed a kind of permanent magnetism preload Gravity support structure, but this complex structure, and processing and assembly technology difficulty are high.Development along with photoetching machine technique, silicon wafer stage can be lighter, its load request also decreases, but, development and use along with magnetic suspension workpiece table, and the large stroke motion platform of magnetic suspension workpiece table contains large halbach magnetic steel array, produces high-intensity magnetic field, can produce larger impact to the gravitational equilibrium effect of the micropositioner mover of duty.
Summary of the invention
The purpose of this invention is to provide a kind of micropositioner with permanent magnetism Gravity support structure, make that the rigidity along axis direction is close to zero between its mover and the stator, and have larger bearing capacity, simultaneously simple in structure, be convenient to processing and safeguard.
Technical scheme of the present invention is as follows:
The first technical scheme of the present invention is: a kind of micropositioner with permanent magnetism Gravity support structure, micropositioner comprises micropositioner stator and micropositioner mover, it is characterized in that: this micropositioner also comprises at least three permanent magnetism Gravity support unit, and described at least three permanent magnetism Gravity support unit are distributed on the micropositioner edge around the Z axis of micropositioner; Each permanent magnetism Gravity support unit contains fixed part and support section, described fixed part is a hollow cylinder permanent magnet and a magnet steel mandrel, the hollow cylinder permanent magnet is bonded on the magnet steel mandrel, the magnetizing direction of described hollow cylinder permanent magnet is along the cylinder axial direction, bottom surface is the S utmost point, and upper bottom surface is the N utmost point; Described supporting part is comprised of an interior annulus permanent magnet, an outer toroid permanent magnet and a magnet steel skeleton, and described two circular ring-shaped permanent-magnet bodies are coaxial to be bonded on the magnet steel skeleton, and the magnetizing direction of two circular ring-shaped permanent-magnet bodies is along radius and point to center of circle direction; The hollow cylinder permanent magnet of described fixed part and interior annulus permanent magnet and outer toroid permanent magnet coaxial arrangement, and be positioned at described two circular ring-shaped permanent-magnet bodies top; The hollow cylinder permanent magnet of the fixed part of each permanent magnetism Gravity support unit is connected on the micropositioner stator by the magnet steel mandrel, and interior annulus permanent magnet and the outer toroid permanent magnet of the support section of this permanent magnetism Gravity support unit are connected on the micropositioner mover by the magnet steel skeleton.
The second technical scheme of the present invention is: a kind of micropositioner with permanent magnetism Gravity support structure, micropositioner comprises micropositioner stator and micropositioner mover, it is characterized in that: this micropositioner also comprises at least three permanent magnetism Gravity support unit, and described at least three permanent magnetism Gravity support unit are distributed on the micropositioner edge around the Z axis of micropositioner; Each permanent magnetism Gravity support unit contains fixed part and support section, described fixed part is a hollow cylinder permanent magnet and a magnet steel mandrel, the hollow cylinder permanent magnet is bonded on the magnet steel mandrel, the magnetizing direction of described hollow cylinder permanent magnet is along the cylinder axial direction, bottom surface is the S utmost point, and upper bottom surface is the N utmost point; Described supporting part is comprised of an interior annulus permanent magnet, an outer toroid permanent magnet and a magnet steel skeleton 5, and described two circular ring-shaped permanent-magnet bodies are coaxial to be bonded on the magnet steel skeleton, and the magnetizing direction of two circular ring-shaped permanent-magnet bodies is along radius and point to center of circle direction; The hollow cylinder permanent magnet of described fixed part and interior annulus permanent magnet and outer toroid permanent magnet coaxial arrangement, and be positioned at described two circular ring-shaped permanent-magnet bodies below; The hollow cylinder permanent magnet of the fixed part of each permanent magnetism Gravity support unit is connected on the micropositioner stator by magnet steel mandrel 4, and interior annulus permanent magnet and the outer toroid permanent magnet of the support section of this permanent magnetism Gravity support unit are connected on the micropositioner mover by the magnet steel skeleton.
The third technical scheme of the present invention is: a kind of micropositioner with permanent magnetism Gravity support structure, micropositioner comprises micropositioner stator and micropositioner mover, it is characterized in that: this micropositioner also comprises at least three permanent magnetism Gravity support unit, and described at least three permanent magnetism Gravity support unit are distributed on the micropositioner edge around the Z axis of micropositioner; Each permanent magnetism Gravity support unit contains fixed part and support section, described fixed part is a hollow cylinder permanent magnet and a magnet steel mandrel, the hollow cylinder permanent magnet is bonded on the magnet steel mandrel, the magnetizing direction of described hollow cylinder permanent magnet is along the cylinder axial direction, bottom surface is the N utmost point, and upper bottom surface is the S utmost point; Described supporting part is comprised of an interior annulus permanent magnet, an outer toroid permanent magnet and a magnet steel skeleton, and described two circular ring-shaped permanent-magnet bodies are coaxial to be bonded on the magnet steel skeleton, and the magnetizing direction of two circular ring-shaped permanent-magnet bodies is along radius and center of circle direction dorsad; The hollow cylinder permanent magnet of described fixed part and interior annulus permanent magnet and outer toroid permanent magnet coaxial arrangement, and be positioned at described two circular ring-shaped permanent-magnet bodies top; The hollow cylinder permanent magnet of the fixed part of each permanent magnetism Gravity support unit is connected on the micropositioner stator by the magnet steel mandrel, and interior annulus permanent magnet and the outer toroid permanent magnet of the support section of this permanent magnetism Gravity support unit are connected on the micropositioner mover by the magnet steel skeleton.
A kind of micropositioner with permanent magnetism Gravity support structure of the present invention, have the following advantages and the high-lighting effect: fixed part is the hollow cylinder permanent magnet of axial charging, inside and outside circular ring-shaped permanent-magnet body coaxial arrangement with support section, in the situation that guarantee between fixed part and the supporting part radially very littlely with the tangential direction interaction force, make that the rigidity along axis direction is close to zero between fixed part and the supporting part.In addition, the present invention has simple in structure, and is convenient to the characteristics such as processing.This supporting construction is mainly used in the litho machine magnetic suspension workpiece table system, and the hollow cylinder permanent magnet of the fixed part axial charging that raise has also reduced the impact of magnetic suspension workpiece table halbach permanent magnet array high-intensity magnetic field on micropositioner mover part gravitational equilibrium effect.
Description of drawings
Fig. 1 is the three-dimensional center diagrammatic cross-section of the first permanent magnetism Gravity support of the present invention unit.
Fig. 2 is a kind of structural representation with micropositioner of permanent magnetism Gravity support structure of the present invention.
Fig. 3 is the magnetic line of force distribution plan of the central cross-section of permanent magnetism Gravity support of the present invention unit.
Fig. 4 is the three-dimensional center diagrammatic cross-section of the second permanent magnetism Gravity support of the present invention unit.
Fig. 5 is the three-dimensional center diagrammatic cross-section of the third permanent magnetism Gravity support unit of the present invention.
Among the figure: 1-hollow cylinder permanent magnet; Annulus permanent magnet in the 2-; 3-outer toroid permanent magnet; 4-magnet steel mandrel; 5-magnet steel skeleton; 6-micropositioner mover; 7-micropositioner stator.
Embodiment
Below in conjunction with accompanying drawing concrete structure of the present invention, mechanism and the course of work are further described.
Fig. 2 is a kind of micropositioner structural representation with permanent magnetism Gravity support structure of the present invention, this micropositioner comprises micropositioner stator, micropositioner mover and at least three permanent magnetism Gravity support unit, adopt three permanent magnetism Gravity support unit in the present embodiment, these three permanent magnetism Gravity support unit are evenly arranged in the micropositioner edge around the Z axis of micropositioner; Each permanent magnetism Gravity support unit contains fixed part and support section, fixed part is a hollow cylinder permanent magnet 1 and a magnet steel mandrel 4, hollow cylinder permanent magnet 1 is bonded on the magnet steel mandrel 4, the magnetizing direction of hollow cylinder permanent magnet 1 is along the cylinder axial direction, bottom surface is the S utmost point, upper bottom surface is the N utmost point, as shown in Figure 1; Supporting part is comprised of an interior annulus permanent magnet 2, an outer toroid permanent magnet 3 and a magnet steel skeleton 5, two coaxial being bonded on the magnet steel skeleton 5 of circular ring-shaped permanent-magnet body, and the magnetizing direction of two circular ring-shaped permanent-magnet bodies is along radius and point to center of circle direction; Hollow cylinder permanent magnet 1 and interior annulus permanent magnet 2 and outer toroid permanent magnet 3 coaxial arrangement of fixed part, and be positioned at two circular ring-shaped permanent-magnet body tops; The hollow cylinder permanent magnet 1 of the fixed part of each permanent magnetism Gravity support unit is connected on the micropositioner stator by magnet steel mandrel 4, and interior annulus permanent magnet 2 and the outer toroid permanent magnet 3 of the support section of this permanent magnetism Gravity support unit are connected on the micropositioner mover by magnet steel skeleton 5.
Because the hollow cylinder permanent magnet 1 of fixed part axial charging is inhaled mutually with the magnetic pole of two circular ring-shaped permanent-magnet bodies of support section, therefore, always the gravity direction with support section is opposite, cries quites, thereby support section is stabilized in certain position in the space; Segment with the hollow cylinder permanent magnet of fixed part and the vertical distance of support section, then calculate vertical anchorage force according to the size of load, if the central horizontal cross section of hollow cylinder permanent magnet 1 short transverse overlaps with the central horizontal cross section of the short transverse of two circular ring-shaped permanent-magnet bodies, the intersection point of two cross sections and Z axis is as the initial point of reference coordinate system, along the Z axis forward for just, opposite to negative, so that hollow cylinder permanent magnet 1 is along the translation of Z axis positive dirction, obtained a curve that is subjected to vertical anchorage force about this hollow cylinder permanent magnet 1 along Z-direction, fixed part hollow cylinder magnet size parameter according to different can draw anchorage force in a big way.In addition, on the zero point of the vertical distance of the interior external hollow permanent magnet of the hollow cylinder permanent magnet of fixed part and support section positive negative direction, can find 2 identical points of absolute value, the hollow cylinder permanent magnet that this explanation is higher than the interior external hollow permanent magnet of support section or fixed part at the hollow cylinder permanent magnet of fixed part can obtain the anchorage force of formed objects when being lower than the interior external hollow permanent magnet of support section, select anchorage force be positive certain a bit, like this with regard to for the invention provides theoretical foundation.
Fig. 4 is the three-dimensional center diagrammatic cross-section of the second permanent magnetism Gravity support of the present invention unit.According to the curve that is subjected to vertical anchorage force about this hollow cylinder permanent magnet 1 along Z-direction, on the zero point of the vertical distance of the interior external hollow permanent magnet of the hollow cylinder permanent magnet of fixed part and support section positive negative direction, can find 2 identical points of absolute value, select a certain point-symmetric another point with the first permanent magnetism Gravity support unit selection.Compare with the first permanent magnetism Gravity support unit shown in Figure 1, the magnetizing direction of the fixed part hollow cylinder permanent magnet 1 of the second permanent magnetism Gravity support unit along cylinder axis to, bottom surface is the S utmost point, upper bottom surface is the N utmost point; Supporting part by two coaxial, along radius and point to interior annulus permanent magnet 2 that center of circle direction magnetizes and along radius and point to the center of circle direction outer toroid permanent magnet 3 that magnetizes and form, hollow cylinder permanent magnet 1 and interior annulus permanent magnet 2 and outer toroid permanent magnet 3 coaxial arrangement of fixed part, and be positioned at described double-layer circular ring permanent magnet below.Because the hollow cylinder permanent magnet 1 of fixed part axial charging repels each other with the magnetic pole of the double-layer hollow magnet ring of support section, therefore, always the gravity direction with support section is opposite, cries quites, thereby support section is stabilized in certain position in the space.
Fig. 5 is the three-dimensional center diagrammatic cross-section of the third permanent magnetism Gravity support unit of the present invention.Compare with permanent magnetism Gravity support structure shown in Figure 1, the magnetizing direction of fixed part hollow cylinder permanent magnet 1 along cylinder axis to, bottom surface is the N utmost point, upper bottom surface is the S utmost point; Supporting part by two coaxial, along radius and dorsad the interior annulus permanent magnet 2 that magnetizes of center of circle direction and along radius and dorsad the outer toroid permanent magnet 3 that magnetizes of center of circle direction form, hollow cylinder permanent magnet 1 and interior annulus permanent magnet 2 and outer toroid permanent magnet 3 coaxial arrangement of fixed part, and be positioned at described double-layer circular ring permanent magnet top, the i.e. whole Rotate 180 degree of all permanent magnet magnetizing directions.
Claims (3)
1. micropositioner with permanent magnetism Gravity support structure, micropositioner comprises micropositioner stator and micropositioner mover, it is characterized in that: this micropositioner also comprises at least three permanent magnetism Gravity support unit, and described at least three permanent magnetism Gravity support unit are distributed on the micropositioner edge around the Z axis of micropositioner; Each permanent magnetism Gravity support unit contains fixed part and support section, described fixed part is comprised of a hollow cylinder permanent magnet (1) and a magnet steel mandrel (4), hollow cylinder permanent magnet (1) is bonded on the magnet steel mandrel (4), the magnetizing direction of described hollow cylinder permanent magnet (1) is along the cylinder axial direction, bottom surface is the S utmost point, and upper bottom surface is the N utmost point; Described supporting part is comprised of an interior annulus permanent magnet (2), an outer toroid permanent magnet (3) and a magnet steel skeleton (5), described two circular ring-shaped permanent-magnet bodies are coaxial to be bonded on the magnet steel skeleton (5), and the magnetizing direction of two circular ring-shaped permanent-magnet bodies is along radius and point to center of circle direction; The hollow cylinder permanent magnet (1) of described fixed part and interior annulus permanent magnet (2) and outer toroid permanent magnet (3) coaxial arrangement, and be positioned at described two circular ring-shaped permanent-magnet bodies top; The hollow cylinder permanent magnet (1) of the fixed part of each permanent magnetism Gravity support unit is connected on the micropositioner stator by magnet steel mandrel (4), and interior annulus permanent magnet (2) and the outer toroid permanent magnet (3) of the support section of this permanent magnetism Gravity support unit are connected on the micropositioner mover by magnet steel skeleton (5).
2. micropositioner with permanent magnetism Gravity support structure, micropositioner comprises micropositioner stator and micropositioner mover, it is characterized in that: this micropositioner also comprises at least three permanent magnetism Gravity support unit, and described at least three permanent magnetism Gravity support unit are distributed on the micropositioner edge around the Z axis of micropositioner; Each permanent magnetism Gravity support unit contains fixed part and support section, described fixed part is a hollow cylinder permanent magnet (1) and a magnet steel mandrel (4), hollow cylinder permanent magnet (1) is bonded on the magnet steel mandrel (4), the magnetizing direction of described hollow cylinder permanent magnet (1) is along the cylinder axial direction, bottom surface is the S utmost point, and upper bottom surface is the N utmost point; Described supporting part is comprised of an interior annulus permanent magnet (2), an outer toroid permanent magnet (3) and a magnet steel skeleton (5), described two circular ring-shaped permanent-magnet bodies are coaxial to be bonded on the magnet steel skeleton (5), and the magnetizing direction of two circular ring-shaped permanent-magnet bodies is along radius and point to center of circle direction; The hollow cylinder permanent magnet (1) of described fixed part and interior annulus permanent magnet (2) and outer toroid permanent magnet (3) coaxial arrangement, and be positioned at described two circular ring-shaped permanent-magnet bodies below; The hollow cylinder permanent magnet (1) of the fixed part of each permanent magnetism Gravity support unit is connected on the micropositioner stator by magnet steel mandrel (4), and interior annulus permanent magnet (2) and the outer toroid permanent magnet (3) of the support section of this permanent magnetism Gravity support unit are connected on the micropositioner mover by magnet steel skeleton (5).
3. micropositioner with permanent magnetism Gravity support structure, micropositioner comprises micropositioner stator and micropositioner mover, it is characterized in that: this micropositioner also comprises at least three permanent magnetism Gravity support unit, and described at least three permanent magnetism Gravity support unit are distributed on the micropositioner edge around the Z axis of micropositioner; Each permanent magnetism Gravity support unit contains fixed part and support section, described fixed part is a hollow cylinder permanent magnet (1) and a magnet steel mandrel (4), hollow cylinder permanent magnet (1) is bonded on the magnet steel mandrel (4), the magnetizing direction of described hollow cylinder permanent magnet (1) is along the cylinder axial direction, bottom surface is the N utmost point, and upper bottom surface is the S utmost point; Described supporting part is comprised of an interior annulus permanent magnet (2), an outer toroid permanent magnet (3) and a magnet steel skeleton (5), described two circular ring-shaped permanent-magnet bodies are coaxial to be bonded on the magnet steel skeleton (5), and the magnetizing direction of two circular ring-shaped permanent-magnet bodies is along radius and center of circle direction dorsad; The hollow cylinder permanent magnet (1) of described fixed part and interior annulus permanent magnet (2) and outer toroid permanent magnet (3) coaxial arrangement, and be positioned at described two circular ring-shaped permanent-magnet bodies top; The hollow cylinder permanent magnet (1) of the fixed part of each permanent magnetism Gravity support unit is connected on the micropositioner stator by magnet steel mandrel (4), and interior annulus permanent magnet (2) and the outer toroid permanent magnet (3) of the support section of this permanent magnetism Gravity support unit are connected on the micropositioner mover by magnet steel skeleton (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104345312A CN102944980A (en) | 2012-11-02 | 2012-11-02 | Microchecker having permanent magnet gravity support structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104345312A CN102944980A (en) | 2012-11-02 | 2012-11-02 | Microchecker having permanent magnet gravity support structure |
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| CN102944980A true CN102944980A (en) | 2013-02-27 |
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| CN2012104345312A Pending CN102944980A (en) | 2012-11-02 | 2012-11-02 | Microchecker having permanent magnet gravity support structure |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105988304A (en) * | 2015-02-28 | 2016-10-05 | 上海微电子装备有限公司 | Adjustable magnetic buoyancy and gravity compensator |
| CN109709444A (en) * | 2018-11-30 | 2019-05-03 | 平顶山学院 | A kind of transmission facility |
| CN113991967A (en) * | 2021-09-30 | 2022-01-28 | 清华大学 | Non-contact permanent magnet supporting device |
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| US6071093A (en) * | 1996-10-18 | 2000-06-06 | Abiomed, Inc. | Bearingless blood pump and electronic drive system |
| US6831285B2 (en) * | 2001-05-31 | 2004-12-14 | Asml Netherlands B.V. | Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby |
| CN102185541A (en) * | 2011-05-19 | 2011-09-14 | 清华大学 | Non-contact permanent magnetic supporting structure |
| CN102392852A (en) * | 2011-11-03 | 2012-03-28 | 贾新涛 | Axial magnetic bearing |
| CN102681364A (en) * | 2012-05-16 | 2012-09-19 | 华中科技大学 | Six-degree-of-freedom magnetic suspension micro-positioner |
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2012
- 2012-11-02 CN CN2012104345312A patent/CN102944980A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6071093A (en) * | 1996-10-18 | 2000-06-06 | Abiomed, Inc. | Bearingless blood pump and electronic drive system |
| US6831285B2 (en) * | 2001-05-31 | 2004-12-14 | Asml Netherlands B.V. | Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby |
| CN102185541A (en) * | 2011-05-19 | 2011-09-14 | 清华大学 | Non-contact permanent magnetic supporting structure |
| CN102392852A (en) * | 2011-11-03 | 2012-03-28 | 贾新涛 | Axial magnetic bearing |
| CN102681364A (en) * | 2012-05-16 | 2012-09-19 | 华中科技大学 | Six-degree-of-freedom magnetic suspension micro-positioner |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105988304A (en) * | 2015-02-28 | 2016-10-05 | 上海微电子装备有限公司 | Adjustable magnetic buoyancy and gravity compensator |
| CN105988304B (en) * | 2015-02-28 | 2018-10-16 | 上海微电子装备（集团）股份有限公司 | A kind of adjustable magnetic buoyancy gravity compensator |
| US10415639B2 (en) | 2015-02-28 | 2019-09-17 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Adjustable magnetic buoyancy gravity compensator |
| CN109709444A (en) * | 2018-11-30 | 2019-05-03 | 平顶山学院 | A kind of transmission facility |
| CN109709444B (en) * | 2018-11-30 | 2021-08-13 | 平顶山学院 | Power transmission equipment |
| CN113991967A (en) * | 2021-09-30 | 2022-01-28 | 清华大学 | Non-contact permanent magnet supporting device |
| CN113991967B (en) * | 2021-09-30 | 2023-07-14 | 清华大学 | Non-contact permanent magnet supporting device |
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Application publication date: 20130227 |