CN102591205A - Recursive optimizing control system of chemical mechanical polishing transfer robot - Google Patents

Abstract

The invention discloses a recursive optimizing control system of a chemical mechanical polishing transfer robot, which comprises an upper computer controller, a main controller, a motion controller, a detector, a plurality of servo drivers, a plurality of motors and an encoder. The detector is used to detect the work state parameter of the transfer robot to generate the detection information; the upper computer controller is used to receive the operating command input by a user; the encoder is used to detect the current motion displacement and current motion angle of the transfer robot; the main controller is used to generate a motion command of the transfer robot according to the operating command and the detection information sent by the motion controller; the motion controller is used to calculate the controlled quantity of the motor by a recursive LQ optimizing control mode; each of the servo drivers is used to calculate the control torque of corresponding motor according to corresponding controlled quantity of the motor; and each of the motors is used to drive the transfer robot to move under control of corresponding control torque.

Description

The recursive optimization control system of chemically mechanical polishing transferring robot

Technical field

The present invention relates to the chemical Mechanical Polishing Technique field, particularly a kind of recursive optimization control system of chemically mechanical polishing transferring robot.

Background technology

By the requirement of buffing machine, the transferring robot of researching and developing a kind of special use is necessary.Offshore company and research institution have obtained great successes in the research and development of transferring robot and gordian technique thereof, and have formed complete product system.But the research and development of domestic transferring robot is more backward than abroad, in the research of the automatic transmission people's system aspects of precision also seldom.At present, the automatic transmission people system that is applied on the domestic IC production line almost all is from external import, and domestic transferring robot has certain gap with world level on stability, reliability and automaticity.

Grasp core technology, the correlative study achievement is able to use in the actual production manufacturing, realizes the autonomy-oriented of transferring robot product, to substitute the imported product of safeguarding inconvenience and expensive.Correlation technique also portable has certain extendability in other IC equipments and in the brilliant unit transmission of equipment room.Very high to the ROBOT CONTROL accuracy requirement in the IC equipment, because the transferring robot system is the height nonlinear dynamic system, friction in addition, load change and other uncertain interference exist, and the accurate control that makes the transferring robot system is a difficult point.

Classical control theory has certain limitation when the dealing with complicated system.Modern control theory is applicable to multiple-input and multiple-output, non-linear, distributed parameter control system; And optimum control is an important component part of modern control theory; Wherein (linear quadratic, LQ) optimal control problem is the very important optimal control problem of a type in the theory of optimal control to the linear quadratic type.The performance index of LQ optimal control have clear physical meaning, and so-called optimum reaches optimum with regard to being meant a certain concrete performance index, and for example error is minimum, weak point, energy minimum etc. of control time.The optimal control solution that wherein obtains is the linear function of state variable, can constitute feedback closed loop, is easy on engineering, realize.The LQ method for optimally controlling to as if linear or can linearizing system, in order can better to control, and can be controlled better effect to NLS, can adopt recurrence Quadratic Optimal Control method to control.Recurrence Quadratic Optimal Control method promptly is on each reference mark, system to be carried out real-time linearization process, again with the LQ optimum control.In order can be better controlling, and to be controlled better effect, the transferring robot system to be adopted the optimal control of recurrence LQ having nonlinear transferring robot system.

Summary of the invention

The object of the invention is intended to solve at least one of above-mentioned technological deficiency, proposes a kind of recursive optimization control system of chemically mechanical polishing transferring robot especially, and this system has the high and control good effectiveness of control accuracy.

For achieving the above object; Embodiments of the invention propose a kind of recursive optimization control system of chemically mechanical polishing transferring robot; Comprise: supervisory controller, master controller, motion controller, detecting device, a plurality of servo-driver, a plurality of motor and scrambler; Wherein, said detecting device be used for the detected transmission robot working status parameter to generate detection information; Said supervisory controller is used to receive the operational order of user's input; Said scrambler links to each other with a plurality of said motors with said motion controller respectively, is used to detect the current moving displacement and the current movement angle of said transferring robot; Said master controller links to each other with said motion controller respectively at said supervisory controller; Be used for generating the movement instruction of transferring robot according to the detection information of said operational order and the transmission of said motion controller; And said movement instruction sent to said motion controller, said motion controller is used for calculating the Electric Machine Control amount with recurrence LQ optimized Control Mode; A plurality of said servo-drivers link to each other with said motion controller, and wherein, each said servo-driver is used for calculating according to corresponding said Electric Machine Control amount the controlling torque of corresponding motor; A plurality of motors link to each other with said transferring robot with said a plurality of servo-drivers respectively, and wherein, each said motor is used under the control of control corresponding torque, driving said transferring robot motion.

Recursive optimization control system according to the chemically mechanical polishing transferring robot of the embodiment of the invention; Calculate the Electric Machine Control amount through adopting recurrence LQ optimized Control Mode; Thereby through recurrence control; Motor can drive transferring robot and reach the precalculated position, thereby improves control accuracy and control effect.

Aspect that the present invention adds and advantage part in the following description provide, and part will become obviously from the following description, or recognize through practice of the present invention.

Description of drawings

Above-mentioned and/or additional aspect of the present invention and advantage are from obviously with easily understanding becoming the description of embodiment below in conjunction with accompanying drawing, wherein:

Fig. 1 is the structured flowchart according to the recursive optimization control system of the chemically mechanical polishing transferring robot of the embodiment of the invention;

Fig. 2 is the recurrence LQ optimal control law feedback of status structural drawing according to the recursive optimization control system of the chemically mechanical polishing transferring robot of the embodiment of the invention;

Fig. 3 is the recurrence LQ optimal control structural drawing according to the recursive optimization control system of the chemically mechanical polishing transferring robot of the embodiment of the invention;

Fig. 4 is according to the recurrence LQ optimal control process flow diagram of the recursive optimization control system of the chemically mechanical polishing transferring robot of the embodiment of the invention;

Fig. 5 has the speed limit process flow diagram for the recurrence LQ optimal control according to the recursive optimization control system of the chemically mechanical polishing transferring robot of the embodiment of the invention;

Fig. 6 is recurrence LQ controlling level position and torque curve;

Fig. 7 is a recurrence LQ controlling level rate curve;

Fig. 8 is recurrence LQ control lifting position and torque curve;

Fig. 9 is recurrence LQ control rising or falling speed curve;

Figure 10 is recurrence LQ control anglec of rotation curve;

Figure 11 is recurrence LQ control angular velocity of rotation curve

Figure 12 is recurrence LQ control rotating torques curve;

Figure 13 is flexible angle of recurrence LQ control and position curve;

Figure 14 is the flexible angular velocity curve of recurrence LQ control;

Figure 15 is the flexible torque curve of recurrence LQ control;

Figure 16 returns LQ horizontal level, speed and torque curve for limited express delivery;

Figure 17 returns LQ lifting position, speed and torque curve for limited express delivery;

Figure 18 returns the LQ anglec of rotation, angular velocity curve for limited express delivery;

Figure 19 returns LQ rotating torques curve for limited express delivery;

Figure 20 returns LQ stretch angle, angular velocity and claw position curve for limited express delivery; And

Figure 21 returns the LQ torque curve that stretches for limited express delivery.

Embodiment

Describe embodiments of the invention below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the present invention, and can not be interpreted as limitation of the present invention.

Disclosing of hereinafter provides many various embodiment or example to be used for realizing different structure of the present invention.Of the present invention open in order to simplify, hereinafter the parts and the setting of specific examples are described.Certainly, they only are example, and purpose does not lie in restriction the present invention.In addition, the present invention can be in different examples repeat reference numerals and/or letter.This repetition is in order to simplify and purpose clearly, itself not indicate the relation between various embodiment that discuss of institute and/or the setting.In addition, various specific technology and the examples of material that the invention provides, but those of ordinary skills can recognize the property of can be applicable to of other technologies and/or the use of other materials.In addition; First characteristic of below describing second characteristic it " on " structure can comprise that first and second characteristics form the embodiment of direct contact; Can comprise that also additional features is formed on the embodiment between first and second characteristics, such first and second characteristics possibly not be direct contacts.

In description of the invention, need to prove, unless otherwise prescribed and limit; Term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be mechanical connection or electrical connection; Also can be the connection of two element internals, can be directly to link to each other, and also can link to each other indirectly through intermediary; For those of ordinary skill in the art, can understand the concrete implication of above-mentioned term as the case may be.

With reference to following description and accompanying drawing, with these and other aspects of knowing embodiments of the invention.These describe with accompanying drawing in, some specific implementations in the embodiments of the invention are specifically disclosed, represent some modes of principle of the embodiment of embodiment of the present invention, still should be appreciated that the scope of embodiments of the invention is not limited.On the contrary, embodiments of the invention comprise and fall into appended spirit that adds the right claim and all changes, modification and the equivalent in the intension scope.

Referring to figs. 1 to Fig. 5 the recursive optimization control system according to the chemically mechanical polishing transferring robot of the embodiment of the invention is described below.Wherein, the transferring robot of the embodiment of the invention can transmit wafer in IC equipment.Particularly, the transferring robot of the embodiment of the invention can carry out level, up-down, rotation, motion such as flexible, thereby realizes the transmission to wafer.Need to prove that above-mentioned motion can be carried out the autonomous intelligence behavior according to the behaviour decision making rule for robot, also can be the operational order motion of in time assigning according to the user.

As shown in Figure 1, comprise according to the recursive optimization control system of the chemically mechanical polishing transferring robot of the embodiment of the invention: supervisory controller 10, master controller 11, motion controller 3, detecting device 8, a plurality of servo-driver 4, a plurality of motor 5 and scrambler 7.Wherein, transferring robot 6 comprises 2 cover topworks and 4 claws.

Detecting device 8 is used for the working status parameter of detected transmission robot to generate detection information.Wherein, detecting device 8 comprises: photoelectric sensing module, vacuum sensing module, pressure sensing module and visual sensing module.

The photoelectric sensing module links to each other with motion controller 3 with transferring robot 6 respectively, is used for the positional information of the wafer of detected transmission robot 6 carryings.The vacuum sensing module links to each other with motion controller 3 with transferring robot 6 respectively, is used to detect the adsorbed state of wafer, promptly detects wafer and whether adsorbs vacuum sensing module on the throne.The pressure sensing module links to each other with motion controller 3 with transferring robot 6 respectively, is used to detect the information on the throne and extracting pressure information of wafer, promptly detects wafer and whether adsorbs vacuum sensing module on the throne.The visual sensing module links to each other with motion controller 3 with transferring robot 6 respectively, is used for the image information of detected transmission robot 6 courses of work.

Supervisory controller 10 is used to receive the operational order of user's input.Wherein, operational order comprises: the sequence of movement table of procedure stores, action command, the instruction of task formula.

In an example of the present invention, supervisory controller 10 can be the PLC (Programmable Logic Controller, programmable logic controller (PLC)) of 2 cover digital operation operation electronic systems.For example: Siemens S-300 (21).

The data converter that supervisory controller 10 and primary controller are 11 is that the DP that 2 cover serial datas are converted into PROFIBUS-DP is Decentralized PeripheryDP data converter PB-B-RS232 (22).

Scrambler 7 links to each other with a plurality of motors 5 with motion controller 3 respectively, is used for the current moving displacement and the current movement angle of detected transmission robot.

Master controller 11 links to each other with motion controller 3 with supervisory controller 10 respectively, is used for the movement instruction according to operational order and detection information generation transferring robot 6, and movement instruction is sent to motion controller 3.

In an example of the present invention, main control 11 is 2 cover embedded computer systems, and for example, model can be PC104.

Motion controller 3 calculates the Electric Machine Control amount with recurrence LQ optimized Control Mode.

In an example of the present invention, motion controller 3 can be DSP (Digital Signal Processor, digital signal processor), for example DSP2812.

In one embodiment of the invention, as shown in Figure 3, motion controller 3 comprises: action generator 31, decision controller 32.

Action generator 31 links to each other with detecting device 8, is used to detect the detection information of detecting device 8 feedbacks, and detection information is sent to master controller 11.Wherein, the method for designing of action generator 31 comprise table look-up, fuzzy logic and expert system algorithm etc.

Decision controller 32 is used to receive and resolve target travel displacement and the target travel angle of said movement instruction to obtain said transferring robot; And reception is from the current moving displacement and the current movement angle of scrambler 7; And current moving displacement and current movement angle and target travel displacement and said target travel angle compared obtaining present bit shift error and current angular error, calculate a plurality of Electric Machine Control amounts of a plurality of servo-drivers 4 according to present bit shift error and said current angular error.

A plurality of servo-drivers 4 link to each other with motion controller 3.Wherein, each servo-driver 4 is used for the controlling torque according to initial Electric Machine Control amount or Electric Machine Control amount calculating corresponding motor.

In an example of the present invention, servo-driver 4 is peace river servo driver of motor, can realize the moment and the speed control of motor 5 through the motor feedback, and promptly servo-driver 4 is realized the speed control of motor 5 through armature current feedback closed loop.

A plurality of motors 5 link to each other with transferring robot 6 with a plurality of servo-drivers 4 respectively.Wherein, each motor 5 is used under the control of control corresponding torque, driving transferring robot 6 motions.

In one embodiment of the invention, motor 5 is an alternating current generator, and motor 5 can be the high precision peace river alternating current generator of middle inertia low capacity, and this motor has the quick responsiveness of high power for the servo type alternating current generator of band speed reduction unit

Wherein, a plurality of said motors comprise: horizontal motor, lifting motor, electric rotating machine and flexible motor.Wherein, Horizontal motor is used to drive transferring robot 6 wafer that carries is moved to produce horizontal shift in the horizontal direction; Lifting motor is used to drive transferring robot 6 the wafer in the vertical direction is moved to produce the up-down displacement; Electric rotating machine is used to drive transferring robot 6 wafer is rotated motion to produce the anglec of rotation, and flexible motor is used to drive transferring robot 6 wafer is carried out stretching motion to produce flexible angle.

As shown in Figure 1, the recursive optimization control system of the embodiment of the invention also comprises: display screen 1, wherein, display screen 1 is used to show the detection information of detecting device 8 and the operational order of user's input.

In yet another embodiment of the present invention, the recursive optimization control system of the embodiment of the invention also comprises warning device 2, and wherein warning device 2 is used for when detection information or operational order are wrong, sending alerting signal.Wherein, warning device 2 can be loudspeaker.

Recurrence control procedure in the face of the recursive optimization control system of the chemically mechanical polishing transferring robot of the embodiment of the invention is described in detail down.

The motion control method of chemically mechanical polishing transferring robot is the control system of one three closed loop, comprises the motion control ring, the motor servocontrol ring of interior ring of transferring robot of main control ring, the adapter ring of the transferring robot of outer shroud.

Recurrence control procedure in the face of the recurrence control system of the chemically mechanical polishing transferring robot of the embodiment of the invention is described in detail down.

The master controller 11 of robot is through data converter, serial ports and USB mouth; Read the detection information of each sensor feedback and user's operational order by motion controller 3 and supervisory controller 10, and the operation that will detect information and user refers to be presented on the liquid crystal touch screen 1.When detection information or user's operational order is wrong, report to the police through loudspeaker 2.Master controller 11 receives to the command information of upper machine controller 10 and liquid crystal touch screen 1; Regularly, robot is moved horizontally, goes up and down, rotates, stretches to order and assign to motion controller 3 through Decision Control with reference to user's operational order and sensor feedback information.

The motor behavior decision making algorithm of master controller 11 is: action generator 31 calculates the displacement of aspiration level motion, displacement, the anglec of rotation and the telescopic location control command of elevating movement with reference to user command or visual information, and decision controller 32 judges whether the carry out desired control command according to robot motion's situation.If motion state is consistent with expectation state, then need not adjust the action of transferring robot 6; Otherwise need adjust the action of transferring robot 6.

Motion controller 3 is carried out master controller 11 instructions, and the level of transferring robot 6 and lifting moving direction feed back to signal by scrambler 7, regulates transferring robot to assigned address.Transferring robot 6 rotation moving directions are by photoelectric sensing module, vacuum sensing module and pressure sensing module and scrambler 7 feedback signals.

The user operation commands that action generator 31 receives from input equipment (for example touch display screen).Each sensor feedback information of action generator monitoring; And regularly with reference to user command and sensor feedback information; Calculate horizontal shift, up-down displacement, the anglec of rotation of transferring robot 6 and the angle control command of stretching through decision controller 32 motor behavior decision making algorithms, assign to servo-driver 4.In a motion control cycle, decision controller 32 reads the feedback signal of scrambler 7 and vision sensor 9 of housing and the telescopic arm of transferring robot 6, and relatively obtains the error signal of displacement and angle with expectation value.

Particularly, motion controller 3 reads the feedback signal of motor encoder 7, and what calculate transferring robot 6 moves horizontally displacement, lifting moving displacement, the anglec of rotation and flexible angle, draws error signal with master controller 11 given control commands contrasts.That is, motion controller 3 compares current moving displacement and current movement angle with target travel displacement and the target travel angle that the control command of resolving master controller 11 obtains, obtain error current displacement and error current angle.Motion controller 3 calculates the controlled quentity controlled variable of motor according to error signal according to recurrence LQ system optimizing control, sends to servo-driver 4 and carries out.

Servo-driver 4 is carried out the instruction of motion controller 3, through reading the feedback signal of scrambler (7), according to error signal; Servo-driver 4 calculates the controlling torque of corresponding motor 5; 5 motions of control alternating current generator drive transferring robot 6 through alternating current generator 5, make robot rotate to specified angle.

In one embodiment of the invention, vision sensor 9 feeds back to supervisory controller 10 with the movable information of transferring robot 6, thereby can carry out the monitoring of duty to transferring robot 6.

At first; With the NLS of transferring robot, handle through decoupling zero, carry out Taylor series expansion; Remove high order item influence; And linearization in real time, thereby obtain the linear condition equation of transferring robot, and it is decomposed into move horizontally, elevating movement, rotation and four single input subsystems of stretching motion.According to the characteristics and the parameter of the mechanical system of transferring robot, set up its mathematical model, linearization process obtains the linear state-space equation:

X＝AX+Bu

Y＝CX+Du

Wherein, $X={\left[\begin{array}{cccccccc}x& \stackrel{\·}{x}& z& \stackrel{\·}{z}& \mathrm{\θ}& \stackrel{\·}{\mathrm{\θ}}& {\mathrm{\θ}}_1& {\stackrel{\·}{\mathrm{\θ}}}_1\end{array}\right]}^T,$ Y=[x z θ θ ₁] ^T, u=[τ ₁τ ₂τ ₃τ ₄] ^T,

$A=\left[\begin{array}{cccccccc}0& 1& 0& 0& 0& 0& 0& 0\\ 0& 0& 0& 0& 0& 0& 0& 0\\ 0& 0& 0& 1& 0& 0& 0& 0\\ 0& 0& 0& 0& 0& 0& 0& 0\\ 0& 0& 0& 0& 0& 1& 0& 0\\ 0& 0& 0& 0& 0& 0& 0& 0\\ 0& 0& 0& 0& 0& 0& 0& 1\\ 0& 0& 0& 0& 0& 0& K1& \mathrm{<figure-callout\; id="2"\; label="K"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">K</figure-callout>}2\end{array}\right],$ $B=\left[\begin{array}{cccc}0& 0& 0& 0\\ \mathrm{<figure-callout\; id="4"\; label="K"\; filenames="HDA0000139598700000021.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">K</figure-callout>}4& 0& 0& 0\\ 0& 0& 0& 0\\ 0& \mathrm{<figure-callout\; id="5"\; label="K"\; filenames="HDA0000139598700000051.png,HDA0000139598700000091.png"\; state="\{\{state\}\}">K</figure-callout>}5& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 6& 0\\ 0& 0& 0& 0\\ 0& 0& 0& \mathrm{<figure-callout\; id="3"\; label="K"\; filenames="HDA0000139598700000051.png,HDA0000139598700000102.png"\; state="\{\{state\}\}">K</figure-callout>}3\end{array}\right],$

$C=\left[\begin{array}{cccccccc}1& 0& 0& 0& 0& 0& 0& 0\\ 0& 1& 0& 0& 0& 0& 0& 0\\ 0& 0& 1& 0& 0& 0& 0& 0\\ 0& 0& 0& 1& 0& 0& 0& 0\\ 0& 0& 0& 0& 1& 0& 0& 0\\ 0& 0& 0& 0& 0& 1& 0& 0\\ 0& 0& 0& 0& 0& 0& 1& 0\\ 0& 0& 0& 0& 0& 0& 0& 1\end{array}\right],$ $D=\left[\begin{array}{cccc}0& 0& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 6& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\end{array}\right],$

$\mathrm{<figure-callout\; id="1"\; label="K"\; filenames="HDA0000139598700000021.png,HDA0000139598700000031.png"\; state="\{\{state\}\}">K</figure-callout>}1=\frac{-({\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_2+2m_3)\sin \left(2\mathrm{\&theta;}\right)2\mathrm{\&theta;}}{(1/3)({\mathrm{<figure-callout\; id="1"\; label="m"\; filenames="HDA0000139598700000021.png,HDA0000139598700000031.png"\; state="\{\{state\}\}">m</figure-callout>}}_1+m_2)+2({\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_2+2m_3){\sin }^2\left(\mathrm{\&theta;}\right)},$ $\mathrm{<figure-callout\; id="2"\; label="K"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">K</figure-callout>}2=\frac{-({\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_2+2m_3){\left(\stackrel{\&CenterDot;}{\mathrm{\&theta;}}\right)}^2\cos \left(2\mathrm{\&theta;}\right)}{(1/3)({\mathrm{<figure-callout\; id="1"\; label="m"\; filenames="HDA0000139598700000021.png,HDA0000139598700000031.png"\; state="\{\{state\}\}">m</figure-callout>}}_1+m_2)+2({\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_2+2m_3){\sin }^2\left(\mathrm{\&theta;}\right)},$

$\mathrm{<figure-callout\; id="3"\; label="K"\; filenames="HDA0000139598700000051.png,HDA0000139598700000102.png"\; state="\{\{state\}\}">K</figure-callout>}3=\frac{1}{((1/3)({\mathrm{<figure-callout\; id="1"\; label="m"\; filenames="HDA0000139598700000021.png,HDA0000139598700000031.png"\; state="\{\{state\}\}">m</figure-callout>}}_1+m_2)+2({\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_2+2m_3){\sin }^2\left(\mathrm{\&theta;}\right))L},$ $\mathrm{<figure-callout\; id="4"\; label="K"\; filenames="HDA0000139598700000021.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">K</figure-callout>}4=\frac{1}{{\mathrm{<figure-callout\; id="1"\; label="m"\; filenames="HDA0000139598700000021.png,HDA0000139598700000031.png"\; state="\{\{state\}\}">m</figure-callout>}}_1+{\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_2+{\mathrm{<figure-callout\; id="3"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000102.png"\; state="\{\{state\}\}">m</figure-callout>}}_3+{\mathrm{<figure-callout\; id="4"\; label="m"\; filenames="HDA0000139598700000021.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_4+{\mathrm{<figure-callout\; id="5"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000091.png"\; state="\{\{state\}\}">m</figure-callout>}}_5+{\mathrm{<figure-callout\; id="6"\; label="m"\; filenames="HDA0000139598700000021.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_6},$

$\mathrm{<figure-callout\; id="5"\; label="K"\; filenames="HDA0000139598700000051.png,HDA0000139598700000091.png"\; state="\{\{state\}\}">K</figure-callout>}5=\frac{1}{{\mathrm{<figure-callout\; id="1"\; label="m"\; filenames="HDA0000139598700000021.png,HDA0000139598700000031.png"\; state="\{\{state\}\}">m</figure-callout>}}_1+{\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_2+{\mathrm{<figure-callout\; id="3"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000102.png"\; state="\{\{state\}\}">m</figure-callout>}}_3+{\mathrm{<figure-callout\; id="4"\; label="m"\; filenames="HDA0000139598700000021.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_4+{\mathrm{<figure-callout\; id="5"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000091.png"\; state="\{\{state\}\}">m</figure-callout>}}_5},$ $\mathrm{<figure-callout\; id="6"\; label="K"\; filenames="HDA0000139598700000021.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">K</figure-callout>}6=\frac{1}{(1/3)({\mathrm{<figure-callout\; id="1"\; label="m"\; filenames="HDA0000139598700000021.png,HDA0000139598700000031.png"\; state="\{\{state\}\}">m</figure-callout>}}_1+{\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">m</figure-callout>}}_2+m_3){\mathrm{<figure-callout\; id="2"\; label="L"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">L</figure-callout>}}^2+(1/2)m_4{\mathrm{<figure-callout\; id="2"\; label="R"\; filenames="HDA0000139598700000051.png,HDA0000139598700000081.png"\; state="\{\{state\}\}">R</figure-callout>}}^2}$

Kinetic model after the linearization in real time is a nonlinear model, is the state space equation of one group of octuple simple in structure, adopts Matlab to ask rank of matrix order rank () to obtain system controllability and measurability order matrix.By system controllability and measurability order criterion rank (B ABA ²BA ³BA ⁴BA ⁵BA ⁶BA ⁷B)=8, system's controllable matrix is a full rank, can the knowledge system be fully controlled, and promptly system satisfies the optimum control service condition.

System all can control fully from the above, thereby each quantity of state of system also all can be measured acquisition, therefore with x ^c, z ^c, θ ^c, θ ₁ ^cBe respectively the system reference input, state x,

Z,

θ,

θ ₁,

Be feedback quantity, and adopt the state feedback controller of recurrence LQ method for optimally controlling design system: the optimal control of recurrence mobile domains is online repeatedly to be carried out, and belongs to a kind of close-loop control mode.System obtains a u at each discrete k constantly ^*(k) controlled quentity controlled variable, through a series of recurrence optimum control, system has reached stable equilibrium state at last.

The performance index of define system:

$J={\&Integral;}_0^{t_f}(X^T\mathrm{QX}+{\mathrm{Ru}}^2)\mathrm{dt},$

Wherein Q is a positive semidefinite matrix,

Q=[85500000000; 01000000; 00200000000; 00010000; 000035000; 00000100; 0000002700; 000000027], for

The weighting matrix of state variable; R=[1000; 0100; 0010; 0001] is the weighting coefficient of controlled quentity controlled variable.(Q R) can try to achieve the FEEDBACK CONTROL rule to function K (k)=lqr through the Matlab program for A, B, obtains at k optimum control constantly amount u ^*=-K (k) X makes system performance index reach minimum.

Discrete state equations formula by system is a controlled device, with the performance index of recurrence LQ optimum control.Then recurrence LQ optimum control mainly comprises several main parts such as parameter designing, iteration operation, parameter transformation.Below in conjunction with Fig. 4 the control flow of the recurrence LQ optimal control system of the embodiment of the invention is described.

S401, parameter initialization comprises m1, m2, m3, m4, m5, m6, L, g, d, SL, Js, T, x ₀, xd, k, the parameter of n and robot system etc.Wherein, m1 is big arm quality, and m2 is the forearm quality, and m3 is the claw quality; M4 is the rotary connector quality, and m5 is the lifting table quality, and m6 is the base quality, and L is the length of big arm, forearm, claw; D is the external diameter of leading screw, and SL is the helical pitch of leading screw, and Js is the speed reduction unit ratio.

S402, the relevant matrix function A of define system (k), B (k), C (k), D (k), Q (k), R (k) etc.

S403 constantly carries out linearization process to NLS at current k, obtain A ' (k) and B ' (k).

S404 finds the solution the Riccati equation and obtains feedback of status gain matrix K ' (k), and wherein (k) to satisfy the optimum control performance index minimum for feedback of status gain matrix K '.

S405 by current k quantity of state x (k) and feedback of status gain matrix K (k) constantly, obtains Electric Machine Control amount u ^*(k)

S406 is with the Electric Machine Control amount u that obtains ^*(k) be implemented in the nonlinear chemical mechanical buffing transferring robot system, obtain new k+1 quantity of state x (k+1) constantly.

S407; If iterations is not accomplished, then

turns back to step S403.

S408 obtains recurrence optimum control sequence u ^*(1), u ^*(2) ..., u ^*(n).

Fig. 6 is recurrence LQ controlling level position (position) and torque (force) curve, and wherein, A is the horizontal level curve, and B is a torque curve.Fig. 7 is for combining recurrence LQ controlling level speed (speed) curve.Fig. 8 is for combining recurrence LQ control lifting position (position) and torque (force) curve, and wherein, A is the lifting position curve, and B is a torque curve.Fig. 9 is for combining recurrence LQ control rising or falling speed (speed curve.Figure 10 is for combining recurrence LQ control anglec of rotation curve.Figure 11 is for combining recurrence LQ control angular velocity of rotation curve.Figure 12 is for combining recurrence LQ control rotating torques curve.Figure 13 is for combining flexible angle of recurrence LQ control and position curve, and wherein, A is a position curve, and C is flexible angle curve.Figure 14 is for combining the flexible angular velocity curve of recurrence LQ control.Figure 15 is for combining the flexible torque curve of recurrence LQ control.

Discrete state equations formula by system is a controlled device, with the performance index of recurrence LQ optimum control.Then recurrence LQ optimum control mainly comprises several main parts such as parameter designing, iteration operation, parameter transformation.There is the control flow of speed limit to describe with reference to 5 couples in figure below.

S501, parameter initialization comprises m1, m2, m3, m4, m5, m6, L, g, d, SL, Js, T, x ₀, xd, k, the parameter of n and robot system etc.Wherein, m1 is big arm quality, and m2 is the forearm quality, and m3 is the claw quality; M4 is the rotary connector quality, and m5 is the lifting table quality, and m6 is the base quality, and L is the length of big arm, forearm, claw; D is the external diameter of leading screw, and SL is the helical pitch of leading screw, and Js is the speed reduction unit ratio.

S502, the relevant matrix function A of define system (k), B (k), C (k), D (k), Q (k), R (k) etc.

S503 constantly carries out linearization process to NLS at current k, obtain A ' (k) and B ' (k).

S504 finds the solution the Riccati equation and obtains feedback of status gain matrix K ' (k), and wherein, it is minimum that feedback of status gain matrix K ' (k) satisfies the optimum control performance index.

S505 by current k quantity of state x (k) and feedback of status gain matrix K (k) constantly, obtains Electric Machine Control amount u ^*(k)

S506 is with the Electric Machine Control amount u that obtains ^*(k) be implemented in the nonlinear chemical mechanical buffing transferring robot system, obtain new k+1 quantity of state x (k+1) constantly.

S507, whether the speed of judging the chemically mechanical polishing transferring robot is greater than qualification speed; If greater than, then make velocity amplitude equal to limit velocity amplitude, otherwise velocity amplitude is constant.

S508; If iterations is not accomplished, then

turns back to step S503.

S509 obtains recurrence optimum control sequence u ^*(1), u ^*(2) ..., u ^*(n).

S510 judges whether to finish, and judges promptly whether iteration is n at this moment, if not, then return step S503.

Figure 16 returns LQ horizontal level, speed and torque curve for limited express delivery, and wherein, A is the horizontal level curve, and B is a torque curve, and D is a rate curve.Figure 17 returns LQ lifting position, speed and torque curve for limited express delivery, and wherein, A is the horizontal level curve, and B is a torque curve, and D is a rate curve.Figure 18 returns the LQ anglec of rotation, angular velocity curve for limited express delivery, and wherein, E is the angular velocity curve, and F is the angle curve.Figure 19 returns LQ rotating torques curve for limited express delivery.Figure 20 returns LQ stretch angle, angular velocity and claw position curve for limited express delivery, and wherein, A is the claw position curve, and G is the angular velocity curve, and H is the angle curve that stretches.Figure 21 returns the LQ torque curve that stretches for limited express delivery.

Recursive optimization control system according to the chemically mechanical polishing transferring robot of the embodiment of the invention; Approach desired value gradually in employing recurrence LQ optimized Control Mode; Thereby improved the control rate of system; And system is reached control effect preferably, can realize the basic function of robot, for the research of control science, mechanical engineering and robotics provides reference.The chemically mechanical polishing transferring robot is a six degree of freedom, adopts the mode of being with transmission at its joint, and the performance index of chemically mechanical polishing transferring robot control system have: three-shaft linkage, close-loop control mode; Locate fast; Can with host computer serial and network service; The function of offline operation; Compensate function; Friendly man-machine dialog interface; Open control mode.Chemically mechanical polishing transferring robot with this recursive optimization control system satisfies purposes such as opening, economy, practicality and reliability.

Describe and to be understood that in the process flow diagram or in this any process otherwise described or method; Expression comprises module, fragment or the part of code of the executable instruction of the step that one or more is used to realize specific logical function or process; And the scope of preferred implementation of the present invention comprises other realization; Wherein can be not according to order shown or that discuss; Comprise according to related function and to carry out function by the mode of basic while or by opposite order, this should be understood by the embodiments of the invention person of ordinary skill in the field.

In process flow diagram the expression or in this logic of otherwise describing and/or step; For example; Can be considered to be used to realize the sequencing tabulation of the executable instruction of logic function; May be embodied in any computer-readable medium; Use for instruction execution system, device or equipment (like computer-based system, comprise that system or other of processor can be from the systems of instruction execution system, device or equipment instruction fetch and execution command), or combine these instruction execution systems, device or equipment and use.With regard to this instructions, " computer-readable medium " can be anyly can comprise, storage, communication, propagation or transmission procedure are for instruction execution system, device or equipment or combine these instruction execution systems, device or equipment and the device that uses.The example more specifically of computer-readable medium (non-exhaustive list) comprises following: the electrical connection section (electronic installation) with one or more wirings; Portable computer diskette box (magnetic device); Random-access memory (ram), ROM (read-only memory) (ROM) can be wiped and can edit ROM (read-only memory) (EPROM or flash memory); Fiber device, and portable optic disk ROM (read-only memory) (CDROM).In addition; Computer-readable medium even can be paper or other the suitable media that to print said program above that; Because can be for example through paper or other media are carried out optical scanning; Then edit, decipher or handle to obtain said program with other suitable methods in case of necessity with the electronics mode, then it is stored in the computer memory.

Should be appreciated that each several part of the present invention can use hardware, software, firmware or their combination to realize.In the above-described embodiment, a plurality of steps or method can realize with being stored in the storer and by software or firmware that suitable instruction execution system is carried out.For example; If realize with hardware; The same in another embodiment, each in the available following technology well known in the art or their combination realize: have the discrete logic that is used for data-signal is realized the logic gates of logic function, have the special IC of suitable combinational logic gate circuit; Programmable gate array (PGA), field programmable gate array (FPGA) etc.

Those skilled in the art are appreciated that and realize that all or part of step that the foregoing description method is carried is to instruct relevant hardware to accomplish through program; Described program can be stored in a kind of computer-readable recording medium; This program comprises one of step or its combination of method embodiment when carrying out.

The above-mentioned storage medium of mentioning can be a ROM (read-only memory), disk or CD etc.

In the description of this instructions, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means the concrete characteristic, structure, material or the characteristics that combine this embodiment or example to describe and is contained at least one embodiment of the present invention or the example.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete characteristic, structure, material or the characteristics of description can combine with suitable manner in any one or more embodiment or example.

Although illustrated and described embodiments of the invention; For those of ordinary skill in the art; Be appreciated that under the situation that does not break away from principle of the present invention and spirit and can carry out multiple variation, modification, replacement and modification that scope of the present invention is accompanying claims and be equal to and limit to these embodiment.

Claims (10)

1. the recursive optimization control system of a chemically mechanical polishing transferring robot is characterized in that, comprising: supervisory controller, master controller, motion controller, detecting device, a plurality of servo-driver, a plurality of motor and scrambler, wherein,

Said detecting device is used for the working status parameter of detected transmission robot to generate detection information;

Said supervisory controller is used to receive the operational order of user's input;

Said scrambler links to each other with a plurality of said motors with said motion controller respectively, is used to detect the current moving displacement and the current movement angle of said transferring robot;

Said master controller links to each other with said motion controller respectively at said supervisory controller; Be used for generating the movement instruction of transferring robot according to the detection information of said operational order and the transmission of said motion controller; And said movement instruction sent to said motion controller

Said motion controller is used for calculating the Electric Machine Control amount with recurrence LQ optimized Control Mode;

A plurality of said servo-drivers link to each other with said motion controller, and wherein, each said servo-driver is used for calculating according to corresponding said Electric Machine Control amount the controlling torque of corresponding motor;

A plurality of motors link to each other with said transferring robot with said a plurality of servo-drivers respectively, and wherein, each said motor is used under the control of control corresponding torque, driving said transferring robot motion.

2. recursive optimization control system as claimed in claim 1 is characterized in that, said motion controller comprises:

The action generator, said action generator links to each other with said detecting device, is used to detect the said detection information of said detecting device feedback, and said detection information is sent to said master controller;

Decision controller; Said decision controller is used to receive and resolve target travel displacement and the target travel angle of said movement instruction to obtain said transferring robot; And reception is from the said current moving displacement and the current movement angle of said scrambler; And said current moving displacement and current movement angle and said target travel displacement and said target travel angle compared obtaining present bit shift error and current angular error, calculate a plurality of Electric Machine Control amounts of a plurality of said servo-drivers according to said present bit shift error and said current angular error.

3. recursive optimization control system as claimed in claim 1; It is characterized in that; Said decision controller also is used for basis said current moving displacement and said current movement angle is carried out first system matrix and second system matrix of linearization process to obtain current time, and judges according to said first system matrix and said second system matrix whether system is controlled.

4. recursive optimization control system as claimed in claim 3; It is characterized in that; Said decision controller, is found the solution the Riccati equation and is obtained feedback of status gain matrix K ' (k), wherein when controlled in the judgement system; Said feedback of status gain matrix K ' (k) is used to represent said present bit shift error and said current angular error, and (k) calculates the current motor controlled quentity controlled variable of said transferring robot according to said feedback of status gain matrix K '.

5. recursive optimization control system as claimed in claim 1 is characterized in that, said detecting device comprises:

The photoelectric sensing module, said photoelectric sensing module links to each other with said motion controller with said transferring robot respectively, is used to detect the positional information of the wafer that said transferring robot carries;

The vacuum sensing module, said vacuum sensing module links to each other with said motion controller with said transferring robot respectively, is used to detect the adsorbed state of said wafer;

The pressure sensing module, said pressure sensing module links to each other with said motion controller with said transferring robot respectively, is used to detect being information and grasping pressure information of said wafer; And

The visual sensing module, said visual sensing module links to each other with said motion controller with said transferring robot respectively, is used for detecting the image information of the said transferring robot course of work.

6. recursive optimization control system as claimed in claim 1 is characterized in that, also comprises:

Display screen is used to show the detection information of said detecting device and the operational order of said user input.

7. like each described recursive optimization control system among the claim 1-6, it is characterized in that, also comprise:

Warning device is used for when said detection information or said operational order are wrong, sending alerting signal.

8. like each described recursive optimization control system among the claim 1-7, it is characterized in that a plurality of said motors comprise:

Horizontal motor is used to drive said transferring robot the wafer that carries is moved to produce horizontal shift in the horizontal direction;

Lifting motor is used to drive said transferring robot said wafer in the vertical direction is moved to produce the up-down displacement;

Electric rotating machine is used to drive said transferring robot said wafer is rotated motion to produce the anglec of rotation; And

Flexible motor is used to drive said transferring robot said wafer is carried out stretching motion to produce flexible angle.

9. like claim 1 or 8 described recursive optimization control system, it is characterized in that said servo-driver feeds back to said motor to control said rotating speed of motor with the armature supply of the said motor of correspondence.

10. recursive optimization control system as claimed in claim 1 is characterized in that, said supervisory controller is a programmable logic controller (PLC).

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