CN102539360A - Light splitting device and method for improving spectrum probing range - Google Patents
Light splitting device and method for improving spectrum probing range Download PDFInfo
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- CN102539360A CN102539360A CN2011104616254A CN201110461625A CN102539360A CN 102539360 A CN102539360 A CN 102539360A CN 2011104616254 A CN2011104616254 A CN 2011104616254A CN 201110461625 A CN201110461625 A CN 201110461625A CN 102539360 A CN102539360 A CN 102539360A
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Abstract
The invention provides a light splitting device for improving the spectrum probing range, which includes a first light splitting unit, a second light splitting unit, a detection unit and a processing unit, wherein the first light splitting unit is used for light splitting of measured light, and the wave length of the measured light covers the range of [lambda1, lambda 2]; the second light splitting unit includes chromatic dispersion component(s) Mi used for the light splitting of measured light before or/ and after passing by the first light splitting unit and having different light splitting capabilities, wherein I equals to 1, 2 to N, and N equals to or is lager than 2, and the chromatic dispersion direction of the first and the second light splitting units are mutually vertical; the detection unit is used for converting optical signals of the received measured light passing by the first light splitting unit or the chromatic dispersion component(s) Mi into electrical signals Ii respectively, and transmitting the electrical signals to the processing unit, wherein I equals to 1, 2 to N, and N equals to or is lager than 2; and the processing unit is used for combining the received electrical signals Ii, so as to obtain the light intensity distribution of the measured light in the range of [lambda1, lambda 2], wherein I equals to 1, 2 to N, and N equals to or is lager than 2. The light splitting device provided by the invention has the advantages of excellent stability, simplicity in installation and debugging, excellent maintainability, low cost and the like.
Description
Technical field
The present invention relates to the beam split of polychromatic light, particularly can obviously improve the light-dividing device and the method for spectrographic detection scope.
Background technology
Spectrometer is a kind of device that the spectrum that collects is carried out continuous distribution and detects.At present, common spectrometer architecture has Czerny-Turner structure, Paschen-Runge structure, flat filed concave grating beam splitting system, echelle grating bidimensional spectroscopy system etc.It is little that echelle grating bidimensional spectroscopy system has a volume, and therefore the resolution advantages of higher obtains more application in the high-resolution occasion of needs.
Fig. 1 has schematically provided the basic block diagram of conventional echelle grating bidimensional spectroscopy system, and is as shown in Figure 1, and said beam splitting system comprises light source 1, collecting lens 2, goes into seam 3, collimating mirror 4, prism 5, echelle grating 6, imaging mirror 7, detector 8.This beam splitting system course of work is: the light signal that sends from light source 1 collects in the light-dividing device through behind the collecting lens 2, and light-dividing device includes seam 3, collimating mirror 4, prism 5, echelle grating 6, imaging mirror 7; Light signal gets into light-dividing device from going into seam 3; Light signal is with certain angular dispersed; Be collimated into directional light through collimating mirror 4 back light signals and incide the two-dimension chromatic dispersion structure of being made up of prism and grating, the chromatic dispersion of prism is in vertical direction, and the chromatic dispersion of grating in the horizontal direction.Different according to different its angle of diffraction of wavelength through the light signal behind prism and the grating two-dimension chromatic dispersion, after the imaging mirror, the light signal at different diffraction angle is imaged at the diverse location on the mirror image face that forms images, thereby has realized beam split.
Echelle grating has unique diffraction characteristic: big blazing angle diffraction, and high diffracting grade, the groove number less than 100 is according to the optical grating diffraction equation
mλ＝d(sinα+sinβ)，
Usually adopt the incident of Littrow mode during the use of echelle grating; It is the blazing angle that incident angle equals grating; Calculate inferior, the angle of diffraction of level of all wavelengths thus, find that from the result angle of diffraction of different wave length is identical, equal the wavelength of blazing angle like angle of diffraction; Therefore echelle grating exists between very serious level time overlappingly, needs a secondary dispersion perpendicular to the grating dispersion direction to solve overlap problem between level time.
Existing solution is to adopt a prism to eliminate overlapping between level time; The light of different wave length incides that its deflection angle is different behind the prism; The angles of the size of deflection angle and the refractive index of prism, prism etc. are relevant, because the prism material refractive index has downward trend gradually near infrared from the deep ultraviolet to the visible light.Fig. 2 has schematically provided MgF
2The relation of material refractive index and incident light wavelength, as shown in Figure 2, along with the increase of wavelength, refractive index descends and eases up gradually.This shows that different wave length is through behind the prism, the deflection angle difference of two bundle ultraviolet lights of identical wavelength difference is big, and the deflection angle difference of visible light and near infrared light is little.
Fig. 3 has schematically provided the spectrogram that combines prismatic decomposition and echelle grating bidimensional spectroscopy to obtain; As shown in Figure 3; The spectral line not at the same level time of short wavelength regions is big at interval, and not at the same level time spectral line of Long wavelength region is little at interval, produced more serious level inferior between overlap problem.Short wavelength regions level minor tick is very big, and especially the waste of spectrogram has been caused in the zone of the deep ultraviolet below the 180nm, makes whole spectrogram stretch, and need just can obtain whole spectrogram with bigger rectangular detector, thereby increase the detector cost greatly.
Such analytical technology mainly contains following deficiency:
1, prismatic refraction rate along with wavelength change to deep ultraviolet (＜180nm), refractive index increases rapidly, causes occupying most of spectrogram at a minute light time deep ultraviolet 130nm～160nm, and is as shown in Figure 3; Be limited by the detector size restriction, present echelle grating bidimensional spectroscopy system can only detect about 160nm in short wavelength regions.For halogen Cl, Br, I element, and its optimum detection spectral line of element such as part nonmetalloid P, S can't be surveyed at 130～160nm.
2, it is intensive especially upwards to demonstrate visible light wave range at the image planes polishing wax at the level power; The characteristics that the ultraviolet spectrum wave band is more sparse; Spectral line in that visible light wave range is not at the same level between taking second place interacts easily, and it is time overlapping to form level, especially the above long wave band of 500nm.
3, as shown in Figure 3, along with wavelength from the shortwave to the long wave, spectrum spectrogram distributes seriously inhomogeneous on detector, causes the space availability ratio of detector lower.
4, gather the deep ultraviolet band spectrum as needing usually, need double exposure, increased moving component, increased Measuring Time.
Summary of the invention
In order to solve the deficiency in the above-mentioned prior art scheme; The present invention provide a kind of can spread spectrum investigative range to deep ultraviolet and don't increase detector size; And can improve the light-dividing device of visible light wave range spectral order time overlap problem; And the spectroscopic analysis system of using this light-dividing device, the light-splitting method that can improve the spectrographic detection scope that a kind of reliability is high, need not safeguard also is provided, and the spectroscopic analysis methods of using this light-splitting method.
The objective of the invention is to realize through following technical scheme:
A kind of light-dividing device that improves the spectrographic detection scope, said light-dividing device comprises:
First spectrophotometric unit, said first spectrophotometric unit is used for the beam split of measuring light, and said measurement light wavelength contains [λ
1, λ
2];
Second spectrophotometric unit, said second spectrophotometric unit comprise be used for measuring light through before the said first spectrophotometric unit beam split or/and after the beam split and the different dispersive component M of beam split ability of light
i, i=1,2 ... N, N>=2; The dispersion direction of said first spectrophotometric unit and second spectrophotometric unit is vertical each other;
Probe unit, said probe unit are used for the said measuring light that receives through said first spectrophotometric unit or said dispersive component M
iAfter light signal convert electric signal I respectively into
i, i=1,2 ... N, N>=2, and be sent to processing unit;
The said electric signal I that the combined reception that is used for processing unit, said processing unit arrives
i, i=1,2 ... N, N>=2, thus draw said measuring light at [λ
1, λ
2] on light distribution.
According to above-mentioned light-dividing device, said dispersive component M
iBe arranged on simultaneously in the light path, i=1,2 ... N, N>=2.
According to above-mentioned light-dividing device, said processing unit is used for making up through long wavelength's part of the light signal electrical signal converted after the dispersive component of strong beam split ability with through the short wavelength's part in the light signal electrical signal converted after the dispersive component of weak beam split ability.
According to above-mentioned light-dividing device, equidirectional measuring light medium wavelength λ
1Light through the first dispersive component M
1After deflection angle be θ
1, said equidirectional measuring light medium wavelength λ
2Light through the second dispersive component M
2After deflection angle be θ
2, θ
1=θ
2
According to above-mentioned light-dividing device, said processing unit is used to make up the said first dispersive component M of process that said probe unit sends
1After the first electric signal I of light signal conversion
1In [λ
1, λ
3] part and the said second dispersive component M of process
2After the second electric signal I of light signal conversion
2In (λ
3, λ
2] part, λ
3∈ [λ
1, λ
2].
According to above-mentioned light-dividing device, said second spectrophotometric unit also comprises mobile module, and said mobile module is used to make said dispersive component M
iAlternately be arranged in the light path, i=1,2 ... N, N>=2.
According to above-mentioned light-dividing device, as preferably, said dispersive component M
iBe prism, i=1,2 ... N, N>=2.
According to above-mentioned light-dividing device, as preferably, said dispersive component M
iAdopt the material of transmission vacuum ultraviolet band of light.
According to above-mentioned light-dividing device, as preferably, said material is magnesium fluoride, calcium fluoride or lithium fluoride.
According to above-mentioned light-dividing device, said wavelength X
1≤130nm, said wavelength X
2>=1050nm.
The object of the invention also is achieved by the following technical programs:
A kind of spectroscopic analysis system comprises light source, lighting equipment, light-dividing device and analytic unit, and said light-dividing device adopts above-mentioned light-dividing device.
According to above-mentioned analytic system, said light source is inductively coupled plasma, spark direct-reading light source, flame, glow discharge, microwave plasma, uviol lamp.
The object of the invention also is achieved by the following technical programs:
A kind of light-splitting method that improves the spectrographic detection scope, said light-splitting method may further comprise the steps:
(A1) measuring light is through the beam split of first spectrophotometric unit, and said measurement light wavelength contains [λ
1, λ
2];
(A2) through before the said first spectrophotometric unit beam split or/and after light through the second spectrophotometric unit beam split, second spectrophotometric unit comprises the dispersive component M that the beam split ability is different
i, i=1,2 ... N, N>=2; The dispersion direction of said first spectrophotometric unit and second spectrophotometric unit is vertical each other;
(A3) the probe unit said measuring light that will receive is through said first spectrophotometric unit or said dispersive component M
iAfter light signal convert electric signal I respectively into
i, i=1,2 ... N, N>=2, and be sent to processing unit;
(A4) the said electric signal I that arrives of processing unit combined reception
i, i=1,2 ... N, N>=2, thus draw said measuring light at [λ
1, λ
2] on light distribution.
According to above-mentioned light-splitting method, said measuring light while or timesharing ground are through said dispersive component M
i, i=1,2 ... N, N>=2.
According to above-mentioned light-splitting method, said processing unit combination is through the part of the long wavelength in the light signal electrical signal converted after the dispersive component of strong beam split ability with through the short wavelength's part in the light signal electrical signal converted after the dispersive component of weak beam split ability.
According to above-mentioned light-splitting method, equidirectional measuring light medium wavelength is λ
1Light through the first dispersive component M
1After deflection angle be θ
1, said equidirectional measuring light medium wavelength is λ
2Light through the second dispersive component M
2After deflection angle be θ
2, θ
1=θ
2
According to above-mentioned light-splitting method, wavelength X
1≤130nm, wavelength X
2>=1050nm.
The object of the invention also is achieved by the following technical programs:
A kind of spectroscopic analysis methods, said method comprise bright dipping step, daylighting step, beam split step and analytical procedure, and said beam split step adopts above-mentioned light-splitting method.
Compared with prior art, the beneficial effect that has of the present invention is:
1, can not increase under the detector area situation, realize that the detection of deep ultraviolet wave band helps the cost control of system;
2, the design through prism makes between 130～1050nm all band in the detector collection, and level time distributes more evenly than original system, has eliminated overlapping interference between the level time of visible light wave range;
3, single exposure can realize that all band covers, and need not multiexposure, multiple exposure, saves Measuring Time;
4,130～1050nm composes data acquisition entirely, does not have spectral line to lose.
Description of drawings
With reference to accompanying drawing, disclosure of the present invention will be easier to understand.Those skilled in the art are understood that easily: these accompanying drawings only are used to illustrate technical scheme of the present invention, and are not to be intended to protection scope of the present invention is constituted restriction.Among the figure:
Fig. 1 is the basic block diagram of prior art echelle grating bidimensional spectroscopy system;
Fig. 2 is MgF
2Material refractive index and wavelength relationship synoptic diagram;
Fig. 3 is the spectrogram synoptic diagram that the beam splitting system according to Fig. 1 obtains;
Fig. 4 is the basic block diagram according to the spectroscopic analysis system of the embodiment of the invention 1;
Fig. 5 is the synoptic diagram according to the prismatic decomposition of the embodiment of the invention 1;
Fig. 6 is the basic block diagram according to the spectroscopic analysis system of the embodiment of the invention 2;
Fig. 7 is the spectrum synoptic diagram after the combination that obtains according to the present invention.
Embodiment
Fig. 4-7 and following declarative description optional embodiment of the present invention how to implement with instruction those skilled in the art and reproduce the present invention.In order to instruct technical scheme of the present invention, simplified or omitted some conventional aspects.Those skilled in the art should understand that the modification or the replacement that are derived from these embodiments will be within the scope of the invention.Those skilled in the art should understand that following characteristics can make up to form a plurality of modification of the present invention in every way.Thus, the present invention is not limited to following optional embodiment, and is only limited claim and their equivalent.
Embodiment 1:
Fig. 4 has schematically provided the basic block diagram of the spectroscopic analysis system of the embodiment of the invention.As shown in Figure 4, said spectroscopic analysis system comprises:
Lighting equipment, said lighting equipment comprise collecting lens 12, entrance slit 13 and collimating mirror 14.
Light-dividing device, said light-dividing device are used for the beam split and the detection of the measuring light that said light source sends, and specifically see also the lower part and describe.
The signal that analytic unit, said analytic unit utilize absorption spectroanalysis technology or the said light-dividing device of emission spectrographic analysis technical Analysis to send.Analytic unit is the state of the art, repeats no more at this.
Said light-dividing device comprises:
First spectrophotometric unit 16, said first spectrophotometric unit are used for the beam split first time of the measuring light that said light source sends, and specifically adopt light-splitting devices such as spectro-grating, like echelle grating.Said measurement light wavelength contains [λ
1, λ
2].
Alternatively, said wavelength X
1=130nm, said wavelength X
2=1050nm.
Alternatively, said dispersive component M
iBe in simultaneously on the light path, i=1,2 ... N, the different two prisms of the angle of wedge (can be the different prism of two angles of wedge or two angle of wedge different portions of a prism) is specifically adopted in N>=2, makes equidirectional measuring light medium wavelength λ
1The light of=130nm is through the little prism M of the angle of wedge
1After deflection angle be θ
1, said equidirectional measuring light medium wavelength λ
2The light of=1050nm is through the big prism M of the angle of wedge
2After deflection angle be θ
2, θ
1=θ
2
Alternatively, said dispersive component M
iBe on the preceding light path of the said first spectrophotometric unit beam split, or on the light path after the beam split, or before the beam split and on the light path after the beam split.
Alternatively, said prism adopts the material of transmission vacuum ultraviolet band of light, like magnesium fluoride, calcium fluoride or lithium fluoride.
The said electric signal I that the combined reception that is used for processing unit, said processing unit arrives
i, i=1,2 ... N, N>=2, thus draw said measuring light at [λ
1, λ
2] on light distribution, and send said analytic unit.
Alternatively, said processing unit is used for making up through long wavelength's part of the light signal electrical signal converted after the dispersive component of strong beam split ability with through the short wavelength's part in the light signal electrical signal converted after the dispersive component of weak beam split ability.As for the dispersive component, said processing unit is used to make up the little prism M of the said angle of wedge of process that said probe unit sends for above-mentioned two prisms
1After the first electric signal I of light signal conversion
1In [λ
1, λ
3] part and the big prism M of the said angle of wedge of process
2After the second electric signal I of light signal conversion
2In (λ
3, λ
2] part, λ
3∈ [λ
1, λ
2].
Fig. 5 has schematically provided the spectroscopy scheme of prism, and is as shown in Figure 5, and through the design of the above-mentioned angle of wedge, two parts outgoing spectrum is not overlapping up and down to have guaranteed prism, on a square conventional detector 18, obtains the complete spectrogram from 130nm to 1050nm.The top angle of prism is little in addition, and the chromatic dispersion that prism produces is less, and it is closeer to obtain spectrogram level time interbody spacer; The bottom angle of prism is big, and the chromatic dispersion that prism produces is bigger, and the interval between acquisition spectrogram level is inferior is thinner; The spectrogram that the combined prism top and the bottom are formed; Just can obtain a complete full spectrum spectrogram, and make more original the dredging of spectrogram level minor tick of long wave part, more original close of the spectrogram level minor tick of shortwave part; Thereby make whole spectrogram level minor tick more originally design evenly; 130nm can arrange on a spectrogram down to the spectral line between the 1050nm, and is as shown in Figure 7, improved the spectrographic detection scope effectively.
A kind of spectroscopic analysis methods, said spectroscopic analysis methods may further comprise the steps:
The bright dipping step utilizes light sources such as inductively coupled plasma, spark direct-reading light source, flame, glow discharge, microwave plasma, uviol lamp to send measuring light.
The daylighting step utilizes parts such as collecting lens, entrance slit to realize the collection of measuring light;
The beam split step is used for beam split, the detection of measuring light, specifically may further comprise the steps:
(A1) measuring light is through the beam split of first spectrophotometric unit (like echelle grating), and said measurement light wavelength contains [λ
1, λ
2];
Alternatively, said wavelength X
1=130nm, said wavelength X
2=1050nm.
(A2) light after the said first spectrophotometric unit beam split of process is simultaneously through the beam split once more of second spectrophotometric unit, and second spectrophotometric unit comprises the dispersive component M that the beam split ability is different
i, i=1,2 ... N, N>=2; The dispersion direction of second spectrophotometric unit and first spectrophotometric unit is vertical each other.
Alternatively, said dispersive component M
iBe in simultaneously on the light path, i=1,2 ... N, the different two prisms of the angle of wedge is specifically adopted in N>=2, makes equidirectional measuring light medium wavelength λ
1The light of=130nm is through the little prism M of the angle of wedge
1After deflection angle be θ
1, said equidirectional measuring light medium wavelength λ
2The light of=1050nm is through the big prism M of the angle of wedge
2After deflection angle be θ
2, θ
1=θ
2
Alternatively, said prism adopts the material of transmission vacuum ultraviolet band of light, like magnesium fluoride, calcium fluoride or lithium fluoride.
(A3) the probe unit said measuring light that will receive is through said dispersive component M
iAfter light signal convert electric signal I respectively into
i, i=1,2 ... N, N>=2, and be sent to processing unit;
(A4) the said electric signal I that arrives of processing unit combined reception
i, i=1,2 ... N, N>=2, thus draw said measuring light at [λ
1, λ
2] on light distribution.
Alternatively, said processing unit is used for making up through long wavelength's part of the light signal electrical signal converted after the dispersive component of strong beam split ability with through the short wavelength's part in the light signal electrical signal converted after the dispersive component of weak beam split ability.As for the dispersive component, said processing unit is used to make up the little prism M of the said angle of wedge of process that said probe unit sends for above-mentioned two prisms
1After the first electric signal I of light signal conversion
1In [λ
1, λ
3] part and the big prism M of the said angle of wedge of process
2After the second electric signal I of light signal conversion
2In (λ
3, λ
2] part, λ
3∈ [λ
1, λ
2], as shown in Figure 7.
Analytical procedure, the measuring light that the analytic unit processing sends is at [λ
1, λ
2] on light distribution, thereby obtain the content or the concentration of determinand.
Embodiment 2:
Fig. 6 has schematically provided the basic block diagram of the spectroscopic analysis system of the embodiment of the invention 1.As shown in Figure 6, different with embodiment 1 is:
1, the different prism of the angle of wedge is to be located in light path the branch time, specifically removes to drive the different prism of the said angle of wedge by mobile module.
2, the spectrogram when the different prism of the angle of wedge is in the light path that receives of processing unit processes probe unit, as utilize software that the spectrogram of twice acquisition in front and back is combined into a complete spectrogram.
A kind of spectroscopic analysis methods, different with embodiment 1 is:
1, the different prism of the angle of wedge is to be located in light path the branch time, specifically removes to drive the different prism of the said angle of wedge 25,29 by mobile module.Probe unit needs the collection spectrogram twice.
2, the spectrogram when the different prism of the angle of wedge is in the light path that receives of processing unit processes probe unit, as utilize software that the spectrogram of twice acquisition in front and back is combined into a complete spectrogram.
Embodiment 3:
Spectroscopic analysis system and the application examples of method in metallurgical industry according to the embodiment of the invention 1; Stipulate according to national standard (GB/T20125-2006); Need to use inductively coupled plasma-Atomic Emission Spectrometer AES device to identify low alloy steel, tested element is silicon, manganese, phosphorus, nickel, chromium, molybdenum etc.In this application examples, the spectral line that is suitable for detecting of elements such as phosphorus is in the deep ultraviolet wave band, as, P:153.592nm.Therefore, the investigative range of light-dividing device will expand to the deep ultraviolet wave band in the said analytic system, and investigative range contains [130nm, 1050nm].
In this application examples, light source adopts inductively coupled plasma, thereby excites the steel sample of the different trades mark to be measured.The angle of wedge of the medium and small angle of wedge prism of second spectrophotometric unit is 20 degree, and the angle of wedge of big angle of wedge prism is 32 degree, thereby makes that wavelength is that the light of 130nm is through little angle of wedge prism M
1After deflection angle to equal wavelength be that the light of 1050nm is through big angle of wedge prism M
2After deflection angle, thereby make single exposure again through the combination after can obtain the light distribution of measuring light on [130nm, 1050nm], as shown in Figure 7.
Embodiment 4:
Spectroscopic analysis system and method according to the embodiment of the invention 1 are routine in the pollution source Application in Monitoring, according to national regulation, need the concentration of harmful gases such as sulphuric dioxide, nitrogen monoxide, sulfuretted hydrogen in the monitoring fume emission.In this application examples, the spectral line that gases such as sulphuric dioxide are suitable for detecting is in ultraviolet band.Light source adopts the ultraviolet xenon lamp, and the measuring light that light source sends is passed tested gas, is sent light-dividing device by the measuring light after the tested gas absorption after through lighting equipment, is received by detector such as CCD after the beam split.
Claims (18)
1. light-dividing device that improves the spectrographic detection scope, said light-dividing device comprises:
First spectrophotometric unit, said first spectrophotometric unit is used for the beam split of measuring light, and said measurement light wavelength contains [λ
1, λ
2];
Second spectrophotometric unit, said second spectrophotometric unit comprise be used for measuring light through before the said first spectrophotometric unit beam split or/and after the beam split and the different dispersive component M of beam split ability of light
i, i=1,2 ... N, N>=2; The dispersion direction of said first spectrophotometric unit and second spectrophotometric unit is vertical each other;
Probe unit, said probe unit are used for the said measuring light that receives through said first spectrophotometric unit or said dispersive component M
iAfter light signal convert electric signal I respectively into
i, i=1,2 ... N, N>=2, and be sent to processing unit;
The said electric signal I that the combined reception that is used for processing unit, said processing unit arrives
i, i=1,2 ... N, N>=2, thus draw said measuring light at [λ
1, λ
2] on light distribution.
2. light-dividing device according to claim 1 is characterized in that: said dispersive component M
iBe arranged on simultaneously in the light path, i=1,2 ... N, N>=2.
3. light-dividing device according to claim 1 is characterized in that: said processing unit is used for making up through long wavelength's part of the light signal electrical signal converted after the dispersive component of strong beam split ability with through the short wavelength's part in the light signal electrical signal converted after the dispersive component of weak beam split ability.
4. light-dividing device according to claim 1 is characterized in that: equidirectional measuring light medium wavelength λ
1Light through the first dispersive component M
1After deflection angle be θ
1, said equidirectional measuring light medium wavelength λ
2Light through the second dispersive component M
2After deflection angle be θ
2, θ
1=θ
2
5. light-dividing device according to claim 4 is characterized in that: said processing unit is used to make up the said first dispersive component M of process that said probe unit sends
1After the first electric signal I of light signal conversion
1In [λ
1, λ
3] part and the said second dispersive component M of process
2After the second electric signal I of light signal conversion
2In (λ
3, λ
2] part, λ
3∈ [λ
1, λ
2].
6. light-dividing device according to claim 1 is characterized in that: said second spectrophotometric unit also comprises mobile module, and said mobile module is used to make said dispersive component M
iAlternately be arranged in the light path, i=1,2 ... N, N>=2.
7. light-dividing device according to claim 1 is characterized in that: said dispersive component M
iBe prism, i=1,2 ... N, N>=2.
8. light-dividing device according to claim 1 is characterized in that: said dispersive component M
iAdopt the material of transmission vacuum ultraviolet band of light.
9. light-dividing device according to claim 1 is characterized in that: said material is magnesium fluoride, calcium fluoride or lithium fluoride.
10. light-dividing device according to claim 1 is characterized in that: said wavelength X
1≤130nm, said wavelength X
2>=1050nm.
11. a spectroscopic analysis system comprises light source, lighting equipment, light-dividing device and analytic unit, it is characterized in that: said light-dividing device adopts arbitrary described light-dividing device among the claim 1-10.
12. analytic system according to claim 11 is characterized in that: said light source is inductively coupled plasma, spark direct-reading light source, flame, glow discharge, microwave plasma, uviol lamp.
13. a light-splitting method that improves the spectrographic detection scope, said light-splitting method may further comprise the steps:
(A1) measuring light is through the first spectrophotometric unit beam split, and said measurement light wavelength contains [λ
1, λ
2];
(A2) through before the said first spectrophotometric unit beam split or/and after light through the second spectrophotometric unit beam split, second spectrophotometric unit comprises the dispersive component M that the beam split ability is different
i, i=1,2 ... N, N>=2; The dispersion direction of said first spectrophotometric unit and second spectrophotometric unit is vertical each other;
(A3) the probe unit said measuring light that will receive is through said first spectrophotometric unit or said dispersive component M
iAfter light signal convert electric signal I respectively into
i, i=1,2 ... N, N>=2, and be sent to processing unit;
(A4) the said electric signal I that arrives of processing unit combined reception
i, i=1,2 ... N, N>=2, thus draw said measuring light at [λ
1, λ
2] on light distribution.
14. light-splitting method according to claim 13 is characterized in that: said measuring light while or timesharing ground are through said dispersive component M
i, i=1,2 ... N, N>=2.
15. light-splitting method according to claim 13 is characterized in that: said processing unit combination is through the part of the long wavelength in the light signal electrical signal converted after the dispersive component of strong beam split ability with through the short wavelength's part in the light signal electrical signal converted after the dispersive component of weak beam split ability.
16. light-splitting method according to claim 13 is characterized in that: equidirectional measuring light medium wavelength is λ
1Light through the first dispersive component M
1After deflection angle be θ
1, said equidirectional measuring light medium wavelength is λ
2Light through the second dispersive component M
2After deflection angle be θ
2, θ
1=θ
2
17. light-splitting method according to claim 13 is characterized in that: wavelength X
1≤130nm, wavelength X
2>=1050nm.
18. a spectroscopic analysis methods, said method comprise bright dipping step, daylighting step, beam split step and analytical procedure, it is characterized in that: said beam split step adopts arbitrary described light-splitting method among the claim 13-17.
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| CN201110461625.4A CN102539360B (en) | 2011-12-31 | 2011-12-31 | Light splitting device and method for improving spectrum probing range |
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|---|---|---|---|
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