CN102096189B

CN102096189B - Variable attenuator of double variable density disc

Info

Publication number: CN102096189B
Application number: CN2010106054613A
Authority: CN
Inventors: 严伟; 胡松; 赵立新; 李艳丽; 杨勇; 王建; 陈铭勇; 马平; 徐文祥
Original assignee: Institute of Optics and Electronics of CAS
Current assignee: Institute of Optics and Electronics of CAS
Priority date: 2010-12-27
Filing date: 2010-12-27
Publication date: 2012-08-15
Anticipated expiration: 2030-12-27
Also published as: CN102096189A

Abstract

The invention discloses a variable attenuator of a double variable density disc, which comprises a first variable density disc, a second variable density disc, a first servo motor, a second servo motor, a first encoder, a second encoder, a first limit switch, a second limit switch, a first motor shaft and a second motor shaft, wherein a servo control system consisting of the motors and the encoders respectively controls the rotations of two variable density discs with a complementary and symmetric structure, and the current transmissivity of the two variable density discs commonly realizes the quantitative attenuation of incident light beams. The invention provides a complementary and symmetric structure of the double variable density disc, which has the characteristics of continuously attenuating the incident light beams of the traditional variable attenuator, has greatly improved transmissivity segmentation precision and has an obvious advantage that: compared with the variable attenuator of single variable density disc, the variable attenuator of the double variable density disc does not change the energy distribution of the light beams and therefore does not increase the energy non-uniformity of the incident light beams, guarantees the quality of the incident light beams after attenuation and represents special advantages.

Description

The variable attenuator of a kind of pair of plate of changing density

Technical field

The present invention relates to a kind of beam energy attenuator, realize adjusting incident beam through changing transmitance.

Background technology

The variable attenuator of present monotropic density dish is widely used in illumination, imaging optical system; The variable attenuator transmitance subdivision accuracy of this monotropic density dish is comparatively low; Simultaneously because incident beam has go-no-go; After can causing the variable attenuator of incident light through monotropic density dish like this, its energy distribution changes, thereby has limited the application of the variable attenuator of monotropic density dish.

Summary of the invention

In order to solve the technical matters described in the background technology, the objective of the invention is to propose the variable attenuator of a kind of pair of plate of changing density, realize that to the high-precision damping capacity of incident light, the energy distribution of avoiding monotropic density dish to introduce simultaneously is inhomogeneous.

In order to realize described purpose; The technical scheme that the variable attenuator technical solution problem of the two plate of changing density of the present invention is adopted is: this device comprises first plate of changing density and second plate of changing density, first servomotor and second servomotor, first scrambler and second scrambler, first limit switch and second limit switch; Coaxial and end face is arranged in parallel first plate of changing density with second plate of changing density; First limit switch is provided with first plate of changing density; Second limit switch is provided with second plate of changing density; Described first limit switch and second limit switch are arranged in the full impregnated light sector of first plate of changing density and second plate of changing density; The axle of first servomotor and the axle of second servomotor are respectively perpendicular to the transverse plane of first plate of changing density and second plate of changing density, and said first plate of changing density and second plate of changing density adopt the plate of changing density of complementary symmetrical structure to rotate respectively, and the inhomogeneity in energy that incident light causes after through first plate of changing density can be by the second plate of changing density correction; The transmitance of first plate of changing density can be segmented by second plate of changing density simultaneously, thereby improves the energy attenuation resolving power.

Innovative point of the present invention is: the present invention proposes the complementary symmetrical structure of a kind of pair of plate of changing density, inherited the conventional variable attenuator to the continuous attenuation characteristic of incident beam, and the transmitance subdivision accuracy improves greatly; More outstanding advantage is; In contrast to the variable attenuator of monotropic density dish, the variable attenuator of this pair of plate of changing density can not change beam energy and distribute, thereby can not be added to the irradiating light beam inhomogeneity in energy; Guarantee incident beam decay back quality, shown distinctive advantage.

1. incident light is regulated the beam energy skewness problem of avoiding attenuator to introduce through the two complementary plate of changing density that are symmetrically distributed.

Through two independently servo-control system control two plate of changing density respectively, can realize the further segmentation of transmitance, thereby improve decay segmentation ability.

Description of drawings

Fig. 1 is a systematic schematic diagram of the present invention;

Fig. 2 a and Fig. 2 b are that the structure A of first plate of changing density and second plate of changing density among Fig. 1 is to view;

Fig. 3 plate of changing density spatial relation;

Fig. 4 first plate of changing density transmitance distribution (increasing progressively clockwise);

Fig. 5 second plate of changing density transmitance distribution (successively decreasing clockwise).

Embodiment

For making the object of the invention, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, to further explain of the present invention.

The variable attenuator of a kind of pair of plate of changing density of the present invention is shown like Fig. 1 and Fig. 2 a and Fig. 2 b; Form by first scrambler 1, first servomotor 2, first plate of changing density 3, first limit switch 4, first motor shaft 9, second plate of changing density 5, second limit switch 6, second servomotor 7, second scrambler 8 and second motor shaft 10; First plate of changing density 3 is fixed on first motor shaft 9; First motor shaft 9 can relatively rotate with respect to first scrambler 1 and first servomotor 2; Second plate of changing density 5 is fixed on second motor shaft 10, and second motor shaft 10 is with respect to second scrambler 8 and second servomotor 7.

The one B sector 32 of first plate of changing density 3 and the 2nd B sector 52 of second plate of changing density 5 are placed in the groove of first limit switch 4 and second limit switch 6; Coaxial and end face is arranged in parallel first plate of changing density 3 with second plate of changing density 5; First limit switch 4 is provided with first plate of changing density 3; Second limit switch 6 is provided with second plate of changing density 5; Described first limit switch 4 and second limit switch 6 are arranged in the full impregnated light sector of first plate of changing density 3 and second plate of changing density 5; The axle of first servomotor 2 and the axle of second servomotor 7 are respectively perpendicular to the transverse plane of first plate of changing density 3 and second plate of changing density 5, and said first plate of changing density 3 and second plate of changing density 5 adopt the plate of changing density of complementary symmetrical structure to rotate respectively, and the inhomogeneity in energy that incident light causes after through first plate of changing density 3 can be by 5 corrections of second plate of changing density; The transmitance of first plate of changing density 3 can be segmented by second plate of changing density 5 simultaneously, thereby realizes higher energy attenuation resolving power.

The structural drawing of two plate of changing density is shown like Fig. 2 a and Fig. 2 b; The clockwise cumulative distribution of the transmitance of first plate of changing density 3 comprises: an A sector 31 is light tight sectors; The one B sector 32 is that full impregnated is crossed the sector; The one C sector 33 is the cumulative districts of transmitance, and the complementary symmetrical structure of a C sector 33 is that transmitance increases progressively from 0% to 100% by clockwise transmitance.The transmitance of second plate of changing density 5 is counterclockwise, and cumulative distribution comprises: the 2nd A sector 51 is light tight sectors; The 2nd B sector 52 is that full impregnated is crossed the sector; The 2nd C sector 53 is transmitance transition regions, and the complementary symmetrical structure of the 2nd C sector 53 is that transmitance increases progressively from 0% to 100% by counterclockwise transmitance.As shown in Figure 3, under the situation for angle pencil of ray incident, two plate of changing density structures, compensation is avoided introducing the beam energy that brings owing to the transmitance gradual change and is not divided equally problem each other.

As shown in Figure 4; The one B sector 32 shared angles are: 330 °-360 °; The 2nd B sector 52 shared angles are: 330 °-360 °, an A sector 31 shared angles are: 300 °-330 °, the 2nd A sector 51 shared angles are: 300 °-330 °; The one C sector 33 shared angles are: 0 °-300 °, the 2nd C sector 53 shared angles are 0 °-300 °.

First plate of changing density 3 is coaxial with first servomotor 2; Second plate of changing density 5 is coaxial with second servomotor 7; Guarantee that simultaneously first servomotor 2 and second servomotor 7 are for coaxial; The full impregnated light sector of first plate of changing density 3 and second plate of changing density 5 is arranged for overlapping, and the angle of first plate of changing density 3 and second plate of changing density 5 is 0 °.First scrambler 1 is coaxial placement with first servomotor 2, and first motor shaft 9 can rotate with respect to first scrambler 1, and second scrambler 8 is coaxial placement with second servomotor 7, and second motor shaft 10 can rotate with respect to second scrambler 8.First limit switch 4 and second limit switch 6 are surveyed as the zero-bit of first servomotor 2 and second servomotor 7 respectively, and first scrambler 1 and second scrambler 8 are accurately measured the corner of first servomotor 2 and second servomotor 7 respectively.

As shown in Figure 4,0 °-300 ° of the corner variation ranges of first plate of changing

density

3,0 °-300 ° of the corner variation ranges of second plate of changing density 5 as shown in Figure 5, then the transmitance of incident beam after through first plate of changing density 3 is α/300; Through behind second plate of changing density 5, total transmitance is (α/300) * (β/300) again.In the formula α be first plate of changing density 3 since 0 ° of angle that turns over, β is that second plate of changing density 5 is since 0 ° of angle that turns over.

The present invention utilizes two plate of changing density that incident beam is decayed, and two plate of changing density have full impregnated light sector and light tight sector, the gradual change of middle endless belt transmitance.Two motor-driven plate of changing density rotations separately, the optional position all will be superposed to the attenuator of a uniform thickness in light path, thereby can not introduce additional light beam unevenness.In addition, the transmitance under first plate of changing density current location can further be segmented by second plate of changing density 5, thereby obtains the damping capacity of high-resolution.

The above; Be merely the embodiment among the present invention, but protection scope of the present invention is not limited thereto, anyly is familiar with this technological people in the technical scope that the present invention disclosed; Can understand conversion or the replacement expected; All should be encompassed in of the present invention comprising within the scope, therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.

Claims

1. the variable attenuator of two plate of changing density; It is characterized in that: this device comprises first plate of changing density (3) and second plate of changing density (5), first servomotor (2) and second servomotor (7), first motor shaft (9) and second motor shaft (10), first scrambler (1) and second scrambler (8), first limit switch (4) and second limit switch (6); Coaxial and end face is arranged in parallel first plate of changing density (3) with second plate of changing density (5); First plate of changing density (3) is provided with first limit switch (4); Second plate of changing density (5) is provided with second limit switch (6); Described first limit switch (4) and second limit switch (6) are arranged in the full impregnated light sector of first plate of changing density (3) and second plate of changing density (5); The axle of first servomotor (2) and second servomotor (7) spool respectively perpendicular to the transverse plane of first plate of changing density (3) and second plate of changing density (5); Said first plate of changing density (3) and second plate of changing density (5) adopt the plate of changing density rotation of complementary symmetrical structure respectively; The inhomogeneity in energy that incident light causes after through first plate of changing density (3) can be revised by second plate of changing density (5), and the transmitance of first plate of changing density (3) can be by second plate of changing density (5) segmentation simultaneously, thereby improves the energy attenuation resolving power;

Said first plate of changing density (3) is coaxial with first servomotor (2), and first plate of changing density (3) is fixed on first motor shaft (9);

Said second plate of changing density (5) is coaxial with second servomotor (7), and second plate of changing density (5) is fixed on second motor shaft (10);

Said first scrambler (1) is coaxial with first servomotor (2), and first motor shaft (9) rotates with respect to first scrambler (1);

Said second scrambler (8) is coaxial with second servomotor (7), and second motor shaft (10) can rotate with respect to second scrambler (8).

2. variable attenuator according to claim 1; It is characterized in that: the clockwise cumulative distribution of the transmitance of described first plate of changing density (3) comprises: an A sector (31) is light tight sector; The one B sector (32) is that full impregnated is crossed the sector; The one C sector (33) is the cumulative district of transmitance, and the complementary symmetrical structure of a C sector (33) is that transmitance increases progressively from 0% to 100% by clockwise transmitance.

3. variable attenuator according to claim 1; It is characterized in that: the counterclockwise cumulative distribution of the transmitance of described second plate of changing density (5) comprises: the 2nd A sector (51) is light tight sector; The 2nd B sector (52) is that full impregnated is crossed the sector; The 2nd C sector (53) is the transmitance transition region, and the complementary symmetrical structure of the 2nd C sector (53) is that transmitance increases progressively from 0% to 100% by counterclockwise transmitance.

4. according to claim 2 and 3 described variable attenuators, it is characterized in that: the full impregnated light sector of described first plate of changing density (3) and second plate of changing density (5) arranges that for overlapping angle is 0 ° between the end face of first plate of changing density (3) and second plate of changing density (5).