CN101919053B - 经封装集成电路、封装集成电路的方法和集成电路封装系统 - Google Patents

经封装集成电路、封装集成电路的方法和集成电路封装系统 Download PDF

Info

Publication number
CN101919053B
CN101919053B CN2009801025126A CN200980102512A CN101919053B CN 101919053 B CN101919053 B CN 101919053B CN 2009801025126 A CN2009801025126 A CN 2009801025126A CN 200980102512 A CN200980102512 A CN 200980102512A CN 101919053 B CN101919053 B CN 101919053B
Authority
CN
China
Prior art keywords
electronic substrate
screen
adhesive
emi
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2009801025126A
Other languages
English (en)
Other versions
CN101919053A (zh
Inventor
斯坦利·克雷格·贝丁菲尔德
让-弗朗索瓦·德鲁阿尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of CN101919053A publication Critical patent/CN101919053A/zh
Application granted granted Critical
Publication of CN101919053B publication Critical patent/CN101919053B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/60Protection against electrostatic charges or discharges, e.g. Faraday shields
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49833Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/552Protection against radiation, e.g. light or electromagnetic waves
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0655Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657Stacked arrangements of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/10Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
    • H01L25/105Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32135Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06517Bump or bump-like direct electrical connections from device to substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/0652Bump or bump-like direct electrical connections from substrate to substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06572Auxiliary carrier between devices, the carrier having an electrical connection structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/10All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
    • H01L2225/1005All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/1011All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
    • H01L2225/1017All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support
    • H01L2225/1023All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support the support being an insulating substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/10All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
    • H01L2225/1005All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/1011All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
    • H01L2225/1041Special adaptations for top connections of the lowermost container, e.g. redistribution layer, integral interposer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/10All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
    • H01L2225/1005All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/1011All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
    • H01L2225/1047Details of electrical connections between containers
    • H01L2225/1058Bump or bump-like electrical connections, e.g. balls, pillars, posts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/10All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
    • H01L2225/1005All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/1011All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
    • H01L2225/1076Shape of the containers
    • H01L2225/1088Arrangements to limit the height of the assembly
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

Abstract

本发明揭示一种经封装集成电路(IC)(100),其包含第一衬底(110),所述第一衬底包括第一多个层及在所述第一衬底的上表面处的第一电路耦合特征(112),所述第一多个层包含第一电磁干扰屏蔽层(132)。所述经封装IC还包含第二衬底(106),所述第二衬底具有通过导电粘合剂材料(136)附接到所述第一衬底的下表面的上表面。所述第二衬底包含第二多个层及在所述第二衬底的下表面处的第二电路耦合特征(108)。所述第一多个层包含第二EMI屏蔽层(134)。所述经封装IC进一步包含功能裸片(124),其安置于所述第一衬底与所述第二衬底之间且功能上耦合到所述第一电路耦合特征及/或所述第二电路耦合特征。在所述经封装IC中,所述粘合剂材料电耦合所述第一屏蔽层与所述第二屏蔽层。

Description

经封装集成电路、封装集成电路的方法和集成电路封装系统
技术领域
大体来说,此涉及集成电路封装,且更特定来说,涉及用于调制集成电路封装中电磁干扰的结构和技术。 
背景技术
随着对具有增加功能性的更快速、更小型电子产品的需求不断增加,一些设计者开始致力于系统级封装(SIP)解决方案。SIP通常包含集成到单个IC封装中的数个不同类型的集成电路(IC)。然而,近些年来,已使用堆叠式封装方案(例如,层叠封装(POP)配置)代替了SIP方案。通常,通过允许堆叠不同的半导体封装,可减小电子产品中用于半导体封装所需的占用面积大小。此外,由于一些堆叠式封装(例如,POP封装)通过允许堆叠不同组合半导体封装来提供模块化解决方案,因此设计者通常可使用几个单个半导体封装占用面积设计不同类型电子装置。 
已知一些类型的集成电路(IC)(包含堆叠式封装中所使用的那些集成电路)在操作周期期间辐射相对大量的电磁能量。举例来说,微处理器及其它数字处理装置被公认为是计算机系统中电磁辐射的主要来源。此类装置所辐射的电磁能量可干扰在辐射IC(包含同一堆叠式封装中的那些IC)附近的其它装置或电路的操作且因此通常是不期望的。 
过去曾使用过若干技术来减小从IC发射的电磁干扰(EMI)的水平,或保护IC使其免受EMI。通常,此类技术需要使用围绕其外围可具有多个间隔开的支腿的冲压板金属笼部件在所述IC周围形成大体导电笼结构。接着,将所述笼部件放置于所述IC封装上方且将其耦合到下伏电路板上的对应接地垫。所述电路板的接地垫使用(举例来说)通孔连接各自以导电方式耦合到所述电路板的接地平面。以此方式,在IC周围形成称为法拉第(Faraday)笼的用于阻挡EMI的大体导电屏蔽。然而,在堆叠式封装方案(例如,POP封装)中使用常规法拉第笼通常增加所述封装的总体尺寸且可消除最初通过堆叠式封装方案所获得的至少一部分大小优势。 
发明内容
随着堆叠式封装方案(例如,POP封装)的日益普及,其中使用所述堆叠式封装方案的应用的数目也得以增加。然而,将EMI敏感IC并入到此类封装中因法拉第笼的并入所产生的增加尺寸而为困难的。更糟的是,如果设计者希望将EMI产生IC及EMI敏感IC并入到单个POP封装中,那么EMI产生IC的接近可阻止这样做。对于此类封装技术,发明者已发现,添加常规法拉第笼结构不但增加POP封装的大小,而且增加封装及其中使用所述封装的电子装置的成本及复杂性。响应于这些问题,本发明的实施例提供用于在不添加单独法拉第笼结构的情况下在堆叠式IC封装中实施法拉第笼的方案。特定来说,发明者已发现,通过将屏蔽层并入现有用于形成可堆叠封装的电子衬底中并施加包括聚合物的导电环氧树脂以电接触屏蔽层,可在不增加封装总体尺寸且不需要将额外结构并入到所述封装中的情况下在其之间提供法拉第笼。 
在本发明的一个实施例中,提供经封装集成电路。所述经封装集成电路可包含第一电子衬底,所述第一电子衬底具有第一多个层及在所述第一电子衬底的上表面处的至少第一电路耦合特征,所述第一多个层包括至少第一电磁干扰(EMI)屏蔽层。所述经封装集成电路还可包含第二电子衬底,所述第二电子衬底具有通过导电粘合剂材料的一个或一个以上部分附接到第一电子衬底的下表面的上表面,所述第二电子衬底包括第二多个层及在所述第二电子衬底的下表面处的至少第二电路耦合特征,所述第一多个层包括至少第二EMI屏蔽层。在所述经封装集成电路中,至少一个功能裸片设置于所述第一电子衬底与所述第二电子衬底之间且功能上耦合到所述第一电路耦合特征及所述第二电路耦合特征中的至少一者。此外,所述粘合剂材料部分中的每一者均电耦合所述第一屏蔽层与所述第二屏蔽层。 
在本发明的另一实施例中,提供用于封装集成电路的方法。所述方法可包含提供第一电子衬底,所述第一电子衬底包括第一多个层及在所述第一电子衬底的上表面处的至少第一电路耦合特征,其中所述第一多个层包括至少第一电磁干扰(EMI)屏蔽层。所述方法还可包含提供第二电子衬底,所述第二电子衬底包括第二多个层及在所述第二电子衬底的下表面处的至少第二电路耦合特征,其中所述第二多个层包括至少第二EMI屏蔽层。所述方法可进一步包含将至少一个功能裸片附接到所述第一电子衬底的下表面或所述第二电子衬底的上表面且将所述功能裸片功能上耦合到所述第一电路耦合特征及所述第二电路耦合特征中的至少一者。所述方法还可包含通过导电粘合剂的一个或一个以上部分将所述第二电子衬底的所述上表面附接到所述第一电子衬底的所述下表面,其中所述粘合剂部分中的每一者均电耦合所述第一屏蔽层与所述第二屏蔽层。 
附图说明
图1显示根据本发明的实施例的实例性多芯片堆叠式封装系统的分解图。 
图2A显示根据本发明的实施例的封装粘合剂的第一实例性接合图案。 
图2B显示根据本发明的实施例的封装粘合剂的第二实例性接合图案。 
图3显示根据本发明的另一实施例的实例性经封装集成电路。 
图4显示根据本发明的实施例的实例性多芯片封装。 
图5显示根据本发明的实施例的多芯片封装中封装粘合剂的实例性接合图案。 
图6显示根据本发明的又一实施例的另一实例性多芯片堆叠式封装系统的分解图。 
具体实施方式
本发明的实施例提供用于减小集成电路(IC)中电磁干扰的结构及方法。特定来说,发明者已发现,可修改现有堆叠式封装技术(例如,POP封装)以在不显著增加所述封装总体大小的情况下为一个或一个以上堆叠式IC提供法拉第笼。因此,可在不显著改变POP封装工艺流程的情况下维持POP封装的大小优势。 
用于提供法拉第笼的常规技术是基于提供用以包围EMI敏感或EMI产生IC的接地金属壳体的基本思想。通常,可通过使用冲压金属结构或通过将固体金属盖部分附接到放置于将要屏蔽的IC周围的固体金属壁部分来提供此类结构。在另一技术中,可在将要屏蔽的IC封装上方喷射导电材料。然而,尽管此类技术可用来有效地屏蔽平面布置中的多个IC,但此类技术对于屏蔽一个或一个以上个别堆叠式裸片或封装来说通常不切实际。因此,常规技术仍需要单独封装EMI产生IC及EMI敏感IC(统称为“EMI反应IC”)且更重要的是将其放置于电子装置中的不同平面位置中。因此,用于这些EMI反应IC的不同平面位置增加电子装置中用于这些IC(例如,电子装置的电路板上)所需的总体面积。 
发明者注意到,用于形成法拉第笼的基本要求是将要屏蔽的目标放置于包括接地导电材料的壳体内。所述壳体不需要是连续的,但任何开口应显著小于将要阻挡的EMI的波长。此外,壳体壁应具有足够厚度。即,所述厚度应足够大以使得EMI仅影响所述壳体的壳体壁厚度的外部部分(趋肤深度)。所需厚度可随着壳体材料的导电性变化而变化且随着EMI的类型变化而变化。一般来说,当壳体材料的导电性增加时,用于阻挡EMI所需材料的厚度减小且反之亦然。因此,电磁层需要不仅导电而且具有大于将要阻挡的EMI的趋肤深度的厚度的层。在其中EMI产生IC在壳体内的情况下,除从壳体内部测量趋肤深度以外应用相同的原则。 
考虑到这些要求,发明者已发现,针对至少某些类型的堆叠封装技术(例如,POP封装),可通过修改封装来形成法拉第笼,这些修改通常不需要显著增加封装的大小。特定来说,发明者已发现,可通过电耦合常规堆叠式封装的上部电子衬底及下部电子衬底中的屏蔽层来形成法拉第笼。即,可在第一多层印刷电路板(PCB)或通常用于将封装安装于电子装置板上的其它电子衬底的层中的一者中形成下部屏蔽层。然而,在堆叠式封装的情况下,IC通常夹在第一电子衬底与第二电子衬底之间。在此类配置中,第二电子衬底通常提供用于电及/或机械附接一个或一个以上第二IC(堆叠式裸片)、其它IC封装(堆叠式封装)或离散电装置及组件的安装或耦合特征。第一电子衬底也可包含耦合特征。耦合特征(举例说明但并不限于)可包含电端子或引线及/ 或用于附接裸片、封装或离散电装置及组件的物理结构。无论耦合特征的类型如何,可在第二电子衬底的层中或其上形成第二屏蔽层。将此类层引入到电子衬底中通常仅需要添加薄金属层,所述薄金属层具有仅为所述薄金属层所添加到的电子衬底的厚度的一小部分的厚度。举例来说,在典型的POP封装中,通常用于提供对邻近RF产生IC的充分屏蔽所需的金属层厚度为至少10um的(主要为)铜合金,且通常在15um与20um之间。 
通常,POP封装使用非导电模制材料或囊封材料来囊封第一电子衬底及第二电子衬底以及夹在之间的IC。然而,本发明的实施例用耦合第一电子衬底与第二电子衬底中的屏蔽层的导电粘合剂材料取代安置于第一电子衬底与第二电子衬底的面对表面之间的此囊封材料的至少一部分。即,一种在其最终或固化状态下导电且粘合到第一电子衬底及第二电子衬底的至少导电部分的材料。举例来说,已知一些包括基于银及基于碳(石墨)的聚合物的粘合剂可提供良好的导电性,例如,基于银及基于石墨的环氧树脂。然而,在各种实施例中,可使用相对于第一电子衬底及第二电子衬底的面对表面具有粘合特性的任一类型有机或无机导电材料,所述导电材料包含包括金属或非金属的材料。举例来说,包括金属的焊料材料也可用作粘合剂。此外,导电粘合剂可以一图案围绕夹在中间的IC放置以电耦合上部屏蔽层与下部屏蔽层且电磁包围夹在中间的IC。因此,本发明的实施例为夹在中间的IC提供法拉第笼,所述法拉第笼具有使用第一电子衬底层及第二电子衬底层形成的法拉第笼的上部屏蔽层及下部屏蔽层以及由导电粘合剂形成的法拉第笼的侧壁。 
举例来说,在图1中所示的实例性堆叠式封装系统100(特定来说,POP封装系统)中图解说明此一配置。在图1中,系统100包含顶部封装102及底部封装104。底部封装104包含具有多个向下延伸以用于将封装系统100耦合到装置板(未显示)的引线108的下部衬底106。底部封装104还包含具有多个耦合到下部电子衬底106的引线108中的至少一些引线的端子112的上部电子衬底110。端子112还可经配置以接纳并耦合到从顶部封装102的下部电子衬底116延伸的多个引线114。 
在各种实施例中,顶部封装102包含电耦合到其下部电子衬底116的一个或一个以上IC 118。顶部封装102还可包含在IC 118与其下部电子衬底116之间的一个或一个以上粘合剂层120及封装模制件122。在组装时,将顶部封装102放置于底部封装104的顶部上。接着,可经由下部电子衬底106接近顶部封装102中的IC118。 
在常规POP布置中,底部封装104中的IC 124通常耦合到下部电子衬底106的引线108中的至少一些引线。在图1中所示的实例性布置中,IC 124以倒装芯片布置配置。即,IC 124附接到上部电子衬底110且焊料球126形成于IC 124上。接着,将上部电子衬底110及IC 124面朝下放置于下部电子衬底106上。可使用一个或一个以上接合线127将上部电子衬底110的端子耦合到下部电子衬底106的端子(未显示)。在倒装芯片布置中,下部电子衬底106可在其上表面上具有耦合到底部封装104的引线108中的至少一些引线的多个端子(未显示)。在其它布置中,IC 124可附接且线 接合到下部电子衬底106上的端子。可使用所述端子来接近下部电子衬底106的耦合到引线108的互连系统129。接着,可使用底部填充层128及模制层130来将IC 124与上部电子衬底110及下部电子衬底106附接在一起。 
在此常规POP布置中,顶部封装102与底部封装104之间的EMI屏蔽通常不切实际,这是因为将额外结构插入在所述封装之间可禁止性地增加堆叠式封装的大小。因此,设计者通常避免将EMI反应IC组合在此一布置中,如先前所描述。 
相反,本发明的各种实施例通过将电磁屏蔽层并入到现有的电子衬底中而允许EMI反应IC的紧密放置。举例来说,如图1中所示,可通过使用所形成的包括底部封装104的上部电子衬底110及下部电子衬底106的法拉第笼来给IC 124提供电磁屏蔽。可通过用导电层涂覆上部电衬底110的下表面来提供上部屏蔽层132。举例来说,如图1中所示,可在上部电衬底110的底部表面上施加金属层,例如,铜、铝、镍、钛或其任一合金。在一些情况下,可如先前所描述通过沉积导电粘合剂来形成导电层。下部屏蔽层134可由底部封装104的下部电子衬底106的层中的一者来提供。即,通过配置下部电子衬底106的导电层中的至少一者来提供电磁屏蔽。在各种实施例中,下部屏蔽层134可耦合到耦合到电子装置(未显示)的接地平面的引线108中的一者。如先前所描述,选择上部屏蔽层132及下部屏蔽层134的厚度以确保对EMI的阻挡。 
用于IC 124的法拉第笼的侧壁由接触上部电子衬底110及下部电子衬底106的面对表面以电及机械耦合上部屏蔽层132与下部屏蔽层134的导电粘合剂部分136来提供。在上部屏蔽层132的情况下,导电粘合剂136可直接接触上部屏蔽层132。在下部屏蔽层134的情况下,可提供多个通孔138来电耦合粘合剂136与下部屏蔽134。下部屏蔽层134电耦合到连接到装置的接地平面的引线108中的一者。粘合剂导体部分的厚度或珠粒(x)应如先前所描述足以阻挡EMI。 
尽管在各种实施例中珠粒大小(x)可变化,但在一个实施例中,已发现在100um到200um之间的基于银的环氧树脂珠粒大小(x)通常足以阻挡IC所产生的EMI,其包含在800MHz到2700MHz范围中的EMI,所述频率范围通常用于无线通信。然而,本发明并不限于此方面且可选择珠粒大小以阻挡在任何频率下所产生的EMI。举例来说,上部屏蔽层132及下部屏蔽层134、通孔138以及导电粘合剂还可适合于屏蔽IC使其免受在诊断放射线照相设备中及其周围所产生的辐射,所述诊断放射线照相设备包含(但并不限于)计算机化断层显像(CT)及其它x射线成像设备、磁共振成像设备、放射性核素成像或核闪烁扫描设备及正电子发射断层显像(PET)。 
在本发明的各种实施例中,导电粘合剂可以多种图案施加且仍可有效阻挡EMI。举例来说,图2A及图2B显示POP封装系统的基于倒装芯片的底部封装的下部电子衬底200的俯视图。如先前所描述,下部电子衬底200在其上表面上可具有用于耦合来自上部电子衬底的接合线的第一多个端子202。下部电子衬底200还可具有用于耦合基于倒装芯片的IC的第二多个端子204。区域206、208分别界定上部电子衬底及IC的占用面积。 
在放置上部电子衬底及IC之前,可施加导电粘合剂。所属领域的技术人员将认识到用于导电粘合剂的一些材料将具有非矩形横截面。因此,所需的最小厚度及/或珠粒大小将基于所得导电粘合剂横截面的最薄部分。本文中所使用的“珠粒大小”是指导电粘合剂的横截面尺寸,其包含高度及厚度(x)。另外,导电粘合剂可以各种类型的接合图案施加。举例来说,如图2A中所示,可在区域206与208之间提供连续接合图案210。在此类实施例中,如先前所描述,在足够珠粒大小的情况下,所述连续接合图案可有效阻挡所有EMI。在另一实例中,如在图2B中所示,可替代地提供非连续接合图案212。在此类实施例中,非连续接合图案212可包含一个或一个以上空隙214。如先前所描述,可选择空隙宽度(y)以使得所述尺寸小于将要阻挡的EMI的波长。在此类实施例中,非连续图案的每一部分均可接触电子衬底中的一个或一个以上通孔。所述部分可具有任一长度。举例来说,在一些实施例中,可使用一组焊料或环氧树脂球形成非连续图案212。或者,也可使用一段焊料或环氧树脂。尽管实例性接合图案显示为均匀地围绕IC区域206,但接合图案可经形成以遵循任何路径,只要仍提供上部屏蔽层与下部屏蔽层的耦合且粘合剂继续电磁包围IC区域206。 
再次参照图1,可选择通孔的尺寸以使得通孔138之间的间隔也适于供阻挡EMI之用。即,通孔138的数目、间隔及宽度应基于通孔138的组成足以防止任何显著量的EMI到达IC 124。然而,导电粘合剂136与屏蔽层中的每一者之间的间隔通常小于100um。通常,此间隔足以阻挡来自横向放置源的EMI且在堆叠式封装的情况下其不是EMI的主要路径。 
如先前所描述,下部电子衬底104可含有具有用于接触引线108的布线层129的多个层。尽管下部屏蔽层134在一些实施例中可形成为实体板,但在其它实施例中,下部屏蔽层134可被图案化。在此类实施例中,图案化允许下部电衬底106中的布线层129具有到引线108的较短长度。然而,为保持法拉第笼的完整性,下部屏蔽层134中的任何开口可具有小于将要阻挡的EMI波长的尺寸。 
在本发明的其它实施例中,法拉第笼的上部屏蔽层不必如图1中所示形成于上部电子衬底的表面上。而是,如图3中所示,上部屏蔽层302可替代地形成于下部封装300的上部电子衬底304的内层中。在此类实施例中,可提供通孔306以将导电粘合剂308电耦合到上部屏蔽层302。也可如先前针对图1中的下部屏蔽层134所描述的那样图案化上部屏蔽层302。也可如先前针对图1中的通孔138所描述的那样配置通孔306的数目、间隔及宽度。 
在本发明的一些实施例中,可屏蔽多于一个IC。举例来说,如图4中所示,底部封装400可包含如先前针对图1所描述的那样使用上部屏蔽层404及下部屏蔽层406、导电粘合剂408以及通孔410屏蔽的两个或两个以上IC 402、403。在一些实施例中,可通过在IC 402与403之间提供额外导电粘合剂部分412来在其之间提供额外屏蔽。 
如上文针对图2A及图2B所描述,用于图4中的配置的导电粘合剂可以各种图案形成且仍可有效阻挡EMI。举例来说,图5显示用于封装两个裸片的POP封装系统 的基于倒装芯片的底部封装的下部电子衬底500的俯视图。下部电子衬底500可在其上部表面上具有用于耦合来自上部电子衬底的接合线的第一多个端子502。下部电子衬底500还可具有用于耦合基于倒装芯片的IC的第二多个端子504。区域506、508及509分别界定上部电子衬底、第一IC及第二IC的占用面积。 
如先前所描述,所述接合图案可变化。举例来说,可围绕IC区域508及509提供连续接合图案。在此类实施例中,如先前所描述,在足够珠粒大小(x)的情况下,所述连续接合图案可有效阻挡所有EMI。在另一实例中,如图5中所示,可如先前在图3B中所描述的那样提供非连续接合图案510。在此类实施例中,非连续接合图案510可包含一个或一个以上空隙514。如先前所描述,可选择空隙大小(y)以使得所述尺寸小于将要阻挡的EMI的波长。 
接合图案510还可包含额外部分512。与接合图案510一样,部分512的图案也可变化。举例来说,在一些情况下,如果提供非连续接合图案,那么空隙大小(y)可足以阻挡源于IC外部位置的EMI,但不能阻挡所述IC之间的EMI。在此类实施例中,可调整部分512中的任何空隙以在所述IC之间提供额外EMI屏蔽。举例来说,如图5中所示,如果IC彼此间比对周围环境更加敏感,那么可给部分512提供连续图案。 
在图1到图5中,法拉第笼是在POP系统的底部封装中实施。然而,本发明并不限于此方面且可在其中IC夹在两个电子衬底之间的任一封装中实施。举例来说,如图6中所图解说明,法拉第笼可在POP系统600的顶部封装602中实施。在此类实施例中,底部封装604任选地还可包含如图1到图5中所描述的法拉第笼。然而,如图6中所示,法拉第笼还可在顶部封装602中实施。在此类实施例中,顶部封装602可如先前针对图1所描述的那样包含用于屏蔽IC 614使其免受EMI所需的上部屏蔽层604及下部屏蔽层608、由导电粘合剂610形成的壁以及通孔612。 
此外,图6中的顶部封装602还图解说明性地显示本发明可如何在堆叠式IC系统(非POP)中实施。在此类实施例中,第二IC 616可安装于第二电子衬底的上表面上。如图6中所示,第二IC 616以倒装芯片配置安装,接触第二电子衬底的上表面上的多个端子(未显示)。所述端子可如先前所描述经由接合线620连接到下部电子衬底622的上表面上的端子且向外连接到引线624。接着,模制层626及底部填充层628可用于囊封IC 616、614。 
已主要在倒装芯片应用方面描述了本发明的各种实施例;然而本发明并不限于此方面。在一些实施例中,接合线可用于使IC表面上的端子直接接触到所使用的下部电子衬底或上部电子衬底的端子。此外,如图1中所示,可使用线接合与倒装芯片方法的组合。 
本发明所涉及领域的技术人员将了解,在所主张发明的范围内,许多其它实施例及变化形式是可能的。 

Claims (15)

1.一种经封装集成电路,其包括:
第一电子衬底,所述第一电子衬底包括第一多个层及在所述第一电子衬底的上表面处的至少第一电路耦合特征,所述第一多个层包括至少第一电磁干扰(EMI)屏蔽层;
第二电子衬底,所述第二电子衬底具有通过导电粘合剂材料的一个或一个以上部分附接到所述第一电子衬底的下表面的上表面,所述第二电子衬底包括第二多个层及在所述第二电子衬底的下表面处的至少第二电路耦合特征,所述第一多个层包括至少第二EMI屏蔽层;及
至少一个功能裸片,其安置于所述第一电子衬底与所述第二电子衬底之间且功能上耦合到所述第一电路耦合特征及所述第二电路耦合特征中的至少一者,
其中所述粘合剂材料部分中的每一者均电耦合所述第一屏蔽层与所述第二屏蔽层。
2.根据权利要求1所述的集成电路,其中所述第二电子衬底进一步包括在所述第二电子衬底的所述上表面上电耦合到所述第二屏蔽层的至少一个端子。
3.根据权利要求2所述的集成电路,其中所述第一电子衬底进一步包括在所述第一电子衬底的所述下表面上电耦合到所述第一屏蔽层的至少一个端子。
4.根据权利要求2所述的集成电路,其中在所述第一电子衬底的下表面处的所述第一多个层中的一者包括所述第一屏蔽层。
5.根据权利要求1所述的集成电路,其中所述粘合剂是以接合图案形成,所述接合图案界定所述第一电子衬底与所述第二电子衬底之间无所述粘合剂的至少一个区域。
6.根据权利要求1所述的集成电路,其中至少两个功能裸片安置于所述第一电子衬底与所述第二电子衬底之间,其中所述粘合剂是以接合图案形成,且其中成所述接合图案的所述粘合剂电磁包围所述功能裸片中的至少一者。
7.一种用于封装集成电路的方法,其包括:
提供第一电子衬底,所述第一电子衬底包括第一多个层及在所述第一电子衬底的上表面处的至少第一电路耦合特征,所述第一多个层包括至少第一电磁干扰(EMI)屏蔽层;
提供第二电子衬底,所述第二电子衬底包括第二多个层及在所述第二电子衬底的下表面处的至少第二电路耦合特征,所述第二多个层包括至少第二EMI屏蔽层;
将至少一个功能裸片附接到所述第一电子衬底的下表面或所述第二电子衬底的上表面且将所述功能裸片功能上耦合到所述第一电路耦合特征及所述第二电路耦合特征中的至少一者;及
通过导电粘合剂的一个或一个以上部分将所述第二电子衬底的所述上表面附接到所述第一电子衬底的所述下表面,其中所述粘合剂部分中的每一者均电耦合所述第一屏蔽层与所述第二屏蔽层。
8.根据权利要求7所述的方法,其中所述附接步骤进一步包括与所述第二电子衬底的所述上表面上电耦合到所述第二屏蔽层的至少一个端子接触地放置所述粘合剂。
9.根据权利要求8所述的方法,其中所述附接步骤进一步包括与所述第一电子衬底的所述下表面上电耦合到所述第一屏蔽层的至少一个端子接触地放置所述粘合剂。
10.根据权利要求8所述的方法,其中所述第一电子衬底的下表面处的所述第一多个层中的一者包括所述第一屏蔽层。
11.根据权利要求7所述的方法,其中所述附接步骤进一步包括以接合图案将所述粘合剂放置于所述第一电子衬底及所述第二电子衬底中的一者上,所述接合图案界定所述第一电子衬底与所述第二电子衬底之间无所述粘合剂的至少一个区域。
12.根据权利要求7所述的方法,其中将至少两个功能裸片安置于所述第一电子衬底与所述第二电子衬底之间,其中所述粘合剂是以接合图案形成,且其中成所述接合图案的所述粘合剂电磁包围所述功能裸片中的至少一者。
13.一种集成电路封装系统,其包括:
至少一个顶部封装,其用于封装至少一个顶部功能裸片,所述顶部封装包括耦合到所述顶部功能裸片并从所述顶部封装的下表面延伸的多个顶部封装引线;及
底部封装,其用于封装至少一个底部功能裸片,所述底部封装包括:
第一电子衬底,所述第一电子衬底包括第一多个层及在所述第一电子衬底的上表面处用于接纳所述顶部引线的多个电端子,所述第一多个层包括至少第一电磁干扰(EMI)屏蔽层,及
第二电子衬底,所述第二电子衬底具有通过包括导电聚合物的粘合剂的一个或一个以上部分附接到所述第一电子衬底的下表面的上表面,所述第二电子衬底包括第二多个层及在所述第二电子衬底的下表面处的多个底部封装引线,所述第二多个层包括至少第二EMI屏蔽层,
其中所述底部裸片安置于所述第一电子衬底与所述第二电子衬底之间,其中所述粘合剂部分电耦合所述第一屏蔽层与所述第二屏蔽层,且其中所述顶部裸片及所述底部裸片均功能上耦合到所述底部引线。
14.根据权利要求13所述的系统,其中所述第二电子衬底进一步包括所述第二电子衬底的所述上表面上电耦合到所述第二屏蔽层的至少一个端子。
15.根据权利要求14所述的集成电路,其中所述第一电子衬底进一步包括所述第一电子衬底的所述下表面上电耦合到所述第一屏蔽层的至少一个端子。
CN2009801025126A 2008-05-19 2009-05-19 经封装集成电路、封装集成电路的方法和集成电路封装系统 Active CN101919053B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/123,115 US7741567B2 (en) 2008-05-19 2008-05-19 Integrated circuit package having integrated faraday shield
US12/123,115 2008-05-19
PCT/US2009/044480 WO2009143126A2 (en) 2008-05-19 2009-05-19 Integrated circuit package having integrated faraday shield

Publications (2)

Publication Number Publication Date
CN101919053A CN101919053A (zh) 2010-12-15
CN101919053B true CN101919053B (zh) 2013-02-13

Family

ID=41315961

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801025126A Active CN101919053B (zh) 2008-05-19 2009-05-19 经封装集成电路、封装集成电路的方法和集成电路封装系统

Country Status (4)

Country Link
US (2) US7741567B2 (zh)
CN (1) CN101919053B (zh)
TW (1) TW201013882A (zh)
WO (1) WO2009143126A2 (zh)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200836315A (en) * 2007-02-16 2008-09-01 Richtek Techohnology Corp Electronic package structure and method thereof
US8071935B2 (en) * 2008-06-30 2011-12-06 Nellcor Puritan Bennett Llc Optical detector with an overmolded faraday shield
US8378383B2 (en) * 2009-03-25 2013-02-19 Stats Chippac, Ltd. Semiconductor device and method of forming a shielding layer between stacked semiconductor die
US8742869B2 (en) * 2010-03-16 2014-06-03 K&L Microwave, Inc. Low passive inter-modulation capacitor
JP5229276B2 (ja) * 2010-06-11 2013-07-03 株式会社村田製作所 回路モジュール
US8409918B2 (en) 2010-09-03 2013-04-02 Stats Chippac, Ltd. Semiconductor device and method of forming pre-molded substrate to reduce warpage during die mounting
US8564111B2 (en) * 2011-01-27 2013-10-22 Siano Mobile Silicon Ltd. Stacked digital/RF system-on-chip with integral isolation layer
US9064781B2 (en) 2011-03-03 2015-06-23 Broadcom Corporation Package 3D interconnection and method of making same
US8508045B2 (en) 2011-03-03 2013-08-13 Broadcom Corporation Package 3D interconnection and method of making same
EP2514713B1 (en) * 2011-04-20 2013-10-02 Tronics Microsystems S.A. A micro-electromechanical system (MEMS) device
US8698297B2 (en) * 2011-09-23 2014-04-15 Stats Chippac Ltd. Integrated circuit packaging system with stack device
US8716065B2 (en) 2011-09-23 2014-05-06 Stats Chippac Ltd. Integrated circuit packaging system with encapsulation and method of manufacture thereof
US8664717B2 (en) 2012-01-09 2014-03-04 Globalfoundries Inc. Semiconductor device with an oversized local contact as a Faraday shield
KR101798571B1 (ko) 2012-02-16 2017-11-16 삼성전자주식회사 반도체 패키지
US20130322029A1 (en) * 2012-05-30 2013-12-05 Dror Hurwitz Multilayer electronic structure with integral faraday shielding
TW201351599A (zh) 2012-06-04 2013-12-16 矽品精密工業股份有限公司 半導體封裝件及其製法
JP5959097B2 (ja) 2012-07-03 2016-08-02 ルネサスエレクトロニクス株式会社 半導体装置
KR20140023112A (ko) 2012-08-17 2014-02-26 삼성전자주식회사 반도체 패키지를 포함하는 전자 장치 및 그 제조 방법
US10192796B2 (en) 2012-09-14 2019-01-29 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming dual-sided interconnect structures in FO-WLCSP
US9818734B2 (en) 2012-09-14 2017-11-14 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming build-up interconnect structures over a temporary substrate
US9443797B2 (en) * 2012-09-14 2016-09-13 STATS ChipPAC Pte. Ltd. Semiconductor device having wire studs as vertical interconnect in FO-WLP
US9064868B2 (en) 2012-10-12 2015-06-23 Globalfoundries Inc. Advanced faraday shield for a semiconductor device
DE102012219661A1 (de) 2012-10-26 2014-04-30 Ihp Gmbh - Innovations For High Performance Microelectronics / Leibniz-Institut Für Innovative Mikroelektronik Individualisierte Spannungsversorgung von Bauelementen integrierter Schaltungen alsSchutzmaßnahme gegen Seitenkanalangriffe
KR20140057979A (ko) * 2012-11-05 2014-05-14 삼성전자주식회사 반도체 패키지 및 반도체 패키지의 제조 방법
TWI550816B (zh) 2013-01-08 2016-09-21 矽品精密工業股份有限公司 半導體封裝件及其製法
KR101983142B1 (ko) * 2013-06-28 2019-08-28 삼성전기주식회사 반도체 패키지
KR102163707B1 (ko) * 2013-11-14 2020-10-08 에스케이하이닉스 주식회사 전자기간섭 차폐층을 갖는 반도체 패키지 및 테스트 방법
KR101538573B1 (ko) * 2014-02-05 2015-07-21 앰코 테크놀로지 코리아 주식회사 반도체 디바이스의 제조 방법 및 이에 따른 반도체 디바이스
US9364187B2 (en) * 2014-05-03 2016-06-14 General Electric Company Packaging design for CT detector
US20150340308A1 (en) * 2014-05-21 2015-11-26 Broadcom Corporation Reconstituted interposer semiconductor package
TWI553817B (zh) * 2014-06-17 2016-10-11 瑞昱半導體股份有限公司 具有電磁防護功能之積體電路及其製造方法
US10211182B2 (en) * 2014-07-07 2019-02-19 Intel IP Corporation Package-on-package stacked microelectronic structures
TWI654723B (zh) * 2015-02-06 2019-03-21 矽品精密工業股份有限公司 封裝結構之製法
US9379090B1 (en) * 2015-02-13 2016-06-28 Qualcomm Incorporated System, apparatus, and method for split die interconnection
US9893017B2 (en) 2015-04-09 2018-02-13 STATS ChipPAC Pte. Ltd. Double-sided semiconductor package and dual-mold method of making same
TWI621378B (zh) * 2015-07-29 2018-04-11 乾坤科技股份有限公司 具有電磁屏蔽結構的電子模組及其製造方法
US10607958B2 (en) * 2015-08-28 2020-03-31 Texas Instruments Incorporated Flip chip backside die grounding techniques
WO2017111952A1 (en) * 2015-12-22 2017-06-29 Intel Corporation Ultra small molded module integrated with die by module-on-wafer assembly
TW202308015A (zh) * 2016-01-15 2023-02-16 荷蘭商庫力克及索發荷蘭公司 放置超小或超薄之離散組件
CN108701680B (zh) * 2016-03-31 2023-05-30 英特尔公司 带有使用金属层和通孔的电磁干扰屏蔽的半导体封装
KR101983185B1 (ko) * 2016-08-19 2019-05-29 삼성전기주식회사 팬-아웃 반도체 패키지
US10332843B2 (en) 2016-08-19 2019-06-25 Samsung Electro-Mechanics Co., Ltd. Fan-out semiconductor package
KR102004801B1 (ko) * 2016-11-17 2019-07-29 삼성전기주식회사 팬-아웃 반도체 패키지
WO2018123699A1 (ja) * 2016-12-27 2018-07-05 株式会社村田製作所 高周波モジュール
US10134716B2 (en) * 2017-03-16 2018-11-20 Intel Corporatin Multi-package integrated circuit assembly with through-mold via
US10177095B2 (en) * 2017-03-24 2019-01-08 Amkor Technology, Inc. Semiconductor device and method of manufacturing thereof
US10453762B2 (en) 2017-07-28 2019-10-22 Micron Technology, Inc. Shielded fan-out packaged semiconductor device and method of manufacturing
TWI787448B (zh) 2018-02-01 2022-12-21 德商漢高股份有限及兩合公司 用於屏蔽系統級封裝組件免受電磁干擾的方法
DE102018204625A1 (de) * 2018-03-27 2019-10-02 Siemens Aktiengesellschaft Gehäuse für einen Umrichter, Endstufe eines Umrichters mit einem derartigen Gehäuse, Umrichter sowie Luftfahrzeug mit einem Umrichter
TWI647796B (zh) * 2018-04-09 2019-01-11 矽品精密工業股份有限公司 電子封裝件及其製法
US10910323B2 (en) * 2018-08-20 2021-02-02 Mediatek Inc. Semiconductor package with reduced noise
JP7236269B2 (ja) * 2018-12-26 2023-03-09 新光電気工業株式会社 配線基板、半導体装置、及び配線基板の製造方法
CN113474860A (zh) * 2019-02-26 2021-10-01 德克萨斯仪器股份有限公司 具有用于降低的emi的集成屏蔽拓扑结构的隔离变压器
US11373959B2 (en) * 2019-04-19 2022-06-28 Skyworks Solutions, Inc. Shielding for flip chip devices
US11355450B2 (en) 2019-08-01 2022-06-07 Mediatek Inc. Semiconductor package with EMI shielding structure
DE102019126028A1 (de) * 2019-09-26 2021-04-01 Robert Bosch Gmbh Multichipanordnung und entsprechendes Herstellungsverfahren
CN113496990B (zh) * 2020-04-01 2023-10-20 中芯国际集成电路制造(上海)有限公司 半导体结构及半导体结构的形成方法
US11830821B2 (en) * 2020-10-19 2023-11-28 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor devices and methods of manufacture
WO2022236787A1 (zh) * 2021-05-13 2022-11-17 华为技术有限公司 芯片封装结构及封装系统
CN113508464A (zh) * 2021-06-08 2021-10-15 长江存储科技有限责任公司 电磁干扰屏蔽封装结构及其制造方法
US11710708B2 (en) 2021-08-19 2023-07-25 Raytheon Company On-chip EMF isolation of an integrated circuit coupled with photoconductive semiconductor switch under an on-chip faraday cage

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6136128A (en) 1998-06-23 2000-10-24 Amerasia International Technology, Inc. Method of making an adhesive preform lid for electronic devices
US6618267B1 (en) * 1998-09-22 2003-09-09 International Business Machines Corporation Multi-level electronic package and method for making same
US7102892B2 (en) * 2000-03-13 2006-09-05 Legacy Electronics, Inc. Modular integrated circuit chip carrier
US6515870B1 (en) 2000-11-27 2003-02-04 Intel Corporation Package integrated faraday cage to reduce electromagnetic emissions from an integrated circuit
US7215022B2 (en) * 2001-06-21 2007-05-08 Ati Technologies Inc. Multi-die module
US7176506B2 (en) 2001-08-28 2007-02-13 Tessera, Inc. High frequency chip packages with connecting elements
US20040061213A1 (en) 2002-09-17 2004-04-01 Chippac, Inc. Semiconductor multi-package module having package stacked over die-up flip chip ball grid array package and having wire bond interconnect between stacked packages
TWI235469B (en) * 2003-02-07 2005-07-01 Siliconware Precision Industries Co Ltd Thermally enhanced semiconductor package with EMI shielding
US7191516B2 (en) * 2003-07-16 2007-03-20 Maxwell Technologies, Inc. Method for shielding integrated circuit devices
KR100639701B1 (ko) 2004-11-17 2006-10-30 삼성전자주식회사 멀티칩 패키지
JP4876618B2 (ja) 2006-02-21 2012-02-15 セイコーエプソン株式会社 半導体装置および半導体装置の製造方法

Also Published As

Publication number Publication date
WO2009143126A3 (en) 2010-02-25
CN101919053A (zh) 2010-12-15
TW201013882A (en) 2010-04-01
WO2009143126A2 (en) 2009-11-26
US8049119B2 (en) 2011-11-01
US20090284947A1 (en) 2009-11-19
US7741567B2 (en) 2010-06-22
US20100214759A1 (en) 2010-08-26

Similar Documents

Publication Publication Date Title
CN101919053B (zh) 经封装集成电路、封装集成电路的方法和集成电路封装系统
CN100454533C (zh) 用于电子元件封装的emi屏蔽
US7261596B2 (en) Shielded semiconductor device
US20070176281A1 (en) Semiconductor package
KR101571526B1 (ko) 전자기 장애를 차폐하는 집적회로 패키지 시스템
US6057601A (en) Heat spreader with a placement recess and bottom saw-teeth for connection to ground planes on a thin two-sided single-core BGA substrate
CN101317268B (zh) 具有emi屏蔽的叠层多芯片封装
US20180197824A1 (en) Anti-emi shielding package and method of making same
US10319685B2 (en) EMI shielded integrated circuit packages and methods of making the same
CN102576702B (zh) 具有嵌入式衬底及引线框的模块封装
CN107978580A (zh) 半导体器件封装及其制造方法
CN108701680A (zh) 带有使用金属层和通孔的电磁干扰屏蔽的半导体封装
US20150033554A1 (en) Organic module emi shielding structures and methods
CN115527996A (zh) 使用热界面材料为集成电路封装提供电屏蔽的方法和装置
KR20140083084A (ko) 전자파 차폐층을 갖는 반도체 패키지 및 그 제조방법
JP2006261622A (ja) 集積回路パッケージ構造とそのパッケージ方法
US20090260872A1 (en) Module for packaging electronic components by using a cap
US6828687B2 (en) Cavity down ball grid array package structure and carrier thereof
US20120248585A1 (en) Electromagnetic interference shielding structure for integrated circuit substrate and method for fabricating the same
CN110233144A (zh) 半导体封装装置
CN105529312A (zh) 封装结构
CN108735677B (zh) 电子封装件及其制法
CN100483661C (zh) 防止芯片被干扰的封装方法及其封装结构
KR101698292B1 (ko) 반도체 모듈
WO2022227063A1 (zh) Lga焊盘结构及制作方法、芯片模块、印刷电路板及装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant