CN101082492B - Minisize gyroscopes - Google Patents
Minisize gyroscopes Download PDFInfo
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- CN101082492B CN101082492B CN2007100526074A CN200710052607A CN101082492B CN 101082492 B CN101082492 B CN 101082492B CN 2007100526074 A CN2007100526074 A CN 2007100526074A CN 200710052607 A CN200710052607 A CN 200710052607A CN 101082492 B CN101082492 B CN 101082492B
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- electric heater
- split channel
- closed cavity
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Abstract
This invention discloses a sort of micro-gyro which has the checking theory of magnetofluid. It consists of the driving layer, the structure layer and the checking layer. The driving layer has two minisize electric heaters which are in the corresponding close cavity body of the structure layer respectively. The two close cavity bodies connect with the miniflow pipeline and the subchannel of the structure layer respectively, and they are obstructed by the current-conduction fluid body. The two minisize electric heaters alternately heat the gas of the close cavity body in order to lead the pressure between the two close cavities bodies augment alternately. It realizes the repeated movement of the current-conduction fluid body between the miniflow pipeline and the subchannel, the flow different of the subchannels that they are distributed symmetrically has the palstance information. It checks the flux different of the two subchannel and obtains the palstance information by the magnetofluid theory. The configuration of this invention is simple, and it has not active parts and the vibratile parts, its life is long, its sensitivity and distinguishability is high. It adopts the micro- processing technique, its craftwork is simple, its cost is cheap, it fits volume produce and it has the considerable application foreground.
Description
Technical field
The present invention relates to a kind of sensor, particularly a kind of minisize gyroscopes that detects angular velocity.
Background technology
Minisize gyroscopes has a wide range of applications and economic benefit in the military and civilian field.The minisize gyroscopes of different accuracy begins to be widely used in guided missile inertial guidance, automobile electron stabilization control, robot motion's control, industrial automation, digital product image stabilization, mobile phone action induction and other consumption electronic products.Nearly all there is a mass in the minisize gyroscopes of development at present, and the Ke Shili that utilizes angular velocity to cause excites the mass orthogonal vibration to detect angular velocity, and it detects principle usually based on effects such as electric capacity, piezoelectricity, pressure drags.Because the existence of oscillating mass piece, gyrostatic processing technology is very complicated, and impact resistance reduces significantly, causes reliability and life-span to descend.
The Ke Shili that utilizes angular velocity to cause based on the minisize gyroscopes of thermal convection principle causes jet deflection, and the thermosensitive device convection heat transfer of itself and one or more pairs of symmetric arrangement be there are differences, and obtains angular velocity information by detecting the thermosensitive device temperature difference.This gyroscope replaces mass with fluid, simplified the structure of detection part, and can improve gyrostatic impact resistance, but the driver manufacture difficulty that is used to produce jet is big, limited the development of thermal convection minisize gyroscopes, though the temperature detection mode is simple ripe in addition, precision is not high and be subject to external environmental interference.
Magnetohydrodynamics is the physics branch of research conductive fluid, its basic thought is in the conductive fluid of motion, magnetic field can induce electric current, and its fundamental equation is Navier Stokes equation in the fluid mechanics and the Maxwell equation group in the electrodynamics.
Summary of the invention
The objective of the invention is to overcome the weak point of above-mentioned existing minisize gyroscopes, propose a kind of minisize gyroscopes, this minisize gyroscopes does not have activity and vibrating mass, and sensitivity of magnetic fluid detection mode and resolution height are simple in structure, is easy to processing.
Minisize gyroscopes provided by the invention is formed by Drive Layer, structural sheet and detection layers three bonding, and Drive Layer is positioned at the bottom, and detection layers is positioned at the top;
On the bonding face of Drive Layer and structural sheet, symmetry is placed the first miniature electric heater and the second miniature electric heater, wherein, the first miniature electric heater links to each other with first, second electric heater electrode on being arranged on this bonding face, and the second miniature electric heater links to each other with the 3rd, the 4th electric heater electrode on being arranged on this bonding face;
On the bonding face of structural sheet and Drive Layer, symmetry has first closed cavity and second closed cavity, makes the first miniature electric heater on the Drive Layer be positioned at first closed cavity, and the second miniature electric heater is positioned at second closed cavity;
On the bonding face of structural sheet and detection layers, have first to the 3rd connecting hole, microchannel and first, second split channel; First, second split channel is about the microchannel symmetry, and be communicated with microchannel, conductive fluid is arranged in microchannel, first connecting hole is communicated with first closed cavity and microchannel, second connecting hole is communicated with second closed cavity and second split channel, and the 3rd connecting hole is communicated with second closed cavity and first split channel;
On the bonding face of detection layers and structural sheet, be provided with first to fourth detecting electrode, first, second detecting electrode lays respectively at the both sides of first split channel, and the 3rd, the 4th detecting electrode lays respectively at the both sides of second split channel;
Detection layers is embedded with magnetic, is positioned at the top of first split channel and second split channel;
Have first, second detecting electrode lead-in wire window on Drive Layer and the structural sheet, first, second detecting electrode lead-in wire window is positioned at the below of first to fourth detecting electrode; Have first to fourth electric heater contact conductor window on the structural sheet, have the 5th to the 8th electric heater contact conductor window on the detection layers, the first and the 5th electric heater contact conductor window is positioned at the top of the first electric heater electrode, the second and the 6th electric heater contact conductor window is positioned at the top of the second electric heater electrode, the the 3rd and the 7th electric heater contact conductor window is positioned at the top of the 3rd electric heater electrode, and the 4th and the 8th electric heater contact conductor window is positioned at the top of the 4th electric heater electrode.
The present invention compared with prior art has following advantage:
(1) adopts magnetic fluid to detect principle, can directly obtain voltage signal, the accuracy of detection height;
(2) adopt the split channel structure, when detecting angular velocity, a flow reduces, and a flow increases, and this differential detection precision is the twice of common detection mode.
(3) adopt hot drive scheme, do not have any activity and vibrating mass, impact resistance and reliability height;
(4) structure and processing technology are simple, are fit to produce in enormous quantities, have considerable application prospect.
Description of drawings
Fig. 1 is the monnolithic case structural drawing of an embodiment of the present invention;
Fig. 2 is the axonometric drawing of Drive Layer among Fig. 1;
Fig. 3 a is the front cross sectional view of structural sheet among Fig. 1;
Fig. 3 b is the vertical view of structural sheet among Fig. 1;
Fig. 4 is the axonometric drawing of detection layers among Fig. 1.
Embodiment
Below in conjunction with accompanying drawing and example the present invention is described in further detail.
By shown in Figure 1, minisize gyroscopes of the present invention is formed by Drive Layer 1, structural sheet 2 and detection layers 3 three's bondings, and Drive Layer 1 is positioned at the bottom, and detection layers 3 is positioned at the top, and structural sheet 2 is between Drive Layer 1 and detection layers 3.The material and the job operation of Drive Layer 1, structural sheet 2 and detection layers 3 are not limit, and Drive Layer 1, structural sheet 2 and detection layers 3 are selected glass material for use in this example, adopt glass solder to realize bonding.Conductive fluid 9 is selected conductivity height and the less mercury of viscosity for use.
Shown in Fig. 2,3 and 4, on the bonding face of Drive Layer 1 and structural sheet 2, symmetry is placed the first miniature electric heater 4a and the second miniature electric heater 4b, also be provided with the first electric heater electrode 5a, the second electric heater electrode 5b, the 3rd electric heater electrode 5c and the 4th electric heater electrode 5d on this bonding face, the first miniature electric heater 4a links to each other with the second electric heater electrode 5b with the first electric heater electrode 5a, and the second miniature electric heater 4b links to each other with the 4th electric heater electrode 5d with the 3rd electric heater electrode 5c.
On the bonding face of structural sheet 2 and Drive Layer 1, symmetry has the first closed cavity 7a and the second closed cavity 7b, make the first miniature electric heater 4a on the Drive Layer 1 be positioned at the first closed cavity 7a, the second miniature electric heater 4b is positioned at the second closed cavity 7b.In order to make the gas temperature in the closed cavity have homogeneity preferably, the first miniature electric heater 4a and the second miniature electric heater 4b should lay respectively at the center of the first closed cavity 7a and the second closed cavity 7b.
On the bonding face of structural sheet 2 and detection layers 3, have the first connecting hole 8a, the second connecting hole 8b, the 3rd connecting hole 8c, microchannel 10, the first split channel 11a and the second split channel 11b.The first split channel 11a and the second split channel 11b are about microchannel 10 symmetries, and be communicated with microchannel 10, conductive fluid mercury 9 is in microchannel 10, the first connecting hole 8a is communicated with the first closed cavity 7a and microchannel 10, the second connecting hole 8b is communicated with the second closed cavity 7b and the second split channel 11b, and the 3rd connecting hole 8c is communicated with the second closed cavity 7b and the first split channel 11a.On the bonding face of detection layers 3 and structural sheet 2, place the first detecting electrode 14a, the second detecting electrode 14b, the 3rd detecting electrode 15a and the 4th detecting electrode 15b, the first detecting electrode 14a and the second detecting electrode 14b lay respectively at the both sides of the first split channel 11a, and the 3rd detecting electrode 15a and the 4th detecting electrode 15b lay respectively at the both sides of the second split channel 11b.
Embed magnetic 13 from the end face of detection layers 3, be positioned at the first split channel 11a and the second split channel 11b directly over.In order to obtain higher sensitivity, the magnetic induction density that magnetic 13 produces in the first split channel 11a and the second split channel 11b should be greater than 0.1T.Have first detecting electrode lead-in wire window 6a and second detecting electrode lead-in wire window 6b on Drive Layer 1 and the structural sheet 2, be positioned at the first detecting electrode 14a, the second detecting electrode 14b, under the 3rd detecting electrode 15a and the 4th detecting electrode 15b, have the first electric heater contact conductor window 12a on the structural sheet 2, the second electric heater contact conductor window 12b, the 3rd electric heater contact conductor window 12c and the 4th electric heater contact conductor window 12d, have the 5th electric heater contact conductor window 12e on the detection layers 3, the 6th electric heater contact conductor window 12f, the 7th electric heater contact conductor window 12g and the 8th electric heater contact conductor window 12h, the first electric heater contact conductor window 12a and the 5th electric heater contact conductor window 12e be positioned at the first electric heater electrode 5a directly over, the second electric heater contact conductor window 12b and the 6th electric heater contact conductor window 12f be positioned at the second electric heater electrode 5b directly over, the 3rd electric heater contact conductor window 12c and the 7th electric heater contact conductor window 12g be positioned at the 3rd electric heater electrode 5c directly over, the 4th electric heater contact conductor window 12d and the 8th electric heater contact conductor window 12h be positioned at the 4th electric heater electrode 5d directly over.
A work period with this minisize gyroscopes is an example now, illustrates that working mechanism of the present invention is as follows:
Original state, conductive fluid mercury 9 is arranged in microchannel 10, at first the gas among the first closed cavity 7a is heated in the first miniature electric heater 4a energising among the first closed cavity 7a, the second miniature electric heater 4b among the second closed cavity 7b is in off-position, therefore the pressure among the first closed cavity 7a promotes conductive fluid mercury 9 to the first split channel 11a and second split channel 11b motion greater than the pressure among the second closed cavity 7b.
When rotational angular velocity ω=0, the formula power F of section that is subjected in 9 motions of conductive fluid mercury
k=0, because the first split channel 11a and the second split channel 11b be about microchannel 10 symmetries, conductive fluid mercury 9 is at the flow Q of the first split channel 11a
1Flow Q with the second split channel 11b
2Equate (Q
1=Q
2), because the sectional dimension of the first split channel 11a and the second split channel 11b is just the same, so conductive fluid mercury 9 is at the flow velocity V of the first split channel 11a
1Flow velocity V with the second split channel 11b
2Equate (V
1=V
2); When rotational angular velocity ω ≠ 0, the formula power F of section that is subjected in 9 motions of conductive fluid mercury
K(wherein, V is the movement velocity of conductive fluid mercury 9 in microchannel 10 to=2 ω V, F
KThe plane formed perpendicular to ω and V of direction), conductive fluid mercury 9 is at the flow Q of the first split channel 11a
1Flow Q with the second split channel 11b
2Unequal (Q
1≠ Q
2), so conductive fluid mercury 9 is at the flow velocity V of the first split channel 11a
1Flow velocity V with the second split channel 11b
2Unequal (V
1≠ V
2).
Be positioned at the high-intensity magnetic field that magnetic 13 directly over the first split channel 11a and the second split channel 11b produces vertical first a split channel 11a and the second split channel 11b, conductive fluid mercury 9 cutting magnetic lines of motion produce motional electromotive force E in the first split channel 11a both sides
1=BLV
1(B is that high magnetic 13 produces the magnetic induction density in magnetic field, and L is the width of the first split channel 11a and the second split channel 11b) produces motional electromotive force E in the second split channel 11b both sides
2=BLV
2, motional electromotive force E
1By the first detecting electrode 14a and the second detecting electrode 14b input detecting circuit, motional electromotive force E
2By the 3rd detecting electrode 15a and the 4th detecting electrode 15b input detecting circuit.When rotational angular velocity ω=0, because V
1=V
2, E
1=E
2When rotational angular velocity ω ≠ 0, because V
1≠ V
2, E
1≠ E
2Therefore two motional electromotive force differences can be represented by the formula:
ΔE＝E
1-E
2＝BL(V
1-V
2)＝BL(Q
1-Q
2)/s＝BLΔQ/s
Wherein Δ Q is the flow Q of the first split channel 11a
1Flow Q with the second split channel 11b
2Difference, s is the sectional area of the first split channel 11a and the second split channel 11b.
Detect two motional electromotive force difference Δ E by differential detection circuit and just can obtain angular velocity information.
After testing circuit produces output signal, the first miniature electric heater 4a outage cooling among the first closed cavity 7a, gas among the second miniature electric heater 4b energising heating second closed cavity 7b among the second closed cavity 7b, pressure among the second closed cavity 7b is greater than the pressure among the first closed cavity 7a, promoting conductive fluid mercury 9 moves to microchannel 10 from the first split channel 11a and the second split channel 11b, after time semiperiod, the first miniature electric heater 4a energising heating, the second miniature electric heater 4b outage cooling begins next work period.
Below schematically invention and embodiment thereof are described, this description does not have limitation, and shown in the accompanying drawing also is one of embodiments of the present invention.So; if those of ordinary skill in the art is enlightened by it; under the situation that does not break away from the invention aim; adopt the same base part of other form or each component layouts mode of other form; without creationary technical scheme similar and the embodiment of designing, all should belong to protection scope of the present invention to this technical scheme.
Claims (2)
1. minisize gyroscopes, it is characterized in that: this gyroscope is formed by Drive Layer (1), structural sheet (2) and detection layers (3) three's bonding, and Drive Layer (1) is positioned at the bottom, and detection layers (3) is positioned at the top;
On the upper surface of Drive Layer (1) and structural sheet (2) bonding, symmetry is placed the first miniature electric heater (4a) and the second miniature electric heater (4b), wherein, the first miniature electric heater (4a) links to each other with first, second electric heater electrode (5b) on being arranged on this upper surface, the second miniature electric heater (4b) be arranged on this upper surface on the 3rd, the 4th electric heater electrode ((5c, 5d) links to each other;
On the lower surface of structural sheet (2) and Drive Layer (1) bonding, symmetry has first closed cavity (7a) and second closed cavity (7b), make the described first miniature electric heater (4a) be positioned at first closed cavity (7a), the second miniature electric heater (4b) is positioned at second closed cavity (7b);
On the upper surface of structural sheet (2) and detection layers (3) bonding, have first to the 3rd connecting hole (8a, 8b, 8c), microchannel (10) and first, second split channel (11a, 11b); First, second split channel (11a, 11b) is about microchannel (10) symmetry, and be communicated with microchannel (10), conductive fluid (9) is arranged in microchannel (10), first connecting hole (8a) is communicated with first closed cavity (7a) and microchannel (10), second connecting hole (8b) is communicated with second closed cavity (7b) and second split channel (11b), and the 3rd connecting hole (8c) is communicated with second closed cavity (7b) and first split channel (11a);
On the lower surface of detection layers (3) and structural sheet (2) bonding, be provided with first to fourth detecting electrode (14a, 14b, 15a, 15b), first, second detecting electrode (14a, 14b) lays respectively at the both sides of first split channel (11a), and the 3rd, the 4th detecting electrode (15a, 15b) lays respectively at the both sides of second split channel (11b);
The upper surface of detection layers (3) is embedded with magnetic (13), is positioned at the top of first split channel (11a) and second split channel (11b);
Have first, second detecting electrode lead-in wire window (6a, 6b) on Drive Layer (1) and the structural sheet (2), first, second detecting electrode lead-in wire window (6a, 6b) is positioned at the below of first to fourth detecting electrode (14a, 14b, 15a, 15b); Have first to fourth electric heater contact conductor window (12a on the structural sheet (2), 12b, 12c, 12d), have the 5th to the 8th electric heater contact conductor window (12e on the detection layers (3), 12f, 12g, 12h), the first and the 5th electric heater contact conductor window (12a, 12e) be positioned at the top of the first electric heater electrode (5a), the second and the 6th electric heater contact conductor window (12b, 12f) be positioned at the top of the second electric heater electrode (5b), the the 3rd and the 7th electric heater contact conductor window (12c, 12g) be positioned at the top of the 3rd electric heater electrode (5c), the 4th and the 8th electric heater contact conductor window (12d, 12h) be positioned at the top of the 4th electric heater electrode (5d).
2. minisize gyroscopes according to claim 1 is characterized in that: the first miniature electric heater (4a) and the second miniature electric heater (4b) lay respectively at the center of first closed cavity (7a) and second closed cavity (7b).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100526074A CN101082492B (en) | 2007-06-29 | 2007-06-29 | Minisize gyroscopes |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100526074A CN101082492B (en) | 2007-06-29 | 2007-06-29 | Minisize gyroscopes |
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| CN101082492B true CN101082492B (en) | 2010-12-01 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103453896B (en) * | 2013-09-13 | 2015-12-23 | 天津大学 | A kind of Magnetic-fluid gyroscope |
| CN103591945A (en) * | 2013-11-19 | 2014-02-19 | 天津大学 | Magnetic fluid top suitable for measuring 0-1 KHz of input signals |
| CN106840155B (en) * | 2017-03-23 | 2020-02-21 | 天津大学 | MHD angular velocity sensor and high-precision gyroscope combined measuring method |
| CN107289919A (en) * | 2017-06-01 | 2017-10-24 | 西安交通大学 | A kind of annular electro resistive MEMS liquid angle gyroscopes |
| CN116136405B (en) * | 2023-04-04 | 2023-06-30 | 天津大学 | Data processing method and device for inertial measurement unit introduced into magnetic fluid sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5668319A (en) * | 1994-02-07 | 1997-09-16 | The Regents Of The University Of California | Micromachined accelerometer |
| CN1595169A (en) * | 2004-07-16 | 2005-03-16 | 北京大学 | Jet flow angle velocity transducer and method for making same |
| CN201053874Y (en) * | 2007-06-29 | 2008-04-30 | 华中科技大学 | Micro gyroscope |
-
2007
- 2007-06-29 CN CN2007100526074A patent/CN101082492B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5668319A (en) * | 1994-02-07 | 1997-09-16 | The Regents Of The University Of California | Micromachined accelerometer |
| CN1595169A (en) * | 2004-07-16 | 2005-03-16 | 北京大学 | Jet flow angle velocity transducer and method for making same |
| CN201053874Y (en) * | 2007-06-29 | 2008-04-30 | 华中科技大学 | Micro gyroscope |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2001-324333A 2001.11.22 |
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