CN101050966A - Double freedom double decouple micro mechanical vibration gyrosope senser - Google Patents
Double freedom double decouple micro mechanical vibration gyrosope senser Download PDFInfo
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- CN101050966A CN101050966A CNA2007100722309A CN200710072230A CN101050966A CN 101050966 A CN101050966 A CN 101050966A CN A2007100722309 A CNA2007100722309 A CN A2007100722309A CN 200710072230 A CN200710072230 A CN 200710072230A CN 101050966 A CN101050966 A CN 101050966A
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Abstract
A micromechanical vibration gyroscopic transducer with double-freedom and double-decoupling is prepared for connecting driving direction bonding block to driving mass block through elastic beam and detection direction bonding block to the first freedom detection mass block through said beam as well as driving fixed electrode to driving fixed electrode bonding block, connecting active electrode to driving mass block and detection fixed electrode to detection direction bonding block as well as detection active electrode to the second freedom detection mass block being connected with the first one then setting isolation mass block between driving mass block and the first freedom detection mass block.
Description
(1) technical field
What the present invention relates to is a kind of sensor construction, specifically a kind of micro mechanical vibration gyrosensor.
(2) background technology
Based on the micro-mechanical inertia instrument of microelectromechanical systems (MEMS) have that volume is little, cost is low, can with advantage such as integrated circuit compatibility, therefore wide application prospect is arranged.
Micromechanical gyro is a focus of MEMS area research in recent years.Vibrating micromechanical gyro is wherein mainly a kind of.It is based on a kind of microstructure of the principle work of coriolis force.The influence of factors such as the temperature the when duty of this class gyro is subjected to the quality of processes and precision, work, air pressure, damping.Exist very big compromise problem between the sensitivity of this gyro and detection mode natural frequency and the driving mode natural frequency.And the oscillatory type gyro drives mode and detects between the mode and can have certain coupling error.These problems have all limited the application of this gyro.
Traditional micro mechanical vibration gyro adopts the single-degree-of-freedom detection mode usually, be that the detection side is to having single mass, the detection bandwidth of this gyro is for driving natural frequency and detecting the poor of natural frequency, and the detection sensitivity of gyro sharply reduces along with the increase of bandwidth, caused the compromise contradictory problems between bandwidth and the sensitivity.When detecting electrode designs, the mode that adopts the press-filming damping of parallel plate electrode to detect usually, this make the detection side to quality factor very little, corresponding influenced by quality factor very big and traditional gyro detects mode, this has further reduced the detection sensitivity of gyro.Simultaneously, traditional gyro generally adopts the structure of single-stage decoupling zero, when gyro drives, detects mass with driving the mass motion, and this brings certain coupling error can for detection mode.These problems all are unfavorable for improving the gyro detection sensitivity and increase bandwidth of operation
(3) summary of the invention
The purpose of this invention is to provide a kind of can making in the detection bandwidth that increases gyro under the same process difficulty condition, under the prerequisite of identical static capacitance value, increase the quality factor that detect mode, reduce the influence of damping, and eliminate the double freedom double decouple micro mechanical vibration gyrosope senser of coupling error to a certain extent sensitivity.
The object of the present invention is achieved like this: it comprises the driving direction bonding piece that is bonded on the glass substrate, drive fixed electorde bonding piece, the detection side is to the bonding piece and detect fixed electorde bonding piece, driving direction bonding piece links to each other with the driving mass by the driving direction elastic beam, the detection side detects mass by elastic beam from first degree of freedom to the bonding piece links to each other with first degree of freedom detection mass, drive to connect on the fixed electorde bonding piece and drive fixed electorde, driving float electrode is connected on the driving mass, the detection side is the joint detection fixed electorde on the bonding piece, the detected activity electrode detects mass with second degree of freedom and links to each other, second degree of freedom detection mass detects mass by second degree of freedom elastic beam links to each other with first degree of freedom detection mass, detect between the mass with first degree of freedom and be provided with the isolation mass driving mass, the both sides that isolate mass link to each other with driving mass and first degree of freedom detection mass with driving the elastic beam that mass is connected and isolate the elastic beam that mass is connected with the detection mass by isolating mass respectively.The one-piece construction left-right symmetric distributes, and symmetrical expression distributes up and down.
The double freedom mass is adopted in the design of detection mass of the present invention, promptly two masses elastic beam by an one dimension link together common constitute detect mass, increase bandwidth and reduce the influence of quality factor with this sensitivity; Detecting electrode is produced on one of them mass, and adopts the capacitance detecting mode of float electrode relative fixed electrode parallel motion to detect quality factor to increase; Adopt the structural design of double-grade decoupling, promptly driving quality and detecting an isolation of adding mass between the quality, so that drive quality and detect the relatively independent motion of quality, thereby the elimination coupling error.
The isolation mass links to each other with the detection mass with the driving mass by the elastic beam of both direction, will drive mass with mutually nested mode and keep apart with the detection mass; Detecting mass is two, and two detect quality links to each other by elastic beam soon, constitutes double freedom and detects; The detected activity electrode is produced on inner the detection on the mass, during detection, and the detecting electrode motion that is parallel to each other, generation slide-film damping.
The contradiction between bandwidth and the detection sensitivity has been alleviated in the present invention to a great extent, increases the quality factor of mode and has reduced the influence of damping to sensitivity, has eliminated the influence of coupling error simultaneously to a certain extent.
The invention has the advantages that: 1, bandwidth is big, and is highly sensitive; 2, it is little influenced by technology and quality factor; 3, the detection side is to the quality factor height; 4, the coupling error influence is little.
(4) description of drawings
Accompanying drawing is a structural representation of the present invention.
(5) embodiment
The manufacturing process of this invention roughly has following three steps:
1,, carves the required table top of bonding (8 fixed blocks) at the back side of silicon ICP dry etching;
2, the bonding table top that step 1 is etched with electrostatic bonding is bonded in and forms 8 fixed blocks on the glass substrate;
3, etch beam, mass, the fixed and movable electrode pattern of sensor in the front of silicon with ICP, discharge beam, mass and electrode structure.
For a more detailed description below in conjunction with accompanying drawing to the present invention:
The composition of double freedom double decouple micro mechanical vibration gyrosope senser comprises the driving direction bonding piece 12 that is bonded on the glass substrate, drive fixed electorde bonding piece 17, the detection side is to bonding piece 9 and detect fixed electorde bonding piece 6, driving direction bonding piece links to each other with driving mass 10 by driving direction elastic beam 11, the detection side detects mass by elastic beam 14 from first degree of freedom to the bonding piece links to each other with first degree of freedom detection mass 5, drive to connect on the fixed electorde bonding piece and drive fixed electorde 16, driving float electrode 15 is connected on the driving mass, the detection side is joint detection fixed electorde 4 on the bonding piece, detected activity electrode 3 detects mass 2 with second degree of freedom and links to each other, second degree of freedom detection mass detects mass by second degree of freedom elastic beam 1 links to each other with first degree of freedom detection mass, detect to be provided with between the mass with first degree of freedom and isolate mass 7 driving mass, the both sides that isolate mass link to each other with driving mass and first degree of freedom detection mass with driving the elastic beam 8 that mass is connected and isolate the elastic beam 13 that mass is connected with the detection mass by isolating mass respectively.The one-piece construction left-right symmetric distributes, and symmetrical expression distributes up and down.
The course of work one: when when drive electrode 15,16 applies driving voltage, driving mass moves under the driving force effect, elastic deformation takes place in driving direction elastic beam 11, because elastic beam 8 is very big in the driving direction rigidity, the deformation of this moment is very little, driving isolation mass 7 by elastic beam 8 moves along driving direction along with driving mass, elastic deformation takes place in elastic beam 13, and is identical with elastic beam 8, and it is very little that deformation takes place elastic beam 14, at this moment, detecting mass 2,5 is subjected to displacement hardly.
The course of work two: when the angular velocity signal that occurs perpendicular to gyro, under the effect of coriolis force, detecting mass 2,5 can be along the detection side to vibration, at this moment, elastic deformation all takes place in elastic beam 1,14, elastic beam 13 is very big in detection side's rigidity that makes progress, the deformation of this moment is very little, isolate mass 7 along with detect mass 2,5 along the detection side to moving, elastic deformation takes place in elastic beam 8, identical with elastic beam 13, the deformation of elastic beam 11 this moment is very little, drive mass 10 the detection side to being subjected to displacement hardly.
The course of work three: when the angular velocity signal that occurs perpendicular to gyro, detecting mass 2,5 can be along the detection side to moving, elastic deformation all takes place in elastic beam 1,14, at this moment, because the existence of elastic beam 1, when detecting mass 2,5 vibrations, produce certain vibration coupling between the two, thereby make gyro in a wider frequency, all have bigger sensitivity, promptly increased the bandwidth of gyro.
Claims (2)
1, a kind of double freedom double decouple micro mechanical vibration gyrosope senser, it comprises the driving direction bonding piece that is bonded on the glass substrate, drive fixed electorde bonding piece, the detection side is to the bonding piece and detect fixed electorde bonding piece, it is characterized in that: driving direction bonding piece links to each other with the driving mass by the driving direction elastic beam, the detection side detects mass by elastic beam from first degree of freedom to the bonding piece links to each other with first degree of freedom detection mass, drive to connect on the fixed electorde bonding piece and drive fixed electorde, driving float electrode is connected on the driving mass, the detection side is the joint detection fixed electorde on the bonding piece, the detected activity electrode detects mass with second degree of freedom and links to each other, second degree of freedom detection mass detects mass by second degree of freedom elastic beam links to each other with first degree of freedom detection mass, detect between the mass with first degree of freedom and be provided with the isolation mass driving mass, the both sides that isolate mass link to each other with driving mass and first degree of freedom detection mass with driving the elastic beam that mass is connected and isolate the elastic beam that mass is connected with the detection mass by isolating mass respectively.
2, double freedom double decouple micro mechanical vibration gyrosope senser according to claim 1 is characterized in that: the one-piece construction left-right symmetric distributes, and symmetrical expression distributes up and down.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2007100722309A CN100543419C (en) | 2007-05-21 | 2007-05-21 | Double freedom double decouple micro mechanical vibration gyrosope senser |
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| CNB2007100722309A CN100543419C (en) | 2007-05-21 | 2007-05-21 | Double freedom double decouple micro mechanical vibration gyrosope senser |
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| CN101050966A true CN101050966A (en) | 2007-10-10 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101261126B (en) * | 2008-04-10 | 2010-06-02 | 上海交通大学 | Micro- solid mode gyroscope |
| CN101907637A (en) * | 2010-06-29 | 2010-12-08 | 瑞声声学科技(深圳)有限公司 | Triaxial differential accelerometer and manufacture method thereof |
| CN101368826B (en) * | 2008-09-25 | 2011-04-27 | 中国人民解放军国防科学技术大学 | Vibration isolation frame work decoupled silicon micro-gyroscope |
| CN102278982A (en) * | 2011-07-13 | 2011-12-14 | 中国人民解放军国防科学技术大学 | Restraining method for coupling error of micro silicon gyroscope with four mass blocks |
| CN102507975A (en) * | 2011-11-09 | 2012-06-20 | 重庆科技学院 | Bi-axial angular velocity sensor |
| CN104406579A (en) * | 2014-11-27 | 2015-03-11 | 歌尔声学股份有限公司 | Micro-electromechanical deformable structure and triaxial multi-degree of freedom micro-electromechanical gyroscope |
| CN104482930A (en) * | 2014-12-04 | 2015-04-01 | 中国科学院半导体研究所 | Weak-coupling elastic beam structure applied to MEMS device |
| CN107192384A (en) * | 2017-07-24 | 2017-09-22 | 深迪半导体(上海)有限公司 | A kind of MEMS three-axis gyroscopes |
| CN108731659A (en) * | 2018-05-25 | 2018-11-02 | 中国电子科技集团公司第二十九研究所 | A kind of more detection vibration unit micro-inertial navigation gyroscopes |
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| CN101871951B (en) * | 2010-06-07 | 2011-11-30 | 瑞声声学科技(深圳)有限公司 | Micro-acceleration sensor |
| CN101865934B (en) * | 2010-06-11 | 2012-01-18 | 瑞声声学科技(深圳)有限公司 | Acceleration transducer |
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- 2007-05-21 CN CNB2007100722309A patent/CN100543419C/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101261126B (en) * | 2008-04-10 | 2010-06-02 | 上海交通大学 | Micro- solid mode gyroscope |
| CN101368826B (en) * | 2008-09-25 | 2011-04-27 | 中国人民解放军国防科学技术大学 | Vibration isolation frame work decoupled silicon micro-gyroscope |
| CN101907637A (en) * | 2010-06-29 | 2010-12-08 | 瑞声声学科技(深圳)有限公司 | Triaxial differential accelerometer and manufacture method thereof |
| CN102278982A (en) * | 2011-07-13 | 2011-12-14 | 中国人民解放军国防科学技术大学 | Restraining method for coupling error of micro silicon gyroscope with four mass blocks |
| CN102507975A (en) * | 2011-11-09 | 2012-06-20 | 重庆科技学院 | Bi-axial angular velocity sensor |
| CN104406579B (en) * | 2014-11-27 | 2017-05-10 | 歌尔股份有限公司 | Micro-electromechanical deformable structure and triaxial multi-degree of freedom micro-electromechanical gyroscope |
| CN104406579A (en) * | 2014-11-27 | 2015-03-11 | 歌尔声学股份有限公司 | Micro-electromechanical deformable structure and triaxial multi-degree of freedom micro-electromechanical gyroscope |
| CN104482930A (en) * | 2014-12-04 | 2015-04-01 | 中国科学院半导体研究所 | Weak-coupling elastic beam structure applied to MEMS device |
| CN104482930B (en) * | 2014-12-04 | 2017-09-29 | 中国科学院半导体研究所 | Apply the weak coupling elastic beam structure in MEMS |
| CN107192384A (en) * | 2017-07-24 | 2017-09-22 | 深迪半导体(上海)有限公司 | A kind of MEMS three-axis gyroscopes |
| WO2019019942A1 (en) * | 2017-07-24 | 2019-01-31 | 深迪半导体(上海)有限公司 | Three-axis mems gyroscope |
| TWI699514B (en) * | 2017-07-24 | 2020-07-21 | 大陸商深迪半導體（上海）有限公司 | A MEMS three-axis gyroscope |
| US11085767B2 (en) | 2017-07-24 | 2021-08-10 | Senodia Technologies (Shaoxing) Co., Ltd | Three-axis MEMS gyroscope |
| CN107192384B (en) * | 2017-07-24 | 2022-04-05 | 深迪半导体(绍兴)有限公司 | MEMS triaxial gyroscope |
| CN108731659A (en) * | 2018-05-25 | 2018-11-02 | 中国电子科技集团公司第二十九研究所 | A kind of more detection vibration unit micro-inertial navigation gyroscopes |
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