CN100498217C - Dislocation measurement device and shape test device using same - Google Patents
Dislocation measurement device and shape test device using same Download PDFInfo
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- CN100498217C CN100498217C CNB2006101270889A CN200610127088A CN100498217C CN 100498217 C CN100498217 C CN 100498217C CN B2006101270889 A CNB2006101270889 A CN B2006101270889A CN 200610127088 A CN200610127088 A CN 200610127088A CN 100498217 C CN100498217 C CN 100498217C
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
Abstract
The invention provides a technique for measuring displacements of not only vertices and flat surfaces but also of slopes by an optical sensor provided with a compound-eye function capable of detecting light regularly reflected at different angles according to the shapes of points of measurement on an object to be measured. The device having a plurality of light reception parts 200, 210 and 220, using a light projection part 100 condenses light onto the point of measurement on the object to be measured to receive reflected light regularly reflected at the point of measurement. The plurality of light reception parts are arranged in such a way as to include projected light and be approximately in a fan shape having an axis through the point of measurement in directions which intersect with a plane approximately perpendicular to the object to be measured and in such a way that the ranges of light reception, which is capable of receiving light from the point of measurement, of the light reception surfaces of adjacent light reception parts may be continuous.
Description
Technical field
The shape inspection apparatus that the present invention relates to a kind of displacement measuring device and use this device by to the measured object irradiates light and scan and receive its reflected light, carries out triangulation to the displacement on the surface of measured object.The invention particularly relates to a kind of technology of displacement of the surface of measuring the measured object that favours the direction of scanning.
Background technology
Before, as utilizing triangulation to carry out the device of displacement measurement, there was the content shown in the prior art of patent documentation 1.If carry out displacement measurement, then there is the problem of the inclination on the surface that can't measure measured object preferably according to above-mentioned prior art.For example, shown in Figure 12 (A), if desire is measured the surface configuration of the encapsulant (sealant) of measured object, then measuring at scanning position is that m point (near the roughly point on the plane the summit) is located the reflected light that the input scan light time carries out normal reflection, and Displacement Measurement, if directly move to position n point (point on inclined-plane), input is measured with scan light that is measured as equal angular of ordering at m and desire, then carries out the reflected light of normal reflection to the direction reflection different with the reflected light of ordering at m at the n point.That is, if with the detector configurations of detection of reflected light receiving the catoptrical position that m is ordered, then can't receive the reflected light that n is ordered.Therefore, if measurement result is drawn along the direction of scanning, then shown in the solid line of Figure 12 (B), the sloping portion of encapsulant obtains to compare sagging waveform with the actual section (dotted line of Figure 12 (B)) of encapsulant.As mentioned above, be because can't receive the reflected light that normal reflection has taken place in the rake.
Therefore, the invention of the special fair 7-69151 communique of Jap.P. is the content that Optical displacement sensor itself is measured corresponding to the dip plane rotation of measured object.The technology of the invention of the special fair 7-69151 communique of Jap.P. is the mode that is made as particular value and rotates Optical displacement sensor of the output with the Optical displacement sensor formation of control automatically.Therefore, can measure according to the inclined-plane of measurement point or plane etc.
Because technology according to the special fair 7-69151 communique of above-mentioned Jap.P., it is the position of rotation (angle) of controlling optical sensor (light sensor) in the mode that the output with Optical displacement sensor is made as particular value automatically, so the control time that stabilizes to particular value until the output of Optical displacement sensor must be arranged, and this control time depends on the shape (plane, inclined-plane etc.) of measurement point, in scanning survey point successively and the displacement measuring device measured, postponed this sweep time.And the control gear of formation and position of rotation is all complicated.
Summary of the invention
The object of the present invention is to provide a kind of technology, it prevents the influence that produced by the shape of this measurement point by optical sensor, but scanning survey point (need not to spend the time that depends on change of shape) is also measured, and above-mentioned optical sensor possesses compound eye (compound eye) function that can detect according to the shape of the measurement point on the measured object and carry out the light of normal reflection from different perspectives.
Comprise Optical displacement sensor in foregoing invention, this Optical displacement sensor comprises: light-projecting portion (100), utilize make light on measured object optically focused and with the position of optically focused as measurement point and oblique irradiation; And light accepting part (210), in order to receive the reflected light that carries out normal reflection from above-mentioned measurement point, and displacement measuring device by with the direction that comprises above-mentioned light that shines and the crossing on the same level vertical with above-mentioned measured object on, above-mentioned Optical displacement sensor is relatively moved and scan, and measure the displacement of above-mentioned measured object.
And above-mentioned Optical displacement sensor comprises a plurality of above-mentioned light accepting parts (200,210,220), a plurality of light accepting parts are towards above-mentioned measurement point, and be fan-shaped in direction symmetric offset spread with above-mentioned crossing on the same level, and the catoptrical optical range that is subjected to that can receive aforementioned normal reflection that the sensitive surface of each above-mentioned light accepting part is occupied from above-mentioned measurement point, aspect displacement measurement, be connected with each other continuous mode and dispose with the sensitive surface of the light accepting part of adjacency.
In foregoing invention, above-mentioned a plurality of light accepting parts are provided with 1 at the point with above-mentioned crossing on the same level, and arrange equal number on its symmetria bilateralis ground.
In foregoing invention, above-mentioned light-projecting portion comprises: light source (LD); And collector lens (2), by the light that penetrates from this light source is concentrated on the measured object position of optically focused is shone as measurement point.
Each of above-mentioned a plurality of light accepting parts comprises: sensitive lens function element (3a, 3b, 3c) receives the light and the optically focused that carry out normal reflection from above-mentioned measurement point; And photo detector (PSD1, PSD2, PSD3), be received in the light of this sensitive lens function element optically focused.
And the sensitive surface of above-mentioned light accepting part is the sensitive surface of above-mentioned sensitive lens function element.
In foregoing invention, the distance of the position from above-mentioned a plurality of sensitive lens function element to this above-mentioned institute optically focused is identical, and the distance that above-mentioned each sensitive lens function element is configured to above-mentioned measurement point is identical, and near being configured in the mode that the sensitive surface of the sensitive lens function element of adjacency is connected.
In foregoing invention, above-mentioned each sensitive lens function element comprises: collimation lens (collimatorlens) (3a1,3b1,3c1) receives and carries out the light of normal reflection and make it become directional light (parallel light) from above-mentioned measurement point; And being subjected to light collector lens (3a2,3b2,3c2), the directional light optically focused of self-focus lens is to the photo detector of above-mentioned correspondence in the future.
And the sensitive surface of above-mentioned light accepting part is the sensitive surface of above-mentioned collimation lens, and the sensitive surface of the collimation lens of adjacency the be subjected to optical range occupied with respect to above-mentioned measurement point disposing in consecutive mode aspect the displacement measurement, and in each sensitive lens function element, above-mentioned measurement point is identical with distance and the above-mentioned light that is subjected between above-mentioned collimation lens with the ratio of the distance between collector lens and above-mentioned photo detector.
Above-mentioned Optical displacement sensor comprises 2, and each Optical displacement sensor is to be configured to different directions, so that each above-mentioned scanning is different directions scanning.
In foregoing invention, on the different direction in each direction of scanning, comprise Optical displacement sensor respectively.
In addition, if change the expression of foregoing invention, then as described below.That is, a kind of deviation meter is characterized in that: comprise Optical displacement sensor, this Optical displacement sensor comprises: light source; Collector lens shines the position of optically focused by the light that penetrates from this light source is concentrated on the measured object as measurement point; The sensitive lens function element, receiving with above-mentioned measurement point is the boundary's light and optically focused of normal reflection symmetrically; And photo detector, be received in the light of this sensitive lens function element optically focused, and by comprise from above-mentioned light source to above-mentioned measurement point light path and with the direction of the planar quadrature that is approximately perpendicular to above-mentioned measured object on, above-mentioned Optical displacement sensor is moved with respect to above-mentioned measured object, scan above-mentioned measurement point, and, detect the displacement of the above-mentioned measured object on the above-mentioned measurement point according to the light receiving position on the sensitive surface of above-mentioned photo detector.
And above-mentioned Optical displacement sensor constitutes, with the direction of above-mentioned crossing on the same level on, with this plane be the boundary with above-mentioned measurement point serve as axle with a plurality of above-mentioned sensitive lens function element symmetrically general alignment be fan-shaped, and each above-mentioned sensitive lens function element has with respect to measurement point is subjected to optical range, aspect displacement measurement, dispose in consecutive mode between the sensitive lens function element of adjacency, and then, a plurality of above-mentioned photo detectors are disposed at and utilize each sensitive lens function element and the position of optically focused corresponding to above-mentioned sensitive lens function element of arranging.
Among the present invention, because Optical displacement sensor is the formation that comprises the light accepting part of a plurality of light that can detect different angles, be formation with so-called compound eye function, so the time can tackle the change of shape of measurement point and receive light, so can scan corresponding to the displacement of the variation of shape and measure immediately in scanning.And, because and but the previous patent documentation 1 described mechanism that makes simple eye Optical displacement sensor rotation, so can easily constitute.
Description of drawings
Fig. 1 (A), Fig. 1 (B) are the signal pie graphs in order to the embodiment that Optical displacement sensor of the present invention is described.
Fig. 2 is a synoptic diagram of roughly observing the formation of Fig. 1 (A) from the direction of arrow A.
Fig. 3 comprises figure as the light accepting part of the PSD of photo detector and sensitive lens (function element) in order to explanation, and is in order to illustrate that a plurality of light accepting parts are identical figure when constituting.
Fig. 4 is the exemplary plot when changing the sensitive lens function element of a plurality of light accepting parts in order to explanation.
Fig. 5 (A), Fig. 5 (B) are in order to sensitive lens function element and the asynchronous exemplary plot of photo detector PSD in a plurality of light accepting parts to be described.
Fig. 6 is the figure that the function of the embodiment of expression displacement measuring device of the present invention constitutes.
Fig. 7 is the figure that the function of embodiment of the shape inspection apparatus of the expression embodiment that uses Fig. 6 constitutes.
Fig. 8 is the exemplary plot of expression displacement measurement.
Fig. 9 is the successional figure that is subjected to optical range in order to the explanation sensitive lens.
Figure 10 (A), 10 (B), 10 (C) are the figure that expression comprises the configuration example of 2 Optical displacement sensors.
Figure 11 is the figure in order to the explanation position of camera.
Figure 12 (A), 12 (B) are the figure in order to the explanation look-ahead technique.
1,3a1,3b1,3c1: collimation lens 2,3a2,3b2,3c2: collector lens
3,3a, 3b, 3c: sensitive lens (function element)
4,4a, 4b: Optical displacement sensor 5: scanning mechanism
6: control part 7,8: totalizer
9: arithmetical unit 10: image processing part
11: compare means 12: judging means
13: demonstration means 100: light-projecting portion
200,210,220: light accepting part 300: displacement measurement portion
400: inspection portion 500: camera
600: encapsulant LD: light source
PSD1, PSD2, PSD3: photo detector
Embodiment
Use figure explanation embodiments of the invention.Fig. 1 (A), 1 (B) are the signal pie graphs in order to the embodiment that Optical displacement sensor of the present invention is described.Fig. 1 (A) is from shining the light of measured object and perpendicular to the observed figure of direction of the planar quadrature of measured object with comprising from light source LD (laser diode, laser diode).In other words, be the figure that observes from the direction of scanning.Fig. 2 is a synoptic diagram of observing the formation of Fig. 1 (A) from the arrow A direction.Fig. 3 comprises the figure of the light accepting part of photo detector PSD and sensitive lens (function element) in order to explanation, and is in order to illustrate that a plurality of light accepting parts are identical figure when constituting.Fig. 4 is the exemplary plot when changing the sensitive lens function element of a plurality of light accepting parts in order to explanation.Fig. 5 (A), 5 (B) are in order to sensitive lens function element and the asynchronous exemplary plot of photo detector PSD in a plurality of light accepting parts to be described.Fig. 6 is the figure that the function of the embodiment of expression displacement measuring device of the present invention constitutes.Fig. 7 is the figure that the function of embodiment of the shape inspection apparatus of the expression embodiment that uses Fig. 6 constitutes.Fig. 8 is the exemplary plot of expression displacement measurement.Fig. 9 is the successional figure that is subjected to optical range in order to explanation.Figure 10 (A), 10 (B), 10 (C) are the figure that expression comprises the configuration example of 2 Optical displacement sensors.Figure 11 is the figure in order to the position of explanation camera.
[Optical displacement sensor]
Herein, the formation and the action of Optical displacement sensor are described, this Optical displacement sensor comprises: the light-projecting portion 100 that is made of light source LD, collimation lens 1 and collector lens 2 among Fig. 1 (A), and 3 light accepting parts 200,210,220 (being called " light accepting part " typically) that are made of sensitive lens (function element) and photo detector (this 1 is combined as 1 light accepting part).
In addition, among the present invention, use the expression of " sensitive lens function element ", but because lens or a plurality of lens that can be single be reached identical function, performance, so be in order to represent above-mentioned all expression.
Among Fig. 1 (A), light source LD is a laser diode for example, concurrent bright dipping.Actual is light beam (beam), but only represents with line among Fig. 1 (A).Collimation lens 1 receives from the light of light source LD and is converted to directional light and is sent to collector lens 2.The directional light optically focused that collector lens 2 will receive from collimation lens 1 also shines on the measured object.Below, the position that this shone is called " measurement point ".
Among Fig. 1 (A), 1 (B) and Fig. 2, in this example, as sensitive lens (function element), comprise 3 sensitive lens 3a, 3b, 3c (being called " sensitive lens 3 " typically), be received in the light of the measurement point normal reflection on the measured object that is shone and optically focused to any of photo detector PSD1 to 3.In this example, photo detector has 3, i.e. PSD1～3.Each photo detector PSD1～3 (being called " photo detector PSD " typically) at this moment, shown in Fig. 1 (B), have identical formation.Photo detector PSD1～3rd, the optical measurement displacement also is converted to the element of electric signal, and can be made of photodiode (photo diode), also can be made of CCD (cha rge-coupled device, charge-coupled image sensor).Photo detector PSD1～3 are at the longitudinal direction of optical picture 1 (B), receive position on the PSD of light, be displacement Lp, use from the intensity of its two ends output, for example export the value of A1 and output B1, represent with Lp1=(A1-B1)/(A1+B1).Therefore, shown in Fig. 1 (A), the variation of the shape of measurement point, height, position P1, P2, the P3 that photo detector PSD1～3 receives light exports A1～3, output B1～3 by each and specifies according to following formula, but and Displacement Measurement Lp1～Lp3 (detailed content is in the back narration).
And, preferably as shown in Figure 2, comprise the light that is thrown light on from light-projecting portion 100 light path and with the face (face of Fig. 1 (A) perpendicular to measured object, or the face on the line of the photo detector PSD2 that is erected in connection layout 2 and measurement point) mode of intersecting, the sensitive surface that roughly sets to fan-shaped sensitive lens 3a, 3b, 3c constitutes in the contacted each other mode that adjoins each other.Promptly, as shown in Figure 2, the light that sensitive lens 3a is received is at photo detector PSD1 optically focused, the light that sensitive lens 3b is received is at PSD2 optically focused, the light that photo detector 3c is accepted is at photo detector PSD3 optically focused, can not make thus setting to the light in each angular range (being subjected to optical range) fan-shaped from sensitive lens 3a to 3c to spill and can receive light.Because if having the slit between the sensitive surface of each photo detector of adjacency,, produce error so enter the displacement of the measurement point in the position in this slit then because can't receive the light that enters this slit.
In addition, as mentioned above, so-called " setting the mode that the sensitive surface for fan-shaped sensitive lens 3a, 3b, 3c contacts each other to adjoin each other constitutes ", sensitive surface that we can say each light accepting part (sensitive lens 3) is subjected to optical range with respect to measurement point had be that sensitive surface with adjacency is connected with each other continuous mode and disposes, though fully continuously also can, have problems such as configuration, structural error.Therefore, the result's Displacement Measurement substantially that means configuration of " disposing in a continuous manner " herein.In other words, allow to measure substantially do not have an influence be subjected to the discontinuous of optical range.For example, when light is caught as light beam, as shown in Figure 9, because if the part of light is input to any sensitive lens and then can measures at least, so have continuity.Fig. 9 only takes out sensitive lens 3a1,3b1, the 3c1 of Fig. 4 and the figure that rearranges in order to explanation.Among Fig. 9, pass between sensitive lens 3b1 and 3c1 from the part of the reflected light A of measurement point (light beam of oblique line part), a part is received by sensitive lens 3b1.The part of reflected light B (oblique line segment beam) is input to sensitive lens 3b1, and other parts are input to sensitive lens 3a1, and other parts are passed between sensitive lens 3b1 and 3a1 in addition, and a part is received by sensitive lens 3b1.So, utilizing the reflected light be made as from measurement point is not the structure of the size relationship that all passes, thereby can have continuity.
On the other hand, in the scanning process, for example, even the situation that utilization as following (i) or measuring method (ii) exist reflected light to pass between specific range, also be also to measure continuously substantially aspect measurement, if it in the error range that displacement measurement allowed, then can be regarded as with being subjected to the continuous mode of optical range essence of sensitive surface and disposes.
(i) in direction of scanning scanning, and in each specific range (the measurement resolution characteristic of direction of scanning) Displacement Measurement.That is, can in each specific range, measure continuously in the direction of scanning.And, as mentioned above, be in each specific range, to measure, but during according to the degree of the degree of the concavo-convex degree of tilt of prediction measured objects such as the kind of measured object or flatness, sometimes the interval of this specific range becomes big, or a part of concentrated area diminishes, a part of concentrated area becomes big.
(ii) according to the degree of the degree of tilt of the concaveconvex shape of measured portion or the degree of flatness, can be in specific range each or every a plurality of interval at interval Displacement Measurement, value in these one or more intervals is proofreaied and correct according to the measured value of front and back, or is made as in conjunction with the inferred value on the line of the measured value of front and back.
As mentioned above, if unsubstantial,, also belong to category of the present invention even then there is the uncontinuity that is subjected to optical range than bad influence.Below, about being subjected to the continuous of optical range, promptly above-mentioned implication.
Fig. 2 is the figure (omitting the formation of light source side) that observes from the arrow A direction of Fig. 1 (A), and represents the position according to main sweep, changes the angle of normal reflection, and the situation of the light receiving position of photo detector PSD1～3 variation.The 1st scan light, the 2nd scan light and the 3rd scan light are with a light main sweep measurement point originally, but aspect explanation, light during with the measurement point Xn-1 on the scanning measured object is as the 1st scan light, and the light the when light when scanning survey is put Xn is put Xn+1 as the 2nd scan light and with scanning survey shows as the 3rd scan light.Utilize the 1st scan light in inclination place of measurement point Xn-1 (with respect to main scanning direction, be positioned at the shear points that rises on the right side) light that carries out normal reflection, utilize sensitive lens 3a to be concentrated on photo detector PSD1 (p2), this displacement is as Lp2=(A1-B1)/(A1+B1) measure.The light that utilizes the 2nd scan light to carry out normal reflection on the summit of measurement point Xn utilizes sensitive lens 3b to be concentrated on photo detector PSD2 (P1), and this displacement is as Lp1=(A2-B2)/(A2+B2) measure.Utilize the 3rd scan light in inclination place of measurement point Xn+1 (with respect to main scanning direction, be positioned at the shear points that the right side descends) light that carries out normal reflection, utilize sensitive lens 3c to be concentrated on photo detector PSD3 (p3), and this displacement is as Lp3=(A3-B3)/(A3+B3) measure.In fact, as following rheme shift measurement device (with reference to Fig. 6) illustrated as, can displacement L=(A-B)/(A+B), A=A1+A2+A3, B=B1+B2+B3 represented.
Fig. 8 represents this measurement result.The transverse axis of Fig. 8 is represented the scanning position of main scanning direction, and the longitudinal axis is based on the output of each photo detector PSD and the displacement of calculating.As this figure, can receive the light that utilizes the inclined-plane to carry out normal reflection, and obtain its shape displacement.
[embodiment of Optical displacement sensor]
, the embodiment of Optical displacement sensor is described herein, the embodiment of light accepting part especially is described.Light accepting part has the embodiment shown in following (1)～(4), and can adopt any according to the difference of the photo detector PSD that constitutes it, sensitive lens function element etc.
(1) constitute the performance of each photo detector PSD of 3 light accepting parts and sensitive lens function element, when function is identical:
To this, the content illustrated with above-mentioned Fig. 1 (A), Fig. 2 is identical, and measurement point is identical with distance between each sensitive lens 3, and measurement point is also identical with distance between each photo detector PSD.
(2) performance, the function of the photo detector PSD of each light accepting part are identical, but the performance of each sensitive lens function element, function are not simultaneously:
Utilize Fig. 4 that this example is described.Each sensitive lens function element of Fig. 4 becomes the collimation lens (3a1,3b1,3c1) of directional light and this directional light is constituted with collector lens (3a2,3b2,3c2) at the light that is subjected to of photo detector PSD optically focused by receiving respectively from the light of the normal reflection of measurement point and with it.Herein, each focal length of collimation lens 3a1,3b1,3c1 is made as Fa1, Fb1, Fc1, each focal length that is subjected to light with collector lens 3a2,3b2,3c2 is made as Fa2, Fb2, Fc2 all is identical value as optical magnification Fa2/Fa1, Fb2/Fb2, the Fc2/Fc1 of each light accepting part.At this moment, the distance between measurement point and each collimation lens, and measurement point and each photo detector PSD between distance (the distance L a of Fig. 4, Lb, Lc) can distinguish different.Especially, the distance between collimation lens (3a1,3b1,3c1) and the photo detector PSD also dissimilates.
In this example, because collimation lens 3a1,3b1,3c1 make the light optically focused from measurement point, so each sensitive surface of the collimation lens 3a1 of adjacency and collimation lens 3b1, collimation lens 3b1 and collimation lens 3c must be arranged in consecutive mode with respect to the optical range that is subjected to of measurement point.It is for the light from the normal reflection of measurement point can't be spilt between collimation lens.At this moment, because can make distance different (with reference to Fig. 4) corresponding to the difference of the focal length of distance collimation lens 3a1,3b1,3c1 apart from measurement point, thus different with above-mentioned (1), be easy to sensitive surface in adjacency and make and be subjected to optical range continuous.
(3) performance of the performance of the photo detector PSD of each light accepting part, function and each sensitive lens function element, function are not simultaneously:
2 light accepting parts of comparison diagram 5 (A), 5 (B) illustrate this example.Each sensitive lens function element of Fig. 5 (A) becomes the collimation lens (3b1,3c1) of directional light and this directional light is constituted with collector lens (3b2,3c2) at the light that is subjected to of photo detector PSD optically focused by receiving respectively from the light of the normal reflection of measurement point and with it., if each focal length of collimation lens 3b1,3c1 is made as Fb1, Fc1, each focal length that is subjected to light with collector lens 3b2,3c2 is made as Fb2, Fc2 herein, then the optical magnification as each light accepting part is Fb2/Fb1, Fc2/Fc1.On the other hand, Fig. 5 (B) is the photo detector PSD2 of expanded view 5 (A), the figure of 3 parts.Among this figure, among photo detector PSD2 and the PSD3, utilize the digital processing of back segment, (for example count Q with identical zoning, 4096) handle, but the ratio (1 zoning size of 1 zoning size/PSD3 of PSD2) of the size of per 1 zoning (pixel, point) of above-mentioned processing equals the ratio { (Fb2/Fb1)/(Fc2/Fc1) } of optical magnification.The result is that photo detector PSD2 becomes identical with the sensitivity that photo detector PSD3 receives per 1 zoning of identical light.Therefore, even among this embodiment, the distance from measurement point to each photo detector PSD1～3 can be according to each light accepting part and difference.Above-mentioned viewpoint can correspond to by following, as photo detector PSD, even with CCD element, CMOS (Complementary Metal-Oxide-Semiconductor, complementary metal oxide semiconductor (CMOS)) element etc. is configured to array-like and when forming, also can use pixel count between above-mentioned photo detector (for example: the CCD parts number) identical, and the size of this per 1 pixel (for example: the CCD size of component) photo detector of different formations.
(4) in above-mentioned 3, the performance of each sensitive lens function element of each light accepting part, function difference, but the performance of photo detector PSD, function are identical, and when adjusting skew, sensitivity etc. with software or Amplifier Gain etc.:
Because the performance of each sensitive lens function element, function difference so magnification of optics (sensitivity) or skew are different, utilize software or amplifier to adjust.That is, as above-mentioned (3), even because magnification Fb2/Fb1 is different with magnification Fc2/Fc1, the position of the image of the photo detector PSD2 of identical function, performance and light that PSD3 receives is also constant, so can utilize this software or amplifier to adjust.
[displacement measuring device]
Based on Fig. 6, the embodiment of the displacement measuring device of the Optical displacement sensor that uses above-mentioned explanation is described.
Among Fig. 6, the Optical displacement sensor 4 of institute's simple declaration is above-mentioned Fig. 1 (A), 1 (B), the illustrated displacement transducer of Fig. 2.In the Optical displacement sensor 4, disclose the light source LD have among Fig. 1 (A), and photo detector PSD1～3 typically.Among Fig. 6, control part 6, scanning mechanism 5, totalizer (adder) 7,8, arithmetical unit 9 and image processing part 10 constitute displacement measurement portion 300.
The control part 6 of Fig. 6 has layout (layout) information in order to the surface of the surperficial necessary measured object of scanning and measurement measured object in advance, and based on this layout, decision main sweep scope and main sweep number of times, reach and the subscan scope and the subscan number of times of the direction of main scanning direction quadrature, and scanning mechanism 5 indicated, indication begins scanning.On the other hand, the information of position during output scanning, the i.e. positional information of measurement point.
As displacement measuring device,, can obtain by the draw figure of output of arithmetical unit 9 of the positional information of corresponding control part 6 if only draw the figure of measurement point and displacement as shown in Figure 8.Image processing part 10 is in order to based on the output of arithmetical unit 9 and the positional information of control part 6, is that the 3-D view that comprises displacement information reproduces with the surface configuration of measured object as each pixel.Can computing also export the image that main scanning direction, sub scanning direction and sense of displacement is made as three-dimensional.
[shape inspection apparatus]
Based on Fig. 7, utilize to use the displacement measuring device of above-mentioned illustrated Optical displacement sensor 4, the embodiment of shape inspection apparatus of the displacement on the surface that is used to check measured object is described.For example, for after carry refluxing (reflow) at electronic component on the printed base plate, especially the good bad judgement of the scolding tin state on inclined-plane is also effective.Among Fig. 7, control part 6, comparison means 11, judging means 12 and demonstration means 13 constitute inspection portions 400.
Judging means 12 is corresponding to reference reception its permissible value from control part, and with compare from the output of means 11 relatively, if and relatively the output of means 11 judges that then being shaped as of measured object is qualified in permissible value, if outside permissible value then be judged as bad (denying).
Demonstration means 13 show the judged result of judging means 12.And, receive and show layout information (for example, the arrangement plan of the scolding tin position of printed base plate), and which position that can discern ground display layout is bad (denying) or qualified from control part 6.And, make above-mentionedly separately or merge and the image based on the view data that generates at image processing part 10 to be shown, and can show which position is bad (denying) or qualified with discerning.
If use above-mentioned compound eye Optical displacement sensor to check the surface configuration of measured object, then not only can also can carry out the inspection of good bad judgement to the shape of sloping portion to comprising the shape of summit or flat.
In the above-mentioned explanation, as the measuring object in the measured object, as shown in Figure 8, be that inclination and its summit explanation present embodiment with the protuberance on the surface of measured object can carry out displacement measurement, but it is opposite, even recess, the displacement that also can measure its rake and bottom according to the range of the opening of this recess.
[example that comprises 2 Optical displacement sensors]
Figure 10 (A) expression comprises the shape inspection apparatus of identical with Fig. 1 (A) or Optical displacement sensor shown in Figure 62 Optical displacement sensor 4a and 4b.Displacement measuring device can replace this shape inspection apparatus.Among Figure 10 (A), 10 (B), 10 (C), symbol and Fig. 1 (A), 1 (B)～identical key element of symbol shown in Figure 6, function is also identical.Among Figure 10 (A), 10 (B), 10 (C), Optical displacement sensor 4a is identical with Optical displacement sensor 4b, and comprises identical light-projecting portion 100 and identical light accepting part 200,210,220 respectively.And Optical displacement sensor 4a and Optical displacement sensor 4b are disposed at the direction mutually orthogonal with main scanning direction.Above-mentioned is Figure 10 (B) encapsulant 600 that is set to rectangle on the base material that is shown in for example, and shown in Figure 10 (C), is used to measure the shape of projection.That is, the shape of the encapsulant 600 of the upper limit direction on the drawing of Optical displacement sensor 4a measurement Figure 10 (B), the encapsulant 600 of the transverse direction on the drawing of Optical displacement sensor 4b measurement Figure 10 (B).And each output of each Optical displacement sensor 4a or 4b utilizes the switch S of Figure 10 (A) to switch, and through displacement measurement portion 300 and inspection portion 400, check result is shown in demonstration means 13.
The switching of Optical displacement sensor 4a and Optical displacement sensor 4b and the switching of switch S are undertaken by control part 6.The operator confirms to be arranged at the image of the measurement point that the camera 500 on the top of measurement point photographed in demonstration means 13 as shown in figure 11, and utilizes operational means (not shown) to switch to indicate and output to control part 6.
So, need not to prepare 2 Optical displacement sensors, possess 1 Optical displacement sensor 4, can utilize switching mechanism, change the direction of this Optical displacement sensor 4 at each different direction of measurement, but this moment, the problem of the micro-repeatability of generation accuracy of measurement.And, repeatability be subjected to easily switching mechanism through the time influence that changes.In the example of Figure 10 (A),, comprise 2 Optical displacement sensor 4a and 4b even also can carry out the good measurement of repeatability for the direction of measurement difference.
Claims (6)
1. a displacement measuring device comprises Optical displacement sensor, and this Optical displacement sensor comprises: light-projecting portion, utilize make light on measured object optically focused and with the position of optically focused as measurement point and oblique irradiation; And light accepting part, in order to receive the reflected light that carries out normal reflection from above-mentioned measurement point, this displacement measuring device by with the direction that comprises above-mentioned light that shines and the planar quadrature vertical with above-mentioned measured object on, above-mentioned Optical displacement sensor is relatively moved and scan, and the displacement of measuring above-mentioned measured object, it is characterized in that:
Above-mentioned Optical displacement sensor comprises a plurality of above-mentioned light accepting parts, these a plurality of light accepting parts are towards above-mentioned measurement point, and with the direction of above-mentioned crossing on the same level on symmetric offset spread be fan-shaped, and the catoptrical optical range that is subjected to that can receive aforementioned normal reflection that the sensitive surface of each above-mentioned light accepting part is occupied from above-mentioned measurement point, aspect displacement measurement, be connected with each other continuous mode and dispose with the sensitive surface of the light accepting part of adjacency.
2. displacement measuring device according to claim 1 is characterized in that:
Above-mentioned a plurality of light accepting part is provided with 1 at the point with above-mentioned crossing on the same level, and with the direction of above-mentioned crossing on the same level on symmetria bilateralis ground arrange equal number.
3. displacement measuring device as claimed in claim 1 or 2 is characterized in that:
Above-mentioned light-projecting portion comprises: light source; And collector lens, by the light that penetrates from this light source is concentrated on the measured object with the position of optically focused as measurement point and oblique irradiation,
Each of above-mentioned a plurality of light accepting parts comprises: the sensitive lens function element receives the light and the optically focused that carry out normal reflection from above-mentioned measurement point; And photo detector, be received in the light of this sensitive lens function element optically focused,
And the sensitive surface of above-mentioned sensitive lens function element is towards above-mentioned measurement point, and with the direction of above-mentioned crossing on the same level on symmetric offset spread be fan-shaped, and the sensitive surface of the above-mentioned sensitive lens function element of each adjacency is to dispose to be connected with each other continuous mode.
4. as the displacement measuring device as described in the claim 3, it is characterized in that:
The distance of the position from above-mentioned a plurality of sensitive lens function element to this above-mentioned institute optically focused is identical, and the distance that above-mentioned each sensitive lens function element is configured to above-mentioned measurement point is identical, and near being configured in the mode that the sensitive surface of the sensitive lens function element of adjacency is connected.
5. as the displacement measuring device as described in the claim 4, it is characterized in that:
Above-mentioned each sensitive lens function element comprises: collimation lens receives and carries out the light of normal reflection and make it become directional light from above-mentioned measurement point; And be subjected to the light collector lens, will arrive the photo detector of above-mentioned correspondence from the directional light optically focused of this collimation lens,
And the sensitive surface of above-mentioned light accepting part is the sensitive surface of above-mentioned collimation lens, and the sensitive surface of the collimation lens of adjacency with respect to above-mentioned measurement point occupied be subjected to optical range, aspect displacement measurement, dispose in consecutive mode, and in each sensitive lens function element, above-mentioned measurement point uses the ratio of the distance between collector lens and above-mentioned photo detector identical with the distance between above-mentioned collimation lens with the above-mentioned light that is subjected to.
6. displacement measuring device according to claim 1 is characterized in that:
Above-mentioned Optical displacement sensor comprises 2, and each Optical displacement sensor is to be configured to different directions, so that each above-mentioned scanning is different directions scanning.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005282629 | 2005-09-28 | ||
| JP2005282629A JP4275661B2 (en) | 2005-09-28 | 2005-09-28 | Displacement measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1940469A CN1940469A (en) | 2007-04-04 |
| CN100498217C true CN100498217C (en) | 2009-06-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006101270889A Expired - Fee Related CN100498217C (en) | 2005-09-28 | 2006-09-26 | Dislocation measurement device and shape test device using same |
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| Country | Link |
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| JP (1) | JP4275661B2 (en) |
| KR (1) | KR100855849B1 (en) |
| CN (1) | CN100498217C (en) |
| TW (1) | TWI288226B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4995041B2 (en) * | 2007-11-01 | 2012-08-08 | アンリツ株式会社 | Printed solder inspection method and printed solder inspection apparatus |
| JP5033587B2 (en) * | 2007-11-05 | 2012-09-26 | アンリツ株式会社 | Printed solder inspection apparatus and printed solder inspection method |
| JP2012007942A (en) * | 2010-06-23 | 2012-01-12 | Fuji Xerox Co Ltd | Position measurement device |
| CN103363951B (en) * | 2012-04-10 | 2015-11-25 | 通用电气公司 | Trigonometry distance measurement system and method |
| KR20150107450A (en) * | 2014-03-14 | 2015-09-23 | 주식회사 엔젤 | Dual acting cylinder integrated with tapeless encoder |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5812269A (en) * | 1996-07-29 | 1998-09-22 | General Scanning, Inc. | Triangulation-based 3-D imaging and processing method and system |
| US5859924A (en) * | 1996-07-12 | 1999-01-12 | Robotic Vision Systems, Inc. | Method and system for measuring object features |
| JP2885765B2 (en) * | 1997-06-20 | 1999-04-26 | 富山日本電気株式会社 | How to measure the amount of solder |
| US6618155B2 (en) * | 2000-08-23 | 2003-09-09 | Lmi Technologies Inc. | Method and apparatus for scanning lumber and other objects |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0763538A (en) * | 1993-08-31 | 1995-03-10 | Matsushita Electric Works Ltd | Visual inspecting device for surface |
| JP2002246302A (en) * | 2001-02-21 | 2002-08-30 | Nikon Corp | Position detector and exposure system |
-
2005
- 2005-09-28 JP JP2005282629A patent/JP4275661B2/en not_active Expired - Fee Related
-
2006
- 2006-09-21 KR KR1020060091666A patent/KR100855849B1/en not_active IP Right Cessation
- 2006-09-26 CN CNB2006101270889A patent/CN100498217C/en not_active Expired - Fee Related
- 2006-09-26 TW TW095135532A patent/TWI288226B/en not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5859924A (en) * | 1996-07-12 | 1999-01-12 | Robotic Vision Systems, Inc. | Method and system for measuring object features |
| US5812269A (en) * | 1996-07-29 | 1998-09-22 | General Scanning, Inc. | Triangulation-based 3-D imaging and processing method and system |
| JP2885765B2 (en) * | 1997-06-20 | 1999-04-26 | 富山日本電気株式会社 | How to measure the amount of solder |
| US6618155B2 (en) * | 2000-08-23 | 2003-09-09 | Lmi Technologies Inc. | Method and apparatus for scanning lumber and other objects |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20070035964A (en) | 2007-04-02 |
| KR100855849B1 (en) | 2008-09-01 |
| CN1940469A (en) | 2007-04-04 |
| JP2007093369A (en) | 2007-04-12 |
| JP4275661B2 (en) | 2009-06-10 |
| TW200712437A (en) | 2007-04-01 |
| TWI288226B (en) | 2007-10-11 |
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