CN100470405C - Moire fringes adjusting method for holographic grating making optical path - Google Patents
Moire fringes adjusting method for holographic grating making optical path Download PDFInfo
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- CN100470405C CN100470405C CNB2006100399661A CN200610039966A CN100470405C CN 100470405 C CN100470405 C CN 100470405C CN B2006100399661 A CNB2006100399661 A CN B2006100399661A CN 200610039966 A CN200610039966 A CN 200610039966A CN 100470405 C CN100470405 C CN 100470405C
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Abstract
The invention relates to a Mohr pattern adjust method of preparing optical path of holographic grating. Wherein, it uses spherical convex lens as collimator, uses Mohr pattern adjust method to detect the preparing optical path of plane holographic grating. Therefore, the axial and off-axis adjust errors in traditional optical path adjust method can be effectively eliminated; and the wave aberration of prepared pulse compress grating can be reduced most; and it can be used in other general grating.
Description
Technical field
The present invention relates generally to a kind of moire fringes adjusting method, relates in particular to a kind of moire fringes adjusting method of holographic grating making optical path.
Background technology
The equidistant striped holographic grating of plane parallel is a kind of important diffraction optical element, it is applied to pulse compression grating, x ray spectro-grating in spectral instrument, fiber grating position phase mask, the inertial confinement fusion (ICF) etc., and its application is extremely extensive.The making light path of this grating has apart from the equidistant two spherical wave optical interference circuits of recording materials usually or utilizes transmission or two collimation directional light optical interference circuits of reflective optical devices.The spherical wave light path is suitable for small size or the less demanding situation of aberration, and area is big and the demanding occasion of aberration must be used the anaberration collimated light path.Generally with non-spherical lens or off axis paraboloidal mirror, their processing costs are higher for the optical device of collimated light path, and light path is adjusted the utility appliance complex and expensive, and the very difficult elimination of the cutter trade of aspheric surface device, and this cutter trade can influence the quality of holographic grating.
Summary of the invention
The object of the invention provides a kind of moire fringes adjusting method of holographic grating making optical path, utilize spherical plano-convex lens as collimating apparatus, with the making light path of moire fringes adjusting method detection plane holographic grating, make that with this control method system's cost of manufacture is low, light path is easy to adjust, wave aberration precision height.
The present invention can be implemented by the following technical programs: design a kind of moire fringes adjusting method of holographic grating making optical path, it may further comprise the steps:
A) with beam splitter laser is divided into thing light and reference light, thing light is gone out by primary mirror reflects and is formed principal reflection light, and reference light is reflected away formation with reference to reflected light by reference mirror, principal reflection light and all be radiated on the holographic recording plate with reference to reflected light;
B) adjust the position of principal reflection mirror, reference mirror, holographic recording plate, make principal reflection light and with reference to reflected light symmetry incident holographic recording plate, and principal reflection light and all satisfy formula with reference to the incident angle of reflected light on the holographic recording plate
, in the wherein said formula, θ refers to described incident angle, and f refers to desired grating spatial frequency in holographic grating making optical path, and λ refers to Wavelength of Laser; While also makes the light path of thing light equal the light path of reference light, the light path of described thing light refers to from beam splitter to the holographic recording plate, thing light the distance of process, the light path of reference light refers to from beam splitter to the holographic recording plate, reference light the distance of process;
C) between principal reflection mirror and holographic recording plate, put into the main regulation catoptron, and regulate the main regulation catoptron and make the minute surface of the vertical main regulation catoptron of principal reflection light, then the main regulation catoptron is spent with principal reflection light with reference to the perpendicular axis of symmetry rotation 1/12～1/6 in plane, reflected light place around it;
D) between principal reflection mirror and main regulation catoptron, put into cue ball face plano-convex lens, and regulate cue ball face plano-convex lens and make cue ball face plano-convex lens and principal reflection light coaxial;
E) between principal reflection mirror and cue ball face plano-convex lens, lay main beam expanding lens, adjust main beam expanding lens, make winner's beam expanding lens and principal reflection light coaxial; Adjust the position of main beam expanding lens, the reflected light convergent point that makes the main regulation catoptron equals the distance of the principal reflection light divergence point of main beam expanding lens to cue ball face plano-convex lens to the distance of cue ball face plano-convex lens;
F) between reference mirror and holographic recording plate, put into, and require to regulate with reference to the accommodation reflex mirror according to the method for adjusting the main regulation catoptron in the step c) with reference to the accommodation reflex mirror;
G) put into reference to spherical plano-convex lens at reference mirror with between with reference to the accommodation reflex mirror, adjusting makes with reference to spherical plano-convex lens and coaxial with reference to reflected light that with reference to spherical plano-convex lens control method is identical with the method for adjusting cue ball face plano-convex lens in the step d);
H) lay with reference to beam expanding lens at reference mirror with between, adjust, make with reference to beam expanding lens and coaxial with reference to reflected light with reference to beam expanding lens with reference to spherical plano-convex lens; Adjustment is with reference to the position of beam expanding lens, makes with reference to the reflected light convergent point of accommodation reflex mirror to equal reference reflected light divergence point with reference to beam expanding lens to the distance with reference to spherical plano-convex lens to the distance with reference to spherical plano-convex lens;
I) on the holographic recording plate, place hologram recording material, hologram recording material is carried out holographic exposure, and the recording materials development treatment is obtained holographic grating;
J) with step I) holographic grating of gained with raster method to being that rotating shaft Rotate 180 degree places on the data board again, thing light and reference light interfere the vignette grid and the stack of described holographic grating striped that produce to produce Moire fringe on the holographic recording plate, adjust the holographic recording plate, make the Moire fringe cycle that occurs on the record surface be centimetre magnitude;
K) regulate main beam expanding lens and with reference to the locus of at least one beam expanding lens of beam expanding lens, until step j) Moire fringe of gained is the straight horizontal striped, notes the amount of movement of each three-dimensional coordinate of beam expanding lens of regulating;
L) beam expanding lens of regulating in regulating step k), with beam expanding lens to step k) the opposite direction adjusting of adjusting direction, regulated quantity is step k) in half of the amount of movement noted, finish whole adjustment process to this.
The diameter of described main regulation catoptron is 1/4 of a cue ball face plano-convex lens diameter; Diameter with reference to the accommodation reflex mirror is with reference to 1/4 of spherical plano-convex lens diameter.
Regulating cue ball face plano-convex lens and the coaxial control method of principal reflection light is: an aperture close with principal reflection light beam size is placed on the place of close cue ball face plano-convex lens focus, and allows principal reflection light pass; Regulate the position and the inclination angle of cue ball face plano-convex lens, concentric until the flare of the flare on observed cue ball face plano-convex lens plane on the aperture plane, cue ball face plano-convex lens sphere with aperture; Adjusting with reference to spherical plano-convex lens with identical with reference to reflected light coaxial control method and the method.
The present invention compared with prior art has following advantage: the moire fringes adjusting method of holographic grating making optical path has effectively improved the axial adjustment precision and has regulated simply, axially and from axial regulating error all can effectively be eliminated in the conventional light path control method.The pulse compression grating wave aberration of producing by this control method is reduced to minimum, aberration by Moire fringe in addition, can directly extrapolate and produce the grating diffration wave aberration, realize online detection quickly and easily, be suitable in the large-area grating making, and the making of other conventional gratings is had important practical value too.
Description of drawings
Accompanying drawing 1 is the light path synoptic diagram that is used for holographic grating making of the present invention;
The general light path of road coherent light when accompanying drawing 2 writes down for using grating of the present invention;
Accompanying drawing 3 is for utilizing the grating recording beam path of plano-convex lens among the present invention;
Accompanying drawing 4 is the 1200 lines per millimeter grating diffration wavefront of coke ratio 1:10 when of the present invention for adopting;
Accompanying drawing 5 for adopting when of the present invention coke ratio 1:10 down 1200 lines per millimeter gratings of record before the diffracted wave under 1.2 millimeters of the directions X imbalances;
Accompanying drawing 6 for adopting when of the present invention coke ratio 1:10 down 1200 lines per millimeter gratings of record before the diffracted wave under 1.2 millimeters of the Y direction imbalances;
Accompanying drawing 7 for adopting when of the present invention coke ratio 1:10 down 1200 lines per millimeter gratings of record before the diffracted wave under 0.12 millimeter of the Z direction imbalance.
Wherein: 1, laser; 2, beam splitter; 3, principal reflection mirror; 4, reference mirror; 5, holographic recording plate; 6, main regulation catoptron; 7, cue ball face plano-convex lens; 8, with reference to beam expanding lens; 9, main beam expanding lens; 10, with reference to regulating plano-convex lens; 11, with reference to regulating reflective mirror; 12, thing light; 13, reference light; 17, principal reflection light; 18, with reference to reflected light; 20, light beam;
X, Y, Z are respectively the three-dimensional coordinate direction on the space.
Embodiment
As shown in Figure 1, a kind of moire fringes adjusting method of holographic grating making optical path, it may further comprise the steps:
A, beam splitter 2 are divided into thing light 12 and reference light 13 with laser 1, thing light 12 is reflected away by principal reflection mirror 3 and forms principal reflection light 17, reference light 13 is reflected away formation with reference to reflected light 18 by reference mirror 4, principal reflection light 17 and all be radiated on the holographic recording plate 5 with reference to reflected light 18;
B, adjust the position of principal reflection mirror 3, reference mirror 4, holographic recording plate 5, make principal reflection light 17 and with reference to reflected light 18 symmetrical incident holographic recording plates 5, and principal reflection light 17 and all satisfy formula with reference to the incident angle of reflected light 18 on holographic recording plate 5
, in the wherein said formula, θ refers to described incident angle, and f refers to desired grating spatial frequency in holographic grating making optical path, and λ refers to the wavelength of laser 1; While also makes the light path of thing light 12 equal the light path of reference light 13, the light path of described thing light 12 refers to from beam splitter 2 to the holographic recording plate 5, the distance of 12 processes of thing light, the light path of reference light 13 refer to from beam splitter 2 to the holographic recording plate 5, the distance of 13 processes of reference light;
C, between principal reflection mirror 3 and holographic recording plate 5, put into main regulation catoptron 6, and regulate main regulation catoptron 6 and make the minute surface of principal reflection light 17 vertical main regulation catoptrons 6, then with main regulation catoptron 6 around it with principal reflection light 17 with rotate 1/12～1/6 with reference to the perpendicular axis of symmetry in plane, reflected light 18 place and spend;
D, between principal reflection mirror 3 and main regulation catoptron 6, put into cue ball face plano-convex lens 7, and regulate cue ball face plano-convex lens 7 and make cue ball face plano-convex lens 7 and principal reflection light 17 coaxial;
E, between principal reflection mirror 3 and cue ball face plano-convex lens 7, lay main beam expanding lens 9, adjust main beam expanding lens 9, make winner's beam expanding lens 9 and principal reflection light 17 coaxial; Adjust the position of main beam expanding lens 9, the reflected light convergent point that makes main regulation catoptron 6 equals the distance of principal reflection light 17 divergence points of main beam expanding lens 9 to cue ball face plano-convex lens 7 to the distance of cue ball face plano-convex lens 7;
F, between reference mirror 4 and holographic recording plate 5, put into, and regulate with reference to accommodation reflex mirror 11 according to the method for adjusting main regulation catoptron 6 among the step c with reference to accommodation reflex mirror 11;
G, put into reference to spherical plano-convex lens 10 at reference mirror 4 with between with reference to accommodation reflex mirror 11, adjusting makes with reference to spherical plano-convex lens 10 and coaxial with reference to reflected light 18 that with reference to spherical plano-convex lens 10 control method is identical with the method for adjusting cue ball face plano-convex lens 7 in the steps d;
H, lay with reference to beam expanding lens 8, adjust, make with reference to beam expanding lens 8 and coaxial with reference to reflected light 18 with reference to beam expanding lens 8 at reference mirror 11 with between with reference to spherical plano-convex lens 10; Adjustment is with reference to the position of beam expanding lens 8, makes with reference to the reflected light convergent point of accommodation reflex mirror 11 to equal reference reflected light 18 divergence points with reference to beam expanding lens 8 to the distance with reference to spherical plano-convex lens 10 to the distance with reference to spherical plano-convex lens 10;
I, on holographic recording plate 5, place hologram recording material, hologram recording material is carried out holographic exposure, and the recording materials development treatment is obtained holographic grating;
J, with the holographic grating of step I gained with raster method to being that rotating shaft Rotate 180 degree places on the data board 5 again, thing light 12 and reference light 13 interfere the vignette grid and the stack of described holographic grating striped that produce to produce Moire fringe on holographic recording plate 5, adjust holographic recording plate 5, make the Moire fringe cycle that occurs on the record surface be centimetre magnitude;
K, regulate main beam expanding lens 9 and, be the straight horizontal striped, note the amount of movement of each three-dimensional coordinate of beam expanding lens of regulating until the Moire fringe of step j gained with reference to the locus of at least one beam expanding lens of beam expanding lens 8;
The beam expanding lens of regulating among l, the regulating step k is regulated beam expanding lens to the opposite direction that step k regulates direction, regulated quantity is half of the amount of movement noted among the step k, finishes whole adjustment process to this.
The diameter of described main regulation catoptron 6 is 1/4 of cue ball face plano-convex lens 7 diameters; Diameter with reference to accommodation reflex mirror 11 is with reference to 1/4 of plano-convex lens 10 diameters.
Regulating cue ball face plano-convex lens 7 and principal reflection light 17 coaxial control methods is: an aperture close with principal reflection light 17 beam sizes is placed on the place of close cue ball face plano-convex lens 7 focuses, and allows principal reflection light 17 pass; Regulate the position and the inclination angle of cue ball face plano-convex lens 7, concentric until the flare of the flare on observed cue ball face plano-convex lens 7 planes on the aperture plane, cue ball face plano-convex lens 7 spheres with aperture; Adjusting with reference to spherical plano-convex lens 10 with identical with reference to reflected light 18 coaxial control method and the method.。
Relation for holographic grating diffracted wave aberration and register system is explained as follows:
As shown in Figure 2 be the grating general light path of one road coherent light in when record.Light beam 20 is coherent lights that pointolite sends, and the frame of broken lines among the figure is represented an optical system, and recording materials are positioned at the xoy plane.Obviously, the relevant light field of light beam 20 generations distributes mutually in the position of xoy face
Can be write as
L in the formula
1(x, y) expression arrives a bit (x, light path y) on the record plane from pointolite.Light distribution after the two-beam interference can be write as
Is that λ c, incident angle are the plane wave incident of θ c to interference field record back with wavelength, and the COMPLEX AMPLITUDE of the first-order diffraction light of grating is
If spatial frequency f with grating central authorities
0For with reference to sky frequently, the position of following formula part mutually can be write as:
Preceding two expressions in the formula are by the plane wave of master grating diffraction, and square bracket are then represented the phase change that caused by aberration
So diffraction light wave aberration w can be write as
As can be seen from the above equation, when with the playback light wavelength during as wave aberration unit, diffracted wave aberration and playback light incident angle and playback wavelength are irrelevant.
The diffracted wave Aberration Analysis of plano-convex lens register system record grating: the grating recording beam path of utilizing plano-convex lens as shown in Figure 3, the grating diffration wave aberration can be calculated with the spherical radius of plano-convex lens and lens thickness and incident angle parameter substitution (5) formula, also point diffraction wave surface and wave aberration can be directly calculated with Zemax software.Table 1 is with Zemax computed in software plano-convex lens system log (SYSLOG) grating diffration wave aberration result, suppose that wherein lens thickness is 35 millimeters, bore is 250 millimeters, coke ratio is respectively 1:6,1:10 and 1:15, and two disperse the point source strictness at the lens focus place, the fringe density of record is respectively the grating of 300 lines per millimeters, 600 lines per millimeters and 1200 lines per millimeters, reproduce 0 ° of grating incident angle, recording wavelength is 413.1nm, the grating bore is 150mm * 200mm, and data have been deducted the wave aberration that out of focus causes in the table.
The relation of table 1 optical grating diffraction wave aberration and plano-convex lens register system coke ratio and grating fringe density
As seen from the above table, when writing down grating,, during the two-way interference of light, but can obtain parallel equidistant vertical bar line although each road light has bigger wave aberration with the plano-convex lens register system of accurately regulating.Though the optical grating diffraction wave aberration with this strip record increases and slightly increases with raster density, they are same orders of magnitude, and all very little, and in close relations with the coke ratio of lens on the other hand, coke ratio is more little, and aberration is more little.Wherein the 1200 lines per millimeter grating diffration wavefront of coke ratio 1:10 as shown in Figure 4.Further calculate and show that two pointolites are not strict on the focus of lens, only need two pointolites apart from the position of lens and optical axis near focus and strict symmetry, just can obtain the diffraction grating of little wave aberration.
Setting up three-dimensional XYZ coordinate on the lens plane is, initial point is got the center of circle, lens plane, the vertical plane shown in Figure 3 of Y-axis, and the Z axle is along optical axis direction.Table 2 to table 4 is the Zemax result of calculation of the relative adjustment error of divergence point light source to the diffracted wave aberration effects.When calculating each hurdle regulating error, accurately, the unit of error regulated quantity is a millimeter in the table when supposing other dimension adjusting positions.Fig. 5 to Fig. 7 be coke ratio 1:10 down 1200 lines per millimeter gratings of record before X, Y, Z direction are lacked of proper care diffracted wave under 1.2 millimeters, 1.2 millimeters, 0.12 millimeter respectively.
The diffracted wave aberration that pointolite relative adjustment error causes 300 lines per millimeter gratings in the table 2 plano-convex lens register system
The diffracted wave aberration that pointolite relative adjustment error causes 600 lines per millimeter gratings in the table 3 plano-convex lens register system
The diffracted wave aberration that pointolite relative adjustment error causes 1200 lines per millimeter gratings in the table 4 plano-convex lens register system
Find out that from last table data the regulating error tolerance limit and the grating fringe density relationship of light path are little.At the lens coke ratio more than or equal to 1; 10 o'clock, the adjusting marginal range of X and Y direction was bigger, reaches the millimeter magnitude, and their regulating error tolerance limit is more or less the same.Regulate laser with lens when coaxial if place aperture at the focus place, on the aperture screen, can observe and the flare of determination number millimeter is offset the imbalance of this X more easy to control experimentally and Y direction.But it is high that the degree of regulation of also seeing the Z direction from last table requires than other directions, and the very difficult detection of axial regulating error, is axial adjustment control so the light path of plano-convex lens register system is regulated difficulty.
Table 5 is relations of adjustment sum of errors wave aberration of the directions X of the area 1200 lines per millimeter gratings that are respectively 200mm * 150mm, 150mm * 100mm and 100mm * 70mm, the unit that adjusts error is a millimeter, the optical system bore of each record area all adapts with area of raster during calculating, and the bore of the register system of three areas is respectively 250 millimeters, 200 millimeters and 150 millimeters.As seen from the table, to the plano-convex lens system of certain coke ratio, the relation of the absolute regulated quantity of error and system's bore is little, and is only relevant with the coke ratio of system.
The regulating error under the different area of rasters of the same coke ratio of table 5 and the relation of diffracted wave aberration
From above data analysis as can be known, the holographic grating of the plano-convex lens register system record that coke ratio 1:10 is following has less diffracted wave aberration, the plano-convex lens system can reach a millimeter magnitude from the axle regulating error, can reach accuracy requirement with the coaxial of laser beam regulating system, but the axial adjustment error margin of system is less, and is not easy to measure.
The principle of the moire fringes adjusting method of described holographic grating making optical path is:
In fact Moire fringe is to be formed by the zero order diffracted light of the thing light of grating and the negative first-order diffraction interference of light of reference light.Under linear record condition, the position that draws Moire fringe by grating complex amplitude transmitance is distributed as mutually
φ
m(x，y)＝φ
2(x，y)-φ
1(x，y)+φ
2(x′，y′)-φ
1(x′，y′) (6)
Wherein
θ is the angle of grating around the rotation of Z axle
With reference to formula (5a), formula (7) can be rewritten as
φ
m(x，y)＝[φ
2(x，y)-φ
1(x，y)-2πf
0x]+[φ
2(x′，y′)-φ
1(x′，y′)-2πf
0x′]+2πf
0(x+x′) (7)
The anglec of rotation of grating is about 180 degree, (x, y) with (x ', y ') almost about former point symmetry.2 π f
0(x+x ') before two much smaller, be about 2%, so ignore this.Therefore the aberration profile of Moire fringe is
By formula (8) as can be known, the aberration of Moire fringe is formed by stacking by the wave aberration of actual situation grating.
When optical system had only primary aberration, its wavefront aberration function can be written as
W(x，y)＝A(x
2+y
2)
2+By(x
2+y
2)+C(x
2+3y
2)+D(x
2+y
2)+Ex+Fy (9)
A in the formula, coefficient of spherical aberration; B, the coma coefficient; C, the astigmatism coefficient; D, the out of focus coefficient; E, F wave tilt coefficient.
By formula (9) as can be known, in the wave aberration axially part (spherical aberration and out of focus) be that (x, even function y) is not with (x, sign modification y) and changing.And the shaft portion (coma) that hangs down is that (x, odd function y) is along with (x, sign modification y) and changing.Therefore along with grating rotating, axially partly be applied in the actual situation wavefront aberration of grating, the shaft portion that hangs down (coma that the vertical direction of principal axis regulating error of spatial filter produces) is then cancelled out each other.Therefore the Moire fringe aberration is the twice of the optical grating diffraction wave aberration of axial adjustment error introducing, and it can not reflect the axial regulating error of hanging down.Suppose that human eye can differentiate 1/10 striped bending, then the wavefront aberration of grating of being produced is about 0.05 λ.Effectively improved the axial adjustment precision from the visible Moire fringe light path of the above analysis method of regulating.By the aberration of Moire fringe, can directly extrapolate and produce the grating diffration wave aberration in addition, realize online detection quickly and easily.
Regulate plane diffraction grating and can regard as, according to holographic lens object-image relation formula from the axle holographic lens
Z in the formula
IBe to reproduce image point position; z
OIt is the object point position; z
A, z
BBe that holographic lens makes up the pointolite position;
λ
oBe recording wavelength, λ is the playback light wavelength;
It is the focal length of m order diffraction picture correspondence.
Relevant with the wavelength and the order of diffraction, if order
So
Only relevant with record condition.
According to desirable grating record condition, the holographic lens that complete symmetrical light path is produced is an afocal system.But actual light path can not strictness satisfy z when debugging
A=z
BSuppose R
o, R
rBe structure optical grating point light source (spatial filter) locus, and R
o=R
r+ Δ is then with R
oReproducing positive one-level (reproduction of grating original position) diffraction object-image relation satisfies
After grating rotating, still with R
oIts order of diffraction is inferior to bearing one-level during reproduction, and it reproduces image position R
xSatisfy
Formula (13) and formula (14) addition get
Abbreviation gets
Because Δ＜＜R
r, R
x-R
r=2 Δs (16)
Compare R
o=R
r+ △ is as can be known behind grating rotating 180 degree, and same light wave reproduces the image position and 2 Δs have taken place changes.Regulate spatial filter to picture point R
xDuring the position, it is straight that Moire fringe becomes.After returning regulated quantity half (Δ), R is just in time dropped in the spatial filter position
oThe place shows two spatial filter locus symmetries after overregulating, and very consistent regulating error is arranged.
The moire fringes adjusting method of holographic grating making optical path is a kind of very simple and practical method.Axially and from axial regulating error all can effectively be eliminated in the conventional light path control method.
Claims (3)
1, a kind of moire fringes adjusting method of holographic grating making optical path, it may further comprise the steps:
A) with beam splitter (2) laser (1) is divided into thing light (12) and reference light (13), thing light (12) is reflected away by principal reflection mirror (3) and forms principal reflection light (17), reference light (13) is reflected away formation with reference to reflected light (18) by reference mirror (4), principal reflection light (17) and all be radiated on the holographic recording plate (5) with reference to reflected light (18);
B) position of adjustment principal reflection mirror (3), reference mirror (4), holographic recording plate (5), make principal reflection light (17) and with reference to reflected light (18) symmetrical incident holographic recording plate (5), and principal reflection light (17) and all satisfy formula with reference to the incident angle of reflected light (18) on holographic recording plate (5)
In the wherein said formula, θ refers to described incident angle, and f refers to desired grating spatial frequency in holographic grating making optical path, and λ refers to the wavelength of laser (1); While also makes the light path of thing light (12) equal the light path of reference light (13), the light path of described thing light (12) refers to from beam splitter (2) to the holographic recording plate (5), thing light (12) the distance of process, the light path of reference light (13) refers to from beam splitter (2) to the holographic recording plate (5), reference light (13) the distance of process;
C) between principal reflection mirror (3) and holographic recording plate (5), put into main regulation catoptron (6), and regulate main regulation catoptron (6) and make the minute surface of the vertical main regulation catoptron (6) of principal reflection light (17), then main regulation catoptron (6) is spent with principal reflection light (17) with reference to the perpendicular axis of symmetry rotation 1/12～1/6 in reflected light (18) plane, place around it;
D) between principal reflection mirror (3) and main regulation catoptron (6), put into cue ball face plano-convex lens (7), and regulate cue ball face plano-convex lens (7) and make cue ball face plano-convex lens (7) and principal reflection light (17) coaxial;
E) between principal reflection mirror (3) and cue ball face plano-convex lens (7), lay main beam expanding lens (9), adjust main beam expanding lens (9), make winner's beam expanding lens (9) and principal reflection light (17) coaxial; Adjust the position of main beam expanding lens (9), the reflected light convergent point that makes main regulation catoptron (6) equals the distance of principal reflection light (17) divergence point of main beam expanding lens (9) to cue ball face plano-convex lens (7) to the distance of cue ball face plano-convex lens (7);
F) between reference mirror (4) and holographic recording plate (5), put into, and require to regulate with reference to accommodation reflex mirror (11) according to the method for adjusting main regulation catoptron (6) in the step c) with reference to accommodation reflex mirror (11);
G) put into reference to spherical plano-convex lens (10) at reference mirror (4) with between with reference to accommodation reflex mirror (11), adjusting makes with reference to spherical plano-convex lens (11) and coaxial with reference to reflected light (18) that with reference to spherical plano-convex lens (10) control method is identical with the method for adjusting cue ball face plano-convex lens in the step d);
H) lay with reference to beam expanding lens (8) at reference mirror (11) with between, adjust, make with reference to beam expanding lens (8) and coaxial with reference to reflected light (18) with reference to beam expanding lens (8) with reference to spherical plano-convex lens (10); Adjustment is with reference to the position of beam expanding lens (8), makes with reference to the reflected light convergent point of accommodation reflex mirror (11) to equal reference reflected light (18) divergence point with reference to beam expanding lens (8) to the distance with reference to spherical plano-convex lens (10) to the distance with reference to spherical plano-convex lens (10);
It is characterized in that:
I) go up the placement hologram recording material at holographic recording plate (5), hologram recording material is carried out holographic exposure, and the recording materials development treatment is obtained holographic grating;
J) with step I) holographic grating of gained with raster method to being that rotating shaft Rotate 180 degree places on the data board (5) again, thing light (12) and reference light (13) are gone up at holographic recording plate (5) and are interfered the vignette grid and the stack of described holographic grating striped that produce to produce Moire fringe, adjust holographic recording plate (5), make the Moire fringe cycle that occurs on the record surface be centimetre magnitude;
K) regulate main beam expanding lens (9) and with reference to the locus of at least one beam expanding lens of beam expanding lens (8), until step j) Moire fringe of gained is the straight horizontal striped, notes the amount of movement of each three-dimensional coordinate of beam expanding lens of regulating;
L) beam expanding lens of regulating in regulating step k), with beam expanding lens to step k) the opposite direction adjusting of adjusting direction, regulated quantity is step k) in half of the amount of movement noted, finish whole adjustment process to this.
2, the moire fringes adjusting method of holographic grating making optical path according to claim 1 is characterized in that: the diameter of described main regulation catoptron (6) is 1/4 of cue ball face plano-convex lens (a 7) diameter; Diameter with reference to accommodation reflex mirror (11) is with reference to 1/4 of spherical plano-convex lens (10) diameter.
3, the moire fringes adjusting method of holographic grating making optical path according to claim 1, it is characterized in that: regulating cue ball face plano-convex lens (7) and the coaxial control method of principal reflection light (17) is: an aperture close with principal reflection light (17) beam size is placed on the place of close cue ball face plano-convex lens (7) focus, and allows principal reflection light (17) pass; Regulate the position and the inclination angle of cue ball face plano-convex lens (7), concentric until the flare of the flare on observed cue ball face plano-convex lens (7) plane on the aperture plane, cue ball face plano-convex lens (7) sphere with aperture; Adjusting with reference to spherical plano-convex lens (10) with identical with reference to reflected light (18) coaxial control method and the method.
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| CNB2006100399661A CN100470405C (en) | 2006-04-24 | 2006-04-24 | Moire fringes adjusting method for holographic grating making optical path |
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| CN100470405C true CN100470405C (en) | 2009-03-18 |
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| CN101738664B (en) * | 2009-12-17 | 2011-08-17 | 上海理工大学 | Method for precise control of grating constant in process of manufacturing plane grating |
| CN103792606B (en) | 2014-01-26 | 2016-02-10 | 清华大学深圳研究生院 | A kind of exposure method of holographic grating and exposure light path |
| CN103955128B (en) * | 2014-04-29 | 2017-04-12 | 苏州大学 | Holographic grating three-dimensional active stability control recording method |
| WO2019222909A1 (en) * | 2018-05-22 | 2019-11-28 | 苏州大学 | Holographic grating lithography system, and adjustment method for self-collimating interference optical path thereof |
| CN108761602B (en) * | 2018-05-22 | 2020-06-16 | 苏州大学 | Adjusting method for auto-collimation of interference light path in holographic grating photoetching system |
| CN108761603B (en) * | 2018-05-22 | 2020-06-16 | 苏州大学 | Photoetching system for manufacturing parallel equidistant stripe holographic grating |
| CN116430496B (en) * | 2023-06-08 | 2023-08-22 | 北京至格科技有限公司 | Light path exposure reproduction and grating reproduction method |
| CN117687136B (en) * | 2024-02-04 | 2024-04-16 | 安徽中科光栅科技有限公司 | Spliced grating alignment precision detection method |
| CN117687135B (en) * | 2024-02-04 | 2024-04-16 | 安徽中科光栅科技有限公司 | Virtual-real grating alignment method |
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