CN100468199C - Double-sided projection exposure device of belt-shape workpieces - Google Patents
Double-sided projection exposure device of belt-shape workpieces Download PDFInfo
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- CN100468199C CN100468199C CNB2004100475702A CN200410047570A CN100468199C CN 100468199 C CN100468199 C CN 100468199C CN B2004100475702 A CNB2004100475702 A CN B2004100475702A CN 200410047570 A CN200410047570 A CN 200410047570A CN 100468199 C CN100468199 C CN 100468199C
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- workpiece
- exposure
- tension force
- banded
- banded workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B43—WRITING OR DRAWING IMPLEMENTS; BUREAU ACCESSORIES
- B43K—IMPLEMENTS FOR WRITING OR DRAWING
- B43K29/00—Combinations of writing implements with other articles
- B43K29/08—Combinations of writing implements with other articles with measuring, computing or indicating devices
- B43K29/093—Combinations of writing implements with other articles with measuring, computing or indicating devices with calculators
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06C—DIGITAL COMPUTERS IN WHICH ALL THE COMPUTATION IS EFFECTED MECHANICALLY
- G06C1/00—Computing aids in which the computing members form at least part of the displayed result and are manipulated directly by hand, e.g. abacuses or pocket adding devices
Abstract
Double-sided projection exposure apparatus, to simultaneously expose both faces of a belt-like work for a pattern and to prevent an out-of-focus state or vibration even when the work thermally expands during exposure. The belt-like work W released from a unwinding roll 1 is sent to an exposure section 5, subjected to the tension in the traveling direction and in the direction perpendicular thereto by a first tension imparting means 11 and a second tension imparting means (not shown in the figure) to such a degree to compensate the estimated thermal expansion during exposure, and held with the tension applied by a work holding means 6. A mask M1 and an alignment mark on the top face of the work W, and a mask M2 and an alignment mark on the back face of the work W are detected and aligned. After completing the alignment, the top face and the back face of the belt-like work W are simultaneously exposed by irradiating with exposure light from irradiation parts 41, 42 via the masks M1, M2 and projection lenses 31, 32.
Description
Technical field
The present invention relates to a kind of exposure device that is exposed in the two sides of banded workpiece, particularly a kind of comprehensively absorption keeps banded workpiece, also can prevent because of the thermal expansion in the exposure causes bending, and the exposure device that is exposed in banded workpiece two sides simultaneously.
Background technology
Sometimes make the circuit figures on the two sides of workpiece such as printed base plate, be used for the exposure device of this technology, known have a double-side exposal device.
For example, in patent documentation 1, put down in writing close formula double-side exposal device (Fig. 1 in this communique).What put down in writing in the document is, to the substrate (workpiece W) that will expose, according to move on the transfer station → on the 1st positioning table B, position → carry out face exposure → reverse → position → carry out back-exposure →, handle at the 1st exposure desk C from taking out of the order that platform G takes out of at the 2nd exposure desk F at the 2nd positioning table E at counter-rotating platform D.
In addition, in patent documentation 2, also put down in writing close formula double-side exposal device.Record is in this patent documentation 2, and two work stage (workpiece maintenance base plate) that keep workpiece (being exposed plate) that face exposure is used and back-exposure is used are set, and carries out face exposure and back-exposure in position separately.
In addition, the figure that is formed on the workpiece two sides has the preposition relation, for example, if circuitous pattern, then is electrically connected both with through hole etc.
Record is about make the close exposure device of circuit figures on workpiece such as printed base plate in above-mentioned patent documentation 1 and the patent documentation 2, but because close exposure or contact exposure all are that workpiece is placed on the work stage, by make mask near or mask is close to expose after the workpiece, so, have the problem of adhering to dust etc. on workpiece or the mask.
In addition, for banded continuous long dimension workpiece (banded workpiece) such as TAB (Tape Automated Bonding) or FPC (flexible printing substrate), need form figure on its two sides equally and make product.
Fig. 8 is illustrated in the structure example that the two sides forms the FPC (flexible printing substrate) 100 of figure.This figure is the sectional view of width of the workpiece direction, for ease of understanding, has amplified vertically.
On resin films 101 such as the polyimide of wide 100～250mm, thick 20～50 μ m or polyester,, attach Copper Foil 102 electric conductors such as grade about thick 10～20 μ m by applying heat or pressure.
Attach dry film photoresist layer 103 (DFR: the thickness of commercially available mainstream product is approximately 7 μ m) in the above, and attach PET (polyethylene terephthalate: the thickness of commercially available mainstream product is approximately 21 μ m) film 104.The gross thickness of FPC100 reaches about 110～180 μ m.
Being used in the exposure that forms figure on the DFR103 is to have installed under the situation of PET film 104 directly to carry out, and develops after peeling off PET film 104.
In addition, PET film 104 is diaphragms, as long as attach this film, even roll extrusion exposure region for example also can prevent to cause damage.
As the exposure device that on above-mentioned banded workpiece, the circuit figures is exposed, for example, the known exposure device that patent documentation 3 records are arranged.
The exposure device of above-mentioned patent documentation 3 records makes the light of emitting from light source portion shine on the banded workpiece by mask and projecting lens, and on the banded workpiece that utilizes connecting gear to transmit mask graph is exposed.
If above-mentioned such projection aligner, then can avoid as above-mentioned near the problem of on workpiece, adhering to dust etc. exposure or the contact exposure.
When the exposure device that adopts above-mentioned banded workpiece, on the two sides of banded workpiece, during exposure figure, carry out by the following method.
On above-mentioned exposure device, place banded workpiece, adopt the face exposure mask, the 1st (surface) integral body of banded workpiece is exposed.Then,, adopt back side mask, the 2nd (back side) of banded workpiece is exposed the placement that turns over of banded workpiece.
Also can expose to above-mentioned the 1st, the 2nd face, the 1st (surface) exposure also can be set with exposure device and the 2nd (back side) exposure exposure device respectively, the 1st, the 2nd face are exposed with 1 exposure device.
When exposed in the two sides of banded workpiece, there is following problem in exposure device adopting above-mentioned patent documentation 3 records.
Owing to be after carrying out the 1st exposure, carry out the 2nd exposure, as carrying out the exposure on two sides, then need the DT Doubling Time of single face exposure.In addition, dress change of lap tube also needs staff, spended time.
In addition, owing to be after having carried out the 1st exposure, carry out the 2nd exposure, delicate difference appears in the environmental baseline when exposing sometimes (temperature or humidity).When FPC was exposed, as mentioned above, substrate was polyester or polyimide resin film, and because of the difference of above-mentioned environmental baseline, difference appears in the stroke of film.
In addition, be formed on the figure and the figure that is formed on the back side of surface of the work, interrelated as mentioned above, must have designed preposition relation.But when face exposure and during back-exposure, if the stroke difference of film, mistake appears in the relative position relation that is formed on the figure on two sides, becomes sometimes to cause underproof reason.
Owing to utilize the exposure device of banded workpiece in the past, the face that pursue exposes, and has the problems referred to above, so, can expose the simultaneously banded workpiece exposure device on two sides of active demand.
Patent documentation 1: No. 2832673 communique of Japan's special permission; Patent documentation 2: TOHKEMY 2000-171980 communique; Patent documentation 3: Japanese kokai publication hei 3-242651 communique.
As exposing simultaneously, can not utilize opaque work stage to adsorb the rear side that keeps carrying out the exposure area to the two sides of banded workpiece comprehensively.Thus, following problem appears.
When exposure, banded workpiece absorbs exposure light and the temperature rising.In the past, because the rear side absorption of exposure area is remained on the work stage, the heat that workpiece produces passed to work stage, thereby dispelled the heat, and can prevent that workpiece temperature from rising.
But, as mentioned above, owing to can not utilize objective table absorption to keep exposure region, so, can not distribute the heat of absorption.Particularly,, do not readily conduct heat because FPC is a resin molding, so, have only the temperature of the part (exposure area: about 100mm * 100mm) of irradiates light to raise.If (use ultra violet radiation illumination 100mW/cm by general conditions of exposure
2, shine several seconds) expose, then the temperature of workpiece exposure region raises about 10 ℃.
Thus, only about exposure area thermal expansion 10 μ m～20 μ m, banded workpiece W as shown in Figure 9, for relaxing this thermal expansion, heaves or crooked (moving) to optical axis (up and down) direction.Because of this heaves the mobile hundreds of μ m that reaches of the optical axis direction of (or crooked).
Scioptics with mask graph on workpiece projection and the exposure the projection exposure mode in, even the depth of focus of projecting lens greatly also have only ± 50 μ m about.So if workpiece moves more than the hundreds of μ m to optical axis direction, the mask images that is projected on the workpiece fogs, and can not carry out high-precision exposure (duplicating of mask graph).
Above-mentioned the heaving of taking place for preventing (or crooked) considered on the direction of transfer of banded workpiece and the direction vertical with direction of transfer (width of the workpiece direction) method that (when not stretching agley) exposes when applying tension force.
But, if when applying tension force, expose,, also be stretched, so workpiece extends fast because of thermal expansion in the exposure and is not less than 10 μ m～20 μ m because workpiece is when being extended by thermal expansion.Because workpiece extends in exposure, workpiece relatively moves with respect to the mask images in the exposure, and skew appears in the figure that is formed on the workpiece, can not carry out high-precision exposure (duplicating of mask graph).
Also consider to make work stage, still, keep the work stage of workpiece, processing to see through the difficulty of the glass as quartz that exposure light is a ultraviolet light as absorption with clear glass, because it is cost is also very high, therefore unrealistic.
In addition, to be called " bluring " because of the unsharp phenomenon of image outline of the image on the workpiece not being carried out joule is caused, though will focus here, to image, but because of workpiece in the exposure moves, and the result can only form the phenomenon of fuzzy figure and is called " irregular ".
Summary of the invention
The present invention proposes for the problem that solves in the above-mentioned conventional art, the objective of the invention is, can be by the two sides while exposure figure of projection exposure to banded workpiece, in graph exposure, even workpiece thermal expansion, can prevent that also workpiece from moving up and down cause image blurring, and the extension of the workpiece in preventing to expose cause irregular.
For addressing the above problem, in the banded workpiece two sides projection aligner to the two sides exposure mask pattern of banded workpiece, be provided with: the 1st mechanism applies tension force to banded workpiece on direction of transfer; The 2nd mechanism applies tension force to banded workpiece on the direction vertical with direction of transfer; And maintaining body, the banded workpiece that has been applied in tension force on above-mentioned direction of transfer and the direction vertical with above-mentioned direction of transfer is kept, before beginning exposure, banded workpiece is applied tension force, extend the amount of the elongation that the workpiece thermal expansion of hypothesis forms in being equivalent to expose, by this elongation fixing after, expose.
Above-mentioned the 1st mechanism, the 2nd mechanism and maintaining body are configured in the exposure region outside, apply tension force with the 1st, the 2nd mechanism, with the fixing banded workpiece of above-mentioned maintaining body, two sides from banded workpiece, mask between the centre, is shone exposure light simultaneously, carry out the two sides exposure.In addition, above-mentioned the 1st mechanism and the 2nd mechanism also can the double as maintaining bodies.
Apply the direction of tension force (stretching), it is the direction of transfer of workpiece and the direction of vertical (width of the workpiece) with it, apply tension force simultaneously, the elongation of the unit length of the elongation of unit length of banded workpiece of direction of transfer and the direction vertical with direction of transfer is equated, and under this state, carry out structure and fix with the maintenance machine.
If only stretch a direction, because the contraction of perpendicular direction, so, tension force on two directions, all applied.
In the exposure, applying under the state of mentioned strain,, the tension force (stress) that is applied to workpiece is being relaxed,, do not producing above-mentioned shown in Figure 9 heaving (or crooked) by only relaxing stress if workpiece produces thermal expansion.In addition, owing to workpiece is extended in advance, so do not produce the extension that thermal expansion causes.
In addition, as mentioned above, if directly exposure under the state that workpiece is applied tensile force, workpiece extends in exposure fast, and it is irregular that image becomes.
To this, in the present invention, in exposure, no longer apply the power that workpiece is further stretched.That is, to keep the mode fixation workpiece of the tension force of being executed in advance.Therefore, when workpiece extended because of thermal expansion, no longer effect made its power of further extending, the extension of workpiece in the exposure, and promptly workpiece does not produce relatively moving with respect to mask images.
Therefore, what the workpiece bending caused in can preventing to expose is fuzzy, and it is irregular to prevent that workpiece from stretching and causing simultaneously.
The elongation that the thermal expansion of supposing in the exposure forms, as mentioned above, for example at 10 μ m～20 μ m, by apply tension force before exposure, workpiece can extend 10 μ m～20 μ m.But, even workpiece so extends,, after exposure, do not produce special problem based on following reason yet.
When forming figure on the two sides of workpiece, the institute position that requires of the relative position off-design of the most debatable figure that is formed in the surface and the back side concerns.In the past, owing to be single face exposure, if the elongation difference of workpiece when exposing separately is offset both relative position.But, under situation of the present invention, even workpiece extends because of being applied in tension force, owing to exposing simultaneously on the two sides, so the relative position that is formed on the figure at the surface and the back side can not depart from.
In addition, by extending workpiece, for example 2 the specifically labelled intervals that are formed on the workpiece are extended (prolongation), but be to the situation of mask graph with the projection aligner of lens projections under, if be arranged on the mechanism of mobile projector lens on the optical axis direction, or zoom mechanism is set on lens, and then can adjust the multiplying power that is projected in the image on the workpiece, can no problem ground carry out the location of mask and workpiece.
In addition, under the big a little state of multiplying power, even form the figure of exposure, when the temperature in end exposure post-exposure zone descends and workpiece when shrinking, formed figure also shrinks thereupon, so, can form the figure of designed size.
Description of drawings
Fig. 1 is the figure of basic structure of double-side exposal device of the banded workpiece of the expression embodiment of the invention.
Fig. 2 is the figure of the structure of expression the 1st tension force imparting mechanism.
Fig. 3 is the figure of structure example of the clamping section of expression the 1st tension force imparting mechanism.
Fig. 4 is the figure of the structure of expression the 2nd tension force imparting mechanism.
Fig. 5 is the figure from last observation exposure portion.
Fig. 6 is explanation applies tension force to banded workpiece figure.
Fig. 7 is the figure that is illustrated in the deviation of the pattern spacing width when applying tension force and exposing.
Fig. 8 is illustrated in the figure of structure example that the two sides forms the FPC (flexible printing substrate) of figure.
Fig. 9 is the banded workpiece of expression figure because of the crooked shape of thermal expansion when exposure.
Embodiment
Fig. 1 is the figure of basic structure of double-side exposal device of the banded workpiece of the expression embodiment of the invention.In addition, in Fig. 1, omit above-mentioned the 2nd mechanism that the direction vertical with above-mentioned direction of transfer (width of the workpiece direction) is applied tension force.In addition, below, the 1st, the 2nd mechanism is called the 1st, the 2nd tension force imparting mechanism.
In Fig. 1, FPC banded workpiece W such as (flexible printing substrates) is wound on uncoiling with rolling shape and rolls on 1.
Roll the 1 banded workpiece W that emits from uncoiling,, turn to 90 degree, roll R2, send into exposure portion 5 through braking with middle guide roll R1 through adjusting volume bend A1 high-volume.At bend A1, optical sensor S1 is set, by not shown control part, 1 the amount of broadcasting is rolled in the adjustment uncoiling, so that the amount of bow among the bend A1 keeps certain.
Roll R3 and roll R2 and be sent to the banded workpiece W of exposure portion 5 by transmission, roll R3 and be stretched by rotating to transmit, and transmit to the right direction of figure by nip drum R2 ' clamping by nip drum R3 ' and braking.
R2 is rolled in braking, is connected with detent when lift-over is moving, and this detent produces and the power of direction of rotation direction, as electromagnetic brake.By utilizing braking to roll R2 and, prevent when conveying work pieces incidental wave inception, crawl, wrinkle etc. by the banded workpiece W of nip drum R2 ' clamping.
Be sent to the banded workpiece W of exposure portion 5, as described later, by the 1st tension force imparting mechanism the 11, the 2nd tension force imparting mechanism (not shown), on direction of transfer and perpendicular direction, be applied in the tension force of thermal expansion degree in the exposure of hypothesis, under this state, be maintained at workpiece maintaining body 6.This part aftermentioned.
In the face side of banded workpiece W, mask M1, the 1st projecting lens 31 of the 1st illumination part 41, formation surface of the work side figure is set; Side overleaf is provided with the 2nd illumination part 42, forms mask M2, the 2nd projecting lens 32 of back of work side figure.
From illumination part 41,42 separately, by mask M1, M2 and projecting lens 31,32, at the two sides of banded workpiece irradiation exposure light, the mask graph that is formed on mask M1, the M2 is exposed.
In addition, even 1 of illumination part also can.Also can utilize semitransparent mirror etc., to cutting apart light path, and be radiated on both sides' mask M1, the M2 from the light of 1 illumination part outgoing.
At the banded workpiece W of exposure portion 5 exposure, as previously mentioned, roll R3 and by nip drum R3 ' clamping by transmission, by guide roll R4, adjust the bend A2 of rolling amount, be wound on rolling and roll on 2.At bend A2, optical sensor S2 is set, adjust rolling by not shown control part and roll 2 rolling amount, so that the amount of bow among the bend A2 keeps certain.
Below, holding workpiece is described and applies above-mentioned the 1st tension force imparting mechanism the 11, the 2nd tension force imparting mechanism of tension force, under the state that workpiece is applied tension force, keep the structure example of workpiece maintaining body 6 of the periphery of exposure region.
(1) the 1st tension force imparting mechanism
Fig. 2 represents banded workpiece W is applied the structure of the 1st tension force imparting mechanism 11 of tension force on the workpiece direction of transfer.The figure shows from the structure of the 1st tension force imparting mechanism 11 of the direction observation vertical with direction of transfer, in the figure, be illustrated in the tension force imparting mechanism 11 that the downstream side of the exposure portion 5 of banded workpiece W is provided with, but be arranged on the structure of the tension force imparting mechanism 11 of upstream side, except that the direction that applies tension force on the contrary, have identical structure.
The 1st tension force imparting mechanism 11 has in the direction vertical with direction of transfer (Width) and goes up the clamping section 12 of the banded workpiece W of clamping and make clamping section 12 move the clamping drive division 13 of scheduled volume.
Owing to when forming the PET film as diaphragm on the surface of banded workpiece W, protect exposure region, so to push the shape of whole of workpiece also passable even step up the shape of portion 12 with this film.Certainly, at its vpg connection, preferably can apply the shape of tension force equably to banded workpiece W.
Step up portion 12 be arranged on fixed station 14 above, on fixed station 14, be equipped with and clamp drive division 13.Clamping drive division 13 possesses by transmitting the ball screw 13b that motor 13a rotates, utilize to transmit motor 13a rotation ball screw rod 13b, the portion that steps up 12 that combines with ball screw 13b is that the sender of banded workpiece W moves up (representing with the dotted line among this figure) at the left and right directions of this figure.
The 1st tension force imparting mechanism so as previously mentioned, along the direction of transfer of exposure portion 5, is arranged on to transmit and rolls the both sides that R2 side (upstream side) rolled in R3 side (downstream) and braking.
Exposure portion 5 with respect to banded workpiece W, control upstream side and downstream with clamping section 12, the clamping section 12 in clamping downstream and the clamping section of clamping upstream portion are respectively at downstream and upstream side, and clamped drive division 13 drives, and applies tension force on the direction of transfer of banded workpiece W.
Fig. 3 represents the structure example of the clamping section 12 of the 1st tension force imparting mechanism 11.
The figure shows from the sectional view of the 1st tension force imparting mechanism 11 of direction of transfer observation.Clamping section 12 constitutes on Width, by pressing plate 12a and lower member 12b from the banded workpiece W of clamping up and down.
Lower member 12b is fixed on the fixed station 14, at an end of fixed station 14 ball screw 13b is installed, and at the other end line slideway 13d is installed, and by rotating above-mentioned ball screw 13b, fixed station 14 moves up in the paper front and back of this figure.
In addition, be provided on the lower member 12b vacuum suction and after send the pipe arrangement hole 12c of air, the pipe arrangement 12d of air supply and vacuum is installed on the 12c of this hole.
Pressing plate 12a, the both sides by cylinder 12e is fixed on the Width of workpiece W move up at the upper and lower of this figure by cylinder 12e.
When transmitting banded workpiece W, cylinder 12e stretches out, rising pressing plate 12a.Banded workpiece W is transmitted in the gap of pressing plate 12a and lower member 12b.At this moment, behind the hole 12c of lower member 12b, send air, in order to avoid the friction of the surface of the back side of banded workpiece W and lower member 12b.
When banded workpiece W was applied the tension force of direction of transfer, cylinder 12e shrank, and pressing plate 12a descends, and banded workpiece W is by pressing plate 12a and lower member 12b clamping.At this moment, to the hole 12c supply vacuum of lower member 12b, assist and control banded workpiece W.
In addition, the part that contacts with banded workpiece W at the downside of pressing plate 12a in order to reduce the influence to the surface of workpiece W as far as possible, preferably attaches the soft resilient material 12f as rubber.
Under this state, utilize above-mentioned clamping drive division 13 shown in Figure 2, the coexist sender of workpiece W of clamping section 12 and fixed station 14 1 moves up, and banded workpiece W is applied the tension force of direction of transfer.
In addition, the 1st tension force imparting mechanism also can be also used as to transmit and rolls R3 and to roll R2 and by nip drum R2 ' by nip drum R3 ' and braking.For example, braking is rolled R2 and can be set for: when workpiece applies tension force, and electromagnetic brake stronger damping force when applying than conveying work pieces.
At this moment, roll R2 and by nip drum R2 ' clamping and apply above-mentioned damping force, roll R3 and banded workpiece W is applied the power of direction of transfer, then can suppress workpiece movement, on direction of transfer, apply tension force by nip drum R3 ' if utilize to transmit by braking.
(2) the 2nd tension force imparting mechanisms
Fig. 4 represents banded workpiece W is applied the structure of the 2nd tension force imparting mechanism of tension force on width of the workpiece direction.This illustrates from the sectional view and the 2nd tension force imparting mechanism 21 of the workpiece maintaining body 6 of direction of transfer observation.
In addition, this illustrates the 2nd one-sided tension force imparting mechanism 21.Tension force imparting mechanism with same structure one-tenth also is set at opposite side.The 2nd tension force imparting mechanism, because with respect to workpiece maintaining body 6, upstream side and downstream at the direction of transfer of banded workpiece W, a pair of the 2nd tension force imparting mechanism 21 is set respectively, so, be aggregated in 4 places the 2nd tension force imparting mechanism 21 is set, control 4 places of banded workpiece W, on the Width of workpiece, apply tension force.
The 2nd tension force imparting mechanism 21 is by the clamping section 22 of the end of controlling banded workpiece W with make the clamping section move a certain amount of clamping drive division 23 to constitute.
Clamp drive division 23 and have to utilize and transmit the ball screw 23b that motor 23a rotates, utilize and transmit motor 23a rotation ball screw rod 13b, the portion that steps up 22 that combines with ball screw 23b moves on the Width of banded workpiece W.
The handle part Gr2 that clamping section 22 constitutes the handle part Gr1 of upper-part 22a and lower member 22b is from the periphery of the banded workpiece W of clamping up and down.Installation shaft 22c on lower member 22b, and be fixed on the platform 22d that is fixedly clamped.
Upper-part 22a is installed on the lower member 22b by axle 22e, is that rotate at the center with axle 22e.In addition, at the handle part Gr1 of upper-part 22a and lower member 22b, the opposite side of Gr2, upper-part 22a and lower member 22b are applied elastic force to the direction of opening handle part Gr1, Gr2 by spring 22f.
Cylinder 22g is installed on lower member 22b, and the driving shaft of cylinder 22g connects lower member 22b and outstanding, and the axle 22e of its front end clamping upper spare 22a is with the opposite side butt of handle part Gr1.Therefore, when driving cylinder 22g, upper-part 22a is that rotate at the center with axle 22e, and handle part Gr1, Gr2 close.
Fig. 5 is the figure that observes exposure portion 5 from the top, is expressed as the relation of being convenient to understand the 2nd tension force imparting mechanism 21 and workpiece maintaining body 6, the 2nd tension force imparting mechanism 21 expression concept structures.In addition, the dotted line among this figure is represented banded workpiece W and is formed the exposure area of its figure.
The 2nd tension force imparting mechanism 21 is arranged on 4 places of banded workpiece W periphery, but the size of its number or clamping section is designed to workpiece is evenly applied tension force.As long as determine as required.
In addition, also can on the direction of transfer of banded workpiece W, prolong the clamping section 22 of the 2nd tension force imparting mechanism 21, utilize the 2nd tension force imparting mechanism in 2 places that are arranged on banded workpiece W both sides, on the direction vertical, apply tension force with direction of transfer.
The workpiece maintaining body 6 that keeps the periphery of banded workpiece W, as Fig. 4, shown in Figure 5, the part in the exposure area that is equivalent to banded workpiece W is provided with peristome 6a, can be from the downside of workpiece maintaining body 6, to the back side illuminaton light of workpiece W.Vacuum suction hole 6b is set on the surface of workpiece maintaining body 6, and when exposure, absorption keeps the exposure region periphery in addition of banded workpiece W.
Below, by above-mentioned the 1st tension force imparting mechanism 11 and the 2nd tension force imparting mechanism 21, illustrate banded workpiece is applied the action that tension force keeps this state.
At first, by the conditions of exposure of the reality banded workpiece W that exposes, and measure the elongation that forms because of thermal expansion in the exposure.Then, if obtain, can make workpiece extend to the degree of the elongation of thermal expansion formation with great power stretched part.That is, if thermal expansion 10 μ m in the exposure then obtain the 1st tension force imparting mechanism 11 and the 2nd tension force imparting mechanism 21 banded workpiece W are extended the required power of 10 μ m.
The tension force that utilizes 21 couples of banded workpiece W of the 1st tension force imparting mechanism 11 and the 2nd tension force imparting mechanism to apply is set for: as previously mentioned, make the elongation of unit length of elongation on direction of transfer and the direction vertical with direction of transfer equate.
For example, when the 2nd tension force imparting mechanism is the structure of above-mentioned Fig. 5, as shown in Figure 6, if will be 21 that control, the length (being substantially equal to the interval of the 2nd tension force imparting mechanism) of the banded workpiece W of direction of transfer is made as Lx by the 2nd tension force imparting mechanism at 2 places that are located at direction of transfer, the width of banded workpiece W is made as Ly, to be made as Fx to the power that the 1st tension force imparting mechanism 11 applies, will be made as Fy, and then apply tension force and get final product according to the formula of Fx/Ly=Fy/Lx to the power that the 2nd tension force imparting mechanism 21 applies.
In above-mentioned Fig. 1～Fig. 5, banded workpiece W is rolled R3 and rolls R2 and by nip drum R2 ' clamping, roll R3 by rotating to transmit by nip drum R3 ' and braking by transmission, and exposure region is fed to exposure portion 5.
The pressing plate 12a direction of transfer both sides, the 1st tension force imparting mechanism 11 that is arranged on exposure portion 5 descends, and by pressing plate 12a and the banded workpiece W of lower member 12b clamping.
The clamping drive division 12 of the 1st tension force imparting mechanism 11 drives, and banded workpiece W is extended upward the sender.On direction of transfer, banded workpiece W is applied tension force, make its extension.Banded workpiece W is applied tension force, consistent up to this elongation with the elongation that thermal expansion forms.In addition, as mentioned above, also can strengthen the braking roll R2 the braking size, by transmission roll R3 and by nip drum R3 ' and the braking roll R2 and workpiece applied tension force by nip drum R2 '.
Below, by the clamping section 22 of the 2nd tension force imparting mechanism 21, control the end of banded workpiece W.Rising cylinder 22g falls the clamping section Gr1 of upper-part 22a, clamps banded workpiece W.
When banded workpiece W was controlled in clamping section 22, the transmission motor 23a that clamps drive division 23 drove, and ball bolt 23b rotates, and clamping section 22 is side shifting outside width of the workpiece direction.Thus, on Width, banded workpiece W is applied tension force, make its extension.Utilize clamping drive division 23 that clamping section 22 is moved, banded workpiece W is applied tension force, consistent up to this elongation with the elongation that thermal expansion forms.
In addition, utilize the 1st tension force imparting mechanism 11 to the stretching of direction of transfer with utilize of the stretching of the 2nd tension force imparting mechanism 21, also can carry out simultaneously to width of the workpiece direction.
When the elongation of two directions of banded workpiece W reaches the elongation that thermal expansion forms, supply with vacuum to the vacuum suction hole of workpiece maintaining body 6 6b, banded workpiece W absorption is remained in the workpiece maintaining body 6.The cylinder 22a of the clamping section 12 of the 1st tension force imparting mechanism 11 raises pressing plate 12a, removes the tension force that applies on the direction of transfer of banded workpiece W.In addition, the cylinder 22g of the clamping section 22 of the 2nd tension force imparting mechanism 21 also descends, and the clamping section Gr1 of rising upper-part 22a, removes the tension force that is applied on the width of the workpiece direction.Drive the transmission motor 23a that clamps drive division 23, rotation ball screw rod 23b, clamping section 22 is to width of the workpiece direction medial movement.
In addition, as mentioned above, when the elongation of two directions of banded workpiece W reaches the elongation that thermal expansion forms, can banded workpiece W absorption not remained on workpiece maintaining body 6 yet, directly keep by the 1st tension force imparting mechanism 11 and the 2nd tension force imparting mechanism 21.
At this moment, with the 1st tension force imparting mechanism 11 and 21 whiles of the 2nd tension force imparting mechanism, keeping under the state of banded workpiece W by clamping section 12,22, if stop to clamp transmission motor 13a, the 23a of drive division 13,23, then the rotation of ball screw 13b, 23b also stops, and banded workpiece W is held under the state of keeping the tension force that is applied on the direction of transfer.
In addition, as mentioned above, adopting transmission to roll R3 as the 1st tension force imparting mechanism rolls under the situation of R2 with braking, rolling R3 with transmission and rolling under R2 and the state by the banded workpiece W of nip drum R2 ' clamping by nip drum R3 ' and braking, if stop to transmit the rotation of rolling R3, then banded workpiece W knapsack under the state of keeping the tension force that is applied on the direction of transfer keeps.
Below, the location and the exposing operation of double-side exposal device of the banded workpiece of present embodiment is described.
As mentioned above, banded workpiece W is being applied tension force, with workpiece maintaining body 6 fixing after, detect the telltale mark on the surface of mask M1 and banded workpiece W with not shown detent mechanism, reach, the telltale mark at the back side of M2 and banded workpiece W positions.After finish the location, from illumination part 41,42 irradiation exposure lights, the surface and the back side of the banded workpiece W that exposes simultaneously.
One finishes exposure, just stops to remove the maintenance of banded workpiece W to workpiece maintaining body 6 supply vacuum.Rotate to transmit and roll R3, send into next exposure area to exposure portion 5.
When above-mentioned location, as mentioned above, move at optical axis direction by making projecting lens 31,32, or on lens, zoom mechanism is set, can adjust the multiplying power that is projected in the image on the banded workpiece W.The location of thus, can no problem ground carrying out mask M1, M2 and banded workpiece W.
The banded workpiece W that extends is positioned or exposes is following carrying out.
Utilization is extended banded workpiece W by the tension force that the 1st tension force imparting mechanism 11 and the 2nd tension force imparting mechanism 21 apply.Thereupon, for example, on the banded workpiece W, 2 specifically labelled intervals of workpiece also extend (elongated).
On mask M1, M2, by forming the mask alignment mark, move by the position that makes mask M1, M2 and banded workpiece W with workpiece telltale mark identical distance, so that both are positioned at same position, carry out the location of mask M1, M2 and banded workpiece W.Yet,, be difficult to high precision and carry out above-mentioned location if extend the specifically labelled interval of workpiece.
Therefore, as mentioned above, be arranged on the mechanism of optical axis direction mobile projector lens 31,32, or on projecting lens 31,32, zoom mechanism be set, adjust the multiplying power that is projected in the mask images on the banded workpiece W.
The multiplying power of mask graph is strengthened the size (as mentioned above, 10 μ m～20 μ m) of extending the specifically labelled interval of workpiece, and carry out projection.By enlargement ratio, owing to also prolong the interval that is projected in the mask alignment mark on the workpiece, can make it consistent with the workpiece telltale mark, can carry out the location of aforementioned mask and workpiece.Because enlargement ratio and projecting figure, therefore the figure of exposure becomes the figure bigger slightly than design load.But behind end exposure, if remove tension force, because workpiece returns to original size, the size of figure is also dwindled thereupon, does not have problems.
In addition, owing to expose simultaneously in the two sides, the two sides all with identical multiplying power projected image, is dwindled when dwindling too, so both relative position relations can not depart from.
Fig. 7 represents above-mentioned banded workpiece shown in Figure 8, adopts said apparatus to apply tension force and the result when exposing.
The transverse axis of Fig. 7 (a) is the size that imposes on banded workpiece W tension force, for example, if 3000g (3kg), the tension force that expression also applies 3kg to the direction of transfer and the Width of workpiece respectively.
The longitudinal axis is the deviation at the interval (live width) of the figure that forms of exposure.Specifically be, shown in Fig. 7 (b), (c), 25 places in the exposure region of about 100mm * 100mm, it is the figure of 15 μ m that exposure forms the interval design load, after the development, at above-mentioned 25 places, measure the interval of above-mentioned figure, expression deducts the value of the narrowest pattern spacing from the wideest pattern spacing.
As mentioned above, banded workpiece W produces fuzzy or deflection in exposure.If the spacing bias of figure is big, then fuzzy or deflection is also big, that is, when exposure, can produce big crooked or extend to banded workpiece.
Found out that by Fig. 7 the tension force that imposes on banded workpiece W is big more, the deviation of pattern spacing is more little, that is, the crooked or extension of the workpiece in reducing to expose can the high precision exposure.
The invention effect
As previously discussed, in the present invention, can access following effect.
(1) in the exposure, banded workpiece absorbs exposure light, and the temperature of exposure region is raise, and produces Give birth to thermal expansion, still, owing to extend workpiece by this elongation in advance, only by relaxing stress, just Do not produce heaving or bending of workpiece. Therefore, banded workpiece does not move to optical axis direction, can not produce Living image blurring, can carry out high-precision exposure (copying of mask graph).
(2) in addition, owing to keep the periphery of the exposure region of banded workpiece to be held, in exposure In, no longer extend workpiece, can prevent irregular generation. So, can carry out high-precision exposing to the sun Light.
(3) owing to carry out projection exposure, so, can adjust the multiplying power of the mask images of projection, Can according to the extension situation projection print plate figure of workpiece, can carry out high-precision exposure.
Claims (2)
1, a kind of two sides projection aligner of banded workpiece is faced mask graph at two of banded workpiece and is exposed, and it is characterized in that having:
The 1st mask is formed with the figure that forms on the 1st of banded workpiece;
The 2nd mask is formed with the figure that forms on the 2nd of banded workpiece;
Be configured in the 1st projecting lens of the 1st side of banded workpiece;
Be configured in the 2nd projecting lens of the 2nd side of banded workpiece;
At least one illumination part is by the 1st, the 2nd mask and above-mentioned the 1st, the 2nd projecting lens, to banded workpiece irradiation exposure light;
Transmit the connecting gear of banded workpiece;
On direction of transfer, banded workpiece is applied the 1st mechanism of tension force;
On the direction vertical, banded workpiece is applied the 2nd mechanism of tension force with direction of transfer; And
Maintaining body keeps the banded workpiece that has been applied in tension force on above-mentioned direction of transfer and the direction vertical with above-mentioned direction of transfer,
Before beginning exposure, banded workpiece is applied tension force, extend the amount of the elongation that the workpiece thermal expansion of hypothesis in being equivalent to expose forms, by this elongation fixing after, expose.
2, as the two sides projection aligner of the banded workpiece of claim 1 record, it is characterized in that: in the 1st mechanism that applies tension force on the above-mentioned direction of transfer and on the direction vertical, apply the 2nd mechanism of tension force, the above-mentioned maintaining body of double as with direction of transfer.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003146392 | 2003-05-23 | ||
| JP2003146392A JP4218418B2 (en) | 2003-05-23 | 2003-05-23 | Double-sided projection exposure system for belt-like workpieces |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1573559A CN1573559A (en) | 2005-02-02 |
| CN100468199C true CN100468199C (en) | 2009-03-11 |
Family
ID=33533257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100475702A Expired - Fee Related CN100468199C (en) | 2003-05-23 | 2004-05-24 | Double-sided projection exposure device of belt-shape workpieces |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4218418B2 (en) |
| KR (1) | KR100665165B1 (en) |
| CN (1) | CN100468199C (en) |
| TW (1) | TWI278724B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102472978A (en) * | 2009-07-17 | 2012-05-23 | 株式会社尼康 | Pattern formation apparatus, pattern formation method, and device manufacturing method |
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|---|---|---|---|---|
| JP5117672B2 (en) * | 2005-10-25 | 2013-01-16 | サンエー技研株式会社 | Exposure method and exposure apparatus |
| KR100806843B1 (en) * | 2006-08-30 | 2008-02-22 | 스템코 주식회사 | Apparatus and method for exposuring board material |
| JP4888002B2 (en) * | 2006-09-25 | 2012-02-29 | 凸版印刷株式会社 | Film fixing and positioning device for alignment |
| JP2010014939A (en) * | 2008-07-03 | 2010-01-21 | Nikon Corp | Manufacturing apparatus and manufacturing method for circuit element |
| JP5451175B2 (en) * | 2009-05-15 | 2014-03-26 | サンエー技研株式会社 | Exposure equipment |
| JP5630113B2 (en) * | 2009-07-17 | 2014-11-26 | 株式会社ニコン | Pattern forming apparatus, pattern forming method, and device manufacturing method |
| US8235695B2 (en) * | 2009-07-17 | 2012-08-07 | Nikon Corporation | Pattern forming device, pattern forming method, and device manufacturing method |
| JP5477862B2 (en) * | 2010-09-06 | 2014-04-23 | 株式会社ブイ・テクノロジー | Film exposure apparatus and film exposure method |
| CN102944978B (en) * | 2011-08-15 | 2014-08-06 | 中山新诺科技股份有限公司 | Exposure system, calibration system, optical engines, exposure method, and production method |
| KR101849508B1 (en) * | 2011-12-20 | 2018-05-28 | 가부시키가이샤 니콘 | Substrate processing device, device manufacturing system and device manufacturing method |
| JP6200224B2 (en) | 2012-09-13 | 2017-09-20 | 日本メクトロン株式会社 | Photomask, photomask set, exposure apparatus and exposure method |
| CN102968000A (en) * | 2012-11-21 | 2013-03-13 | 京东方科技集团股份有限公司 | Dual-sided processing method and exposure device |
| JP6510768B2 (en) * | 2014-05-23 | 2019-05-08 | 株式会社オーク製作所 | Exposure device |
| JP6723831B2 (en) * | 2016-06-01 | 2020-07-15 | 株式会社オーク製作所 | Exposure equipment |
| CN107966881B (en) | 2017-03-15 | 2018-11-23 | 上海微电子装备（集团）股份有限公司 | Lithographic equipment and method |
| JP7412872B2 (en) * | 2017-10-31 | 2024-01-15 | 株式会社アドテックエンジニアリング | Double-sided exposure device |
| JP7234426B2 (en) * | 2017-11-30 | 2023-03-07 | 株式会社アドテックエンジニアリング | Mask pairs and double-sided exposure equipment |
| TW202021887A (en) * | 2018-12-03 | 2020-06-16 | 由田新技股份有限公司 | Inspection apparatus for reel tape workpiece |
| CN109884860B (en) * | 2019-03-22 | 2020-12-04 | 上海微电子装备（集团）股份有限公司 | Multi-station flexible tape exposure device and exposure method |
| CN111752109A (en) * | 2020-07-21 | 2020-10-09 | 杭州新诺微电子有限公司 | Substrate exposure device and method for roll-to-roll double-sided digital photoetching |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2892079B2 (en) * | 1990-02-21 | 1999-05-17 | ウシオ電機株式会社 | Film exposure equipment |
| KR200187015Y1 (en) * | 1997-12-29 | 2000-08-01 | 유무성 | In-line type two faces exposure apparatus |
-
2003
- 2003-05-23 JP JP2003146392A patent/JP4218418B2/en not_active Expired - Fee Related
-
2004
- 2004-02-23 TW TW093104462A patent/TWI278724B/en not_active IP Right Cessation
- 2004-03-13 KR KR1020040017123A patent/KR100665165B1/en not_active IP Right Cessation
- 2004-05-24 CN CNB2004100475702A patent/CN100468199C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102472978A (en) * | 2009-07-17 | 2012-05-23 | 株式会社尼康 | Pattern formation apparatus, pattern formation method, and device manufacturing method |
| CN102472978B (en) * | 2009-07-17 | 2015-06-24 | 株式会社尼康 | Pattern formation apparatus, pattern formation method, and device manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20040100870A (en) | 2004-12-02 |
| CN1573559A (en) | 2005-02-02 |
| TWI278724B (en) | 2007-04-11 |
| KR100665165B1 (en) | 2007-01-04 |
| JP4218418B2 (en) | 2009-02-04 |
| TW200506543A (en) | 2005-02-16 |
| JP2004347964A (en) | 2004-12-09 |
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