CN100468062C - Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing - Google Patents
Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing Download PDFInfo
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Abstract
A micro-machined multi-sensor that provides 1-axis of acceleration sensing and 2-axes of angular rate sensing. The multi-sensor includes a plurality of accelerometers, each including a mass anchored to and suspended over a substrate by a plurality of flexures. Each accelerometer further includes acceleration sense electrode structures disposed along lateral and longitudinal axes of the respective mass. The multi-sensor includes a fork member coupling the masses to allow relative antiphase movement, and to resist in phase movement, of the masses, and a drive electrode structure for rotationally vibrating the masses in antiphase. The multi-sensor provides electrically independent acceleration sense signals along the lateral and longitudinal axes of the respective masses, which are added and/or subtracted to obtain 1-axis of acceleration sensing and 2-axes of angular rate sensing.
Description
The cross-reference of related application
The application require the applying date be April 28 in 2003 day, be called the U.S. Provisional Patent Application No.60/466 of " little processing multisensor that an axis of acceleration sensing and two axis of angular rate sensing are provided ", 090 preference.
Statement about the government-funded research and development
Inapplicable
Technical field
The present invention relates generally to integrated acceleration and angular-rate sensor (" multisensor "), more specifically relates to little processing multisensor that an axis of acceleration sensing and two angle speed detection axles can be provided.
Background technology
Known little processing multisensor comprises at least one accelerometer that is used for providing at single-sensor equipment the indication of acceleration detection and angular velocity detection.Traditional little processing multisensor, for example announce February 28 nineteen ninety-five, name is called the U.S. Patent No. 5 of " little processing accelerometer gyroscope ", 392, little processing multisensor described in 650, comprise two accelerometers, wherein each accelerometer comprises the rigidity accelerometer frame that anchors to substrate and by the quality inspection piece of a plurality of deflections from described frame hanging.This little processing multisensor has with it related single axis of acceleration sensing and detects axle perpendicular to the single rotation of described acceleration axle.And this little processing multisensor typically is configured to anti-phasely vibrate described quality inspection piece simultaneously along vibrating shaft, and this vibrating shaft is perpendicular to described acceleration and turning axle.
Traditional little processing multisensor carry out linear and rotatablely move and the quality inspection piece anti-phasely vibrates simultaneously simultaneously situation under, the power of linearity that is produced and Coriolis (Coriolis) acceleration is with respect to substrate deflection quality inspection piece.Described multisensor is configured to detect the deflection of each quality inspection piece, and produces the relevant acceleration detection signal, and the value of this acceleration detection signal is directly proportional with the amplitude of described deflection.Because vibration quality inspection piece is in homophase to the response of linear acceleration, and the quality inspection piece is in anti-phase to the response of Coriolis acceleration, therefore the linear acceleration component (comprising acceleration detection information) of detection signal and rotary acceleration component (comprising angular velocity detection information) can rotate or linear component to eliminate respectively by described signal being carried out addition or subtracting each other and separated.
A defective of above-mentioned traditional little processing multisensor is that it typically only provides an axis of acceleration sensing and an axis of angular rate sensing only is provided.Yet, more than one acceleration detection and/or axis of angular rate sensing usually advantageously are provided in single-sensor equipment.
Can detect axle with respect to two rotations and measure second kind of traditional little processed sensor of rotational speed in U.S. Patent No. 5,869, be described in 760, this patent disclosure was on February 9th, 1999, and name is called " the little process equipment that has the whirling vibration mass ".This little processed sensor comprises two accelerometers, and wherein each accelerometer comprises the mass of a circular beam form, this mass by a plurality of flexure suspension on substrate and adjacent a pair of acceleration detection electrode.Two rotations related with this little processed sensor detect axle and are arranged in described substrate plane.And this little processed sensor is configured to vibrate described circular beam rotatably in anti-phase mode, promptly alternately clockwise/be rotated counterclockwise a circular beam, and and another beam rotates essentially identical amount simultaneously in the opposite direction.
Second kind of traditional little processing multisensor carry out linear and rotatablely move and situation that described circular beam anti-phasely rotates simultaneously under, the linearity that is produced and the power of Coriolis acceleration are with respect to the described beam of substrate deflection.The deflection of each beam of acceleration detection electrode detection, and produce the relevant acceleration detection signal, this acceleration detection signal is directly proportional with the amplitude of described deflection and with respect to rotating the rotational speed that detects axle.Because the symbol of the rotary acceleration component (comprising angular velocity detection information) of detection signal is corresponding to the sense of rotation of described circular beam, therefore can be by described signal subtraction is separated described rotational component to eliminate described linear component from the linear acceleration component of described detection signal.Yet although this little processing multisensor can provide more than one axis of angular rate sensing, the defective that it had is that it does not typically provide acceleration detection information.
Therefore wish to have a kind of little processing multisensor, it provides acceleration detection and angular velocity detection simultaneously, and avoids the defective of above-mentioned traditional little processed sensor equipment.
Summary of the invention
According to the present invention, a kind of little processing multisensor is disclosed, it provides an axis of acceleration sensing and two axis of angular rate sensing.Current disclosed little processing multisensor comprises at least one pair of accelerometer, described accelerometer is provided on the electricity irrelevant acceleration detection signal, and this acceleration detection signal comprises and the acceleration detection information relevant with angular velocity detection with respect to one or above detection axle.
In first embodiment, described little processing multisensor comprises a pair of accelerometer, and each accelerometer comprises by a plurality of flexure suspension on substrate and anchor to the mass of described substrate.The rotation two associations, mutually orthogonal that described multisensor has in described substrate plane detects axle, with perpendicular to one of described two turning axles related axis of acceleration sensing.And each mass has related with it horizontal and vertical axis of symmetry and the turning axle vertical with this horizontal and vertical axis of symmetry.Each accelerometer further comprises the first pair of acceleration detection electrode structure arranging along the described transverse axis of mass separately and second pair of acceleration detection electrode structure arranging along the described longitudinal axis of mass separately.Described multisensor further comprises fork, and this fork is configured to connect described two masses allowing the relative anti-phase motion of described mass, and prevents the simultaneous movements of described mass.Described a plurality of deflections that described mass is anchored to described substrate be configured to force described mass basically only with rotation mode with respect to described substrate motion.
In current disclosed embodiment, described little processing multisensor comprises the drive electrode structure, this drive electrode structure is configured to the anti-phase described mass that vibrates rotatably, promptly alternately rotate a mass around its turning axle clockwise/counterclockwise, and another mass rotates essentially identical amount in opposite direction around its turning axle simultaneously.The described multisensor that has the whirling vibration mass carry out linearity and/or situation about rotatablely moving under, described first and second pairs of acceleration detection electrodes are created in acceleration detection signal irrelevant on the electricity based on being applied to the linearity on the described mass and the power of Coriolis acceleration.Described multisensor is configured to: (1) will be by the difference of the acceleration of first pair of acceleration detection electrode detection of first accelerometer with by the difference addition of the acceleration of first pair of acceleration detection electrode detection of second accelerometer, to obtain and the relevant information of angular velocity detection with respect to the horizontal turning axle of described multisensor, (2) will be by the difference of the acceleration of second pair of acceleration detection electrode detection of first accelerometer with by the difference addition of the acceleration of second pair of acceleration detection electrode detection of second accelerometer, to obtain and the relevant information of angular velocity detection with respect to the longitudinal rotating shaft of described multisensor, (3) will be by the acceleration sum of first pair of acceleration detection electrode detection of first accelerometer, acceleration sum by first pair of acceleration detection electrode detection of second accelerometer, acceleration sum by second pair of acceleration detection electrode detection of first accelerometer, and by the acceleration sum addition of second pair of acceleration detection electrode detection of second accelerometer, to obtain and the relevant information of acceleration detection with respect to the acceleration axle of described multisensor.
In a second embodiment, described little processing multisensor comprises and is arranged to foursquare four accelerometers.Each accelerometer comprises the mass that is suspended on the substrate and anchors to described substrate.Described multisensor further comprises fork separately, and this fork connects adjacent mass to allowing the right relative anti-phase motion of described adjacent mass, and prevents the simultaneous movements of described adjacent mass.The rotation two associations, mutually orthogonal that described little processing multisensor has in described substrate plane detects axle, with perpendicular to one of described two turning axles related axis of acceleration sensing.Each accelerometer further comprises the first pair of acceleration detection electrode structure arranging along the transverse axis of mass separately and second pair of acceleration detection electrode structure arranging along the longitudinal axis of mass separately.Described accelerometer is arranged on the opposite side of each turning axle in the mirror image mode.Because the symmetry of this second embodiment of described little processing multisensor, this multisensor is centering on mould at an easy rate, has therefore reduced the harmful effect of die surface region deformation and gradient.
By above-mentioned little processing multisensor is configured to comprise a plurality of accelerometers, and each accelerometer has mass and irrelevant two pairs of acceleration detection signals on electricity along the horizontal and vertical axis of symmetry of described mass is provided respectively, by suitably with described acceleration detection signal plus and/or subtract each other and can obtain an axis of acceleration sensing and two axis of angular rate sensing.
From following detailed description of the present invention with apparent further feature of the present invention, function and aspect.
Description of drawings
To more completely understand the present invention with reference to of the present invention the following specifically describes in conjunction with the accompanying drawings, wherein:
Fig. 1 is the simplified structure diagram according to little processing multisensor of the present invention;
Fig. 2 is the detailed plan view of little processing multisensor of Fig. 1;
Fig. 3 is the schematic diagram of acceleration detection signal processing circuit that is used for little processing multisensor of Fig. 1;
Fig. 4 is the simplified structure diagram of alternate embodiment of little processing multisensor of Fig. 1;
Fig. 5 is the detailed plan view of little processing multisensor of Fig. 4; And
Fig. 6 is a kind of process flow diagram of method of little processing multisensor of application drawing 2.
Embodiment
In on April 28th, 2003 application, name is called the application U.S. Provisional Patent Application No.60/466 of " little processing multisensor that an axis of acceleration sensing and two axis of angular rate sensing are provided ", 090 is incorporated into this with for referencial use.
Disclose a kind of little processing multisensor, it provides an axis of acceleration sensing and two axis of angular rate sensing in single multi-sensor device.Current disclosed little processing multisensor can be arranged on the mould symmetrically, has improved output thus and has improved the overall performance of multi-sensor device.
Fig. 1 has shown an exemplary embodiment according to little processing multisensor 100 of the present invention.In the embodiment that this exemplifies, multisensor 100 comprises a plurality of accelerometers 102 and 104.Accelerometer 102 and 104 comprises mass 103 and 105 respectively, and each mass is circular basically.Should be appreciated that mass 103 and 105 can selectively be roughly square, hexagon, octagon or any other suitable geometric configuration. Circular mass 103 and 105 is anchored to substrate 101 and is hanging on this substrate by a plurality of deflection (not shown).Multisensor 100 further comprises fork 106, this fork be configured to connect described two circular masses 103 with 105 allowing the relative anti-phase motion of described mass, and prevent the simultaneous movements of described mass.The described circular mass 103 of anchoring and 105 and described a plurality of deflections that they are suspended on the substrate 101 be configured to force described mass only in a plane, to move basically with rotation mode, described plane parallel is in described substrate, and can be with inclination or the translational mode motion perpendicular to described substrate 101.
For example, substrate 101 can comprise silicon substrate, perhaps the substrate of other any adequate types.And substrate 101 can be subjected to the little processing of any suitable body (bulkmicro-machining) process to form microelectromechanical-systems (MEMS) multi-sensor device.Should be noted that the circular mass 103 and 105 and coupling yoke 106 that can form MEMS multisensor 100 by any suitable method in this area.
As shown in fig. 1, the rotation two associations, mutually orthogonal that multisensor 100 has in the plane of substrate 101 detects axle X and Y, with perpendicular to the related axis of acceleration sensing Z of turning axle X with Y (promptly perpendicular to substrate 101).Multisensor 100 is configured to provide with respect to two indications of the angular velocity detection of turning axle X and Y with respect to an indication of the acceleration detection of acceleration axle Z.And each circular mass 103 and 105 has related with it horizontal and vertical axis of symmetry (mark) and perpendicular to the turning axle (be turning axle 142 and 144, see Fig. 1) of the described transverse axis and the longitudinal axis.
Fig. 2 has shown the detailed plan view 200 of little processing multisensor 100 (see figure 1)s.As shown in Figure 2, little processing multisensor 200 comprises a plurality of accelerometers 202 and 204. Accelerometer 202 and 204 comprises circular substantially mass 203 and 205 respectively, and described mass anchors to substrate 201 as on the silicon substrate by a plurality of deflection structures, and is suspended on the described substrate.Particularly, each deflection structure of anchoring and the circular mass 203 of suspension comprises fixator 270 and stress relief element 260, and each deflection structure of anchoring and the circular mass 205 of suspension comprises fixator 272 and stress relief element 262.
Should be noted that circular mass 203 and 205, fork 206 and acceleration detection electrode structure 208-215 are basically respectively with circular mass 103 and 105, the fork 106 of multisensor 100 (see figure 1)s with add detector electrode structure 108-115 equivalences that hasten.And the rotation shown in Fig. 3 detects axle X and Y and axis of acceleration sensing Z corresponding to detecting axle X and Y and axis of acceleration sensing Z with reference to the described rotation of figure 1 in the above.
As shown in Figure 2, multisensor 200 comprises a plurality of drive electrode structures 240 and 242, described drive electrode structure anchor is to substrate 201, and be configured to anti-phase circular mass 203 and 205 of vibrating rotatably, promptly alternately clockwise/be rotated counterclockwise a mass, and another mass rotates essentially identical amount in opposite direction simultaneously around its turning axle.Particularly, drive electrode structure 240 is used for vibrating circular mass 203 rotatably around turning axle 282, and drive electrode structure 242 is used for vibrating circular mass 205 rotatably around turning axle 284.In current disclosed embodiment, drive electrode structure 240 and 242 is arranged along the radial axle of circular mass 203 and 205 respectively.And each in the drive electrode structure 240 and 242 all comprises a plurality of electrodes (" finger "), and described a plurality of electrodes intersect with the corresponding a plurality of fingers that extend from least one radial edges of circular mass 203 and 205 respectively. Drive electrode structure 240 and 242 is connected to the signal source (not shown) that is used to produce drive signal, and described drive signal is operationally with the indicated anti-phase oscillating mass rotatably of the mode of vibration piece 203 and 205 of direction arrow 280.
The fundamental purpose that should be noted that circular geometry provides a pivot and lever and is converted to the motion that is fit to coupling yoke 206 with will be on diameter relative mass 203 and 205 not parallel linear movement.Therefore, be dominant linear component at mass 203 useful aspect the generation Coriolis force and 205 motion, rather than rotation.
Those skilled in the art will understand, when circular mass 203 and 205 vibrates around turning axle 282 and 284 respectively, when rotating, mass 203 and 205 is subjected to the Coriolis motion to multisensor 200 around the radial axle (not mark) of mass 203 and 205 simultaneously.And owing to circular quality 203 and 205 is vibrated anti-phasely, so Coriolis acceleration in the opposite direction is applied on each mass.As a result, significantly Coriolis force is applied to circular mass 203 and 205, thereby in opposite direction with respect to substrate 201 deflection masses 203 and 205.
For example, in Fig. 2, use "+" and "-" symbol represent circular mass 203 and 205 owing to the Coriolis force that is applied the relative direction of deflection.As shown in Figure 2, the acceleration detection electrode structure 208-209 and 212-213 of mass 203 is marked respectively-,+,-and+.The corresponding acceleration detection electrode structure 210-211 and 214-215 of mass 205 be marked respectively opposite symbol+,-, + and-, to indicate the Coriolis force that is applied at opposite direction these respective regions with respect to substrate 201 deflection masses 203 and 205.
Should be noted that circular mass 203 along the acceleration detection electrode structure 208-209 of the longitudinal axis and along the acceleration detection electrode structure 212-213 of transverse axis be labeled respectively opposite mark-and+.Similarly, circular mass 205 along the acceleration detection electrode structure 210-212 of the longitudinal axis and along the acceleration detection electrode structure 214-215 of transverse axis be labeled respectively opposite symbol+and-.This is that circular mass 203 and 205 is rigid structures because in current disclosed embodiment, and this rigid structure is configured to respond the Coriolis force that is applied and tilts with respect to substrate 201.
And, because the circular mass 203 and 205 of the Coriolis force deflection in the opposite direction that is applied, therefore the mass 203 and the 205 pairs of responses with respect to the Coriolis acceleration of turning axle X and Y are in anti-phasely, and circular mass 203 and 205 pairs of responses with respect to the linear acceleration of acceleration axle Z are in homophase.Therefore, the irrelevant detection signal on electricity that provides by acceleration detection electrode structure 208-215 can be added and/or subtract each other to extract from described detection signal corresponding to the information (being acceleration detection information) of linear acceleration with from the information (be angular velocity detection information) of described detection signal extraction corresponding to Coriolis acceleration.
Fig. 3 has shown an exemplary embodiment of acceleration detection signal processing circuit 300, and the acceleration detection signal extraction acceleration detection information and the angular velocity detection information that are provided from acceleration detection electrode structure 208-215 (see figure 2)s is provided this acceleration detection signal processing circuit.For example, signal processing circuit 300 can realize on same substrate with multisensor 200 the same ground.In the embodiment that is exemplified, detection signal treatment circuit 300 comprises a plurality of differential amplifiers 308-309 and a plurality of summing amplifier 302-306, and described differential amplifier subtracts each other/extracted mutually acceleration detection and angular velocity detection information with the acceleration that summing amplifier degree of will speed up detector electrode structure 208-215 is detected.
Particularly, the acceleration that detected of acceleration detection electrode structure 208-209 comprises with respect to the linear component Az of acceleration axle Z with respect to the time mutarotation of turning axle Y changes component ay (w); The acceleration that acceleration detection electrode structure 210-211 is detected comprises with respect to the linear component Bz of acceleration axle Z with respect to the time mutarotation of turning axle Y changes component by (w).Should be noted that rotational component ay (w) and by (w) change at angular oscillation frequency w place, and be directly proportional that described radial axle is perpendicular to the vibration velocity vector with the rotational speed that centers on radial axle.Because the vibration velocity of mass 203 and 205 is opposite, therefore the acceleration that detected of acceleration detection electrode structure 208-209 is respectively Az+ay (w) and Az-ay (w), and the acceleration that acceleration detection electrode structure 210-211 is detected is respectively Bz+by (w) and Bz-by (w).Similarly, the acceleration that acceleration detection electrode structure 212-213 is detected is respectively Az+ax (w) and Az-ax (w), and the acceleration that acceleration detection electrode structure 214-215 is detected is respectively Bz+bx (w) and Bz-bx (w).
As mentioned above, circular mass 203 and 205 (see figure 2)s are in anti-phase to the response with respect to the Coriolis acceleration of turning axle X and Y, and circular mass 203 and 205 pairs of responses with respect to the linear acceleration of acceleration axle Z are in homophase.Therefore, circular mass 203 and 205 pairs of responses with respect to the Coriolis acceleration of turning axle X and Y are in anti-phase, described Coriolis acceleration by acceleration ay (w) and-ay (w), by (w) and-by (w), ax (w) and-ax (w), bx (w) and-bx (w) expression, and circular mass 203 and 205 pairs of responses with respect to the linear acceleration of acceleration axle Z are in homophase, described acceleration is represented by acceleration A z and Bz.
As shown in Figure 3, represent acceleration A z+ay (w) that electrode structure 208-209 detects and the signal of Az-ay (w) to be provided for summing amplifier 302-303 respectively, represent acceleration Bz+by (w) that electrode structure 210-211 detects and the signal of Bz-by (w) to be provided for summing amplifier 302-303 respectively.Summing amplifier 302-303 is configured to and will offers its each signal plus, and provide the signal that obtains sum to differential amplifier 308, described differential amplifier is configured to these signal subtractions to eliminate linear component Az and Bz and to produce signal 2ay (the w)+2by (w) of indication with respect to the angular velocity detection of turning axle Y (" Y angular velocity ").
Similarly, represent acceleration A z+ax (w) that electrode structure 212-213 detects and the signal of Az-ax (w) to be provided for summing amplifier 304-305 respectively, represent acceleration Bz+bx (w) that electrode structure 214-215 detects and the signal of Bz-bx (w) to be provided for summing amplifier 304-305 respectively.Summing amplifier 304-305 is configured to and will offers its each signal plus, and provide the signal that obtains sum to differential amplifier 309, described differential amplifier is configured to these signal subtractions to eliminate linear component Az and Bz and to produce signal 2ax (the w)+2bx (w) of indication with respect to the angular velocity detection of turning axle X (" X angular velocity ").
As shown in Figure 3, summing amplifier 302-305 also their output place separately to summing amplifier 306 provide signal and, described summing amplifier 306 is configured to these signal plus to eliminate rotational component ax (w), bx (w), ay (w) and by (w), and produce the signal 4Az+4Bz of indication with respect to the acceleration detection of acceleration axle Z (" Z acceleration ").
Fig. 4 has shown second exemplary embodiment according to little processing multisensor 400 of the present invention.In the embodiment that is exemplified, sensor 400 comprises and is arranged to foursquare a plurality of accelerometer 402,404,406 and 408.Accelerometer 402,404,406 and 408 comprise mass 403,405 respectively, 407 and 409, each mass is roughly square.Yet should be appreciated that mass 403,405,407 and 409 can alternatively be substantially circle, hexagon, octagon or any other suitable geometric configuration.
Square mass 403,405,407 and 409 is suspended on the substrate 401 and anchors to described substrate by a plurality of deflection (not shown).Multisensor 400 further comprises the fork 410 that connects adjacent mass 403 and 405, the fork 412 that connects adjacent mass 403 and 407, connect the fork 414 of adjacent mass 407 and 409, and the fork 416 that connects adjacent mass 405 and 409.Fork 410,412,414 and 416 are configured to connect mass 403,405,407 and 409 to allow adjacent mass around turning axle 452,454,456 and 458 relative anti-phase rotatablely moving, and prevent that adjacent mass from rotatablely moving around the homophase of turning axle 452,454,456 and 458.
Be similar to substrate 201 (see figure 2)s of multisensor 200, substrate 401 (see figure 4)s of multisensor 400 can comprise silicon substrate, perhaps the substrate of any other adequate types.And substrate 401 can be subjected to the little process of any suitable body to form the MEMS multisensor.
As shown in Figure 4, the rotation two associations, mutually orthogonal that multisensor 400 has in the plane of substrate 401 detects axle X and Y, with perpendicular to one of turning axle X and Y related axis of acceleration sensing Z.Be similar to multisensor 200 (see figure 2)s, multisensor 400 provides with respect to two indications of the angular velocity detection of turning axle X and Y with respect to an indication of the acceleration detection of acceleration axle Z.
For example, acceleration detection electrode structure 418-419,420-421,426-427 and 428-429 can be respectively applied for acceleration A z+ay (w) and Az-ay (w) are provided, Bz+by (w) and Bz-by (w), Cz+cy (w) and Cz-cy (w), and the indication of Dz+dy (w) and Dz-dy (w), Az wherein, Bz, Cz and Dz are the linear acceleration components with respect to acceleration axle Z, ay (w), by (w), cy (w) and dy (w) are that the time mutarotation with respect to turning axle Y changes component of acceleration.And, acceleration detection electrode structure 422-423,430-431,424-425 and 432-433 can be respectively applied for and provide acceleration A z+ax (w) and Az-ax (w), Bz+bx (w) and Bz-bx (w), Cz+cx (w) and Cz-cx (w), and the indication of Dz+dx (w) and Dz-dx (w), ax (w) wherein, bx (w), cx (w) and dx (w) are that the time mutarotation with respect to turning axle X changes component of acceleration.By suitably each acceleration being subtracted each other, can eliminate linear component, stay rotational component, this rotational component comprises and the information relevant with respect to the angular velocity detection of turning axle X and Y.And, with each acceleration addition, can eliminate rotational component by suitably, stay linear component, this linear component comprises and the relevant information of acceleration detection with respect to acceleration axle Z.
Fig. 5 has shown the detailed plan view 500 of little processing multisensor 400 (see figure 4)s.As shown in Figure 5, little processing multisensor 500 comprises accelerometer 502,504,506 and 508.Accelerometer 502,504,506 and 508 comprise foursquare mass 503,505,507 and 509 substantially respectively, described mass anchors to substrate 501 by a plurality of deflections and is suspended on the described substrate.Particularly, each deflection structure of anchoring and suspended mass 503 comprises such as the such fixator of fixator 570 with such as the such stress relief element of stress relief element 560, each deflection of anchoring/suspended mass 505 comprises such as the such fixator of fixator 572 with such as the such stress relief element of stress relief element 562, each deflection of anchoring/suspended mass 507 comprises such as the such fixator of fixator 574 with such as the such stress relief element of stress relief element 564, and each deflection of anchoring/suspended mass 509 comprises such as the such fixator of fixator 576 with such as the such stress relief element of stress relief element 566.Should be noted that fixator/stress relief element is to the longitudinal axis and transverse axis layout along each mass 503,505,507 and 509.Multisensor 500 further comprises fork 510,512,514 and 516, described fork is configured to connect adjacent mass and rotatablely moves to allow the anti-phase relatively of described mass, and the homophase that prevents described mass rotatablely moves, and this is known in the art.
Should be noted that mass 503,505,507 and 509 and fork 510,512,514 and 516 basically respectively with the mass 403,405,407 of multisensor 400 (see figure 4)s and 409 and fork 410,412,414 and 416 equivalences.And the rotation shown in Fig. 5 detects axle X and Y and axis of acceleration sensing Z and detects axle X and Y and axis of acceleration sensing Z corresponding to top with reference to figure 4 described rotations.
Multisensor 500 (see figure 5)s comprise a plurality of drive electrode structures 540,542,544 and 546, described drive electrode structure anchor is to substrate 501, and is configured to respectively oscillating mass piece 503,505 rotatably, 507 and 509, thus adjacent mass vibrates anti-phasely.In the drive electrode structure 540,542,544 and 546 each comprises a plurality of fingers, and described finger is arranged along the radial axle of described mass, and intersected with the corresponding a plurality of fingers that extend from least one radial edges of described mass.In a preferred embodiment, drive electrode structure 540,542,544 and 546 is arranged in mass 503,505 respectively diagonally, on 507 and 509.
Be to be understood that accelerometer 502,504,506 and 508 and fork 510,512,514 and 516 be arranged on each side of lateral symmetry axle of multisensor 500 and vertically on each side of axis of symmetry in the mirror image mode.Therefore, multisensor 500 can be centered on the mould (not shown) symmetrically to reduce die surface distortion and the gradient adverse effect to the performance of multisensor 500.
Exemplified a kind of method of operation such as the so current disclosed little processing multisensor of multisensor 200 (see figure 2)s with reference to figure 6.Described as step 602, when multisensor 200 carries out linearity/when rotatablely moving, mass 203 and 205 is anti-phasely vibrated rotatably around turning axle 282 and 284 respectively.Should be appreciated that turning axle X and Y are arranged in the plane of multisensor substrate 201, linear acceleration axle Z is perpendicular to described turning axle.Then, described in step 604, acceleration detection signal Az+ay (w) and the Az-ay (w) that is produced by acceleration detection electrode structure 208-209 subtracted each other respectively, to produce detection signal difference 2ay (w), equally as described in the step 604, the acceleration detection signal Bz+by (w) and the Bz-by (w) that are produced by acceleration detection electrode structure 210-211 are subtracted each other, to produce detection signal difference 2by (w).Described in step 606, signal 2ay (w) and 2by (w) addition then, producing signal summation 2ay (w)+2by (w), this summation comprises and the relevant information of angular velocity detection with respect to turning axle Y (Y rotation).Then, described in step 608, acceleration detection signal Az+ax (w) and the Az-ax (w) that is produced by acceleration detection electrode structure 212-213 subtracts each other respectively, to produce detection signal difference 2ax (w), equally as described in the step 608, the acceleration detection signal Bz+bx (w) and the Bz-bx (w) that are produced by acceleration detection electrode structure 214-215 subtract each other, to produce detection signal difference 2bx (w).Described in step 610, signal 2ax (w) and 2bx (w) addition then, producing signal summation 2ax (w)+2bx (w), this summation comprises and the relevant information of angular velocity detection with respect to turning axle X (X rotation).At last, described in step 612, signal Az+ay (w), Az-ay (w), Bz+by (w), Bz-by (w), Az+ax (w), Az-ax (w), Bz+bx (w) and, Bz-bx (w) addition, producing summation 4Az+4Bz, this summation comprises and the relevant information of acceleration detection with respect to acceleration axle Z (Z acceleration).
Those of ordinary skill in the art will understand and can improve and change and do not break away from innovative idea disclosed herein above-mentioned little processing multisensor that an axis of acceleration sensing and two axis of angular rate sensing are provided.Therefore, except the scope and spirit by appended claim limit, the present invention should be considered as being subjected to other restriction.
Claims (16)
1. multisensor comprises:
Substrate;
At least one first mass, it is connected to described substrate and hangs thereon, and this first mass has the related longitudinal axis and transverse axis, and related turning axle, and this turning axle is perpendicular to the related with it described longitudinal axis and transverse axis;
At least one second mass, it is connected to described substrate and hangs thereon, and this second mass has the related longitudinal axis and transverse axis, and related turning axle, this turning axle is perpendicular to the related with it described longitudinal axis and transverse axis, and this second mass is adjacent with described first mass
At least one drives structure, it operationally is connected to described first and second masses, and this drives structure is configured to vibrate described first and second masses around turning axle separately anti-phasely;
First and second pairs of acceleration detection structures relative on diameter, it operationally is connected to described first mass, and this first and second acceleration detection structure is to arranging along the longitudinal axis of described first mass and transverse axis respectively; With
Third and fourth pair of acceleration detection structure relative on diameter, it operationally is connected to described second mass, and this third and fourth acceleration detection structure is to arranging along the longitudinal axis of described second mass and transverse axis respectively,
Wherein each longitudinal axis is parallel to first rotation and detects axle, and each transverse axis detects axle in second rotation, and first and second rotations detect axle and are positioned at a substrate plane,
Wherein each acceleration detection structure is configured to produce detection signal separately, this detection signal separately comprises and the relevant information of angular velocity detection that detects axle with respect to described first and second rotations, and further comprise and the information relevant with respect to the acceleration detection of axis of acceleration sensing, described axis of acceleration sensing is perpendicular to described substrate plane
Wherein each in the detection signal separately that is produced by described first and the 3rd pair of acceleration detection structure comprises with respect to the linear component of described axis of acceleration sensing and detects the rotational component of axle with respect to described first rotation, wherein each in the detection signal separately that is produced by described second and the 4th pair of acceleration detection structure comprises with respect to the linear component of described axis of acceleration sensing and detects the rotational component of axle with respect to described second rotation
Described multisensor further comprises signal processing unit, this signal processing unit is configured to make up the linearity test component of signal separately that produced by described first, second, third and the 4th pair of acceleration detection structure to produce output signal, this output signal comprises and the information relevant with respect to the acceleration detection of described axis of acceleration sensing, and
First and second pairs of speed detector electrode structure that difference operationally links to each other with first and second masses, described first and second pairs of speed detector electrode structure are respectively along the transverse axis setting of first and second masses, first and second pairs of speed detector electrode structure are configured to detect the vibration velocity of first and second masses respectively
Wherein said at least one drives structure comprises first and second drives structure that operationally link to each other with first and second masses respectively, and described first and second drives structure are provided with diagonally with respect to the transverse axis of first and second masses respectively.
2. multisensor according to claim 1, wherein said signal processing unit further is configured to make up the rotation detection signal component separately that produced by described first and the 3rd pair of acceleration detection structure producing output signal, and this output signal comprises and the relevant information of angular velocity detection that detects with respect to described first rotation spool.
3. multisensor according to claim 1, wherein said signal processing unit further is configured to make up the rotation detection signal component separately that produced by described second and the 4th pair of acceleration detection structure producing output signal, and this output signal comprises and the relevant information of angular velocity detection that detects with respect to described second rotation spool.
4. multisensor according to claim 1, further comprise the flexible member that connects described first mass and described second mass, this flexible member is configured to allow the vibrate in opposite phase motion of each mass, and prevents the in phase vibration campaign of each mass.
5. multisensor according to claim 1, comprise two first masses and two second masses of being suspended on the described substrate, these four masses are arranged such that each mass is adjacent with other two masses, wherein said drives structure is configured to vibrate this four masses around turning axle separately anti-phasely, thereby each mass moves with respect to adjacent mass in identical and opposite mode.
6. by little processing, described first and second rotations detect the plane that axle is arranged in described little process substrate on described substrate for multisensor according to claim 1, wherein described at least first and second masses.
7. multisensor comprises:
Substrate;
At least one first mass, it is connected to described substrate and hangs thereon, and this first mass has the related longitudinal axis and transverse axis, and related turning axle, and this turning axle is perpendicular to the related with it described longitudinal axis and transverse axis;
At least one second mass, it is connected to described substrate and hangs thereon, and this second mass has the related longitudinal axis and transverse axis, and related turning axle, this turning axle is perpendicular to the related with it described longitudinal axis and transverse axis, and this second mass is adjacent with described first mass
At least one drives structure, it operationally is connected to described first and second masses, and this drives structure is configured to vibrate described first and second masses around turning axle separately anti-phasely;
First and second pairs of acceleration detection structures relative on diameter, it operationally is connected to described first mass, and this first and second acceleration detection structure is to arranging along the longitudinal axis of described first mass and transverse axis respectively; With
Third and fourth pair of acceleration detection structure relative on diameter, it operationally is connected to described second mass, and this third and fourth acceleration detection structure is to arranging along the longitudinal axis of described second mass and transverse axis respectively,
Wherein each longitudinal axis is parallel to first rotation and detects axle, and each transverse axis detects axle in second rotation, and described first and second rotations detect axle and are positioned at a substrate plane,
Wherein each acceleration detection structure is configured to produce detection signal separately, this detection signal separately comprises and the relevant information of angular velocity detection that detects axle with respect to described first and second rotations, and further comprise and the information relevant with respect to the acceleration detection of axis of acceleration sensing, described axis of acceleration sensing is perpendicular to described substrate plane
Described multisensor further comprises: first amplifier, it is configured to receive a pair of first detection signal from described first pair of acceleration detection structure, the 3rd amplifier, it is configured to receive a pair of the 3rd detection signal from described the 3rd pair of acceleration detection structure, the described first and the 3rd amplifier further is configured to produce the first and the 3rd output signal of the difference of the difference that comprises described a pair of first detection signal respectively and described a pair of the 3rd detection signal, this first comprises with the 3rd output signal and detects the relevant information of angular velocity detection of axle with respect to described first rotation, and
First and second pairs of speed detector electrode structure that difference operationally links to each other with first and second masses, described first and second pairs of speed detector electrode structure are respectively along the transverse axis setting of first and second masses, first and second pairs of speed detector electrode structure are configured to detect the vibration velocity of first and second masses respectively
Wherein said at least one drives structure comprises first and second drives structure that operationally link to each other with first and second masses respectively, and described first and second drives structure are provided with diagonally with respect to the transverse axis of first and second masses respectively.
8. multisensor comprises:
Substrate;
At least one first mass, it is connected to described substrate and hangs thereon, and this first mass has the related longitudinal axis and transverse axis, and related turning axle, and this turning axle is perpendicular to the related with it described longitudinal axis and transverse axis;
At least one second mass, it is connected to described substrate and hangs thereon, and this second mass has the related longitudinal axis and transverse axis, and related turning axle, this turning axle is perpendicular to the related with it described longitudinal axis and transverse axis, and this second mass is adjacent with described first mass
At least one drives structure, it operationally is connected to described first and second masses, and this drives structure is configured to vibrate described first and second masses around turning axle separately anti-phasely;
First and second pairs of acceleration detection structures relative on diameter, it operationally is connected to described first mass, and this first and second acceleration detection structure is to arranging along the longitudinal axis of described first mass and transverse axis respectively; With
Third and fourth pair of acceleration detection structure relative on diameter, it operationally is connected to described second mass, and this third and fourth acceleration detection structure is to arranging along the longitudinal axis of described second mass and transverse axis respectively,
Wherein each longitudinal axis is parallel to first rotation and detects axle, and each transverse axis detects axle in second rotation, and first and second rotations detect axle and are positioned at a substrate plane,
Wherein each acceleration detection structure is configured to produce detection signal separately, this detection signal separately comprises and the relevant information of angular velocity detection that detects axle with respect to described first and second rotations, and further comprise and the information relevant with respect to the acceleration detection of axis of acceleration sensing, described axis of acceleration sensing is perpendicular to described substrate plane
Described multisensor further comprises: second amplifier, it is configured to receive a pair of second detection signal from described second pair of acceleration detection structure, the 4th amplifier, it is configured to receive a pair of the 4th detection signal from described the 4th pair of acceleration detection structure, the described second and the 4th amplifier further is configured to produce the second and the 4th output signal of the difference of the difference that comprises described a pair of second detection signal respectively and described a pair of the 4th detection signal, this second comprises with the 4th output signal and detects the relevant information of angular velocity detection of axle with respect to described second rotation, and
First and second pairs of speed detector electrode structure that difference operationally links to each other with first and second masses, described first and second pairs of speed detector electrode structure are respectively along the transverse axis setting of first and second masses, first and second pairs of speed detector electrode structure are configured to detect the vibration velocity of first and second masses respectively
Wherein said at least one drives structure comprises first and second drives structure that operationally link to each other with first and second masses respectively, and described first and second drives structure are provided with diagonally with respect to the transverse axis of first and second masses respectively.
9. multisensor comprises:
Substrate;
At least one first mass, it is connected to described substrate and hangs thereon, and this first mass has the related longitudinal axis and transverse axis, and related turning axle, and this turning axle is perpendicular to the related with it described longitudinal axis and transverse axis;
At least one second mass, it is connected to described substrate and hangs thereon, and this second mass has the related longitudinal axis and transverse axis, and related turning axle, this turning axle is perpendicular to the related with it described longitudinal axis and transverse axis, and this second mass is adjacent with described first mass
At least one drives structure, it operationally is connected to described first and second masses, and this drives structure is configured to vibrate described first and second masses around turning axle separately anti-phasely;
First and second pairs of acceleration detection structures relative on diameter, it operationally is connected to described first mass, and this first and second acceleration detection structure is to arranging along the longitudinal axis of described first mass and transverse axis respectively; With
Third and fourth pair of acceleration detection structure relative on diameter, it operationally is connected to described second mass, and this third and fourth acceleration detection structure is to arranging along the longitudinal axis of described second mass and transverse axis respectively,
Wherein each longitudinal axis is parallel to first rotation and detects axle, and each transverse axis detects axle in second rotation, and first and second rotations detect axle and are positioned at a substrate plane,
Wherein each acceleration detection structure is configured to produce detection signal separately, this detection signal separately comprises and the relevant information of angular velocity detection that detects axle with respect to described first and second rotations, and further comprise and the information relevant with respect to the acceleration detection of axis of acceleration sensing, described axis of acceleration sensing is perpendicular to described substrate plane
Described multisensor further comprises: first amplifier, it is configured to receive a pair of first detection signal from described first pair of acceleration detection structure, second amplifier, it is configured to receive a pair of second detection signal from described second pair of acceleration detection structure, the 3rd amplifier, it is configured to receive a pair of the 3rd detection signal from described the 3rd pair of acceleration detection structure, the 4th amplifier, it is configured to receive a pair of the 4th detection signal from described the 4th pair of acceleration detection structure, described first, second, third and fourth amplifier further is configured to generation and comprises the described a pair of first detection signal sum respectively, the described a pair of second detection signal sum, first of described a pair of the 3rd detection signal sum and described a pair of the 4th detection signal sum, second, third and fourth output signal, this is first years old, second, third and fourth output signal comprises and the information relevant with respect to the acceleration detection of described axis of acceleration sensing, and
First and second pairs of speed detector electrode structure that difference operationally links to each other with first and second masses, described first and second pairs of speed detector electrode structure are respectively along the transverse axis setting of first and second masses, first and second pairs of speed detector electrode structure are configured to detect the vibration velocity of first and second masses respectively
Wherein said at least one drives structure comprises first and second drives structure that operationally link to each other with first and second masses respectively, and described first and second drives structure are provided with diagonally with respect to the transverse axis of first and second masses respectively.
10. method of operating multisensor may further comprise the steps:
The turning axle that centers on separately by at least one drives structure vibrates at least one first mass and at least one second mass anti-phasely, described first and second masses are adjacent one another are and be connected to and be suspended on the substrate, each mass has perpendicular to the longitudinal axis of the association of described turning axle separately and transverse axis
Wherein each longitudinal axis is parallel to first rotation and detects axle, and each transverse axis detects axle in second rotation, and first and second rotations detect axle and are positioned at a substrate plane,
The acceleration detection structure that first and second pairs of diameters by operationally being connected to described first mass are relative produces detection signal separately, and the described first and second acceleration detection structures are arranged the longitudinal axis and the transverse axis along described first mass respectively; With
The acceleration detection structure that third and fourth pair of diameter by operationally being connected to described second mass is relative produces detection signal separately, and the described third and fourth acceleration detection structure arranges the longitudinal axis and the transverse axis along described second mass respectively,
Wherein producing the described detection signal separately that produces in the step described first and second comprises and the relevant information of angular velocity detection that detects axle with respect to described first and second rotations, and further comprise and the information relevant with respect to the acceleration detection of axis of acceleration sensing, described axis of acceleration sensing is perpendicular to described substrate plane
Wherein produce in the steps by in the detection signal separately of described first and the 3rd pair of acceleration detection structure generation each described first and second and comprise with respect to the linear component of described axis of acceleration sensing and detect the rotational component of axle with respect to described first rotation; Wherein produce in the steps by in the detection signal separately of described second and the 4th pair of acceleration detection structure generation each described first and second and comprise with respect to the linear component of described axis of acceleration sensing and detect the rotational component of axle with respect to described second rotation
Described method further may further comprise the steps:
The linearity test component of signal separately that is produced by described first, second, third and the 4th pair of acceleration detection structure by the combination of signal processing unit is to produce output signal, this output signal comprises and the information relevant with respect to the acceleration detection of described axis of acceleration sensing, and
Detect the vibration velocity of first and second masses by first and second pairs of speed detector electrode structure that operationally link to each other respectively with first and second masses, described first and second pairs of speed detector electrode structure are respectively along the transverse axis setting of first and second masses
Wherein said at least one drives structure comprises first and second drives structure that operationally link to each other with first and second masses respectively, and described first and second drives structure are provided with diagonally with respect to the transverse axis of first and second masses respectively.
11. method according to claim 10, further may further comprise the steps: the rotation detection signal component separately that is produced by described first and the 3rd pair of acceleration detection structure by the combination of this signal processing unit to be producing output signal, and this output signal comprises and the relevant information of angular velocity detection that detects with respect to described first rotation spool.
12. method according to claim 10, further may further comprise the steps: the rotation detection signal component separately that is produced by described second and the 4th pair of acceleration detection structure by the combination of this signal processing unit to be producing output signal, and this output signal comprises and the relevant information of angular velocity detection that detects with respect to described second rotation spool.
13. method according to claim 10, wherein said vibrating step comprises that the turning axle that centers on separately by a drives structure vibrates two first masses and two second masses anti-phasely, these four masses are suspended on the described substrate, and these four masses are arranged such that each mass is adjacent with other two masses, these four masses are vibrated by described drives structure, thereby each mass moves with respect to adjacent mass in identical and opposite mode.
14. a method of operating multisensor may further comprise the steps:
The turning axle that centers on separately by at least one drives structure vibrates at least one first mass and at least one second mass anti-phasely, described first and second masses are adjacent one another are and be connected to and be suspended on the substrate, each mass has perpendicular to the longitudinal axis of the association of described turning axle separately and transverse axis
Wherein each longitudinal axis is parallel to first rotation and detects axle, and each transverse axis detects axle in second rotation, and first and second rotations detect axle and are positioned at a substrate plane,
The relative acceleration detection structure on diameter of the first and second couple by operationally being connected to described first mass produces detection signal separately, and the described first and second acceleration detection structures are arranged the longitudinal axis and the transverse axis along described first mass respectively; With
The relative acceleration detection structure on diameter of the third and fourth couple by operationally being connected to described second mass produces detection signal separately, the described third and fourth acceleration detection structure is to arranging along the longitudinal axis of described second mass and transverse axis respectively
Wherein producing the described detection signal separately that produces in the step described first and second comprises and the relevant information of angular velocity detection that detects axle with respect to described first and second rotations, and further comprise and the information relevant with respect to the acceleration detection of axis of acceleration sensing, described axis of acceleration sensing is perpendicular to described substrate plane
Described method further may further comprise the steps:
Receive a pair of first detection signal by first amplifier from described first pair of acceleration detection structure;
Receive a pair of the 3rd detection signal by the 3rd amplifier from described the 3rd pair of acceleration detection structure;
Produce the first and the 3rd output signal of the difference of the difference comprise described a pair of first detection signal respectively and described a pair of the 3rd detection signal by the described first and the 3rd amplifier, this first comprises and the relevant information of angular velocity detection that detects with respect to described first rotation spool with the 3rd output signal; And
Detect the vibration velocity of first and second masses by first and second pairs of speed detector electrode structure that operationally link to each other respectively with first and second masses, described first and second pairs of speed detector electrode structure are respectively along the transverse axis setting of first and second masses
Wherein said at least one drives structure comprises first and second drives structure that operationally link to each other with first and second masses respectively, and described first and second drives structure are provided with diagonally with respect to the transverse axis of first and second masses respectively.
15. a method of operating multisensor may further comprise the steps:
The turning axle that centers on separately by at least one drives structure vibrates at least one first mass and at least one second mass anti-phasely, described first and second masses are adjacent one another are and be connected to and be suspended on the substrate, each mass has perpendicular to the longitudinal axis of the association of described turning axle separately and transverse axis
Wherein each longitudinal axis is parallel to first rotation and detects axle, and each transverse axis detects axle in second rotation, and first and second rotations detect axle and are positioned at a substrate plane,
The relative acceleration detection structure on diameter of the first and second couple by operationally being connected to described first mass produces detection signal separately, and the described first and second acceleration detection structures are arranged the longitudinal axis and the transverse axis along described first mass respectively; With
The relative acceleration detection structure on diameter of the third and fourth couple by operationally being connected to described second mass produces detection signal separately, the described third and fourth acceleration detection structure is to arranging along the longitudinal axis of described second mass and transverse axis respectively
Wherein producing the described detection signal separately that produces in the step described first and second comprises and the relevant information of angular velocity detection that detects axle with respect to described first and second rotations, and further comprise and the information relevant with respect to the acceleration detection of axis of acceleration sensing, described axis of acceleration sensing is perpendicular to described substrate plane
Described method further may further comprise the steps:
Receive a pair of second detection signal by second amplifier from described second pair of acceleration detection structure;
Receive a pair of the 4th detection signal by the 4th amplifier from described the 4th pair of acceleration detection structure;
Produce the second and the 4th output signal of the difference of the difference comprise described a pair of second detection signal respectively and described a pair of the 4th detection signal by the described second and the 4th amplifier, this second comprises and the relevant information of angular velocity detection that detects with respect to described second rotation spool with the 4th output signal; And
Detect the vibration velocity of first and second masses by first and second pairs of speed detector electrode structure that operationally link to each other respectively with first and second masses, described first and second pairs of speed detector electrode structure are respectively along the transverse axis setting of first and second masses
Wherein said at least one drives structure comprises first and second drives structure that operationally link to each other with first and second masses respectively, and described first and second drives structure are provided with diagonally with respect to the transverse axis of first and second masses respectively.
16. a method of operating multisensor may further comprise the steps:
The turning axle that centers on separately by at least one drives structure vibrates at least one first mass and at least one second mass anti-phasely, described first and second masses are adjacent one another are and be connected to and be suspended on the substrate, each mass has perpendicular to the longitudinal axis of the association of described turning axle separately and transverse axis
Wherein each longitudinal axis is parallel to first rotation and detects axle, and each transverse axis detects axle in second rotation, and first and second rotations detect axle and are positioned at a substrate plane,
The relative acceleration detection structure on diameter of the first and second couple by operationally being connected to described first mass produces detection signal separately, and the described first and second acceleration detection structures are arranged the longitudinal axis and the transverse axis along described first mass respectively; With
The relative acceleration detection structure on diameter of the third and fourth couple by operationally being connected to described second mass produces detection signal separately, the described third and fourth acceleration detection structure is to arranging along the longitudinal axis of described second mass and transverse axis respectively
Wherein producing the described detection signal separately that produces in the step described first and second comprises and the relevant information of angular velocity detection that detects axle with respect to described first and second rotations, and further comprise and the information relevant with respect to the acceleration detection of axis of acceleration sensing, described axis of acceleration sensing is perpendicular to described substrate plane
Described method further may further comprise the steps:
Receive a pair of first detection signal by first amplifier from described first pair of acceleration detection structure;
Receive a pair of second detection signal by second amplifier from described second pair of acceleration detection structure;
Receive a pair of the 3rd detection signal by the 3rd amplifier from described the 3rd pair of acceleration detection structure;
Receive a pair of the 4th detection signal by the 4th amplifier from described the 4th pair of acceleration detection structure;
Comprise the described a pair of first detection signal sum respectively by the generation of the described first, second, third and the 4th amplifier, the described a pair of second detection signal sum, the first, second, third and the 4th output signal of described a pair of the 3rd detection signal sum and described a pair of the 4th detection signal sum, this first, second, third comprises and the information relevant with respect to the acceleration detection of described axis of acceleration sensing with the 4th output signal; And
Detect the vibration velocity of first and second masses by first and second pairs of speed detector electrode structure that operationally link to each other respectively with first and second masses, described first and second pairs of speed detector electrode structure are respectively along the transverse axis setting of first and second masses
Wherein said at least one drives structure comprises first and second drives structure that operationally link to each other with first and second masses respectively, and described first and second drives structure are provided with diagonally with respect to the transverse axis of first and second masses respectively.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US46609003P | 2003-04-28 | 2003-04-28 | |
| US60/466,090 | 2003-04-28 | ||
| US10/462,542 | 2003-06-16 |
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| CN100468062C true CN100468062C (en) | 2009-03-11 |
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| CNB2004800182911A Expired - Fee Related CN100468062C (en) | 2003-04-28 | 2004-04-27 | Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103630127A (en) * | 2012-05-11 | 2014-03-12 | 罗伯特·博世有限公司 | Yaw-rate sensor |
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|---|---|---|---|---|
| US8042394B2 (en) | 2007-09-11 | 2011-10-25 | Stmicroelectronics S.R.L. | High sensitivity microelectromechanical sensor with rotary driving motion |
| DE102007054505B4 (en) * | 2007-11-15 | 2016-12-22 | Robert Bosch Gmbh | Yaw rate sensor |
| DE102007060942A1 (en) * | 2007-12-18 | 2009-06-25 | Robert Bosch Gmbh | Rotation rate sensor and method for operating a rotation rate sensor |
| ITTO20090489A1 (en) * | 2008-11-26 | 2010-12-27 | St Microelectronics Srl | READING CIRCUIT FOR A MULTI-AXIS MEMS GYROSCOPE WITH DETECTED DETECTION DIRECTIONS COMPARED TO THE REFERENCE AXES, AND CORRESPONDING MEMS MULTI-AXIS GIROSCOPE |
| US8266961B2 (en) * | 2009-08-04 | 2012-09-18 | Analog Devices, Inc. | Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies |
| DE102011056971A1 (en) * | 2011-12-23 | 2013-06-27 | Maxim Integrated Products, Inc. | Micromechanical Coriolis rotation rate sensor |
| EP3546954B1 (en) | 2016-01-07 | 2022-12-14 | Analog Devices, Inc. | 3-axis angular accelerometer |
| US10732198B2 (en) | 2017-08-09 | 2020-08-04 | Analog Devices, Inc. | Integrated linear and angular MEMS accelerometers |
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|---|---|---|---|---|
| US4744248A (en) * | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4744248A (en) * | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103630127A (en) * | 2012-05-11 | 2014-03-12 | 罗伯特·博世有限公司 | Yaw-rate sensor |
| CN103630127B (en) * | 2012-05-11 | 2017-10-27 | 罗伯特·博世有限公司 | Speed probe |
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