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Publication numberCN100442612 C
Publication typeGrant
Application numberCN 200610046473
Publication date10 Dec 2008
Filing date29 Apr 2006
Priority date29 Apr 2006
Also published asCN101064409A
Publication number200610046473.0, CN 100442612 C, CN 100442612C, CN 200610046473, CN-C-100442612, CN100442612 C, CN100442612C, CN200610046473, CN200610046473.0
Inventors于海军, 唐书凯, 多丽萍, 桑凤亭, 健 汪, 金玉奇
Applicant中国科学院大连化学物理研究所
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
Complex electrode structure of longitudinal stream gas discharge system
CN 100442612 C
Abstract  translated from Chinese
本发明是一种流动气体放电的电极结构,具体地说是纵向流气体放电体系的复电极结构,包括阳极、石英管、双阴极,阳极为柱状空腔结构,通过密封套与石英管相连,双阴极为两个分别放置,第一阴极为环状空腔结构,同样通过密封套与石英管相连,阳极和石英管,石英管和第一阴极组成密封结构,第二阴极是螺旋盘管结构,垂直放置在第一阴极外侧气流下游过渡段位置。 The present invention is an electrode structure for a discharge of the flow of gas, particularly complex electrode structure longitudinal flow of gas discharge system, comprising an anode, a quartz tube, double cathode, anode to columnar cavity structure, connected through the gland with the quartz tube, double cathodes were placed into two, the first cathode is annular cavity structure, also connected through the gland with the quartz tube, the anode and the quartz tube, quartz tube and a first cathode composition seal structure, a second cathode helical coil structure vertically placed in the outside air flow downstream of the first cathode transition position. 本发明通过采用双阴极结构,得到了很好的放电稳定性,注入功率明显提高;对于基于活性粒子的放电引发的化学激光来说,活性粒子产量得到了很大提高,双阴极结构提高了活性粒子的利用效率。 The present invention dual cathode structure, get a good discharge stability, significantly improved power injection; for discharge based on active particles caused chemical laser, the active particles production has been greatly improved, dual cathode structure to improve the activity use efficiency of particles.
Claims(5)  translated from Chinese
1.纵向流气体放电体系的复电极结构,其特征在于:包括阳极、石英管、双阴极,阳极(1)为柱状空腔结构,通过密封套与石英管(2)相连,双阴极为两个分别放置的第一阴极(3)和第二阴极(4),第一阴极(3)为环状空腔结构,同样通过密封套与石英管(2)相连,阳极(1)和石英管(2),石英管(2)和第一阴极组成密封结构,第二阴极(4)是螺旋盘管结构,放置在第一阴极(3)出口气流下游副气流加入的位置,主气流垂直穿过螺旋。 Complex electrode structures 1. Longitudinal flow gas discharge system, which is characterized by: an anode, a quartz tube, double cathode, anode (1) is a cylindrical cavity structure, connected through the gland and the quartz tube (2), two double cathode two were placed in the first cathode (3) and a second cathode (4), the first cathode (3) an annular cavity structure, the same gland through the quartz tube (2) is connected to the anode (1) and quartz tube (2), quartz tube (2) and the first cathode composition seal structure, a second cathode (4) is a helical coil structure, placed in the first cathode (3) downstream of the secondary gas outlet flow position to join the main stream vertical wear over spiral.
2. 按照权利要求l所述纵向流气体放电体系的复电极结构,其特征在于:所述石英管(2)为放电等离子管;阳极(1)、第一阴极(3)和第二阴极(4)均为金属材料加工而成。 2. The claim l complex electrode structure of the longitudinal flow of gas discharge system, characterized in that: the quartz tube (2) for the discharge plasma tube; anode (1), the first cathode (3) and a second cathode ( 4) are metal materials processing.
3. 按照权利要求l所述纵向流气体放电体系的复电极结构,其特征在于:所述阳极(1)、第一阴极(3)和第二阴极(4)内部均采用循环水冷却,其上分别设置有循环水的进出口。 3. The claim l complex electrode structure of the longitudinal flow of gas discharge system, wherein: the anode (1), the first cathode (3) and a second cathode (4) are used internally circulating water cooling, which respectively provided with a circulating water import and export.
4. 按照权利要求1所述纵向流气体放电体系的复电极结构,其特征在于:所述石英管(2)为双层结构,其上设置有循环水的进出口,内部水循环冷却,在石英管(2)靠近阳极(1)端的侧壁上设置有流动气体的进气孔(5)。 The complex electrode structure according to claim 1 wherein the longitudinal flow of gas discharge system, characterized in that: the quartz tube (2) for the two-layer structure, on which the import and export of recycled water, internal water cooling, in quartz tube (2) near the anode (1) is provided with a flow of the gas inlet holes on the side wall side (5).
5. 按照权利要求l所述纵向流气体放电体系的复电极结构,其特征在于:所述石英管(2)上设置有测压孔。 5. The claim l complex electrode structure of the longitudinal flow of gas discharge system, comprising: provided with taps (2) of the quartz tube.
Description  translated from Chinese

纵向流气体放电体系的复电极结构 Longitudinal flow complex electrode structure of the gas discharge system

技术领域 Technical Field

本发明涉及一种流动气体放电的电极结构,来提高气流放电的稳定性, 加强气流间的混合。 The present invention relates to an electrode structure for a discharge of the flow of gas to increase air flow discharge stability, strengthen inter-mixed gas stream. 通过这种电极结构的气流,不但提高了活性粒子的浓度,提高了放电的稳定性,而且提高了活性粒子的利用效率,从而推动了流动气体放电的发展。 This electrode structure by air, not only improves the concentration of active particles and to improve the discharge stability, and improve the utilization efficiency of active particles, so as to promote the flow of the gas discharge development.

背景技术 Background

氧碘化学激光器发展已有二十年的历史,也具有一定的规模。 Chemical oxygen iodine laser development has been 20 years of history, but also has a certain scale. 由于氧发生器为气液反应,使得氧碘化学激光器的体积比功率很难提高,为此, Since the oxygen generator is a gas-liquid reaction, so that the volume of chemical oxygen iodine laser is difficult to increase specific power, therefore,

縮减氧碘激光器的体积和重量都受到限制。 Reduced oxygen-iodine lasers size and weight restrictions. 1990年Bower和Yang报道观察到NCl(a】A)+I的传能,引起了世界人们的极大关注。 1990 Bower and Yang reported observed NCl (a} A) + I can pass, causing great concern in the world. 由NClWA)泵浦I 原子的全气相化学激光器能否产生和放大以及该体系的相关动力学的研究近几年也广泛展开。 By the NClWA) I pumped full atomic vapor laser can produce and amplify chemical and related dynamics of the system in recent years has launched extensive research.

自19卯年Bower和Yang报道观察到NCl(a'A)+I的传能以来,对亚稳态粒子NCl(a^)猝灭及传能动力学的研究成为热点。 19 years since Mao and Yang reported Bower observed NCl (a'A) + since I can pass on the metastable particle NCl (a ^) quenching kinetics of energy transfer and research has become a hot spot. 93-95年间,Denver 大学的Coombe等人用193nm激光光解C1N3及CH2I2/C1N3的体系,并研究了诸多粒子对NCl(a)的猝灭动力学。 93--95 years, Coombe and other people at the University of Denver with a 193nm laser photolysis C1N3 and CH2I2 / C1N3 system, and study many particle NCl (a) quenching kinetics. 在1995年Ray和Coombe报道了NCl(a) 泵浦的碘原子化学激光器,它是光引发,非流动的;用探头记录到激光的输出波形,并没有测量激光的输出功率。 In 1995 Ray and Coombe reported NCl (a) pumped iodine chemical laser, which is a photo-initiator, illiquid; probe recorded the output waveform of the laser, and did not measure the laser output power.

1999年西部光电子会议上,美国空军武器实验室报告了"NCl(a)/1体系测量1.315m小信号增益",是用直流放电(2KW)F2:He-l:4来产生F,加入DC1和HI进行置换反应产生CI和I,测得1.315m小信号增益为0.02%cm"。 作者分析了增益如此低的原因是受F粒子数密度的限制,因为F2流量小于0.75mmol/s,直流放电才更高效。同时也提出下步工作目标是提高F粒子数密度。2000年首次报道了流动的NCl(a)/I体系的出光装置AGILI,出光功率达到180mW。 2003年和2004年分别报道了扩大和改进的AGIL II出光功率达到15W和31W。 West photoelectron meeting, the Air Force Weapons Laboratory report in 1999 the "NCl (a) / 1 system measuring 1.315m small signal gain" is a DC discharge (2KW) F2: He-l: 4 to produce F, added DC1 and HI replacement reaction CI and I, 1.315m measured small signal gain of 0.02% cm ". The author analyzes the reasons for such a low gain is F particle number density is limited by, because F2 flow is less than 0.75mmol / s, DC discharge is more efficient at the same time also put under further work aims to improve the F particle number density. 2000 first reported the flow of NCl (a) / a light-emitting device AGILI I system, the light power of 180mW. 2003 and 2004, respectively, reports the expansion and improvement of AGIL II optical power reaches 15W and 31W.

以上研究的AGIL I和AGIL II都是由直流放电产生氟原子,间接产生氯原子,来实现激发态碘原子出光的。 More research and AGIL II AGIL I are from DC discharge fluorine atom, chlorine atom indirectly to achieve the excited light of iodine atom. 因此要想提高F/DC1/HI/HN3全气相碘激光系统的小信号增益和输出功率,必须要提高F原子的产量,因为tc 原子的多少直接影响和限制该体系的效率。 Therefore, in order to improve small-signal gain and output power F / DC1 / HI / HN3 Full Gas iodine laser system, it must increase production F atoms, because little direct influence and restrict the efficiency of the system tc atoms. 上述报道虽然都提及直流放电产生氟原子,但没有提到直流放电的放电模式和电极结构。 Although the above mentioned DC discharge are reported a fluorine atom, but does not mention the discharge mode and a DC discharge electrode structure. 发明内容 DISCLOSURE

本发明的目的是提供一种流动气体直流放电的电极结构。 Object of the present invention is to provide an electrode structure of a direct-current flow of the gas discharge. 通过该种电极结构,实现流动气体直流放电的稳定、注入功率的高效和活性粒子的髙利用率。 With this kind of electrode structure, to achieve a stable flow of the gas discharge current injected Gao efficient utilization of power and active particles.

为实现上述目的,本发明采用的技术方案是: To achieve the above object, the present invention is used:

纵向流气体放电体系的复电极结构,包括阳极、石英管、双阴极,阳极为柱状空腔结构,通过密封套与石英管相连,双阴极为两个分别放置,第一阴极为环状空腔结构,同样通过密封套与石英管相连,阳极和石英管, 石英管和第一阴极组成密封结构,第二阴极是螺旋盘管结构,垂直放置在第一阴极外侧气流下游过渡段位置,气体从一个阴极环的中心流出,碰撞并穿过另一个阴极。 Complex electrode structure longitudinal flow gas discharge system, comprising an anode, a quartz tube, double-cathode, anode columnar cavity structure, the sealing sleeve is connected through the quartz tube, were placed two double cathode, the cathode of the first annular cavity structure, also through the gland with the quartz tube is connected to the anode and the quartz tube, quartz tube and a first cathode composition seal structure, a second cathode helical coil structure, vertically on the outside of the first cathode gas flow downstream of the transition position, the gas from a central cathode ring out of the collision and through the other cathode.

所述阳极、第一阴极和第二阴极均为金属材料加工而成,它们内部均采用循环水冷却,其上分别设置有循环水的进出口;石英管为放电等离子管, 为双层结构,其上设置有循环水的进出口,内部水循环冷却,在石英管靠近阳极端的侧壁上设置有流动气体的进气孔,其中上还设置有测压孔。 The anode, cathode and the second cathode are first metal material processing, they are used internally circulating water cooling, which are provided respectively on the import and export of recycled water; quartz tube for the discharge plasma tube, two-layer structure, on which the import and export of recycled water, internal water cooling, in a quartz tube near the anode end of the side wall is provided with a flow of gas into the pores, which is also provided on the pressure taps.

本发明的有益效果是- The beneficial effects of the present invention is -

1、 气流放电的高稳定性。 1, air discharge and high stability. 本发明为一种流动气体放电的电极结构,通过采用双阴极结构,得到了很好的放电稳定性,气流间的均匀混合,注入功率明显提高。 The present invention provides an electrode structure for a discharge of the flow of gas through the dual cathode structure, get a good discharge stability, uniformly mixed gas stream between the injection power has improved significantly.

2、 提高了活性粒子产量。 2, increase the activity of particle production. 本发明对于基于活性粒子的放电引发的化学激光来说,活性粒子产量得到了很大提高,提髙了活性粒子的浓度。 The present invention is based on the discharge for the active particles caused chemical laser, the active particles production has been greatly improved, Gao mention the concentration of active particles.

3、 提高了活性粒子的利用效率。 3, to improve the utilization efficiency of the active particles. 本发明对于基于活性粒子的放电引发的化学激光来说,双阴极结构提高了活性粒子的利用效率。 The present invention is based on the discharge for the active particles caused chemical laser, a double cathode structure to improve the utilization efficiency of the active particles.

附图说明 Brief Description

图la为本发明的结构示意图; Figure la structure diagram of the present invention;

图lb为图la的俯视图; Figure la Figure lb is a top view;

图2a为本发明的具体实施结构示意图; DETAILED DESCRIPTION Fig. 2a schematic structure of the present invention;

图2b为图la的俯视图; Figure 2b shows a plan view of FIG. La;

图3为本发明实施例注入功率曲线。 3 is an embodiment of the injected power curve.

具体实施方式 DETAILED DESCRIPTION

本发明系统包括循环冷却的柱状阳极,放电石英管,循环冷却的双阴极,电极(包括阳极、第一阴极和第二阴极)选用导电和导热良好的金属材料,采用制冷方式减少电极的损耗。 The present invention includes a circulating cooling system of the columnar anode, quartz discharge tube, cooling the dual cathode electrode (comprising an anode, a first cathode and the second cathode) selection of a good electrically and thermally conductive metallic material, reduce the loss of cooling methods using electrodes. 由于是纵向流动,第一阴极两端要-有进气孔和出气孔。 Because it is a longitudinal flow to the first cathode ends - at intake and vents. 高压端的阳极是柱状结构,内部循环冷却,侧面进气; 接地的公共阴极为双阴极结构,双阴极为两个分别放置,两个阴极之间分开一定的距离放置, 一个为环状结构,放置在放电石英管的端口,气体从环的中心流出,另一个为旋转的蟪旋结构,放置在环状阴极出口气流下游副气流加入的位置,主气流垂直穿过螺旋,双阴极的内部循环冷却。 The high-pressure side of the anode is a cylindrical structure, internal circulation cooling, side air; grounded common cathode dual cathode structure, dual cathodes were placed into two separate certain distance between the two cathodes placed a cyclic structure, placement quartz tube in the discharge port, the gas flows from the center of the ring, the other rotating structure rotates cicada, the cathode is placed in the annular secondary gas outlet downstream of the air flow added to the position, the main gas stream vertically through the coil, the cathode internal circulation cooling bis .

实施例1 Example 1

请参阅图1所示,发明装置由阳极、石英放电管、双阴极结构组成。 Please refer to FIG. 1, the invention apparatus composed of an anode, a quartz discharge tube, double-cathode structures. 阳极1为圆柱空腔结构,内部循环水冷却,通过一有机玻璃密封套与石英 1 is a cylindrical cavity of the anode structure, the inner loop water cooling, through a plexiglass gland and quartz

管2相连,第一阴极3为环状空腔结构,内部循环冷却,同样通过有机玻璃密封套与石英管2相连,第二阴极4是螺旋盘管结构,垂直放置在气流下游过渡段位置,内部循环冷却。 Tube 2 is connected to the first cathode 3 is annular cavity structure, internal circulation cooling, also through plexiglass gland and quartz tube 2 is connected to the second cathode 4 is a helical coil structure, placed vertically in the air flow downstream of the transition position, internal circulation cooling. 5是流动气体的进气孔,气体流过放电管, 由阴极3的环中心流出,碰撞流经阴极4,增加扰动,加强混合。 5 is an air intake flow of gas, gas flow through the discharge tube, out of the ring center from the cathode 3, the collision flow through the cathode 4, increasing disturbances enhance mixing.

上述电极结构可应用于流动气体稳定放电、增加活性粒子产生浓度和提高活性粒子的利用效率。 The electrode structure can be applied to stabilize the flow of gas discharge, increasing the concentration of active particles produce and improve the utilization efficiency of the active particles.

实施例2 Example 2

下面以F/DC1/HI/HN3全气相碘激光系统的应用为例以说明本发明电极结构的使用方法。 The following application F / DC1 / HI / HN3 whole iodine vapor laser system as an example to illustrate the use of an electrode structure of the present invention.

申请人利用本发明即混合反应气流放电体系的电极结构来产生活性粒子氟原子,并且首次将该发明应用于F/DCl/HI/HN3全气相碘激光体系,研究了气体的放电特性和注入功率情况。 The applicant with the present invention has a mixed reaction on the electrode structure stream discharge system to produce active particles fluorine atom, and the invention is applied to the first F / DCl / HI / HN3 whole iodine vapor laser system to study the characteristics of the gas discharge and injection power situation.

请参阅图2所示,由于F/DC1/HI/HN3全气相碘激光体系是四股气流的混合反应,产生激发态的碘原子,才有可能进行增益测量和出光演示。 See Fig. 2, since the F / DC1 / HI / HN3 gas phase iodine laser system is a full four stocks mixed reactant gas stream, resulting in an iodine atom excited state, the possible gain measurements and light presentation. 本' 实施例采用本发明即混合反应气流放电体系的电极结构对NF3/He的混合气体进行直流放电,产生活性粒子氟原子,携带氟原子的主气流流过第一阴极3,第二阴极4,在第二阴极4的位置,上下有两排直径为0.5mm第一小孔6, DCl/He混合气体从第一小孔6喷入主气流,主副气流进行混合反应,置换出氯原子。 The 'embodiment of the present invention has a mixed reaction on the electrode structure stream discharge system mixed gas NF3 / He of DC discharge, produce active particles fluorine atom, a fluorine atom carrying the primary air flow through the first cathode 3, a second cathode 4 In the second position of the cathode 4, up and down two rows of first holes of 0.5mm diameter 6, DCl / He mixed gas from the first 6 holes injected into the main stream, the primary and secondary airflow mixed reaction, the replacement of a chlorine atom . 继续向下游流动,与从第二小孔7喷入的HI/He反应置换出碘原子,与从第三小孔8喷入的HN3/He反应生成NCl(a),:^Pw),NCl(b)等,9为测试窗口,可以通过测试窗口测量激发态碘原子1(2&/2)的荧光辐射和小信号增益系数,真空系统是由真空泵10来保障的。 Continue to flow downstream, and from the second orifice 7 is injected into the HI / He reaction displace iodine atom, and from the third orifice 8 is injected into the HN3 / He reaction NCl (a),: ^ Pw), NCl (b) et al., 9 for the test window, you can pass the test window measuring excited state iodine atom 1 (2 & / 2) of the fluorescence radiation and small signal gain coefficient, the vacuum system is to protect the vacuum pump 10.

F/DC1/HI/HN3全气相碘激光体系的反应机理为, 氯原子的产生 F / DC1 / HI / HN3 iodine vapor reaction mechanism of the whole laser system for generating chlorine atoms

Ncuy厶)的产生 Ncuy Si) production

<formula>formula see original document page 5</formula>(2) <Formula> formula see original document page 5 </ formula> (2)

<formula>formula see original document page 5</formula> (3) <Formula> formula see original document page 5 </ formula> (3)

碘原子的产生 Produce iodine atoms

<formula>formula see original document page 5</formula>(4)激发态碘原子的产生 <Formula> formula see original document page 5 </ formula> (4) iodine atoms excited by state

A) + / — /(2户1/2) + AO(J^i:) (5) 输出激光 A) + / - / (2 户 1/2) + AO (J ^ i :) (5) of the output laser

/(2尸1/2) + /^ —/(2尸3/2) + 2計(6) / (2 dead 1/2) + / - / (2 dead 3/2) + 2 meter (6)

图3为本发明实施例在不同NF3和He流量的混合气体,在单电极和复电极两种情况下,直流放电的注入功率曲线。 3 is an example in a mixed gas of NF3 and He flow different implemented in two single electrode and the electrode complex cases, injection of DC power discharge curve. 可以看到,在小的氦气流量的情况下,复电极放电的注入功率明显高于单电极放电的注入功率,而且放电稳定。 You can see that in the case of small helium flow, complex electrical discharge injection power was significantly higher than the single electrode discharge injection power, and stable discharge. 在较大氦气流量的情况下,他们的注入功率基本一样,但是放电要稳定的多。 In the case of a large flow of helium, they injected power is basically the same, but the discharge to be more stable.

Patent Citations
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CN2762396Y30 Dec 20041 Mar 2006周迅Middle power carbon dioxide laser tube
US426620013 Jan 19775 May 1981Liu Chi ShengMetal halide laser tube structure
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Classifications
International ClassificationH01S3/038
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26 Dec 2007C10Request of examination as to substance
10 Dec 2008C14Granted
4 Jul 2012C17Cessation of patent right