CN100437116C - Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing - Google Patents

Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing Download PDF

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CN100437116C
CN100437116C CNB2004800182733A CN200480018273A CN100437116C CN 100437116 C CN100437116 C CN 100437116C CN B2004800182733 A CNB2004800182733 A CN B2004800182733A CN 200480018273 A CN200480018273 A CN 200480018273A CN 100437116 C CN100437116 C CN 100437116C
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detection signal
acceleration
amplifier
detection
electrode structure
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CN1813191A (en
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约翰·A·吉恩
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Analog Devices Inc
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Analog Devices Inc
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Abstract

A micro-machined multi-sensor that provides 2-axes of acceleration sensing and 1-axis of angular rate sensing. The multi-sensor includes a rigid accelerometer frame, a first proof mass, and a second proof mass. The substrate has two associated acceleration axes in the plane of the substrate, and one associated rotation axis perpendicular to the acceleration axes. The proof masses have a common vibration axis, which is perpendicular to the rotation axis. The multi-sensor further includes a drive electrode structure for causing the proof masses to vibrate in antiphase, a first pair of acceleration sense electrode structures disposed along one of the acceleration axes, and a second pair of acceleration sense electrode structures disposed along the other acceleration axis. The multi-sensor adds the sense signals provided by the respective sense electrode pairs to extract information pertaining to acceleration sensing along the acceleration axes, and adds the differences of the sense signals provided by the respective sense electrode pairs to extract information pertaining to angular rate sensing relative to the rotation axis.

Description

Little processing multisensor of two axis of acceleration sensing and an axis of angular rate sensing is provided
The cross-reference of related application
The application require the applying date be April 28 in 2003 day, be called " provide two acceleration detection the axle and an angular velocity detection spool little processing multisensor " U.S. Provisional Patent Application No.60/466,126 preference.
Statement about the government-funded research and development
Inapplicable
Technical field
The present invention relates generally to integrated acceleration and angular-rate sensor (" multisensor "), more specifically relates to the little processing multisensor of silicon that two axis of acceleration sensing and an angle speed detection axle can be provided.
Background technology
The little processing multisensor of known silicon comprises at least one accelerometer that is used for providing at single-sensor equipment the indication of acceleration detection and/or angular velocity detection.The little processing multisensor of traditional silicon, for example announce February 28 nineteen ninety-five, name is called the U.S. Patent No. 5 of " little processing accelerometer gyroscope ", 392, the little processing multisensor of silicon described in 650, comprise a pair of accelerometer, wherein each accelerometer comprises accelerometer frame separately and the quality inspection piece separately that hangs by a plurality of flexures from described framework.Traditional little processing multisensor has associated single axis of acceleration sensing and detects axle perpendicular to the single rotation of described acceleration axle.And traditional little processing multisensor is configured to vibrate separately quality inspection piece along vibrating shaft anti-phasely, and this vibrating shaft is perpendicular to described acceleration and turning axle.
In typical operator scheme, the little processing multisensor of traditional silicon is by the power of the linear acceleration on first group of each quality inspection piece of electricity restoring force balance, and this first group electricity restoring force is the function of quality inspection piece along the linear acceleration of acceleration axle.Traditional little processing multisensor further is configured to by Coriolis (Coriolis) power on second group of each quality inspection piece of electricity restoring force balance, and this second group electricity restoring force is the function of quality inspection piece edge perpendicular to the Coriolis acceleration of the axis of rotation and vibrating shaft.The Coriolis acceleration of each quality inspection piece is by the combination results of quality inspection piece along the vibration of vibrating shaft and quality inspection piece along the angle rotation that turning axle is applied in.
Typically be manufactured into anti-phasely and vibrate owing to be included in quality inspection piece in the little processing multisensor of traditional silicon, so the quality inspection piece is in homophase to the response of linear acceleration, and the quality inspection piece is in anti-phase to the response of Coriolis acceleration.Therefore, traditional little processing multisensor is configured to information (being acceleration detection information) corresponding to linear acceleration is extracted in the output of accelerometer separately mutually, and accelerometer output is separately subtracted each other to extract the information (being angular velocity detection information) corresponding to Coriolis acceleration.
Typically make above-mentioned traditional little processing multisensor discretely by the method and its electronic equipment that are called as the little processing of body (bulk micro-machining), this method is a kind of relatively more expensive method that is used to make little process equipment.Also there be other little machining manufacture more cheap usually, for example have surperficial little processing of integrated electronic equipment than the little processing of body.For example, traditional surperficial little processing gyroscope is in U.S. Patent No. 6,122, is described in 961, and this patent disclosure was on September 26th, 2000, and name is called " little processing gyroscope ".Traditional little processing gyro equipment can be configured to the output addition of its Coriolis accelerometer and subtract each other with the axis that is created in substrate plane neutral line acceleration (promptly tilting) with perpendicular to the gyro axis (being beat) of substrate plane.
Yet above-mentioned traditional surperficial little processing gyroscope also has defective.For example, the quality inspection piece that is included in wherein hangs from the accelerometer frame of separating.As a result, typically have at least one slight mismatch in the resonant frequency of each quality inspection piece, this can cause being difficult to produce enough drivings, and vibration quality inspection piece obtains detectable Coriolis acceleration under sufficiently high speed to be used for.And the accelerometer frame that has separation in little processing multi-sensor device causes the more difficult equipment that makes placed in the middle on mould usually.Distortion in the die surface zone therefore can be asymmetric about little process equipment, and this can reduce the overall performance of multisensor.Another defective is that this equipment mostly just provides an accelerometer tilt detection axle and/or a gyro beat to detect axle.Yet, usually advantageously in single detector equipment, have the axle that more than one acceleration and/or speed detect.
Therefore it is desirable to have the little processing multisensor of a kind of silicon, it provides the axle of more than one acceleration detection and/or angular velocity detection, and avoids the defective of above-mentioned traditional little processing multisensor.
Summary of the invention
According to the present invention, a kind of little processing multisensor is disclosed, it provides two axis of acceleration sensing and an axis of angular rate sensing in than the equipment structure that is easier to be centered on the mould.Current disclosed little processing multisensor comprises at least one pair of accelerometer, and described accelerometer is provided at detection signal irrelevant on the electricity, shares common accelerometer frame and common vibrating shaft simultaneously.
In one embodiment, described little processing multisensor comprises the rigidity accelerometer frame, the first quality inspection piece and the second quality inspection piece, and each mass is formed on the silicon substrate.Described substrate has two axis of acceleration sensing that be associated, mutually orthogonal and detects axle perpendicular to the rotation that of described two acceleration axles is associated in the plane of described substrate.The described first and second quality inspection pieces have the common axis of symmetry along vibrating shaft, and described vibrating shaft is perpendicular to described turning axle.And the described first and second quality inspection pieces flexibly are coupled to each other along described vibrating shaft.The described first and second quality inspection pieces hang from described rigid frame by a plurality of first flexures separately, and described rigid frame is anchored to described substrate by a plurality of second flexures.Described first and second flexures are configured to force the described first and second quality inspection pieces only to move with respect to described rigid frame along the direction of described vibrating shaft basically, and force described rigid frame to move with respect to substrate with linear and rotation mode.
In current disclosed embodiment, described little processing multisensor comprises the drive electrode structure, and this drive electrode structure is configured to make the described first and second quality inspection pieces to vibrate along described vibrating shaft anti-phasely.Described little processing multisensor further comprises first pair of acceleration detection electrode structure relative on diameter, it is connected to described rigid frame and arranges along the first acceleration axle in the described acceleration axle, with second pair of acceleration detection electrode structure relative on diameter, it is connected to described rigid frame and arranges along the second acceleration axle in the described acceleration axle.Described little processing multisensor is configured to: (1) with by described first detecting electrode to the detection signal that provides extracted mutually with along the relevant information of the acceleration detection of the described first acceleration axle, (2) with by described second detecting electrode to the detection signal that provides is extracted mutually with along the relevant information of the acceleration detection of the described second acceleration axle, with (3) with by described first detecting electrode to the difference of the detection signal that provides with by described second detecting electrode difference phase of the detection signal that provides is extracted and the information relevant with respect to the angular velocity detection of described turning axle.
By described little processing multisensor being configured to provide the irrelevant acceleration detection signal on electricity of two pairs of two mutually orthogonal acceleration axles separately in the plane of described silicon substrate, can be by suitably with described detection signal addition and/or subtract each other and obtain two axis of acceleration sensing and an axis of angular rate sensing.And, make the described first and second quality inspection pieces vibrate by disposing described little processing multisensor along common vibrating shaft anti-phasely, from common acceleration frame hanging, described multi-sensor device has two orthogonal mirror image symmetries and therefore easier to be placed in the middle on mould simultaneously.Like this, can reduce the adverse effect of die surface region deformation.
From following detailed description of the present invention with apparent further feature of the present invention, function and aspect.
Description of drawings
To more completely understand the present invention with reference to of the present invention the following specifically describes in conjunction with the accompanying drawings, wherein:
Fig. 1 is the scheme skeleton view of the little processing multisensor of silicon according to the present invention;
Fig. 2 is included in the planimetric map of a sensor in the little processing multisensor of silicon of Fig. 1;
Fig. 3 is the schematic diagram of the little processing multisensor of the silicon of Fig. 1; With
Fig. 4 is the process flow diagram of a kind of method of the little processing multisensor of the silicon of application drawing 1.
Embodiment
In on April 28th, 2003 application, name is called the U.S. Provisional Patent Application No.60/466 of " little processing multisensor that two axis of acceleration sensing and an axis of angular rate sensing are provided ", 126 are incorporated into this with for referencial use.
Disclose a kind of little processing multisensor, it provides two axis of acceleration sensing and an axis of angular rate sensing in single multi-sensor device.Current disclosed little processing multisensor can be arranged on the mould symmetrically, has improved output thus and has improved the overall performance of multi-sensor device.
Fig. 1 has shown the conceptual scheme according to little processing multisensor 100 of the present invention.Current disclosed multisensor 100 comprises such as the such substrate 102 of silicon substrate, and this substrate is carried out any suitable body micro fabrication to form microelectromechanical-systems (MEMS) multi-sensor device.As shown in fig. 1, MEMS multisensor 100 comprises sensor 101, this sensor has mutually orthogonal the axis of acceleration sensing X and the Y of two associations in the plane that is arranged in substrate 102, and detects an axle Z perpendicular to the related rotation of described acceleration axle X and Y one.Multisensor 100 is configured to provide along two indications of the acceleration detection of each self-acceleration axle X and Y with respect to an indication of the angular velocity of described turning axle Z.
Fig. 2 has shown the exemplary embodiment 201 that is included in the sensor 101 in little processing multisensor 100 (see figure 1)s.In the embodiment that is exemplified, sensor 201 comprises rigidity accelerometer frame 230 and quality inspection piece 232.1-232.2 and 234.1-234.2, and they are formed on the substrate 202.Quality inspection piece 232.1-232.2 hangs from rigid frame 230 by resonator flexure 236.1-236.2 respectively, and quality inspection piece 234.1-234.2 hangs from described rigid frame by resonator flexure 238.1-238.2 respectively.And rigid frame 230 is anchored to described substrate by accelerometer flexure 244.1-244.4, and described accelerometer flexure is arranged on the substrate 202 diagonally.
Sensor 201 further comprises drive electrode structure 246.1-246.2 and 248.1-248.2, and acceleration detection electrode structure A-D.As shown in Figure 2, drive electrode structure 246.1-246.2 and 248.1-248.2 comprise a plurality of drive electrodes (" finger ") separately, and described drive electrode is parallel to each other and arrange across.Response comprises the drive signal (not shown) of alternating voltage, drive electrode structure 246.1-246.2 is configured to apply electrostatic force respectively on quality inspection piece 232.1-232.2, and drive electrode structure 248.1-248.2 is configured to apply electrostatic force respectively on quality inspection piece 234.1-234.2.Be to be understood that drive electrode structure 246.1-246.2 and 248.1-248.2 alternately comprise the Electromagnetic Drive structure, this Electromagnetic Drive structure is configured to respond ac current signal and applies electromagnetic force respectively on quality inspection piece 232.1-232.2 and 234.1-234.2.
As further shown in Figure 2, acceleration detection electrode structure A-D comprises a plurality of detecting electrodes (" finger ") separately, and described detecting electrode is parallel to each other and arrange across.Particularly, described detector electrode structure A, B, C and D comprise integrally being connected to first group of rigid frame 230 and detecting the corresponding second group of detection that refers to and be fixed to substrate 202 and refer to separately.For example sensor 201 carry out linearity and/or situation about rotatablely moving under, linear acceleration that rigid frame 230 responses produce and/or Coriolis force and with respect to substrate 202 deflections.Because rigid frame 230 refers to that with first group of detection related with detector electrode structure A-D (for example referring to referring to 250 with the related detection of detector electrode structure B) is along with rigid frame 230 moves when its deflection, and second group of detection simultaneously refers to that (for example referring to 252 referring to the detection related with detector electrode structure B) still anchors to substrate 202, therefore detector electrode structure A-D detects the deflection that the relative motion that refers to detects framework 230 by detecting first and second groups, and produce detection signal A '-D ' (see figure 3), the amplitude that this detection signal had is directly proportional with the amplitude of described deflection.Be to be understood that detector electrode structure A, the detection that C and D have the finger-like structure that is similar to detector electrode structure B refers to structure.
Sensor 201 further comprises a plurality of lever 240.1-240.4 that hang from rigid frame 230 and the drive electrode structure 240.5-240.6 that is used for lever 240.1-240.4.Particularly, lever 240.1 flexibly is connected between quality inspection piece 232.1 and the lever 240.3, lever 240.2 flexibly is connected between quality inspection piece 232.2 and the lever 240.4, lever 240.3 flexibly is connected between quality inspection piece 234.1 and the lever 240.1, and lever 240.4 flexibly is connected between quality inspection piece 234.2 and the lever 240.2.And drive electrode structure 240.5-240.6 comprises that a plurality of drivings separately parallel to each other and that arrange across refer to.Drive electrode structure 240.5 is configured to apply electrostatic force on lever 240.1 and 240.3, and drive electrode structure 240.6 is configured to apply electrostatic force on lever 240.2 and 240.4.Be to be understood that drive electrode structure 240.5-240.6 alternately comprises Electromagnetic Drive structure separately.Be to be understood that also some drive electrodes alternately are used to provide rate signal, this rate signal provides feedback for drive electronics and handles for coriolis signal provides reference.
Should be noted that quality inspection piece 232.1 mechanically is connected to quality inspection piece 232.2, thereby quality inspection piece 232.1-232.2 moves together as single mass basically.Similarly, quality inspection piece 234.1 mechanically is connected to quality inspection piece 234.2, thereby quality inspection piece 234.1-234.2 moves together as single mass basically.And the flexure 236.1-236.2 that hangs quality inspection piece 232.1-232.2 from rigid frame 230 is configured to force quality inspection piece 232.1-232.2 only to move with respect to framework 230 along the direction of axle X basically.Similarly, the flexure 238.1-2382 from rigid frame 230 suspension quality inspection piece 234.1-234.2 is configured to force quality inspection piece 234.1-234.2 only to move with respect to framework 230 along the direction of axle X basically.Lever 240.1-240.4 is configured to connect the motion of quality inspection piece 232.1-232.2 and 234.1-234.2, makes them vibrate as single resonance.Provide the advantage of this connection disclosed on June 3rd, 1997, name is called the U.S. Patent No. 5 of " being used for the connection of a plurality of masses of little process equipment ", 635,638,, name disclosed with on June 3rd, 1997 is called the U.S. Patent No. 5 of " the little process equipment that has the whirling vibration mass ", 635, be described in 640, yet, the physical construction of the sensor 201 that the specific mechanical configurations of the connection of describing in these existing patents is different among Fig. 2 to be exemplified.The flexure 244.1-244.4 that rigid frame 230 is anchored to substrate 202 is configured to force rigid frame 230 to allow framework 230 to be rotated motion to be used for Coriolis detection with respect to substrate 202.
Diagonal angle flexure 244.1-244.4 forms folding right, thereby different with the single flexure that is arranged to diagonal angle spoke (spoke), they allow some translation motion.This has alleviated the stress that is used for surface micromachined deposited film, and allows to carry out the linear acceleration detection along X and Y-axis.Coriolis acceleration is more much smaller than linear acceleration to be detected usually, thereby it is desirable to, and compares with Y-axis along X, and flexure 244.1-244.4 more adapts to and rotatablely moves.By using the flexure length one folding suitable ratio that separates to produce the ideal ratio of compliance.
Further should be noted that, rigid frame 230, quality inspection piece 232.1-232.2 and 234.1-234.2, drive electrode structure 246.1-246.2,248.1-248.2 and 240.5-240.6, acceleration detection electrode structure A-D, lever 240.1-240.4, and flexure 236.1-236.2,238.1-238.2 and 244.1-244.4 are arranged on each side of lateral symmetry axle of sensor 201 in the mirror image mode and on each side of vertical axis of symmetry.Therefore, sensor 201 can be arranged symmetrically and be centered on the mould (not shown) to reduce the adverse effect of die surface distortion.Yet, in sensor 201, adopt single rigid frame 230 to reduce the overall dimensions of multi-sensor device.
Fig. 3 has shown the schematic diagram according to an exemplary embodiment 300 of little processing multisensor 100 (see figure 1)s of the present invention.In the embodiment that this exemplifies, multisensor 300 comprises sensor 301, strides resistance (transresistance) amplifier 304, a plurality of differential amplifiers 306,308,310,312,316 and 320, a plurality of summing amplifiers 314,318 and 322, and phase detector (phase demodulator) 324.As mentioned above, quality inspection piece 232.1-232.2 (see figure 2) is linked together as single mass and moves, and quality inspection piece 234.1-234.2 (see figure 2) is linked together similarly as single mass and moves.Therefore, sensor 301 comprises the rigidity accelerometer frame 330 of representing rigid frame 230 (see figure 2)s, represents the first quality inspection piece 332 of quality inspection piece 232.1-232.2 and represents the second quality inspection piece 334 of quality inspection piece 234.1-234.2.
Particularly, the first quality inspection piece 332 hangs from rigid frame 330 by the resonator flexure 336 of representing flexure 236.1-236.2 (see figure 2), and the second quality inspection piece 334 hangs from rigid frame 330 by the resonator flexure 338 of representing flexure 238.1-238.2 (see figure 2).And rigid frame 330 anchors to substrate (for example, referring to the substrate among Fig. 2 202) by a plurality of accelerometer flexures (for example, referring to the flexure 244.1-244.4 among Fig. 2).
Sensor 301 (see figure 3)s further comprise the flexible member 340 of representing lever and drive electrode structure 240.1-240.6 (see figure 2).Flexible member 340 flexibly the interconnect first quality inspection piece 332 and the second quality inspection piece 334.And, sensor 301 comprises the drive electrode structure (for example, referring to drive electrode structure 246.1-246.2 and the 248.1-248.2 among Fig. 2) that is used to vibrate quality inspection piece 332 and 334, and the acceleration detection electrode structure A of the detector electrode structure A-D of representative graph 2, B, C and D.
Particularly, the drive electrode structure is configured to simultaneously with the mechanical resonant vibration first and second quality inspection pieces 332 and 334 separately, and flexible member 340 is configured to along vibrating shaft anti-phasely (promptly, on phase place, differ 180 °) mobile quality inspection piece 332 and 334, described vibrating shaft is parallel to acceleration axle X in current disclosed embodiment.Relative acceleration detection electrode structure A-B arranges and is connected to rigid frame 330 that along acceleration axle Y acceleration detection electrode structure C-D relative on diameter arranges and be connected to rigid frame 330 along acceleration axle X on diameter.Each detector electrode structure A-D is configured to be created in respectively detection signal A ', B ', C ' and D ' irrelevant on the electricity.
Those of ordinary skill in the art will understand, when quality inspection piece 332 and 334 when vibrating shaft vibrates, when rigid frame 330 was around turning axle Z rotation simultaneously, each in the quality inspection piece 332 and 334 was born Coriolis acceleration in the plane that is limited by acceleration axle X and Y.And because quality inspection piece 332 and 334 vibrates anti-phasely, therefore quality inspection piece 332 and 334 separately in the opposite direction bears Coriolis acceleration.As a result, significantly Coriolis force is applied to quality inspection piece 332 and 334, thereby along the reverse direction deflection quality inspection piece 332 and 334 in the plane of acceleration axle X and Y.
Therefore, quality inspection 332 and 334 is in anti-phase to the response of Coriolis acceleration with respect to turning axle Z, and quality inspection 332 and 334 is in forward with respect to acceleration axle X and Y to the response of linear acceleration.Therefore the suitable acceleration detection signal A ' that will on electricity, have nothing to do, B ', C ' and D ' addition and/or subtract each other extracting information (being acceleration detection information) corresponding to described linear acceleration, and extract information (being angular velocity detection information) corresponding to Coriolis acceleration.For example, first group of electricity restoring force (not shown) can be used for the power of balance linear acceleration, and second group of electricity restoring force (not shown) can be used for the power of balance Coriolis acceleration.And each detector electrode structure A, B, C and D can be configured to be created in acceleration detection signal A ', B ', C ' and D ' irrelevant on the electricity based on the size of described electric restoring force.
Select as another, the elastic force that deflection produced that described framework is connected to the flexure 244.1-244.4 of described substrate can be used for balance Coriolis force and be used to detect described structure A, B, C and the D of these deflections.If being used for the structural membrane of surperficial microfabrication is polysilicon, the deflection of so described flexure is relevant linearly with described power, is uneconomic thereby introduce complicated electric restoring force.
Particularly, differential amplifier 306 is configured to receive Differential Detection signal B ' from detector electrode structure B, and provides relevant detection signal b to summing amplifier 314 and differential amplifier 316.Similarly, differential amplifier 308 is configured to receive Differential Detection signal A ' from detector electrode structure A, and provides relevant detection signal a to summing amplifier 314 and differential amplifier 316.And, differential amplifier 310 is configured to receive Differential Detection signal D ' from detector electrode structure D, and provide relevant detection signal d to summing amplifier 318 and differential amplifier 320, differential amplifier 312 is configured to receive Differential Detection signal C ' from detector electrode structure C, and provides relevant detection signal c to summing amplifier 318 and differential amplifier 320.
Summing amplifier 314 is configured to detection signal a and b addition, and produces detection signal a+b sum, and this summation comprises and the relevant information of acceleration detection along acceleration axle X (" X acceleration ").Similarly, summing amplifier 318 is configured to detection signal c and d addition, and produces detection signal c+d sum, and this summation comprises and the relevant information of acceleration detection along acceleration axle Y (" Y acceleration ").
And differential amplifier 316 is configured to detection signal a and b are subtracted each other, and the difference of detection signal a-b is provided to summing amplifier 322.Similarly, differential amplifier 320 is configured to detection signal c and d are subtracted each other, and the difference of detection signal c-d is provided to summing amplifier 322.And summing amplifier 322 is configured to detection a-b and c-d addition, and provides a+c-b-d sum to phase detector 324.Detection signal a+c-b-d comprises and the relevant information of angular velocity detection with respect to turning axle " Z " (" Z rotation ").Yet should be noted that detection signal a+c-b-d can comprise that also at least some are with one of in acceleration axle X and Y or both relevant information of acceleration detection.Therefore, phase detector 324 is configured to eliminate the acceleration information among the gyro detection signal a+c-b-d.
Particularly, phase detector 324 is facing to speed detection signal V demodulation gyro detection signal a+c-b-d, the vibration velocity homophase of this speed detection signal and quality inspection piece 332 and 334 and not synchronous with quality inspection piece acceleration.As shown in Figure 3, sensor 301 comprises speed detector electrode structure 342, this speed detector electrode structure is configured to provide speed detection signal V (current signal) to trans-impedance amplifier 304, and described trans-impedance amplifier is converted to correspondent voltage signal v with described current signal.Be connected to the electrode of quality inspection piece 332 and 334 and anchor to relative motion between the electrode of substrate by detection, speed detector electrode structure 342 detects the vibration velocity of quality inspection piece 332 and 334, and produce speed detection signal V, this speed detection signal and vibration velocity homophase.Then, trans-impedance amplifier 304 provides voltage signal v as phase reference to phase detector 324.Because speed detection signal V is asynchronous with c+d with acceleration signal a+b, so eliminated by phase detector 324, increased the signal to noise ratio (snr) of gyro thus in phase detector output place at the acceleration information of output place of summing amplifier 322.
Should be appreciated that in order to detect the accelerometer electrode A by differential capacitor, B, the static deflection of C and D provides alternating voltage and facing to the described signal of this voltage synchronous demodulation to framework 330.Such demodulation both can be at differential amplifier 306,308, carried out in 310 and 312, also can carry out in summing amplifier 314,318 and 322.In order to improve sensitivity, the frequency of alternating voltage is high as much as possible.And, in order to prevent the mistake of relative frequency displacement, preferably use phaselocked loop to make alternating voltage relevant with rate signal.Although should be noted that also for discuss clear various amplifiers are presented among Fig. 3 discretely that described amplifier can alternatively be combined into a transistorized more effective layout in integrated circuit, total keep their function simultaneously.Particularly, if use realize continuous time (based on amplifier),, can keep the integrality of this process by reservation differential signal channel with regard to phase detector.If adopt discrete time (digital) method, it can more effectively merge addition, subtraction, separate the mediation filtering so.
Exemplified a kind of method of operating the little processing multisensor of current disclosed silicon with reference to figure 4.Described in step 402, two quality inspection pieces that are included in the multisensor vibrate along vibrating shaft anti-phasely, and multisensor is around the turning axle rotation simultaneously.Be to be understood that vibrating shaft in the plane of the substrate of multisensor, turning axle is perpendicular to vibrating shaft and multisensor substrate.Then, described in step 404, the Differential Detection signal A ' and the B ' that are produced by acceleration detection electrode structure A and B are converted into detection signal a and b respectively.Similarly, described in step 406, the Differential Detection signal C ' and the D ' that are produced by acceleration detection electrode structure C and D are converted into detection signal c and d respectively.Acceleration detection electrode structure A and B arrange that along acceleration axle X this acceleration axle is in the plane of substrate and perpendicular to vibrating shaft.And acceleration detection electrode structure C and D arrange that along acceleration axle Y this acceleration axle is in the plane of substrate and perpendicular to acceleration axle X.Described in step 408, detection signal a and b are added then, and producing detection signal a+b sum, this summation comprises and the relevant information of acceleration detection along acceleration axle X (X acceleration).Similarly, described in step 410, detection signal c and d are added then, and producing detection signal c+d sum, this summation comprises and the relevant information of acceleration detection along acceleration axle Y (Y acceleration).Then, described in step 412, detection signal a and b subtract each other then, to produce the difference of detection signal a-b.Similarly, described as step 414, detection signal c and d subtract each other then, to produce the difference of detection signal c-d.Described in step 416, detection signal a-b and c-d addition then, producing detection signal (a-b)+(c-d) sum, this summation comprises and the relevant information of angular velocity detection with respect to turning axle Z (Z rotation).At last, described in step 418, the acceleration information that can be included among the gyro detection signal a+c-b-d selectively is eliminated, to increase gyro SNR.
The those of ordinary skill in signal Processing field should be appreciated that the algorithm described in Fig. 4 is not is the unique algorithm that produces desired result, also can utilize other suitable discrete time to realize.For example, step 412, the order of the addition described in 414,416 and 418, subtraction and demodulation can exchange or merge.
Those of ordinary skill in the art will be further understood that, can improve above-mentioned little processing multisensor that two axis of acceleration sensing and an axis of angular rate sensing are provided and change and do not break away from innovative idea disclosed herein.Therefore, except the scope and spirit by appended claim limit, the present invention should be considered as being subjected to other restriction.

Claims (25)

1. multisensor comprises:
Basically smooth accelerometer frame;
Be connected to the first quality inspection piece of described framework;
Be connected to the second quality inspection piece of described framework;
First pair of acceleration detection electrode structure relative on diameter, it is connected to described framework and arranges along the first acceleration axle; With
Second pair of acceleration detection electrode structure relative on diameter, it is connected to described framework and arranges along the second acceleration axle, and this second acceleration axle is perpendicular to the described first acceleration axle,
The wherein said first and second quality inspection pieces are configured to vibrate along vibrating shaft anti-phasely, described vibrating shaft in plane by described first acceleration axle and the described second acceleration axis limit, and
Wherein each acceleration detection electrode structure is configured to produce acceleration detection signal separately, and each detection signal and remaining detection signal are irrelevant on electricity.
2. multisensor according to claim 1 further comprises flexible member, and this flexible member flexibly connects described first quality inspection piece and the described second quality inspection piece.
3. multisensor according to claim 1, further comprise signal processing unit, this signal processing unit be configured to extract with along the relevant information of the acceleration detection of the described first and second acceleration axles, and extract and the information relevant with respect to the angular velocity detection of turning axle, wherein said turning axle is perpendicular to the described first and second acceleration axles.
4. multisensor according to claim 1, further comprise: first amplifier, its of being configured to from described first pair of acceleration detection electrode structure receives the Differential Detection signal and produces first detection signal, with second amplifier, it is configured to another reception Differential Detection signal from described first pair of acceleration detection electrode structure and produces second detection signal.
5. multisensor according to claim 4, further comprise the 3rd amplifier, the 3rd amplifier is configured to receive described first and second detection signals, and produce the 3rd detection signal comprise the described first and second detection signal sums, the 3rd detection signal comprise with along the relevant information of the acceleration detection of the described first acceleration axle.
6. multisensor according to claim 1, further comprise: first amplifier, its of being configured to from described second pair of acceleration detection electrode structure receives the Differential Detection signal and produces first detection signal, with second amplifier, it is configured to another reception Differential Detection signal from described second pair of acceleration detection electrode structure and produces second detection signal.
7. multisensor according to claim 6, further comprise the 3rd amplifier, the 3rd amplifier is configured to receive described first and second detection signals, and produce the 3rd detection signal comprise the described first and second detection signal sums, the 3rd detection signal comprise with along the relevant information of the acceleration detection of the described second acceleration axle.
8. multisensor according to claim 1, further comprise: first amplifier, its of being configured to from described first pair of acceleration detection electrode structure receives the Differential Detection signal and produces first detection signal, second amplifier, it is configured to another reception Differential Detection signal from described first pair of acceleration detection electrode structure and produces second detection signal, the 3rd amplifier, its of being configured to from described second pair of acceleration detection electrode structure receives the Differential Detection signal and produces the 3rd detection signal; With the 4th amplifier, it is configured to another reception Differential Detection signal from described second pair of acceleration detection electrode structure and produces the 4th detection signal.
9. multisensor according to claim 8, further comprise: the 5th amplifier, it is configured to receive described first and second detection signals, and produce the 5th detection signal of the difference that comprises described first and second detection signals, with the 6th amplifier, it is configured to receive described third and fourth detection signal, and produces the 6th detection signal of the difference that comprises described third and fourth detection signal.
10. multisensor according to claim 9, further comprise the 7th amplifier, the 7th amplifier is configured to receive the described the 5th and the 6th detection signal, and produce the 7th detection signal that comprises the described the 5th and the 6th detection signal sum, the 7th detection signal comprises and the information relevant with respect to the angular velocity detection of turning axle that described turning axle is perpendicular to the described first and second acceleration axles.
11. multisensor according to claim 10, further comprise the speed detector electrode structure that is configured to produce speed detection signal, the vibration velocity homophase of this speed detection signal and the described first and second quality inspection pieces and asynchronous with the linear acceleration of the described first and second quality inspection pieces.
12. multisensor according to claim 11, further comprise phase detector, this phase detector is configured to receive described the 7th detection signal and described speed detection signal, and produce the 8th detection signal, the 8th detection signal comprises and the information relevant with respect to the angular velocity detection of described turning axle.
13. multisensor according to claim 1, by little processing, the described first and second acceleration axles are in the plane of described substrate on substrate for wherein described at least framework and the described first and second quality inspection pieces.
14. a method of operating multisensor may further comprise the steps:
Vibrate the first quality inspection piece and the second quality inspection piece by the drive electrode structure along vibrating shaft, described first quality inspection piece and the described second quality inspection piece are connected to accelerometer frame anti-phasely;
By first pair of acceleration detection electrode structure generation first accelerometer detection signal separately relative on diameter, described first pair of acceleration detection electrode structure is connected to described framework and arranges along the first acceleration axle; With
By second pair of acceleration detection electrode structure generation second accelerometer detection signal separately relative on diameter, described second pair of acceleration detection electrode structure is connected to described framework and arranges along the second acceleration axle, this second acceleration axle is perpendicular to the described first acceleration axle
Wherein by first pair on diameter relative acceleration detection electrode structure produce in the described step of the first accelerometer detection signal separately and have nothing to do on electricity with remaining detection signal producing each detection signal that produces in the described step of the second accelerometer detection signal separately by second pair of acceleration detection electrode structure relative on diameter.
15. method according to claim 14, further may further comprise the steps: by a signal processing unit, extract with along the relevant information of the acceleration detection of the described first and second acceleration axles, and by described signal processing unit, extract and the information relevant with respect to the angular velocity detection of turning axle, wherein said turning axle is perpendicular to the described first and second acceleration axles.
16. method according to claim 14, further may further comprise the steps: by the reception Differential Detection signal of first amplifier from described first pair of acceleration detection electrode structure, and produce first detection signal by described first amplifier, receive Differential Detection signal by second amplifier another from described first pair of acceleration detection electrode structure, and produce second detection signal by described second amplifier.
17. method according to claim 16, further may further comprise the steps: receive described first and two detection signals by the 3rd amplifier, and produce the 3rd detection signal that comprises the described first and second detection signal sums by described the 3rd amplifier, the 3rd detection signal comprise with along the relevant information of the acceleration detection of the described first acceleration axle.
18. method according to claim 14, further may further comprise the steps: by the reception Differential Detection signal of first amplifier from described second pair of acceleration detection electrode structure, and produce first detection signal by described first amplifier, receive Differential Detection signal by second amplifier another from described second pair of acceleration detection electrode structure, and produce second detection signal by described second amplifier.
19. method according to claim 18, further may further comprise the steps: receive described first and two detection signals by the 3rd amplifier, and produce the 3rd detection signal that comprises the described first and second detection signal sums by described the 3rd amplifier, the 3rd detection signal comprise with along the relevant information of the acceleration detection of the described second acceleration axle.
20. method according to claim 14, further may further comprise the steps: by the reception Differential Detection signal of first amplifier from described first pair of acceleration detection electrode structure, and produce first detection signal by described first amplifier, by second amplifier another reception Differential Detection signal from described first pair of acceleration detection electrode structure, and produce second detection signal by described second amplifier, by the reception Differential Detection signal of the 3rd amplifier from described second pair of acceleration detection electrode structure, and produce the 3rd detection signal by described the 3rd amplifier, receive Differential Detection signal by the 4th amplifier another from described second pair of acceleration detection electrode structure, and produce the 4th detection signal by described the 4th amplifier.
21. method according to claim 20, further may further comprise the steps: receive described first and second detection signals by the 5th amplifier, and produce the 5th detection signal of the difference that comprises described first and second detection signals by described the 5th amplifier, receive described third and fourth detection signal by the 6th amplifier, and produce the 6th detection signal of the difference that comprises described third and fourth detection signal by described the 6th amplifier.
22. method according to claim 21, further may further comprise the steps: receive the described the 5th and the 6th detection signal by the 7th amplifier, and produce the 7th detection signal that comprises the described the 5th and the 6th detection signal sum by described the 7th amplifier, the 7th detection signal comprises and the information relevant with respect to the angular velocity detection of turning axle that described turning axle is perpendicular to the described first and second acceleration axles.
23. method according to claim 22, further may further comprise the steps: produce speed detection signal, the vibration velocity homophase of this speed detection signal and the described first and second quality inspection pieces and asynchronous with the acceleration of the described first and second quality inspection pieces by the speed detector electrode structure.
24. method according to claim 23, further may further comprise the steps: receive described the 7th detection signal and described speed detection signal by phase detector, and produce the 8th detection signal by described phase detector, the 8th detection signal comprises and the information relevant with respect to the angular velocity detection of described turning axle.
25. method according to claim 14 further may further comprise the steps: described framework of little at least processing and the described first and second quality inspection pieces on substrate, the described first and second acceleration axles are in the plane of described substrate.
CNB2004800182733A 2003-04-28 2004-04-27 Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing Expired - Fee Related CN100437116C (en)

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