CN100420036C - 非易失性存储器件及其制造方法 - Google Patents
非易失性存储器件及其制造方法 Download PDFInfo
- Publication number
- CN100420036C CN100420036C CNB038240033A CN03824003A CN100420036C CN 100420036 C CN100420036 C CN 100420036C CN B038240033 A CNB038240033 A CN B038240033A CN 03824003 A CN03824003 A CN 03824003A CN 100420036 C CN100420036 C CN 100420036C
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- Prior art keywords
- semiconductor substrate
- forms
- insulating barrier
- district
- channel region
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- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000004065 semiconductor Substances 0.000 claims abstract description 120
- 125000001475 halogen functional group Chemical group 0.000 claims abstract description 37
- 230000008569 process Effects 0.000 claims abstract description 26
- 238000003860 storage Methods 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims description 58
- 239000002019 doping agent Substances 0.000 claims description 50
- 230000015654 memory Effects 0.000 claims description 27
- 230000004888 barrier function Effects 0.000 claims description 23
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 4
- 229910000967 As alloy Inorganic materials 0.000 claims 2
- 238000002347 injection Methods 0.000 abstract description 5
- 239000007924 injection Substances 0.000 abstract description 5
- 239000000969 carrier Substances 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 description 33
- 239000011248 coating agent Substances 0.000 description 26
- 238000000576 coating method Methods 0.000 description 26
- 229910045601 alloy Inorganic materials 0.000 description 24
- 239000000956 alloy Substances 0.000 description 24
- 239000004744 fabric Substances 0.000 description 21
- 230000015572 biosynthetic process Effects 0.000 description 20
- 238000005530 etching Methods 0.000 description 19
- 238000003475 lamination Methods 0.000 description 17
- 238000005229 chemical vapour deposition Methods 0.000 description 16
- 238000005240 physical vapour deposition Methods 0.000 description 16
- 238000002955 isolation Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 10
- 238000007254 oxidation reaction Methods 0.000 description 10
- 125000006850 spacer group Chemical group 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000001965 increasing effect Effects 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000007943 implant Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002159 nanocrystal Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- -1 oxynitrides Chemical class 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66833—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a charge trapping gate insulator, e.g. MNOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
Abstract
Description
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/267,153 US6887758B2 (en) | 2002-10-09 | 2002-10-09 | Non-volatile memory device and method for forming |
US10/267,153 | 2002-10-09 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007101962649A Division CN101197292B (zh) | 2002-10-09 | 2003-09-23 | 非易失性存储器件及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1689165A CN1689165A (zh) | 2005-10-26 |
CN100420036C true CN100420036C (zh) | 2008-09-17 |
Family
ID=32068349
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038240033A Expired - Lifetime CN100420036C (zh) | 2002-10-09 | 2003-09-23 | 非易失性存储器件及其制造方法 |
CN2007101962649A Expired - Lifetime CN101197292B (zh) | 2002-10-09 | 2003-09-23 | 非易失性存储器件及其制造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007101962649A Expired - Lifetime CN101197292B (zh) | 2002-10-09 | 2003-09-23 | 非易失性存储器件及其制造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6887758B2 (zh) |
JP (1) | JP2006502581A (zh) |
KR (1) | KR20050055003A (zh) |
CN (2) | CN100420036C (zh) |
AU (1) | AU2003277017A1 (zh) |
TW (1) | TWI322498B (zh) |
WO (1) | WO2004034426A2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109166804A (zh) * | 2018-08-29 | 2019-01-08 | 上海华虹宏力半导体制造有限公司 | 零阈值电压nmos的制备方法 |
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- 2003-09-23 CN CNB038240033A patent/CN100420036C/zh not_active Expired - Lifetime
- 2003-09-23 WO PCT/US2003/030588 patent/WO2004034426A2/en active Application Filing
- 2003-09-23 CN CN2007101962649A patent/CN101197292B/zh not_active Expired - Lifetime
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CN109166804A (zh) * | 2018-08-29 | 2019-01-08 | 上海华虹宏力半导体制造有限公司 | 零阈值电压nmos的制备方法 |
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Also Published As
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TW200427071A (en) | 2004-12-01 |
US6887758B2 (en) | 2005-05-03 |
US20040070030A1 (en) | 2004-04-15 |
CN1689165A (zh) | 2005-10-26 |
WO2004034426A2 (en) | 2004-04-22 |
AU2003277017A8 (en) | 2004-05-04 |
WO2004034426A3 (en) | 2004-08-12 |
CN101197292A (zh) | 2008-06-11 |
TWI322498B (en) | 2010-03-21 |
CN101197292B (zh) | 2010-06-23 |
JP2006502581A (ja) | 2006-01-19 |
KR20050055003A (ko) | 2005-06-10 |
AU2003277017A1 (en) | 2004-05-04 |
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