CA2577816A1 - Systems and methods using interferometric optical modulators and diffusers - Google Patents

Systems and methods using interferometric optical modulators and diffusers Download PDF

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Publication number
CA2577816A1
CA2577816A1 CA002577816A CA2577816A CA2577816A1 CA 2577816 A1 CA2577816 A1 CA 2577816A1 CA 002577816 A CA002577816 A CA 002577816A CA 2577816 A CA2577816 A CA 2577816A CA 2577816 A1 CA2577816 A1 CA 2577816A1
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Canada
Prior art keywords
display
movable
millimeters
reflector
diffuser
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Granted
Application number
CA002577816A
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French (fr)
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CA2577816C (en
Inventor
Clarence Chui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qualcomm MEMS Technologies Inc
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Idc, Llc
Clarence Chui
Qualcomm Mems Technologies, Inc.
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Priority to CA2775949A priority Critical patent/CA2775949C/en
Publication of CA2577816A1 publication Critical patent/CA2577816A1/en
Application granted granted Critical
Publication of CA2577816C publication Critical patent/CA2577816C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Abstract

Various embodiments include interferometric optical modulators comprising a substrate layer having a thickness between about 0.1 mm to about 0.45 mm thick and a method for manufacturing the same. The interferometric modulator can be integrated together with a diffuser in a display device. The thin substrate permits use of a thicker substrate. The thinner substrate may increase resolution and reduce overall thickness of the inteferometric modulator. The thicker diffuser may provide increased diffusion and durability.

Claims (82)

1. A display comprising a plurality of display elements, each of the display elements comprising:
a movable reflector;
a partial reflector positioned at a distance from the movable reflector thereby forming an optical resonator cavity, said movable reflector and said partial reflector separated by a gap;
a diffuser portion disposed forward the movable and partial reflectors; and an electrode configured to cause said movable reflector to move with respect to said partial reflector and to alter said optical resonator cavity, wherein (i) the plurality of display elements has a reflectivity at a viewing angle of about 45° that is greater than about 75% of the reflectivity of the plurality of display elements when viewed from normal and (ii) the diffuser portions are disposed sufficiently close to the partially reflective layers such that the plurality of display elements achieve a contrast of greater than about 5 to 1 while using a displayed test pattern of alternating white and black lines of a spatial period of less than about 0.45 millimeters.
2. The display of Claim 1, wherein said diffuser portion is disposed within about 0.45 millimeters of said partial reflector.
3. The display of Claim 1, wherein said diffuser portion is disposed within about 0.25 millimeters of said partial reflector.
4. The display of Claim 1, wherein said diffuser portion is disposed within about 0.15 millimeters of said partial reflector.
5. The display of Claim 1, wherein said movable reflector, said partial reflector and said electrode are disposed on a first side of a substrate and said diffuser portion is disposed on a second side of said substrate.
6. The display of Claim 5, wherein said substrate has a thickness of less than about 0.45 millimeters.
7. The display of Claim 1, wherein the spatial period is less than about 0.3 millimeters.
8. The display of Claim 7, wherein the spatial period is less than about 0.2 millimeters.
9. The display of Claim 7, wherein the spatial period is less than about 0.1 millimeters.
10. The display of Claim 1, further comprising a substrate comprised of at least one of glass, plastic, silica, and alumina.
11. The display of Claim 1, wherein said diffuser portions for said plurality of display elements comprise a plurality of separate diffuser elements.
12. The display of Claim 11, wherein said diffuser portion comprises a diffractive optical element.
13. The display of Claim 11 wherein said diffuser portion has optical power.
14. The display of Claim 13, wherein said diffuser portion has negative optical power.
15. The display of Claim 1, wherein said substrate has a thickness of about 0.4 millimeters or less.
16. The display of Claim 1, wherein said substrate has a thickness of about 0.3 millimeters or less.
17. The display of Claim 1, wherein said substrate has a thickness of about 0.2 millimeters or less.
18. The display of Claim 1, wherein said substrate has a thickness of about 0.1 millimeters or less.
19. The display of Claim 1, further comprising:
a processor that is in electrical communication with at least said electrode, said processor being configured to process image data; and a memory device in electrical communication with said processor.
20. The display of Claim 19, further comprising a driver circuit configured to send at least one signal to at least said electrode.
21. The display of Claim 20, further comprising a controller configured to send at least a portion of said image data to said driver circuit.
22. The display of Claim 19, further comprising an image source module configured to send said image data to said processor.
23. The display of Claim 22, wherein said image source module comprises at least one of a receiver, transceiver, and transmitter.
24. The display of Claim 19, further comprising an input device configured to receive input data and to communicate said input data to said processor.
25. A display comprising:
means for displaying an image, comprising:
means for reflecting light, said reflecting means being movable; and means for partially reflecting light, the partially reflecting means positioned at a distance from the movable reflecting means thereby forming means for inducing optical resonance, the movable reflecting means and the partially reflecting means being separated by a gap;
means for diffusing said light, disposed forward the movable reflecting means and partially reflecting means; and means for moving the movable reflecting means relative to the partially reflecting means to alter the optical resonator cavity, wherein (i) said displaying means has a reflectivity at a viewing angle of about 45° that is greater than about 75% of the reflectivity of the displaying means when viewed from normal, and (ii) said displaying means produces a display contrast greater than about 5 to 1 for a test pattern comprising alternating white and black lines of a spatial period of less than about 0.45 millimeters.
26. The display of Claim 25, wherein the displaying means comprises a plurality of display elements.
27. The display of Claim 25 or 26, wherein the movable reflecting means comprises a movable reflector.
28. The display of any one of Claims 25, 26, or 27, wherein the partially reflecting means comprises a partial reflector.
29. The display of any one of Claims 25, 26, 27, or 28, wherein the inducing means comprises an optical resonator cavity.
30. The display of any one of Claims 25, 26, 27, 28, or 29, wherein the diffusing means comprises a diffuser.
31. The display of any one of Claims 25, 26, 27, 28, 29, or 30, wherein the moving means comprises an electrode.
32. The display of Claim 25, further comprising means for focusing light.
33. The display of Claim 32, wherein the focusing means comprises at least one of a holographic lens, a diffractive lens, and a Frensel lens.
34. A method of manufacturing a display comprising a plurality of display elements, said method comprising:
forming a movable reflector;
forming a partial reflector positioned at a distance from the movable reflector thereby forming an optical resonator cavity, said movable reflector and said partial reflector separated by a gap such that said movable reflector can move toward said partial reflector to modulate said optical resonator cavity;
forming a diffuser disposed within about 0.45 millimeters or less of the partially reflective layer; and forming an electrode configured to cause said movable reflector to move with respect to said partial reflector.
35. The method of Claim 34, wherein forming said diffuser comprises disposing said diffuser within about 0.35 millimeters of said partially reflecting layer.
36. The method of Claim 34, wherein forming said diffuser comprises disposing said diffuser within about 0.25 millimeters of said partially reflecting layer.
37. The method of Claim 34, wherein forming said diffuser comprises disposing said diffuser within about 0.15 millimeters of said partially reflecting layer.
38. The method of Claim 34, wherein said movable and partial reflectors are formed on a substrate comprises at least one of glass, plastic, silica, alumina.
39. The method of Claim 34, wherein forming the diffuser comprises forming at least one of a holographic lens or a diffractive lens.
40. The method of Claim 34, wherein forming the diffuser comprises forming a Frensel lens.
41. A display manufactured using the method of any of Claims 34 to 40.
42. The display of Claim 41, wherein said plurality of display elements are configured to achieve a contrast of greater than about 5 to 1 for a test pattern comprising alternating white and black rows of said plurality of display elements, wherein the plurality of display elements has a reflectivity at a viewing angle of about 45°
that is greater than about 75% of the reflectivity of the display elements when viewed from normal, and wherein the spatial resolution of the plurality of display elements is less than about 0.3 millimeters.
43. The display of Claim 42, wherein the spatial resolution is less than about 0.2 millimeters.
44. The display of Claim 42, wherein the spatial resolution is less than about 0.1 millimeters.
45. A display comprising a plurality of display elements, each of the display elements comprising:
a movable reflector;
a partial reflector positioned at a distance from the movable reflector thereby forming an optical resonator cavity;
an electrode configured to cause said movable mirror to move with respect to said partial reflector to alter said optical resonator cavity; and a substrate, said movable reflector, said partial reflector and said electrode disposed on one side of the substrate, said substrate having a thickness of about 0.45 millimeters or less.
46. The display of Claim 45, wherein said substrate has a thickness of about 0.4 millimeters or less.
47. The display of Claim 45, wherein said substrate has a thickness of about 0.3 millimeters or less.
48. The display of Claim 45, wherein said substrate has a thickness of about 0.2 millimeters or less.
49. The display of Claim 45, wherein said substrate has a thickness of about 0.1 millimeters or less.
50. The display of Claim 45, further comprising a diffuser having a thickness of no more than about 0.4 millimeters.
51. The display of Claim 50, wherein said plurality of display elements are arranged in rows and columns and have a spatial resolution less than about 0.3 millimeters and a reflectivity at a viewing angle of about 45° that is greater than about 75% of the reflectivity when viewed from normal.
52. The display of Claim 51, wherein said diffuser is disposed a distance from said partial reflector to provide said plurality of display elements with a contrast of greater than about 5 to 1 for a test pattern of alternating white and black rows or columns.
53. The display of Claim 45, further comprising:
a processor that is in electrical communication with at least said electrode, said processor being configured to process image data; and a memory device in electrical communication with said processor.
54. The display of Claim 53, further comprising a driver circuit configured to send at least one signal to at least said electrode.
55. The display of Claim 54, further comprising a controller configured to send at least a portion of said image data to said driver circuit.
56. The display of Claim 53, further comprising an image source module configured to send said image data to said processor.
57. The display of Claim 56, wherein said image source module comprises at least one of a receiver, transceiver, and transmitter.
58. The display of Claim 53, further comprising an input device configured to receive input data and to communicate said input data to said processor.
59. A display comprising:
means for displaying an image, the displaying image comprising:
means for reflecting light that is movable;
means for partially reflecting light, the partially reflecting means positioned at a distance from the movable reflecting means thereby forming means for inducing optical resonance; and means for moving the movable reflecting means relative to the partially reflecting means to alter the optical resonance inducing means; and means for supporting said movable reflecting means, said partially reflecting means, and said moving means, said means for supporting having a thickness about 0.45 millimeters or less, wherein the movable reflecting means, the partially reflecting means, and the moving means are each disposed on one side of the transmitting means.
60. The display of Claim 53, wherein the displaying means comprises a plurality of display elements.
61. The display of Claim 53, or 60, wherein the movable reflecting means comprises a movable reflector.
62. The display of any one of Claims 53, 60, or 61, wherein the partially reflecting means comprises a partial reflector.
63. The display of any one of Claims 53, 60, 61, or 62, wherein the inducing means comprises an optical resonance cavity.
64. The display of any one of Claims 53, 60, 61, 62, or 63, wherein the moving means comprises an electrode.
65. The display of any one of Claims 53, 60, 61, 62, 63, or 64, wherein the transmitting means comprises a substrate having a thickness of about 0.45 millimeters or less.
66. A display comprising a plurality of display elements, each of the display elements comprising:
a movable reflector;
a partial reflector positioned at a distance from the movable reflector thereby forming an optical resonator cavity, said movable reflector and said partial reflector separated by a gap;
a diffuser portion disposed forward the movable and partial reflectors; and an electrode configured to cause said movable reflector to move with respect to said partial reflector and to alter said optical resonator cavity, wherein said diffuser portion is disposed within about 0.45 millimeters of said partial reflector.
67. The display of Claim 66, wherein said diffuser portion is disposed within about 0.35 millimeters of said partial reflector.
68. The display of Claim 66, wherein said diffuser portion is disposed within about 0.25 millimeters of said partial reflector.
69. The display of Claim 66, wherein said diffuser portion is disposed within about 0.15 millimeters of said partial reflector.
70. The display of Claim 66, further comprising:
a processor that is in electrical communication with at least said electrode, said processor being configured to process image data; and a memory device in electrical communication with said processor.
71. The display of Claim 70, further comprising a driver circuit configured to send at least one signal to at least said electrode.
72. The display of Claim 71, further comprising a controller configured to send at least a portion of said image data to said driver circuit.
73. The display of Claim 70, further comprising an image source module configured to send said image data to said processor.
74. The display of Claim 73, wherein said image source module comprises at least one of a receiver, transceiver, and transmitter.
75. The display of Claim 70, further comprising an input device configured to receive input data and to communicate said input data to said processor.
76. A display comprising:
means for displaying an image, the displaying means comprising:
means for reflecting light that is movable; and means for partially reflecting light, the partially reflecting means positioned at a distance from the movable reflecting means thereby forming means for inducing optical resonance, the movable reflecting means and the partially reflecting means separated by a gap;
means for diffusing said light, disposed forward the movable and partially reflecting means; and means for moving the movable reflecting means relative to the partially reflecting means to alter the optical resonance inducing means, wherein the diffusing means is disposed within about 0.45 millimeters of the partially reflecting means.
77. The display of Claim 70, wherein the displaying means comprises a plurality of display elements.
78. The display of Claim 70 or 77, wherein the movable reflecting means comprises a movable reflector.
79. The display of any one of Claims 70, 77, or 78, wherein the partially reflecting means comprises a partial reflector.
80. The display of any one of Claims 70, 77, 78, or 79, wherein the inducing means comprises an optical resonance cavity.
81. The display of any one of Claims 70, 77, 78, 79, or 80, wherein the diffusing means comprises a diffuser.
82. The display of any one of Claims 70, 77, 78, 79, 80, or 81, wherein the moving means comprises an electrode.
CA2577816A 2004-09-27 2005-09-14 Systems and methods using interferometric optical modulators and diffusers Expired - Fee Related CA2577816C (en)

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US61356804P 2004-09-27 2004-09-27
US60/613,568 2004-09-27
US11/209,143 2005-08-22
US11/209,143 US7710636B2 (en) 2004-09-27 2005-08-22 Systems and methods using interferometric optical modulators and diffusers
PCT/US2005/033056 WO2006036588A1 (en) 2004-09-27 2005-09-14 Systems and methods using interferometric optical modulators and diffusers

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EP (3) EP2241925A1 (en)
KR (2) KR101229320B1 (en)
CA (2) CA2775949C (en)
SG (1) SG155993A1 (en)
TW (1) TW200619131A (en)
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US8184358B2 (en) 2012-05-22
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EP1800170A1 (en) 2007-06-27
US20110199669A1 (en) 2011-08-18

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