CA2565444A1 - Coated article having low-e coating with ion beam treated ir reflecting layer and corresponding method - Google Patents

Coated article having low-e coating with ion beam treated ir reflecting layer and corresponding method Download PDF

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Publication number
CA2565444A1
CA2565444A1 CA002565444A CA2565444A CA2565444A1 CA 2565444 A1 CA2565444 A1 CA 2565444A1 CA 002565444 A CA002565444 A CA 002565444A CA 2565444 A CA2565444 A CA 2565444A CA 2565444 A1 CA2565444 A1 CA 2565444A1
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Prior art keywords
reflecting layer
layer
coated article
ion beam
reflecting
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Granted
Application number
CA002565444A
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French (fr)
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CA2565444C (en
Inventor
Vijayen Veerasamy
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Guardian Industries Corp
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Guardian Industries Corp.
Vijayen Veerasamy
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Publication of CA2565444A1 publication Critical patent/CA2565444A1/en
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Publication of CA2565444C publication Critical patent/CA2565444C/en
Expired - Fee Related legal-status Critical Current
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/3442—Applying energy to the substrate during sputtering using an ion beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
    • B32B17/10036—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising two outer glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10165—Functional features of the laminated safety glass or glazing
    • B32B17/10174—Coatings of a metallic or dielectric material on a constituent layer of glass or polymer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B32B17/10761—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing vinyl acetal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3694—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer having a composition gradient through its thickness
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0652—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C23C14/5833—Ion beam bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/586—Nitriding
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering

Abstract

A coated article is provided that may be used as a vehicle windshield, insulating glass (IG) window unit, or the like. An ion beam is used during at least part of forming an infrared (IR) reflecting layer(s) of such a coated article. Advantageously, this has been found to improve sheet resistance (Rs) properties, solar control properties, and/or durability of the coated article.
Other layers may also be ion beam treated in certain example embodiments.

Claims (54)

1. A method of making a coated article, the method comprising:
providing a glass substrate;

forming at least one dielectric layer on the substrate;

forming an infrared (IR) reflecting layer comprising silver on the substrate over at least the first dielectric layer, where said forming of the IR
reflecting layer comprises (a) sputter-depositing a first layer portion, or seed layer, comprising silver;
and (b) using a simultaneous combination of an ion beam and material moving toward the substrate from a sputtering target to form a second layer portion immediately over and contacting the first layer portion; and forming at least one additional dielectric layer on the substrate over at least the IR reflecting layer.
2. The method of claim 1, wherein said at least one dielectric layer comprises at least one of silicon nitride and zinc oxide.
3. The method of claim 1, wherein said additional dielectric layer comprises at least one of tin oxide and silicon nitride.
4. The method of claim 1, wherein said ion beam consists essentially of ions from an inert gas used in an ion source(s).
5. The method of claim 1, wherein said ion beam is substantially free of oxygen ions.
6. The method of claim 1, wherein the ion beam is utilized in a manner so as to cause the IR reflecting layer to have compressive stress.
7. The method of claim 1, further comprising forming at least a layer comprising NiCr on the substrate over at least the IR reflecting layer.
8. The method of claim 1, wherein the ion beam is utilized in a manner sufficient to cause a sheet resistance (R s) of the IR reflecting layer to be at least 5%
less than if the ion beam had not been used.
9. The method of claim 1, wherein the ion beam is utilized in a manner sufficient to cause a sheet resistance (R s) of the IR reflecting layer to be at least 10%
less than if the ion beam had not been used.
10. The method of claim 1, wherein the ion beam is utilized in a manner sufficient to cause a sheet resistance (R s) of the IR reflecting layer to be at least 15%
less than if the ion beam had not been used.
11. The method of claim 1, further comprising heat treating the coated article in a manner sufficient for at least one of tempering and heat bending, so that following said heat treating the coated article has a visible transmission of at least 70% and a sheet resistance (R s) of no greater than 5.0 ohms/square.
12. The method of claim 1, further comprising heat treating the coated article in a manner sufficient for at least one of tempering and heat bending, so that following said heat treating the coated article has a visible transmission of at least 75% and a sheet resistance (R s) of no greater than 3.0 ohms/square.
13. The method of claim 1, wherein prior to any optional heat treating, the coated article in monolithic form has a visible transmission of at least 70%
and a sheet resistance (R s) of no greater than 5.0 ohms/square.
14. The method of claim 1, further comprising forming a layer comprising zinc oxide on the glass substrate in a position so that the IR reflecting layer is formed directly on and contacting the layer comprising zinc oxide.
15. A window comprising the coated article made according to the method of claim 1.
16. The method of claim 1, further comprising forming another IR
reflecting layer comprising silver in accordance with (a) and (b).
17. 'The method of claim 1, wherein each of the first layer portion and the second layer portion is substantially metallic.
18. A method of making a coated article, including forming an infrared (IR) reflecting layer on a glass substrate, where said forming of the IR
reflecting layer comprises:

sputter-depositing a first layer portion, or seed layer; of the IR reflecting layer and using a simultaneous combination of an ion beam and material moving toward the substrate from a sputtering target to form a second layer portion immediately over and contacting the first layer portion; and forming at least one additional layer on the substrate over at least the IR
reflecting layer.
19. The method of claim 18, wherein said ion beam consists essentially of argon ions.
20. The method of claim 18, wherein said ion beam is substantially free of oxygen ions.
21. The method of claim 18, wherein the ion beam is utilized in a manner so as to cause the IR reflecting layer to have compressive stress.
22. The method of claim 18, further comprising forming at least a layer comprising NiCr on the substrate over at least the IR reflecting layer.
23. The method of claim 18, wherein the ion beam is utilized in a manner sufficient to cause a sheet resistance (R s) of the IR reflecting layer to be at least 5%
less than if the ion beam had not been used.
24. The method of claim 18, wherein the ion beam is utilized in a manner sufficient to cause a sheet resistance (R s) of the IR reflecting layer to be at least 10%
less than if the ion beam had not been used.
25. The method of claim 18, wherein the ion beam is utilized in a manner sufficient to cause a sheet resistance (R s) of the IR reflecting layer to be at least 15%
less than if the ion beam had not been used.
26. The method of claim 18, further comprising heat treating the coated article in a manner sufficient for at least one of tempering and heat bending, so that following said heat treating the coated article has a visible transmission of at least 70% and a sheet resistance (R s) of no greater than 5.0 ohms/square.
27. The method of claim 18, wherein prior to any optional heat treating, the coated article in monolithic form has a visible transmission of at least 70% and a sheet resistance (R s) of no greater than 5.0 ohms/square.
28. The method of claim 18, further comprising forming a layer comprising zinc oxide on the glass substrate in a position so that the IR
reflecting layer is formed directly on and contacting the layer comprising zinc oxide.
29. A window comprising the coated article made according to the method of claim 18.
30. The method of claim 18, wherein each of the first layer portion and the second layer portion is substantially metallic.
31. The method of claim 18, wherein the IR reflecting layer comprises Ag and/or Au.
32. The method of claim 18, wherein the IR reflecting layer is graded with respect to argon content, so that an upper portion of the IR reflecting layer has a higher argon concentration than does a lower portion of the IR reflecting layer.
33. The method of claim 1, wherein the IR reflecting layer is graded with respect to argon content, so that an upper portion of the IR reflecting layer has a higher argon concentration than does a lower portion of the IR reflecting layer.
34. A coated article including a glass substrates supporting a coating, wherein the coating comprises:

at least one dielectric layer;

an IR reflecting layer provided on the substrate over at least the dielectric layer;

another dielectric layer provided on the substrate over at least the IR
reflecting layer and the at least one dielectric layer; and wherein the IR reflecting layer comprises silver and has compressive stress.
35. The coated article of claim 34, wherein the IR reflecting layer is substantially free of oxygen in at least a portion thereof.
36. The coated article of claim 34, wherein the IR reflecting layer is substantially metallic or metallic.
37. The coated article of claim 34, wherein the IR reflecting layer is graded with respect to argon content, so that an upper portion of the IR
reflecting layer has a higher argon concentration than does a lower portion of the IR
reflecting layer.
38. The coated article of claim 37, wherein the upper portion of the IR
reflecting layer has an argon concentration at least 10% higher than that of the lower portion of the IR reflecting layer.
39. The coated article of claim 38, wherein the upper portion of the IR
reflecting layer has an argon concentration at least 20% higher than that of the lower portion of the IR reflecting layer.
40. The coated article of claim 34, wherein the at least one dielectric layer comprises silicon nitride.
41. The coated article of claim 34, wherein the coated article has a visible transmission of at least 70% and a sheet resistance (R s) of no greater than 5.0 ohms/square.
42. The coated article of claim 34, further comprising a layer comprising zinc oxide, wherein the IR reflecting layer is located directly on and contacting the layer comprising zinc oxide.
43. The coated article of claim 34, wherein the IR reflecting layer comprises Ag and/or Au.
44. A coated article including a glass substrates supporting a coating, wherein the coating comprises:

at least one dielectric layer;

an IR reflecting layer provided on the substrate over at least the dielectric layer, another dielectric layer provided on the substrate over at least the IR
reflecting layer and the at least one dielectric layer; and wherein the IR reflecting layer has different portions which differ with respect to content of an inert element, so that an upper portion of the IR reflecting layer has a higher concentration of the inert element than does a lower portion of the IR
reflecting layer.
45. The coated article of claim 44, wherein the inert element is argon.
46. The coated article of claim 44, wherein the IR reflecting layer comprises silver and has compressive stress of from about 50 MPa to 2 GPa.
47. The coated article of claim 44, wherein the IR reflecting layer is substantially free of oxygen in at least a central portion thereof.
48. The coated article of claim 44, wherein the IR reflecting layer is substantially metallic or metallic.
49. The coated article of claim 44, wherein the upper portion of the IR
reflecting layer has an argon concentration at least 10% higher than that of the lower portion of the IR reflecting layer.
50. The coated article of claim 44, wherein the upper portion of the IR
reflecting layer has an argon concentration at least 20% higher than that of the lower portion of the IR reflecting layer.
51. The coated article of claim 44, wherein the at least one dielectric layer comprises silicon nitride.
52. The coated article of claim 44, wherein the coated article has a visible transmission of at least 70% and a sheet resistance (R s) of no greater than 5.0 ohms/square.
53. The coated article of claim 44, further comprising a layer comprising zinc oxide, wherein the IR reflecting layer is located directly on and contacting the layer comprising zinc oxide.
54. The coated article of claim 44, wherein the IR reflecting layer comprises Ag and/or Au.
CA2565444A 2004-06-25 2005-06-22 Coated article having low-e coating with ion beam treated ir reflecting layer and corresponding method Expired - Fee Related CA2565444C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/875,515 2004-06-25
US10/875,515 US7229533B2 (en) 2004-06-25 2004-06-25 Method of making coated article having low-E coating with ion beam treated and/or formed IR reflecting layer
PCT/US2005/022197 WO2006012184A1 (en) 2004-06-25 2005-06-22 Coated article having low-e coating with ion beam treated ir relfecting layer and corresponding method

Publications (2)

Publication Number Publication Date
CA2565444A1 true CA2565444A1 (en) 2006-02-02
CA2565444C CA2565444C (en) 2012-05-22

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Country Status (6)

Country Link
US (3) US7229533B2 (en)
EP (1) EP1786739B1 (en)
CA (1) CA2565444C (en)
ES (1) ES2398355T3 (en)
PL (1) PL1786739T3 (en)
WO (1) WO2006012184A1 (en)

Cited By (1)

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