CA2471693A1 - Arrays of microparticles and methods of preparation thereof - Google Patents

Arrays of microparticles and methods of preparation thereof Download PDF

Info

Publication number
CA2471693A1
CA2471693A1 CA002471693A CA2471693A CA2471693A1 CA 2471693 A1 CA2471693 A1 CA 2471693A1 CA 002471693 A CA002471693 A CA 002471693A CA 2471693 A CA2471693 A CA 2471693A CA 2471693 A1 CA2471693 A1 CA 2471693A1
Authority
CA
Canada
Prior art keywords
biochips
beads
substrate
wafer substrate
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002471693A
Other languages
French (fr)
Other versions
CA2471693C (en
Inventor
Michael Seul
Chiu Wo Chau
Hui Huang
Sukanta Banerjee
Ye Hong
Jiacheng Yang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bioarray Solutions Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2471693A1 publication Critical patent/CA2471693A1/en
Application granted granted Critical
Publication of CA2471693C publication Critical patent/CA2471693C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6813—Hybridisation assays
    • C12Q1/6834—Enzymatic or biochemical coupling of nucleic acids to a solid phase
    • C12Q1/6837—Enzymatic or biochemical coupling of nucleic acids to a solid phase using probe arrays or probe chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0046—Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/5302—Apparatus specially adapted for immunological test procedures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54306—Solid-phase reaction mechanisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00279—Features relating to reactor vessels
    • B01J2219/00306—Reactor vessels in a multiple arrangement
    • B01J2219/00313—Reactor vessels in a multiple arrangement the reactor vessels being formed by arrays of wells in blocks
    • B01J2219/00315—Microtiter plates
    • B01J2219/00317—Microwell devices, i.e. having large numbers of wells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00457—Dispensing or evacuation of the solid phase support
    • B01J2219/00459—Beads
    • B01J2219/00466—Beads in a slurry
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00457—Dispensing or evacuation of the solid phase support
    • B01J2219/00459—Beads
    • B01J2219/00468—Beads by manipulation of individual beads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00497—Features relating to the solid phase supports
    • B01J2219/005—Beads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/0054—Means for coding or tagging the apparatus or the reagents
    • B01J2219/00545—Colours
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00646—Making arrays on substantially continuous surfaces the compounds being bound to beads immobilised on the solid supports
    • B01J2219/00648—Making arrays on substantially continuous surfaces the compounds being bound to beads immobilised on the solid supports by the use of solid beads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00659—Two-dimensional arrays
    • B01J2219/00662—Two-dimensional arrays within two-dimensional arrays
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q2563/00—Nucleic acid detection characterized by the use of physical, structural and functional properties
    • C12Q2563/149—Particles, e.g. beads

Abstract

This invention provides high unit density arrays of microparticles and methods of assembling such arrays. The microparticles in the arrays may be functionalized with chemical or biological entities specific to a given target analyte. The high unit density arrays of this invention are formed on chips which may be combined to form multichip arrays acccording to the methods described herein. The chip and/or multichip arrays of this invention are useful for chemical and biological assays.

Claims (44)

1. A method for producing biochips comprising patterning a wafer substrate to form a plurality of chip regions;
assembling at least one bead array comprising functionalized, encoded beads on a surface of the wafer substrate in at least one chip region; and singulating the wafer to form a plurality of individual biochips.
2. The method according to claim 1, wherein said method further comprises scribing said wafer substrate in accordance with delineated chip regions.
3. The method according to claim 1 further comprising the step of cutting trenches into said patterned wafer along boundaries between said chip regions.
4. The method according to claim 3 wherein cutting is accomplished by using wet chemicals.
5. The method according to claim 3 wherein cutting is accomplished by using dry etching.
6. The method according to claim 1 wherein said bead array is protected by a removable protective coating prior to singulation.
7. The method of producing biochips according to claim 1 further comprising fabricating bead confining structures in said chip regions, the bead confining structures comprising recesses to confine the movement of beads.
8. The method according to claim 7 wherein said recesses are defined by photolithography and formed by reactive ion etching.
9. The method according to claim 7 wherein each said recess has straight sidewalls and a predetermined depth.
10. The method according to claim 9 wherein said recesses have reentrant sidewall profiles, said profiles being formed by modifying recesses having straight sidewalk by subsequently depositing a layer of material that adheres to the sidewalls so as to produce the desired re-entrant sidewall profiles.
11. The method according to claim 10 wherein said material is silicon dioxide.
12. The method according to claim 1, further comprising a step for evaluating and controlling biochip quality by optically imaging the beads to ensure that recesses formed in said chip regions are substantially occupied by beads.
13. A method for packaging biochips produced according to the method of claim comprising selecting biochips originating from a multiplicity of wafer substrates and assembling them on a planar surface to form pooled biochip sets.
14. A method for packaging biochips produced according to the method of claim 1, wherein said pooled biochip sets form an assay device.
15. The method according to claim 13 wherein said biochips are assembled in an assembly area by sliding said biochips from a multiplicity of wafer substrates present on a common substrate.
16. The method according to claim 15 wherein said biochips are tagged to identify the wafer substrate of origin.
17. The method according to claim 16 wherein said biochips are assembled randomly.
18. The method according to claim 16 wherein biochips from a multiplicity of wafer substrates are present in a suspension and wherein said suspension is deposited on a planar substrate.
19. The method according to claim 13 wherein biochips from a multiplicity of wafer substrates are picked and placed on a common planar surface.
20. A method for packaging biochips produced according to the method of claim comprising selecting at least one biochip from at least one wafer substrate and placing said at least one biochip into a liquid confining region on a carrier substrate.
21. The method according to claim 20 wherein said carrier substrate comprises a hydrophilic major surface and a patterned hydrophobic layer.
22. The method according to claim 21 wherein said patterned hydrophobic layer on said carrier substrate defines liquid confining regions.
23. A plurality of biochips prepared by the method comprising:
patterning a wafer substrate to form a plurality of chip regions;
assembling at least one bead array comprising functionalized, encoded beads on a surface the wafer substrate in at least one chip region; and singulating the wafer to form said plurality of individual biochips.
24. The plurality of biochips according to claim 23, wherein said wafer substrate also comprises scribing in accordance with delineated chip regions.
25. The plurality of biochips according to claim 23 wherein said wafer substrate also comprises trenches cut into said patterned wafer along boundaries between said chip regions.
26. A pool biochips obtained from a multiplicity of wafer substrates and wherein said biochips are prepared according to the method of claim 1.
27. An assay device comprising a mobile chip carrier and a functional device for containing liquid, said mobile chip carrier comprising a plurality of biochips bonded to a common substrate; and wherein said biochips attached to said mobile chip carrier may be positioned to contact liquid contained by said functional device during an assay.
28. A mobile chip carrier comprising at least one chamber containing at least one biochip, said mobile chip carrier further comprising means for changing thermodynamic properties of said at least one chamber.
29. An assay comprising:
contacting a mobile chip carrier comprising a plurality biochips bonded to a carrier substrate with a solution comprising at least one target analyte, said solution contained in a functional device for containing liquid; and detecting whether the target analyte reacts with the biochips.
30. The assay according to claim 29, comprising multiple processing steps of contacting said mobile chip carrier with different reaction media contained in a plurality of functional devices.
31. The method according to either one of claims 29 or 30, wherein said functional device is selected from the group consisting of a reaction chamber, a washing chamber, or a signal reading stage.
32. A bead array comprising a removable coating for protecting said bead array on a biochip, said bead array comprising a plurality of functionalized encoded beads with surfaces to which molecular probes are attached, and said coating having the property of being non-reactive towards the molecular probes on the surfaces of the beads.
33. A process for depositing beads on a surface of a patterned wafer substrate to form a bead array, wherein said surface of said wafer substrate comprises a patterned layer, said patterned layer having an area with surface structures for confining beads, said process comprising placing an aliquot of a suspension of beads on a surface of said wafer substrate and mechanically agitating the suspension of beads to induce beads to settle in said area with surface structures for confining beads to form said bead array.
34. The process according to claim 33, wherein the step of mechanically agitating the suspension of beads comprises stirring said suspension with a damp cotton applicator to increase the occupancy of beads in said area for confining beads.
35. A semiconductor wafer substrate comprising at least one chip region, said chip region comprising:
a recess array for confining movement of beads on the substrate;
an optional patterned insulating dielectric layer for modifying impedance of an electrolyte-insulator semiconductor structure when the substrate is in contact with a bead solution wherein said patterned dielectric layer is positioned such that when an alternating electric field is applied beads in said bead solution are driven to accumulate at said recess array; and an optional protective passivation layer covering a surface of the substrate.
36. The semiconductor wafer substrate according to claim 35, further comprising a plurality of chip regions.
37. The semiconductor wafer substrate according to claim 35, wherein said patterned insulating dielectric layer defines a region having a star-shaped perimeter.
38. The semiconductor wafer substrate according to claim 37, wherein said recess array comprises recesses having shapes selected from the group consisting of triangles, pentagons, hexagons and circles.
39. A method of assembling an array of beads, said method comprising:
providing a semiconductor wafer substrate according to claim 35, wherein said patterned dielectric layer defines regions on said substrate with and without dielectric, and wherein said recess array is located in a region without dielectric;
applying a solution of beads to a surface of the substrate, said surface comprising said patterned dielectric layer; and assembling an array of beads using LEAPS, wherein an electric field with a first frequency is applied to induce movement of beads towards said regions with dielectric and a second frequency electric field is applied to arrange beads in said recess array.
40. A wafer substrate comprising a plurality of chip regions defined by patterning and optionally scribing said wafer substrate, wherein said chip regions comprise at least one bead restraining region and wherein said scribing enables breaking of said chip regions to form biochips comprising one or more chip regions.
41. The wafer substrate according to claim 40 further comprising at least one bead subpopulation affixed to a surface of at least one chip region of said substrate and wherein said bead subpopulation is formed of at least one biofunctionalized molecular probe selected from a probe library and affixed to a plurality of beads.
42. A plurality of biochips wherein said biochips are produced by breaking at least one wafer substrate according to claim 41 to separate said chip regions to form said plurality of biochips.
43. The plurality of biochips according to claim 42 wherein said biochips are obtained by breaking two or more wafer substrates comprising different bead subpopulations.
44. A method of retaining a population of charged beads in designated positions on a surface of a semiconductor wafer substrate comprising depositing a first charged polymer on the surface of the semiconductor wafer substrate, said first charged polymer having a charge of opposite sign to the charged beads, depositing the beads onto the surface of the semiconductor wafer substrate, and depositing a second charged polymer on the surface of the semiconductor wafer substrate, said second charged polymer having a charge of opposite sign to the first charged polymer.
CA2471693A 2001-12-28 2002-12-27 Arrays of microparticles and methods of preparation thereof Expired - Lifetime CA2471693C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US34362101P 2001-12-28 2001-12-28
US60/343,621 2001-12-28
US10/192,352 2002-07-09
US10/192,352 US7335153B2 (en) 2001-12-28 2002-07-09 Arrays of microparticles and methods of preparation thereof
PCT/US2002/041623 WO2003058199A2 (en) 2001-12-28 2002-12-27 Arrays of microparticles and methods of preparation thereof

Publications (2)

Publication Number Publication Date
CA2471693A1 true CA2471693A1 (en) 2003-07-17
CA2471693C CA2471693C (en) 2011-05-03

Family

ID=26888007

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2471693A Expired - Lifetime CA2471693C (en) 2001-12-28 2002-12-27 Arrays of microparticles and methods of preparation thereof

Country Status (13)

Country Link
US (7) US7335153B2 (en)
EP (3) EP2565648B1 (en)
JP (2) JP2005535868A (en)
KR (1) KR100966683B1 (en)
CN (1) CN1299117C (en)
AU (1) AU2002364034B2 (en)
CA (1) CA2471693C (en)
ES (2) ES2398194T3 (en)
HK (1) HK1074881A1 (en)
IL (2) IL162737A0 (en)
NZ (1) NZ533752A (en)
PT (1) PT1488236E (en)
WO (1) WO2003058199A2 (en)

Families Citing this family (154)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2288760T3 (en) 1996-04-25 2008-01-16 Bioarray Solutions Ltd. ELECTROCINETIC ASSEMBLY CONTROLLED BY LIGHT OF PARTICLES NEXT TO SURFACES.
DE10065632A1 (en) * 2000-05-12 2001-11-15 Smtech Biovision Holding Ag Ec Detecting polynucleotides by hybridizing an array of sequences on a carrier with detection probes, but not immobilized
US9709559B2 (en) 2000-06-21 2017-07-18 Bioarray Solutions, Ltd. Multianalyte molecular analysis using application-specific random particle arrays
DE60117556T2 (en) 2000-06-21 2006-11-02 Bioarray Solutions Ltd. MULTI-ANALYTIC MOLECULAR ANALYSIS THROUGH THE USE OF APPLICATION SPECIFIC RAPID PARTICLE ARRAYS
US7262063B2 (en) * 2001-06-21 2007-08-28 Bio Array Solutions, Ltd. Directed assembly of functional heterostructures
ES2661167T3 (en) 2001-10-15 2018-03-27 Bioarray Solutions Ltd. Multiplexed analysis of polymorphic loci by simultaneous consultation and enzyme-mediated detection
NL1019613C2 (en) * 2001-12-19 2003-06-20 Micronit Microfluidics Bv Method for dividing a substrate into a number of individual chip parts.
US7335153B2 (en) 2001-12-28 2008-02-26 Bio Array Solutions Ltd. Arrays of microparticles and methods of preparation thereof
AU2003244342A1 (en) * 2002-01-29 2003-09-02 Asahi Kasei Kabushiki Kaisha Biosensor, magnetic molecule measurement method, and measurement object measuring method
US7508608B2 (en) 2004-11-17 2009-03-24 Illumina, Inc. Lithographically fabricated holographic optical identification element
US7901630B2 (en) 2002-08-20 2011-03-08 Illumina, Inc. Diffraction grating-based encoded microparticle assay stick
US7164533B2 (en) 2003-01-22 2007-01-16 Cyvera Corporation Hybrid random bead/chip based microarray
US7923260B2 (en) 2002-08-20 2011-04-12 Illumina, Inc. Method of reading encoded particles
US7872804B2 (en) 2002-08-20 2011-01-18 Illumina, Inc. Encoded particle having a grating with variations in the refractive index
US7900836B2 (en) 2002-08-20 2011-03-08 Illumina, Inc. Optical reader system for substrates having an optically readable code
US7157228B2 (en) * 2002-09-09 2007-01-02 Bioarray Solutions Ltd. Genetic analysis and authentication
CA2498933C (en) * 2002-09-12 2012-08-28 Cyvera Corporation Method and apparatus for aligning elongated microbeads in order to interrogate the same
US7092160B2 (en) 2002-09-12 2006-08-15 Illumina, Inc. Method of manufacturing of diffraction grating-based optical identification element
US20100255603A9 (en) * 2002-09-12 2010-10-07 Putnam Martin A Method and apparatus for aligning microbeads in order to interrogate the same
US7526114B2 (en) 2002-11-15 2009-04-28 Bioarray Solutions Ltd. Analysis, secure access to, and transmission of array images
US8652774B2 (en) * 2003-04-16 2014-02-18 Affymetrix, Inc. Automated method of manufacturing polyer arrays
US7452565B2 (en) * 2003-06-12 2008-11-18 Sukanta Banerjee Immobilization of bead-displayed ligands on substrate surfaces
FR2856677B1 (en) * 2003-06-27 2006-12-01 Saint Gobain SUBSTRATE COATED WITH A DIELECTRIC LAYER AND METHOD FOR MANUFACTURING THE SAME
WO2005029705A2 (en) 2003-09-18 2005-03-31 Bioarray Solutions, Ltd. Number coding for identification of subtypes of coded types of solid phase carriers
AU2004276761B2 (en) 2003-09-22 2009-12-24 Bioarray Solutions, Ltd. Surface immobilized polyelectrolyte with multiple functional groups capable of covalently bonding to biomolecules
AU2004286252A1 (en) * 2003-10-28 2005-05-12 Bioarray Solutions Ltd. Optimization of gene expression analysis using immobilized capture probes
US20050089916A1 (en) * 2003-10-28 2005-04-28 Xiongwu Xia Allele assignment and probe selection in multiplexed assays of polymorphic targets
AU2004287069B2 (en) 2003-10-29 2009-07-16 Bioarray Solutions, Ltd. Multiplexed nucleic acid analysis by fragmentation of double-stranded DNA
US8944002B2 (en) * 2004-01-14 2015-02-03 Honda Motor Co., Ltd. High throughput physical vapor deposition system for material combinatorial studies
FI20040205A (en) * 2004-02-11 2005-08-12 Reagena Ltd Oy Method and apparatus for producing a rapid test
US7433123B2 (en) * 2004-02-19 2008-10-07 Illumina, Inc. Optical identification element having non-waveguide photosensitive substrate with diffraction grating therein
EP1580559B1 (en) * 2004-03-23 2013-12-25 Bio-Rad Laboratories, Inc. Methods for reducing the variance between analyte concentrations taken from complex sample mixtures
GB2412730B (en) * 2004-03-31 2006-08-23 Toshiba Res Europ Ltd An encoded carrier and a method of monitoring a carrier
US9267167B2 (en) 2004-06-28 2016-02-23 Becton, Dickinson And Company Dissolvable films and methods including the same
US7363170B2 (en) * 2004-07-09 2008-04-22 Bio Array Solutions Ltd. Transfusion registry network providing real-time interaction between users and providers of genetically characterized blood products
WO2006020363A2 (en) 2004-07-21 2006-02-23 Illumina, Inc. Method and apparatus for drug product tracking using encoded optical identification elements
US7848889B2 (en) 2004-08-02 2010-12-07 Bioarray Solutions, Ltd. Automated analysis of multiplexed probe-target interaction patterns: pattern matching and allele identification
US20060292846A1 (en) * 2004-09-17 2006-12-28 Pinto Gustavo A Material management in substrate processing
US8084400B2 (en) * 2005-10-11 2011-12-27 Intermolecular, Inc. Methods for discretized processing and process sequence integration of regions of a substrate
US7749881B2 (en) * 2005-05-18 2010-07-06 Intermolecular, Inc. Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region
US7390739B2 (en) * 2005-05-18 2008-06-24 Lazovsky David E Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region
US8882914B2 (en) * 2004-09-17 2014-11-11 Intermolecular, Inc. Processing substrates using site-isolated processing
EP2194485B1 (en) 2004-11-16 2012-10-17 Illumina, Inc. Method and apparatus for reading coded microbeads
WO2006055735A2 (en) * 2004-11-16 2006-05-26 Illumina, Inc Scanner having spatial light modulator
US7879710B2 (en) * 2005-05-18 2011-02-01 Intermolecular, Inc. Substrate processing including a masking layer
US7309658B2 (en) * 2004-11-22 2007-12-18 Intermolecular, Inc. Molecular self-assembly in substrate processing
US20060183055A1 (en) * 2005-02-15 2006-08-17 O'neill Mark L Method for defining a feature on a substrate
US8486629B2 (en) 2005-06-01 2013-07-16 Bioarray Solutions, Ltd. Creation of functionalized microparticle libraries by oligonucleotide ligation or elongation
GB0515695D0 (en) * 2005-07-29 2005-09-07 Randox Lab Ltd Method
EP1933817B1 (en) * 2005-09-13 2014-03-12 Affymetrix, Inc. Encoded microparticles
US20100233429A1 (en) * 2005-09-16 2010-09-16 Yamatake Corporation Substrate for Biochip, Biochip, Method for Manufacturing Substrate for Biochip and Method for Manufacturing Biochip
US7544574B2 (en) 2005-10-11 2009-06-09 Intermolecular, Inc. Methods for discretized processing of regions of a substrate
US8776717B2 (en) 2005-10-11 2014-07-15 Intermolecular, Inc. Systems for discretized processing of regions of a substrate
US7955436B2 (en) * 2006-02-24 2011-06-07 Intermolecular, Inc. Systems and methods for sealing in site-isolated reactors
JP5284108B2 (en) * 2006-02-10 2013-09-11 インターモレキュラー， インコーポレイテッド Method and system for combinatorial change of materials, unit processes and process sequences
US8772772B2 (en) * 2006-05-18 2014-07-08 Intermolecular, Inc. System and method for increasing productivity of combinatorial screening
US7830575B2 (en) 2006-04-10 2010-11-09 Illumina, Inc. Optical scanner with improved scan time
US8296088B2 (en) * 2006-06-02 2012-10-23 Luminex Corporation Systems and methods for performing measurements of one or more materials
EP2038655A2 (en) * 2006-06-02 2009-03-25 Luminex Corporation Systems and methods for performing measurements of one or more materials
US8278216B1 (en) 2006-08-18 2012-10-02 Novellus Systems, Inc. Selective capping of copper
US20080113456A1 (en) * 2006-11-15 2008-05-15 International Business Machines Corporation Process for protecting image sensor wafers from front surface damage and contamination
US7844099B2 (en) * 2006-11-15 2010-11-30 International Business Machines Corporation Inspection method for protecting image sensor devices with front surface protection
US8011317B2 (en) * 2006-12-29 2011-09-06 Intermolecular, Inc. Advanced mixing system for integrated tool having site-isolated reactors
US20080217182A1 (en) * 2007-03-08 2008-09-11 E. I. Dupont De Nemours And Company Electroplating process
JP4803125B2 (en) * 2007-05-10 2011-10-26 ソニー株式会社 Bead group, method for producing the bead group, and method using the bead group
GR1006042B (en) * 2007-06-20 2008-09-03 Εθνικο Κεντρο Ερευνας Φυσικων Επιστημων (Ε.Κ.Ε.Φ.Ε.)-Δημοκριτος Method for making a mikroarray.
EP2173509A4 (en) * 2007-06-25 2013-11-06 Affymetrix Inc Patterned microcodes
US8039379B1 (en) * 2007-07-02 2011-10-18 Novellus Systems, Inc. Nanoparticle cap layer
KR101414232B1 (en) * 2007-08-02 2014-08-06 삼성전자 주식회사 Biochip package and biochip packaging substrate
KR20090029053A (en) * 2007-09-17 2009-03-20 삼성전자주식회사 Methods of cutting substrate along pattern and chip by the same
JP2010027743A (en) * 2008-07-16 2010-02-04 Ebara Corp Glass substrate for imprint, resist pattern forming method, and method and apparatus for inspecting glass substrate for imprint
KR101060957B1 (en) 2009-01-13 2011-08-30 삼성전기주식회사 Biomaterial Detection Device and Biomaterial Measurement System
JP5564800B2 (en) * 2009-01-30 2014-08-06 セイコーエプソン株式会社 Device with reaction field
WO2010120080A2 (en) 2009-04-14 2010-10-21 서울대학교산학협력단 Color-coded magnetic structure
WO2010120108A2 (en) 2009-04-14 2010-10-21 서울대학교산학협력단 Method for forming a microsphere having a structural color
GB0913258D0 (en) 2009-07-29 2009-09-02 Dynex Technologies Inc Reagent dispenser
US9523701B2 (en) 2009-07-29 2016-12-20 Dynex Technologies, Inc. Sample plate systems and methods
US20110076853A1 (en) * 2009-09-28 2011-03-31 Magic Technologies, Inc. Novel process method for post plasma etch treatment
US8772016B2 (en) * 2009-11-13 2014-07-08 Pacific Biosciences Of California, Inc. Sealed chip package
US8501122B2 (en) 2009-12-08 2013-08-06 Affymetrix, Inc. Manufacturing and processing polymer arrays
JP2011196849A (en) * 2010-03-19 2011-10-06 Rohm Co Ltd Rotating analysis chip and measurement system using the same
US20140134711A1 (en) * 2010-07-12 2014-05-15 Nanospot Gmbh Microstructured measuring chip for optically measuring properties of artificial or biological membranes, and method for its production thereof
CN106198656B (en) * 2010-08-18 2018-12-11 生命科技股份有限公司 The immersion coating of micropore for electrochemical detection device
US8962301B2 (en) * 2010-10-13 2015-02-24 Intellectual Discovery Co., Ltd. Biochip and method for manufacturing the same
US9252175B2 (en) 2011-03-23 2016-02-02 Nanohmics, Inc. Method for assembly of spectroscopic filter arrays using biomolecules
US9828696B2 (en) 2011-03-23 2017-11-28 Nanohmics, Inc. Method for assembly of analyte filter arrays using biomolecules
KR101288165B1 (en) 2011-08-29 2013-07-18 삼성전기주식회사 Stamping device for biochip and stamping method
US9329154B1 (en) * 2011-10-06 2016-05-03 Sandia Corporation Devices and methods to detect and quantify trace gases
US9746466B2 (en) 2011-12-23 2017-08-29 Nanomedica Llc Integrated compound discovery systems and methods
EP2866928A1 (en) 2012-06-29 2015-05-06 Danmarks Tekniske Universitet A method of charging a test carrier and a test carrier
US10584381B2 (en) 2012-08-14 2020-03-10 10X Genomics, Inc. Methods and systems for processing polynucleotides
CA2881685C (en) 2012-08-14 2023-12-05 10X Genomics, Inc. Microcapsule compositions and methods
US9388465B2 (en) 2013-02-08 2016-07-12 10X Genomics, Inc. Polynucleotide barcode generation
US11591637B2 (en) 2012-08-14 2023-02-28 10X Genomics, Inc. Compositions and methods for sample processing
US9701998B2 (en) 2012-12-14 2017-07-11 10X Genomics, Inc. Methods and systems for processing polynucleotides
US10273541B2 (en) 2012-08-14 2019-04-30 10X Genomics, Inc. Methods and systems for processing polynucleotides
US9567631B2 (en) 2012-12-14 2017-02-14 10X Genomics, Inc. Methods and systems for processing polynucleotides
US10752949B2 (en) 2012-08-14 2020-08-25 10X Genomics, Inc. Methods and systems for processing polynucleotides
US9951386B2 (en) 2014-06-26 2018-04-24 10X Genomics, Inc. Methods and systems for processing polynucleotides
US10221442B2 (en) 2012-08-14 2019-03-05 10X Genomics, Inc. Compositions and methods for sample processing
US10323279B2 (en) 2012-08-14 2019-06-18 10X Genomics, Inc. Methods and systems for processing polynucleotides
CN102879556A (en) * 2012-09-25 2013-01-16 中国电子科技集团公司第四十九研究所 Biochip with constant volume and preparation method thereof
US10533221B2 (en) 2012-12-14 2020-01-14 10X Genomics, Inc. Methods and systems for processing polynucleotides
US8803328B1 (en) 2013-01-22 2014-08-12 International Business Machines Corporation Random coded integrated circuit structures and methods of making random coded integrated circuit structures
CN103439514B (en) * 2013-08-05 2015-06-10 徐州工程学院 Pesticide and veterinary drug multi-residue detection method based on microarray detection chip
EP3076182A4 (en) * 2013-11-29 2017-08-09 Nikon Corporation Washing/drying device, screening device, washing/drying method, and screening method
GB2524541A (en) * 2014-03-26 2015-09-30 Ibm Microfluidic chip with conic bead trapping cavities and fabrication thereof
US8975163B1 (en) * 2014-04-10 2015-03-10 Applied Materials, Inc. Laser-dominated laser scribing and plasma etch hybrid wafer dicing
AU2015243445B2 (en) 2014-04-10 2020-05-28 10X Genomics, Inc. Fluidic devices, systems, and methods for encapsulating and partitioning reagents, and applications of same
JP5892197B2 (en) * 2014-06-16 2016-03-23 セイコーエプソン株式会社 Devices and sensors with reaction fields
EP4053292A1 (en) 2014-06-26 2022-09-07 10X Genomics, Inc. Methods of analyzing nucleic acids from individual cells or cell populations
US9899234B2 (en) 2014-06-30 2018-02-20 Lam Research Corporation Liner and barrier applications for subtractive metal integration
WO2016069939A1 (en) 2014-10-29 2016-05-06 10X Genomics, Inc. Methods and compositions for targeted nucleic acid sequencing
US9975122B2 (en) 2014-11-05 2018-05-22 10X Genomics, Inc. Instrument systems for integrated sample processing
CA2972969A1 (en) 2015-01-12 2016-07-21 10X Genomics, Inc. Processes and systems for preparing nucleic acid sequencing libraries and libraries prepared using same
EP3262407B1 (en) 2015-02-24 2023-08-30 10X Genomics, Inc. Partition processing methods and systems
WO2016138148A1 (en) 2015-02-24 2016-09-01 10X Genomics, Inc. Methods for targeted nucleic acid sequence coverage
CN107580627A (en) * 2015-05-18 2018-01-12 10X基因组学有限公司 For the flowing solid compositions in biochemical reaction and analysis
US11371094B2 (en) 2015-11-19 2022-06-28 10X Genomics, Inc. Systems and methods for nucleic acid processing using degenerate nucleotides
CN115369161A (en) 2015-12-04 2022-11-22 10X 基因组学有限公司 Methods and compositions for nucleic acid analysis
US10386365B2 (en) 2015-12-07 2019-08-20 Nanohmics, Inc. Methods for detecting and quantifying analytes using ionic species diffusion
US10386351B2 (en) 2015-12-07 2019-08-20 Nanohmics, Inc. Methods for detecting and quantifying analytes using gas species diffusion
JP6808940B2 (en) * 2016-01-29 2021-01-06 凸版印刷株式会社 Array device, biomolecule analysis kit and solvent sealing method
JP6730819B2 (en) * 2016-02-29 2020-07-29 日本電波工業株式会社 Sensing sensor and sensing method
WO2017197338A1 (en) 2016-05-13 2017-11-16 10X Genomics, Inc. Microfluidic systems and methods of use
WO2018059445A1 (en) * 2016-09-28 2018-04-05 中国科学院苏州纳米技术与纳米仿生研究所 Encoded chip based micro-array, preparation method therefor and application thereof
KR102060306B1 (en) * 2016-10-05 2019-12-30 서울대학교산학협력단 Biochemical carrier capable of storing, preserving and indexing, and manufacturing method thereof
US10340173B2 (en) * 2016-10-11 2019-07-02 Micron Technology, Inc. System for handling semiconductor dies
WO2018069056A1 (en) * 2016-10-12 2018-04-19 Mycartis N.V. Prefilled cartridge
US10815525B2 (en) 2016-12-22 2020-10-27 10X Genomics, Inc. Methods and systems for processing polynucleotides
US10550429B2 (en) 2016-12-22 2020-02-04 10X Genomics, Inc. Methods and systems for processing polynucleotides
US10011872B1 (en) 2016-12-22 2018-07-03 10X Genomics, Inc. Methods and systems for processing polynucleotides
EP4029939B1 (en) 2017-01-30 2023-06-28 10X Genomics, Inc. Methods and systems for droplet-based single cell barcoding
US10995333B2 (en) 2017-02-06 2021-05-04 10X Genomics, Inc. Systems and methods for nucleic acid preparation
SG11201901822QA (en) 2017-05-26 2019-03-28 10X Genomics Inc Single cell analysis of transposase accessible chromatin
US20180340169A1 (en) 2017-05-26 2018-11-29 10X Genomics, Inc. Single cell analysis of transposase accessible chromatin
CN107828653B (en) * 2017-10-12 2021-03-05 中国科学院半导体研究所 Chip for open type single cell research and preparation method thereof
SG11201913654QA (en) 2017-11-15 2020-01-30 10X Genomics Inc Functionalized gel beads
US10829815B2 (en) 2017-11-17 2020-11-10 10X Genomics, Inc. Methods and systems for associating physical and genetic properties of biological particles
WO2019157529A1 (en) 2018-02-12 2019-08-15 10X Genomics, Inc. Methods characterizing multiple analytes from individual cells or cell populations
US10453800B1 (en) * 2018-03-29 2019-10-22 International Business Machines Corporation Optical chip ID definition using nanoimprint lithography
EP3775271A1 (en) 2018-04-06 2021-02-17 10X Genomics, Inc. Systems and methods for quality control in single cell processing
CN112218708B (en) * 2018-05-15 2023-06-16 生物复制有限公司 Microarray transducer
CR20190591A (en) 2018-06-29 2020-02-26 Illumina Cambridge Ltd Flow cells
US11294277B2 (en) 2018-07-25 2022-04-05 Canon Kabushiki Kaisha Process of imprinting a substrate with fluid control features
US20200032335A1 (en) 2018-07-27 2020-01-30 10X Genomics, Inc. Systems and methods for metabolome analysis
US11459607B1 (en) 2018-12-10 2022-10-04 10X Genomics, Inc. Systems and methods for processing-nucleic acid molecules from a single cell using sequential co-partitioning and composite barcodes
US11845983B1 (en) 2019-01-09 2023-12-19 10X Genomics, Inc. Methods and systems for multiplexing of droplet based assays
US11851683B1 (en) 2019-02-12 2023-12-26 10X Genomics, Inc. Methods and systems for selective analysis of cellular samples
CN111665235A (en) * 2019-03-08 2020-09-15 上海索昕生物科技有限公司 Chemiluminescent microarray chip and application thereof
CN109971609B (en) * 2019-03-14 2020-09-11 宁波胤瑞生物医学仪器有限责任公司 Digital PCR chip and preparation method thereof
WO2023107684A1 (en) * 2021-12-10 2023-06-15 Idexx Laboratories, Inc. Devices and methods for particle solution testing
CN114307885B (en) * 2022-01-20 2022-09-16 厦门大学 Preparation method of local functionalized modified microspheres
CN115331735B (en) * 2022-10-11 2023-03-17 青岛百创智能制造技术有限公司 Chip decoding method and device

Family Cites Families (86)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2988432A (en) * 1957-10-21 1961-06-13 Gen Motors Corp Odor destroyer
US3265701A (en) 1963-07-10 1966-08-09 American Home Prod Fluorene-9-carboxylic acid esters of hydroxyalkyl azaspiranes
US3790492A (en) * 1971-03-11 1974-02-05 Atomic Energy Commission Method for production of uniform microspheres
US3761782A (en) * 1971-05-19 1973-09-25 Signetics Corp Semiconductor structure, assembly and method
US3790051A (en) 1971-09-07 1974-02-05 Radiant Energy Systems Semiconductor wafer fracturing technique employing a pressure controlled roller
US4326008A (en) * 1976-08-27 1982-04-20 California Institute Of Technology Protein specific fluorescent microspheres for labelling a protein
JPS5527623A (en) * 1978-08-17 1980-02-27 Mitsubishi Electric Corp Semiconductor wafer dividing method
US4267235A (en) * 1979-03-19 1981-05-12 California Institute Of Technology Polyglutaraldehyde microspheres
US4717655A (en) 1982-08-30 1988-01-05 Becton, Dickinson And Company Method and apparatus for distinguishing multiple subpopulations of cells
US4487855A (en) * 1983-02-15 1984-12-11 Shih Yen Jer Colored latexes; methods for making same and colored finely divided products
DE3322373C2 (en) 1983-05-19 1986-12-04 Ioannis Dr. 3000 Hannover Tripatzis Test means and methods for the detection of antigens and / or antibodies
US5073498A (en) * 1984-12-24 1991-12-17 Caribbean Microparticles Corporation Fluorescent alignment microbeads with broad excitation and emission spectra and its use
US4774189A (en) * 1984-12-24 1988-09-27 Flow Cytometry Standards Corp. Fluorescent calibration microbeads simulating stained cells
US4613559A (en) * 1985-04-01 1986-09-23 Xerox Corporation Process for colored toner compositions with controlled charges thereon
US5571629A (en) 1987-07-10 1996-11-05 Tdk Corporation Optical recording medium
US5194300A (en) * 1987-07-15 1993-03-16 Cheung Sau W Methods of making fluorescent microspheres
US5807755A (en) 1987-08-06 1998-09-15 Multilyte Limited Determination of ambient concentrations of several analytes
US5266467A (en) * 1988-05-02 1993-11-30 The United States Of America As Represented By The Secretary Of Agriculture Enzymatic production of maltohexaose-rich compositions
US5266427A (en) 1988-10-18 1993-11-30 Nippondenso Co., Ltd. Display board and method for producing the same
US5143854A (en) 1989-06-07 1992-09-01 Affymax Technologies N.V. Large scale photolithographic solid phase synthesis of polypeptides and receptor binding screening thereof
US5723218A (en) * 1990-04-16 1998-03-03 Molecular Probes, Inc. Dipyrrometheneboron difluoride labeled flourescent microparticles
US5326692B1 (en) * 1992-05-13 1996-04-30 Molecular Probes Inc Fluorescent microparticles with controllable enhanced stokes shift
DK0604552T3 (en) * 1991-09-18 1997-08-04 Affymax Tech Nv Process for the synthesis of different assemblies of oligomers
US5639603A (en) 1991-09-18 1997-06-17 Affymax Technologies N.V. Synthesizing and screening molecular diversity
US5516635A (en) * 1991-10-15 1996-05-14 Ekins; Roger P. Binding assay employing labelled reagent
US5605662A (en) * 1993-11-01 1997-02-25 Nanogen, Inc. Active programmable electronic devices for molecular biological analysis and diagnostics
IL103674A0 (en) * 1991-11-19 1993-04-04 Houston Advanced Res Center Method and apparatus for molecule detection
HU9201687D0 (en) * 1992-05-21 1992-08-28 Arpad Furka Preparation of sets from peptid mixtures with polycomponents and their use for the identification of biologically active peptides
US5415835A (en) * 1992-09-16 1995-05-16 University Of New Mexico Method for fine-line interferometric lithography
US5298741A (en) * 1993-01-13 1994-03-29 Trustees Of Tufts College Thin film fiber optic sensor array and apparatus for concurrent viewing and chemical sensing of a sample
GB9326450D0 (en) 1993-12-24 1994-02-23 Multilyte Ltd Binding assay
US5614586A (en) * 1994-04-06 1997-03-25 Graphic Controls Corporation Polyacrylate and Polymethacrylate ester based hydrogel adhesives
US5571639A (en) * 1994-05-24 1996-11-05 Affymax Technologies N.V. Computer-aided engineering system for design of sequence arrays and lithographic masks
DE69527585T2 (en) * 1994-06-08 2003-04-03 Affymetrix Inc Method and device for packaging chips
US5846719A (en) * 1994-10-13 1998-12-08 Lynx Therapeutics, Inc. Oligonucleotide tags for sorting and identification
US5595839A (en) * 1994-10-13 1997-01-21 Yardney Technical Products, Inc. Bipolar lithium-ion rechargeable battery
GB2295152A (en) * 1994-11-18 1996-05-22 Pfizer Ltd Preparation of a library of compounds by solid-phase synthesis
US5959098A (en) * 1996-04-17 1999-09-28 Affymetrix, Inc. Substrate preparation process
WO1996030392A1 (en) 1995-03-28 1996-10-03 Novartis Ag Process for the production of combinatorial compound libraries
US5961923A (en) * 1995-04-25 1999-10-05 Irori Matrices with memories and uses thereof
GB2300258A (en) * 1995-04-28 1996-10-30 Philip John Jewess A separation device for magnetisable particles
US5959598A (en) * 1995-07-20 1999-09-28 The Regents Of The University Of Colorado Pixel buffer circuits for implementing improved methods of displaying grey-scale or color images
US5981180A (en) 1995-10-11 1999-11-09 Luminex Corporation Multiplexed analysis of clinical specimens apparatus and methods
US7041510B2 (en) * 1996-04-25 2006-05-09 Bioarray Solutions Ltd. System and method for programmable illumination pattern generation
ES2288760T3 (en) 1996-04-25 2008-01-16 Bioarray Solutions Ltd. ELECTROCINETIC ASSEMBLY CONTROLLED BY LIGHT OF PARTICLES NEXT TO SURFACES.
WO1998017383A1 (en) * 1996-10-21 1998-04-30 Smithkline Beecham Plc Apparatus and method for distributing beads
US5786219A (en) * 1996-10-28 1998-07-28 Molecular Probes, Inc. Microspheres with fluorescent spherical zones
US6875620B1 (en) * 1996-10-31 2005-04-05 Agilent Technologies, Inc. Tiling process for constructing a chemical array
US5900481A (en) * 1996-11-06 1999-05-04 Sequenom, Inc. Bead linkers for immobilizing nucleic acids to solid supports
US6133436A (en) * 1996-11-06 2000-10-17 Sequenom, Inc. Beads bound to a solid support and to nucleic acids
US6083763A (en) * 1996-12-31 2000-07-04 Genometrix Inc. Multiplexed molecular analysis apparatus and method
US5812272A (en) * 1997-01-30 1998-09-22 Hewlett-Packard Company Apparatus and method with tiled light source array for integrated assay sensing
US6327410B1 (en) * 1997-03-14 2001-12-04 The Trustees Of Tufts College Target analyte sensors utilizing Microspheres
US7622294B2 (en) * 1997-03-14 2009-11-24 Trustees Of Tufts College Methods for detecting target analytes and enzymatic reactions
US6023540A (en) 1997-03-14 2000-02-08 Trustees Of Tufts College Fiber optic sensor with encoded microspheres
JP4294740B2 (en) 1997-05-23 2009-07-15 ソレクサ・インコーポレイテッド System and apparatus for serial processing of analytes
WO1998053093A1 (en) 1997-05-23 1998-11-26 Bioarray Solutions Llc Color-encoding and in-situ interrogation of matrix-coupled chemical compounds
US5948621A (en) * 1997-09-30 1999-09-07 The United States Of America As Represented By The Secretary Of The Navy Direct molecular patterning using a micro-stamp gel
US7115884B1 (en) 1997-10-06 2006-10-03 Trustees Of Tufts College Self-encoding fiber optic sensor
CA2306501C (en) 1997-10-14 2011-03-29 Luminex Corporation Precision fluorescently dyed particles and methods of making and using same
US5922617A (en) * 1997-11-12 1999-07-13 Functional Genetics, Inc. Rapid screening assay methods and devices
CN1230682C (en) 1997-12-30 2005-12-07 埃佩多夫阵列技术股份有限公司 Method comprising capture molecule fixed on disc surface
AU2464299A (en) * 1998-01-22 1999-08-09 Luminex Corporation Microparticles with multiple fluorescent signals
US6096368A (en) * 1998-02-19 2000-08-01 Delsys Pharmaceutical Corporation Bead transporter chucks using repulsive field guidance and method
US5988432A (en) * 1998-03-25 1999-11-23 Sarnoff Corporation Bead manipulating chucks with bead size selector
WO1999060170A1 (en) 1998-05-21 1999-11-25 Hyseq, Inc. Linear arrays of immobilized compounds and methods of using same
US6908770B1 (en) 1998-07-16 2005-06-21 Board Of Regents, The University Of Texas System Fluid based analysis of multiple analytes by a sensor array
WO2000013004A2 (en) 1998-08-26 2000-03-09 Trustees Of Tufts College Combinatorial polymer synthesis of sensors for polymer-based sensor arrays
US6429027B1 (en) * 1998-12-28 2002-08-06 Illumina, Inc. Composite arrays utilizing microspheres
KR200195882Y1 (en) 1999-01-28 2000-09-15 김석배 Decice For Indicating The Road Of Automobile Using The Optical Transfer
US6151973A (en) * 1999-01-29 2000-11-28 Glaxo Wellcome Inc. Bead picking apparatus and method
US6215894B1 (en) 1999-02-26 2001-04-10 General Scanning, Incorporated Automatic imaging and analysis of microarray biochips
CN1185492C (en) * 1999-03-15 2005-01-19 清华大学 Single-point strobed micro electromagnetic units array chip or electromagnetic biologic chip and application thereof
WO2001054813A2 (en) 2000-01-11 2001-08-02 Clinical Micro Sensors, Inc. Devices and methods for biochip multiplexing
AU7569600A (en) 1999-05-20 2000-12-28 Illumina, Inc. Combinatorial decoding of random nucleic acid arrays
US6713309B1 (en) * 1999-07-30 2004-03-30 Large Scale Proteomics Corporation Microarrays and their manufacture
WO2001020593A1 (en) * 1999-09-17 2001-03-22 Bioarray Solutions, Llc System and method for programmable illumination pattern generation
CN1133750C (en) * 1999-12-06 2004-01-07 晶宇生物科技实业股份有限公司 Biochip and its preparing process
US20020001855A1 (en) * 2000-03-22 2002-01-03 Prentiss Mara G. Methods and apparatus for parallel magnetic biological analysis and manipulation
KR100792021B1 (en) * 2000-03-30 2008-01-04 가부시키가이샤 에바라 세이사꾸쇼 Reactive probe chip and method for fabrication thereof
DE10020704B4 (en) 2000-04-27 2006-09-28 Bioref Gmbh Biochip for archiving and laboratory medical analysis of biological sample material, process for its production and its use in diagnostic procedures
EP1132739B1 (en) 2000-05-16 2001-09-26 BioChip Technologies GmbH Linker system for activating surfaces for bioconjugation and methods for their use
DE60117556T2 (en) * 2000-06-21 2006-11-02 Bioarray Solutions Ltd. MULTI-ANALYTIC MOLECULAR ANALYSIS THROUGH THE USE OF APPLICATION SPECIFIC RAPID PARTICLE ARRAYS
US6905885B2 (en) * 2001-06-12 2005-06-14 The Regents Of The University Of California Portable pathogen detection system
US7335153B2 (en) * 2001-12-28 2008-02-26 Bio Array Solutions Ltd. Arrays of microparticles and methods of preparation thereof
KR101522272B1 (en) 2014-06-30 2015-05-21 엘에스산전 주식회사 Neutral pole current detector module for circuit breaker and neutral pole current detecting apparatus for circuit breaker

Also Published As

Publication number Publication date
EP1488236A4 (en) 2007-09-12
IL162737A0 (en) 2005-11-20
EP1488236B1 (en) 2012-10-31
KR100966683B1 (en) 2010-06-29
JP2005535868A (en) 2005-11-24
AU2002364034A1 (en) 2003-07-24
EP2319617A1 (en) 2011-05-11
EP2565648A1 (en) 2013-03-06
HK1074881A1 (en) 2005-11-25
ES2398194T3 (en) 2013-03-14
US20190024156A1 (en) 2019-01-24
JP2009175163A (en) 2009-08-06
AU2002364034B2 (en) 2009-03-19
CA2471693C (en) 2011-05-03
CN1656380A (en) 2005-08-17
NZ533752A (en) 2006-09-29
EP1488236A2 (en) 2004-12-22
US10138511B2 (en) 2018-11-27
EP2565648B1 (en) 2017-07-19
PT1488236E (en) 2013-01-22
US20120220495A1 (en) 2012-08-30
ES2649962T3 (en) 2018-01-16
WO2003058199A2 (en) 2003-07-17
US7335153B2 (en) 2008-02-26
US7842649B2 (en) 2010-11-30
US20080123089A1 (en) 2008-05-29
CN1299117C (en) 2007-02-07
US20150126407A1 (en) 2015-05-07
US9611507B2 (en) 2017-04-04
US20030082587A1 (en) 2003-05-01
KR20040081103A (en) 2004-09-20
US20110098201A1 (en) 2011-04-28
IL162737A (en) 2010-05-17
US20170260577A1 (en) 2017-09-14
WO2003058199A3 (en) 2004-06-17

Similar Documents

Publication Publication Date Title
CA2471693A1 (en) Arrays of microparticles and methods of preparation thereof
US10919033B2 (en) Flow cells with hydrogel coating
KR102656824B1 (en) Flow cell package and method of manufacturing the same
US20020068021A1 (en) Method for producing a fluid device, fluid device and analysis apparatus
KR20000067887A (en) Solid Supports for Analytical Measuring Processes, a Process for their Preparation, and their Use
JP2005522219A5 (en)
US9099486B2 (en) Integrated circuit with ion sensitive sensor and manufacturing method
US20110086766A1 (en) Chemical and Biological Detection Arrays
US20030113724A1 (en) Packaged microarray apparatus and a method of bonding a microarray into a package

Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry

Effective date: 20221228