CA2435727A1 - Resonant sensor - Google Patents
Resonant sensor Download PDFInfo
- Publication number
- CA2435727A1 CA2435727A1 CA002435727A CA2435727A CA2435727A1 CA 2435727 A1 CA2435727 A1 CA 2435727A1 CA 002435727 A CA002435727 A CA 002435727A CA 2435727 A CA2435727 A CA 2435727A CA 2435727 A1 CA2435727 A1 CA 2435727A1
- Authority
- CA
- Canada
- Prior art keywords
- modes
- resonant sensor
- regions
- frequencies
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/10—Number of transducers
- G01N2291/101—Number of transducers one transducer
Abstract
A resonant sensor for determining structural property changes, in particular for detecting the presence of chemical or biological species, comprises a structure (2) mounted to be capable of resonating and having a cyclically symmetrical configuration with two independent degenerative modes of vibration of a common natural frequency (f), and means (24,26,28,30,32,34,36,38) for exciting the structure (2) to resonate according to the two degenerative modes, regions (8,12,16,20) of the structure (2) being modified such that, on changes in the structural properties of the modified regions (8,12,16,20), for example by the addition or subtraction of mass, the natural frequencies (f1, f2) of the two modes of vibration become different, the difference in frequencies (f) being proportional to the change in structural properties.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0102832.3A GB0102832D0 (en) | 2001-02-05 | 2001-02-05 | Resonant sensor |
GB0102832.3 | 2001-02-05 | ||
PCT/GB2002/000237 WO2002063264A2 (en) | 2001-02-05 | 2002-01-21 | Resonant sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2435727A1 true CA2435727A1 (en) | 2002-08-15 |
CA2435727C CA2435727C (en) | 2009-08-11 |
Family
ID=9908138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002435727A Expired - Fee Related CA2435727C (en) | 2001-02-05 | 2002-01-21 | Resonant sensor |
Country Status (11)
Country | Link |
---|---|
US (1) | US6805009B2 (en) |
EP (1) | EP1358475B1 (en) |
JP (1) | JP4267918B2 (en) |
AT (1) | ATE308044T1 (en) |
AU (1) | AU2002226529A1 (en) |
CA (1) | CA2435727C (en) |
DE (1) | DE60206880T2 (en) |
DK (1) | DK1358475T3 (en) |
ES (1) | ES2250631T3 (en) |
GB (1) | GB0102832D0 (en) |
WO (1) | WO2002063264A2 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002103340A2 (en) * | 2001-06-20 | 2002-12-27 | M.S. Tech Ltd | Method and device for the detection of trace amounts of a substance,using a piezoelectric crystal element |
US7681433B2 (en) * | 2005-05-30 | 2010-03-23 | National Institute Of Advanced Industrial Science And Technology | Detection sensor and resonator |
GB0513910D0 (en) | 2005-07-07 | 2005-08-10 | Univ Newcastle | Immobilisation of biological molecules |
US7583090B2 (en) * | 2006-08-30 | 2009-09-01 | David S. Nyce | Electromagnetic apparatus for measuring angular position |
US8945912B2 (en) | 2008-09-29 | 2015-02-03 | The Board Of Trustees Of The University Of Illinois | DNA sequencing and amplification systems using nanoscale field effect sensor arrays |
WO2011163058A2 (en) | 2010-06-21 | 2011-12-29 | The Board Of Trustees Of The University Of Illinois | Cell mass measurement and apparatus |
CN109374729B (en) * | 2018-09-25 | 2021-02-19 | 深圳大学 | Acoustic micro-mass sensor and detection method |
CN109556702A (en) * | 2018-11-19 | 2019-04-02 | 西北大学 | Optical fibre grating acceleration sensor based on diaphragm type equi intensity cantilever structure |
EP3715826B1 (en) * | 2019-03-26 | 2024-03-06 | Infineon Technologies AG | Sensor device, particle sensor device and method for detecting a particulate matter density |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4144747A (en) * | 1978-01-30 | 1979-03-20 | The Bendix Corporation | Simultaneously resonated, multi-mode crystal force transducer |
SE434438B (en) * | 1980-02-21 | 1984-07-23 | Gambro Engstrom Ab | DEVICE FOR DETECTING THE EXISTENCE OF A GAS COMPONENT IN A GAS MIXTURE |
US5455475A (en) * | 1993-11-01 | 1995-10-03 | Marquette University | Piezoelectric resonant sensor using the acoustoelectric effect |
US5705399A (en) * | 1994-05-20 | 1998-01-06 | The Cooper Union For Advancement Of Science And Art | Sensor and method for detecting predetermined chemical species in solution |
US5852229A (en) * | 1996-05-29 | 1998-12-22 | Kimberly-Clark Worldwide, Inc. | Piezoelectric resonator chemical sensing device |
-
2001
- 2001-02-05 GB GBGB0102832.3A patent/GB0102832D0/en not_active Ceased
-
2002
- 2002-01-21 EP EP02716136A patent/EP1358475B1/en not_active Expired - Lifetime
- 2002-01-21 WO PCT/GB2002/000237 patent/WO2002063264A2/en active IP Right Grant
- 2002-01-21 CA CA002435727A patent/CA2435727C/en not_active Expired - Fee Related
- 2002-01-21 JP JP2002562962A patent/JP4267918B2/en not_active Expired - Fee Related
- 2002-01-21 DE DE60206880T patent/DE60206880T2/en not_active Expired - Lifetime
- 2002-01-21 US US10/470,340 patent/US6805009B2/en not_active Expired - Lifetime
- 2002-01-21 DK DK02716136T patent/DK1358475T3/en active
- 2002-01-21 AT AT02716136T patent/ATE308044T1/en active
- 2002-01-21 ES ES02716136T patent/ES2250631T3/en not_active Expired - Lifetime
- 2002-01-21 AU AU2002226529A patent/AU2002226529A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2002063264A2 (en) | 2002-08-15 |
JP4267918B2 (en) | 2009-05-27 |
CA2435727C (en) | 2009-08-11 |
US20040051539A1 (en) | 2004-03-18 |
JP2004518959A (en) | 2004-06-24 |
US6805009B2 (en) | 2004-10-19 |
ATE308044T1 (en) | 2005-11-15 |
AU2002226529A1 (en) | 2002-08-19 |
DK1358475T3 (en) | 2006-03-13 |
DE60206880T2 (en) | 2006-07-20 |
GB0102832D0 (en) | 2001-03-21 |
ES2250631T3 (en) | 2006-04-16 |
DE60206880D1 (en) | 2005-12-01 |
EP1358475B1 (en) | 2005-10-26 |
WO2002063264A3 (en) | 2003-03-20 |
EP1358475A2 (en) | 2003-11-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE602006016264D1 (en) | ||
WO2008054404A3 (en) | Resonant vibratory device having high quality factor and methods of fabricating same | |
WO2003019981A3 (en) | Electromagnetic piezoelectric acoustic sensor | |
HK1093553A1 (en) | Biosensor utilizing a resonator having a functionalized surface | |
WO2002103340A3 (en) | Method and device for the detection of trace amounts of a substance,using a piezoelectric crystal element | |
EP0992768A3 (en) | Mass sensor and mass sensing method | |
WO2006021858A3 (en) | Resonator-based magnetic field sensor | |
CA2435727A1 (en) | Resonant sensor | |
EP0984252A3 (en) | Mass sensor and mass sensing method | |
WO2004096007A3 (en) | Methods and devices for mechanical resonator evaluation | |
WO2006083482A3 (en) | Nanomechanical oscillator | |
EP1264746A3 (en) | Device for humidity detection | |
WO2001026138A3 (en) | Chemical sensor and coating for same | |
BR0013345A (en) | Apparatus and method for interrogating a passive sensor | |
EP1345008A3 (en) | Vibrators and vibratory gyroscopes | |
WO2004086027A3 (en) | Mechanical resonator | |
WO2009105354A3 (en) | Sensor, system, and method, for measuring fluid properties using multi-mode quasi-shear-horizontal resonator | |
DE502006008245D1 (en) | DEVICE WITH A PIEZOA ACOUSTIC RESONATOR ELEMENT AND ITS USE FOR SUBMITTING A SIGNAL DEPENDING ON A RESONANCE FREQUENCY | |
US8394327B2 (en) | Manufacturing method for acoustic wave sensor realizing dual mode in single chip and biosensor using the same | |
WO2002027303A3 (en) | Optical micro-cavity sensors | |
WO2003100413A3 (en) | Surface acoustic wave sensors and methods for detecting target analytes | |
CA2247485A1 (en) | Assembly for sensing and/or monitoring a predetermined level in a vessel | |
WO2004044569A3 (en) | Mems membrane based sensor | |
WO2003042694A3 (en) | Characterization of molecules | |
US7543476B2 (en) | Rupture event sensors |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |
Effective date: 20180122 |