CA2173059A1 - Microoptical Device - Google Patents

Microoptical Device

Info

Publication number
CA2173059A1
CA2173059A1 CA2173059A CA2173059A CA2173059A1 CA 2173059 A1 CA2173059 A1 CA 2173059A1 CA 2173059 A CA2173059 A CA 2173059A CA 2173059 A CA2173059 A CA 2173059A CA 2173059 A1 CA2173059 A1 CA 2173059A1
Authority
CA
Canada
Prior art keywords
strip
shaped
mirrors
rows
cylindrical lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2173059A
Other languages
French (fr)
Other versions
CA2173059C (en
Inventor
Werner Spath
Stefan Grotsch
Ralf Moser
Georg Bogner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7758100&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CA2173059(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Siemens AG filed Critical Siemens AG
Publication of CA2173059A1 publication Critical patent/CA2173059A1/en
Application granted granted Critical
Publication of CA2173059C publication Critical patent/CA2173059C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1086—Beam splitting or combining systems operating by diffraction only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/12—Beam splitting or combining systems operating by refraction only
    • G02B27/123—The splitting element being a lens or a system of lenses, including arrays and surfaces with refractive power
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping

Abstract

The microoptical device has beam-parallelizing optics and a deflecting mirror configuration. The device converts a laser beam bundle, which is emitted by a laser diode strip structure or individual diode chips and which is comprised of a plurality of strip-shaped individual laser beams, into a rectangular or parallelogram-shaped laser beam bundle composed of parallelized strip-shaped individual laser beams arranged parallel next to one another. The beam-parallelizing optics may be a cylindrical lens, and the deflecting mirror configuration may be two rows of mirrors. The cylindrical lens and the rows of mirrors are preferably produced from a semiconductor material and they can therefore be produced cost effectively by means of methods used in semiconductor process engineering.
CA002173059A 1995-03-29 1996-03-29 Microoptical device Expired - Fee Related CA2173059C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19511593.7 1995-03-29
DE19511593A DE19511593C2 (en) 1995-03-29 1995-03-29 Micro-optical device

Publications (2)

Publication Number Publication Date
CA2173059A1 true CA2173059A1 (en) 1996-09-30
CA2173059C CA2173059C (en) 2000-03-14

Family

ID=7758100

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002173059A Expired - Fee Related CA2173059C (en) 1995-03-29 1996-03-29 Microoptical device

Country Status (9)

Country Link
US (1) US5808323A (en)
EP (1) EP0735397B1 (en)
JP (1) JP2991968B2 (en)
KR (1) KR960035074A (en)
CN (1) CN1080417C (en)
CA (1) CA2173059C (en)
DE (2) DE19511593C2 (en)
IN (1) IN187666B (en)
TW (1) TW317034B (en)

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997031284A1 (en) * 1996-02-23 1997-08-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Arrangement for shaping the geometrical cross-section of a plurality of solid and/or semiconductor lasers
DE19706279A1 (en) * 1997-02-18 1998-08-20 Siemens Ag Laser device
DE19706276B4 (en) * 1997-02-18 2011-01-13 Siemens Ag A semiconductor laser device and method of manufacturing a semiconductor laser device
AU747260B2 (en) 1997-07-25 2002-05-09 Nichia Chemical Industries, Ltd. Nitride semiconductor device
DE59813644D1 (en) * 1997-09-05 2006-08-31 Osram Opto Semiconductors Gmbh Immersion System
DE59806609D1 (en) 1997-09-22 2003-01-23 Osram Opto Semiconductors Gmbh Laser component with a laser array and method for its production
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
JP3770014B2 (en) 1999-02-09 2006-04-26 日亜化学工業株式会社 Nitride semiconductor device
EP1168539B1 (en) 1999-03-04 2009-12-16 Nichia Corporation Nitride semiconductor laser device
US6356577B1 (en) * 1999-07-15 2002-03-12 Silicon Light Machines Method and apparatus for combining light output from multiple laser diode bars
EP1076359B1 (en) * 1999-08-13 2011-02-23 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation device
US6504650B1 (en) 1999-10-19 2003-01-07 Anthony J. Alfrey Optical transformer and system using same
US6407870B1 (en) 1999-10-28 2002-06-18 Ihar Hurevich Optical beam shaper and method for spatial redistribution of inhomogeneous beam
JP2001215443A (en) * 2000-02-04 2001-08-10 Hamamatsu Photonics Kk Optical device
EP1215523A3 (en) * 2000-12-16 2004-05-26 Hentze-Lissotschenko Patentverwaltungs GmbH & Co.KG Radiation system with beam transformation for generating modulated radiation
DE10113019A1 (en) 2001-03-17 2002-09-19 Lissotschenko Vitalij Beam shaper has boundary surface at which sub-beams are incident from different directions; one sub-beam passes through surface, the other is reflected to combine beams
KR100640127B1 (en) * 2001-03-30 2006-10-31 신닛뽄세이테쯔 카부시키카이샤 Semiconductor laser device and solid laser device using the same
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
FI116010B (en) * 2002-05-22 2005-08-31 Cavitar Oy Method and laser device for producing high optical power density
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
CN2566292Y (en) * 2002-09-03 2003-08-13 钱定榕 Light beam distributor
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
JP4153438B2 (en) 2003-01-30 2008-09-24 富士フイルム株式会社 Laser beam multiplexing method and apparatus
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
CA2443494C (en) 2003-09-30 2009-04-07 Institut National D'optique Apparatus for reshaping an optical beam bundle
US20060280209A1 (en) * 2005-02-11 2006-12-14 Hans-Georg Treusch Beam combining methods and devices with high output intensity
US7830608B2 (en) * 2006-05-20 2010-11-09 Oclaro Photonics, Inc. Multiple emitter coupling devices and methods with beam transform system
US20070268572A1 (en) * 2006-05-20 2007-11-22 Newport Corporation Multiple emitter coupling devices and methods with beam transform system
US20070291373A1 (en) * 2006-06-15 2007-12-20 Newport Corporation Coupling devices and methods for laser emitters
US7680170B2 (en) * 2006-06-15 2010-03-16 Oclaro Photonics, Inc. Coupling devices and methods for stacked laser emitter arrays
US7866897B2 (en) * 2006-10-06 2011-01-11 Oclaro Photonics, Inc. Apparatus and method of coupling a fiber optic device to a laser
CN101933202B (en) * 2007-12-17 2013-05-29 奥兰若光电公司 Laser emitter modules and methods of assembly
CN107085288B (en) 2008-05-08 2020-03-24 贰陆激光企业有限责任公司 High-brightness diode output method and device
TWI362769B (en) 2008-05-09 2012-04-21 Univ Nat Chiao Tung Light emitting device and fabrication method therefor
WO2010084001A1 (en) * 2009-01-23 2010-07-29 Limo Patentverwaltung Gmbh & Co. Kg Beam forming device for laser diode arrays
JP5299251B2 (en) * 2009-12-09 2013-09-25 セイコーエプソン株式会社 Light emitting device and projector
EP2529452B1 (en) 2010-01-22 2018-05-23 II-VI Laser Enterprise GmbH Homogenization of far field fiber coupled radiation
DE102010031199B4 (en) * 2010-07-09 2020-05-14 Jenoptik Optical Systems Gmbh Beam shaping apparatus and method
DE102010038572A1 (en) * 2010-07-28 2012-02-02 Jenoptik Laser Gmbh Apparatus and method for beam shaping
DE102010038571A1 (en) * 2010-07-28 2012-02-02 Jenoptik Laser Gmbh Device for beam shaping radiation beams of e.g. semiconductor laser elements, has reflective mirrors arranged in direction of radiation beams emitted by light sources and displaced with respect to each other
US8644357B2 (en) 2011-01-11 2014-02-04 Ii-Vi Incorporated High reliability laser emitter modules
DE102012107456A1 (en) * 2012-08-14 2014-02-20 Limo Patentverwaltung Gmbh & Co. Kg Arrangement for shaping laser radiation
US9645389B2 (en) 2012-08-29 2017-05-09 Fujikura Ltd. Light guiding device, method for producing same, and LD module
JP5717714B2 (en) 2012-12-27 2015-05-13 株式会社フジクラ Multiplexing device, multiplexing method, and LD module
WO2014167904A1 (en) * 2013-04-12 2014-10-16 シャープ株式会社 Reflective type image forming element and method for manufacturing reflective type image forming element
JP5767684B2 (en) * 2013-11-15 2015-08-19 株式会社フジクラ Light guiding device, manufacturing method, and LD module
JP5781188B1 (en) 2014-03-26 2015-09-16 株式会社フジクラ Light guiding device, manufacturing method, and LD module
US9513483B2 (en) 2015-03-16 2016-12-06 Igor Gurevich Beam shaper system for laser diode array
JP2017120301A (en) * 2015-12-28 2017-07-06 ウシオ電機株式会社 Prism and light source device
DE102016102591A1 (en) * 2016-02-15 2017-08-17 Limo Patentverwaltung Gmbh & Co. Kg Device for shaping laser radiation
CN105891977B (en) * 2016-06-16 2018-08-17 韩涛 A kind of compact laser
CN112394436B (en) * 2020-11-25 2021-07-06 中国科学院上海光学精密机械研究所 Asymmetric structure all-dielectric reflection type beam combination grating with 1064-nanometer waveband

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4823357A (en) * 1986-11-10 1989-04-18 The United States Of America As Represented By The Secretary Of The Air Force Diffraction limited dichroic combiner diode laser
JP2535201B2 (en) * 1988-02-18 1996-09-18 富士写真フイルム株式会社 Multi semiconductor laser light source device
US5333077A (en) * 1989-10-31 1994-07-26 Massachusetts Inst Technology Method and apparatus for efficient concentration of light from laser diode arrays
US5168401A (en) * 1991-05-07 1992-12-01 Spectra Diode Laboratories, Inc. Brightness conserving optical system for modifying beam symmetry
JPH05236216A (en) * 1992-02-24 1993-09-10 Ricoh Co Ltd Light source equipment in optical scanner
US5369659A (en) * 1993-12-07 1994-11-29 Cynosure, Inc. Fault tolerant optical system using diode laser array
DE4438368C3 (en) * 1994-10-27 2003-12-04 Fraunhofer Ges Forschung Arrangement for guiding and shaping beams of a straight-line laser diode array

Also Published As

Publication number Publication date
EP0735397A2 (en) 1996-10-02
CN1080417C (en) 2002-03-06
CN1164657A (en) 1997-11-12
EP0735397B1 (en) 2002-06-12
TW317034B (en) 1997-10-01
IN187666B (en) 2002-06-01
US5808323A (en) 1998-09-15
DE19511593A1 (en) 1996-10-24
DE19511593C2 (en) 1997-02-13
EP0735397A3 (en) 1997-04-02
DE59609313D1 (en) 2002-07-18
JP2991968B2 (en) 1999-12-20
KR960035074A (en) 1996-10-24
CA2173059C (en) 2000-03-14
JPH08271832A (en) 1996-10-18

Similar Documents

Publication Publication Date Title
CA2173059A1 (en) Microoptical Device
EP1125085B1 (en) Luminaire, optical element and method of illuminating an object
CA2153771A1 (en) High power semiconductor laser system
DK0541658T3 (en) Light source for big effects
WO2001075487A3 (en) One-piece lens arrays for collimating and focusing light and led light generators using same
WO2004047239A3 (en) Laser diode bar integrator/reimager
WO2001067163A3 (en) Apparatus for projecting a line of light from a diode-laser array
DE59712104D1 (en) OPTICAL BEAM FORMING SYSTEM
JP2000137139A (en) Optical luminous flux converter
WO1998028775A3 (en) Scanning microscope in which a sample is simultaneously and optically excited at various points
CA2010990A1 (en) Network topology for reduced blocking and photonic system implementation thereof
EP0342836A3 (en) Beam combining unit
ATE392640T1 (en) LASER DIODE ARRANGEMENT
ATE253231T1 (en) ASYMMETRIC REFLECTION ARRANGEMENT FOR THE ADDITION OF HIGH POWER LASER BEAMS
CA2036957A1 (en) Semiconductor laser diode arrangement
WO2004025704A3 (en) Contact lens package and storage case, holder, and system and method of making and using
CA2443494A1 (en) Apparatus for reshaping an optical beam bundle
JPH01152683A (en) Semiconductor laser beam scanner
EP0895176A3 (en) Optical scanner and light source module
EP0159023A3 (en) Light beam scanning apparatus
EP0237812A3 (en) Semiconductor laser array with a collimated beam
JPS5455184A (en) Semiconductor laser light source unit
CA2355918A1 (en) M x n optical matrix switch
JPS5669610A (en) Scanning optical system having array light source
JPS56109314A (en) Variable-resolution scanning optical system

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed