CA2110214A1 - Functional Fluid Additives for Acid Copper Electroplating Baths - Google Patents

Functional Fluid Additives for Acid Copper Electroplating Baths

Info

Publication number
CA2110214A1
CA2110214A1 CA2110214A CA2110214A CA2110214A1 CA 2110214 A1 CA2110214 A1 CA 2110214A1 CA 2110214 A CA2110214 A CA 2110214A CA 2110214 A CA2110214 A CA 2110214A CA 2110214 A1 CA2110214 A1 CA 2110214A1
Authority
CA
Canada
Prior art keywords
functional fluid
copper electroplating
electroplating baths
acid copper
fluid additives
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2110214A
Other languages
French (fr)
Other versions
CA2110214C (en
Inventor
Sylvia Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MacDermid Enthone Inc
Original Assignee
Enthone OMI Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Enthone OMI Inc filed Critical Enthone OMI Inc
Publication of CA2110214A1 publication Critical patent/CA2110214A1/en
Application granted granted Critical
Publication of CA2110214C publication Critical patent/CA2110214C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper

Abstract

A process and composition for high acid/low metal copper electroplating baths with improved leveling, adhesion, ductility and throwing power. The bath includes effective amounts of a functional fluid having at least one ether group derived from an alcohol epoxy or a bisphenol A and containing ethoxy and propoxy functionalities.
CA002110214A 1992-12-23 1993-11-30 Functional fluid additives for acid copper electroplating baths Expired - Fee Related CA2110214C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/996,095 US5328589A (en) 1992-12-23 1992-12-23 Functional fluid additives for acid copper electroplating baths
US996,095 1992-12-23

Publications (2)

Publication Number Publication Date
CA2110214A1 true CA2110214A1 (en) 1994-06-24
CA2110214C CA2110214C (en) 2000-05-16

Family

ID=25542500

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002110214A Expired - Fee Related CA2110214C (en) 1992-12-23 1993-11-30 Functional fluid additives for acid copper electroplating baths

Country Status (9)

Country Link
US (1) US5328589A (en)
JP (1) JPH06228785A (en)
CA (1) CA2110214C (en)
DE (1) DE4343946C2 (en)
ES (1) ES2088356B1 (en)
FR (1) FR2699556B1 (en)
GB (1) GB2273941B (en)
HK (1) HK28197A (en)
IT (1) IT1261377B (en)

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Also Published As

Publication number Publication date
GB9326323D0 (en) 1994-02-23
ITTO930935A1 (en) 1995-06-10
CA2110214C (en) 2000-05-16
ES2088356B1 (en) 1997-03-16
DE4343946A1 (en) 1994-06-30
GB2273941A (en) 1994-07-06
HK28197A (en) 1997-03-21
JPH06228785A (en) 1994-08-16
DE4343946C2 (en) 1998-10-29
FR2699556A1 (en) 1994-06-24
IT1261377B (en) 1996-05-20
GB2273941B (en) 1995-09-13
US5328589A (en) 1994-07-12
ES2088356A1 (en) 1996-08-01
ITTO930935A0 (en) 1993-12-10
FR2699556B1 (en) 1996-03-01

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