CA2080672A1 - Vertically-coupled arrow modulators or switches on silicon - Google Patents

Vertically-coupled arrow modulators or switches on silicon

Info

Publication number
CA2080672A1
CA2080672A1 CA002080672A CA2080672A CA2080672A1 CA 2080672 A1 CA2080672 A1 CA 2080672A1 CA 002080672 A CA002080672 A CA 002080672A CA 2080672 A CA2080672 A CA 2080672A CA 2080672 A1 CA2080672 A1 CA 2080672A1
Authority
CA
Canada
Prior art keywords
modulators
switches
silicon
coupled
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002080672A
Other languages
French (fr)
Other versions
CA2080672C (en
Inventor
Gregory A. Magel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Gregory A. Magel
Texas Instruments Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gregory A. Magel, Texas Instruments Incorporated filed Critical Gregory A. Magel
Publication of CA2080672A1 publication Critical patent/CA2080672A1/en
Application granted granted Critical
Publication of CA2080672C publication Critical patent/CA2080672C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the refractive index
    • G02F1/0152—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the refractive index using free carrier effects, e.g. plasma effect
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G02F2201/063—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide ridge; rib; strip loaded
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/30—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating
    • G02F2201/302—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating grating coupler
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G02F2202/101—Ga×As and alloy
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G02F2202/105—Materials and properties semiconductor single crystal Si

Abstract

An optical modulator is disclosed. The modulator (10) is based upon an ARROW waveguide, consisting of a substrate (12), a lower cladding (16), an interference layer (18), and a core layer (20). An electronic element (14) is formed in the structure to control the free-carrier concentration in the interference layer (18).
The light is coupled by gratings (22,24) into the interference layer (18), where the free-carrier concentration is controlled by the element (14), which in turn controls the modulation of the light in the interference layer (18) before it is coupled back to the core (20) layer.
CA002080672A 1991-11-22 1992-10-15 Vertically-coupled arrow modulators or switches on silicon Expired - Fee Related CA2080672C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US797,520 1991-11-22
US07/797,520 US5276748A (en) 1991-11-22 1991-11-22 Vertically-coupled arrow modulators or switches on silicon

Publications (2)

Publication Number Publication Date
CA2080672A1 true CA2080672A1 (en) 1993-05-23
CA2080672C CA2080672C (en) 2002-09-24

Family

ID=25171065

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002080672A Expired - Fee Related CA2080672C (en) 1991-11-22 1992-10-15 Vertically-coupled arrow modulators or switches on silicon

Country Status (5)

Country Link
US (3) US5276748A (en)
EP (1) EP0543369B1 (en)
JP (1) JP3396498B2 (en)
CA (1) CA2080672C (en)
DE (1) DE69224272T2 (en)

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CA2165119C (en) * 1995-12-13 2006-10-03 Vincent Delisle Antiresonant waveguide apparatus for periodically selecting a series of at least one optical wavelength from an incoming light signal
US5903683A (en) * 1997-09-10 1999-05-11 The United States Of America As Represented By The National Security Agency Device for modulating an optical signal using a single wave guide
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US6075908A (en) * 1997-12-19 2000-06-13 Intel Corporation Method and apparatus for optically modulating light through the back side of an integrated circuit die
US6330376B1 (en) 1997-12-19 2001-12-11 Intel Corporation Higher order rejection method and apparatus for optical modulator
US6393169B1 (en) 1997-12-19 2002-05-21 Intel Corporation Method and apparatus for providing optical interconnection
US6374003B1 (en) 1997-12-19 2002-04-16 Intel Corporation Method and apparatus for optically modulating light through the back side of an integrated circuit die using a plurality of optical beams
US6049639A (en) * 1997-12-19 2000-04-11 Intel Corporation Method and apparatus providing optical input/output through the back side of an integrated circuit die
US6052498A (en) * 1997-12-19 2000-04-18 Intel Corporation Method and apparatus providing an optical input/output bus through the back side of an integrated circuit die
US6587605B2 (en) 1999-01-06 2003-07-01 Intel Corporation Method and apparatus for providing optical interconnection
US6215577B1 (en) 1999-10-25 2001-04-10 Intel Corporation Method and apparatus for optically modulating an optical beam with a multi-pass wave-guided optical modulator
US6501092B1 (en) 1999-10-25 2002-12-31 Intel Corporation Integrated semiconductor superlattice optical modulator
US6268953B1 (en) 1999-12-02 2001-07-31 Intel Corporation Method and apparatus for optically modulating an optical beam with long interaction length optical modulator
US6351326B1 (en) 1999-12-14 2002-02-26 Intel Corporation Method and apparatus for optically modulating light utilizing a resonant cavity structure
GB2373343A (en) * 2001-03-16 2002-09-18 Bookham Technology Plc Rib waveguide for connection to an optical component
US6912330B2 (en) * 2001-05-17 2005-06-28 Sioptical Inc. Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6891685B2 (en) * 2001-05-17 2005-05-10 Sioptical, Inc. Anisotropic etching of optical components
US6646747B2 (en) 2001-05-17 2003-11-11 Sioptical, Inc. Interferometer apparatus and associated method
US6608945B2 (en) 2001-05-17 2003-08-19 Optronx, Inc. Self-aligning modulator method and associated apparatus
US6654511B2 (en) 2001-05-17 2003-11-25 Sioptical, Inc. Optical modulator apparatus and associated method
US6947615B2 (en) 2001-05-17 2005-09-20 Sioptical, Inc. Optical lens apparatus and associated method
CA2725883C (en) * 2001-05-17 2013-11-19 Sioptical, Inc. Integrated optical waveguide device comprising a polysilicon layer-based passive optical waveguide device in combination with an active optical waveguide device, and method for making same
US6603889B2 (en) 2001-05-17 2003-08-05 Optronx, Inc. Optical deflector apparatus and associated method
US6526187B1 (en) 2001-05-17 2003-02-25 Optronx, Inc. Polarization control apparatus and associated method
US6690844B2 (en) 2001-05-17 2004-02-10 Optronx, Inc. Optical fiber apparatus and associated method
US6748125B2 (en) 2001-05-17 2004-06-08 Sioptical, Inc. Electronic semiconductor control of light in optical waveguide
US6493502B1 (en) 2001-05-17 2002-12-10 Optronx, Inc. Dynamic gain equalizer method and associated apparatus
US6625348B2 (en) 2001-05-17 2003-09-23 Optron X, Inc. Programmable delay generator apparatus and associated method
US6963118B2 (en) * 2001-05-17 2005-11-08 Sioptical, Inc. Hybrid active and electronic circuit with evanescent coupling
US6993224B1 (en) 2001-11-15 2006-01-31 UNIVERSITé LAVAL Segmented waveguide array gratings (SWAG)-based archival optical memory
US6999662B2 (en) * 2001-11-15 2006-02-14 UNIVERSITé LAVAL Segmented waveguide array grating filters
US6580864B1 (en) * 2002-01-14 2003-06-17 Applied Wdm, Inc. Birefringence free optical waveguide structures
KR100418262B1 (en) * 2002-05-14 2004-02-14 한국전자통신연구원 Multimode interference coupler, multi-layer optical planar waveguide using the same and method of manufacturing the same
US6993236B1 (en) * 2002-06-24 2006-01-31 Luxtera, Inc. Polysilicon and silicon dioxide light scatterers for silicon waveguides on five layer substrates
US7010208B1 (en) * 2002-06-24 2006-03-07 Luxtera, Inc. CMOS process silicon waveguides
CA2557509C (en) * 2004-02-26 2014-09-30 Sioptical, Inc. Active manipulation of light in a silicon-on-insulator (soi) structure
US8031991B2 (en) * 2008-05-28 2011-10-04 Lightwire Inc. Low index, large mode field diameter optical coupler
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JP2015064413A (en) * 2013-09-24 2015-04-09 富士通株式会社 Optical semiconductor element and manufacturing method therefor
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Also Published As

Publication number Publication date
US5502779A (en) 1996-03-26
EP0543369B1 (en) 1998-01-28
CA2080672C (en) 2002-09-24
DE69224272D1 (en) 1998-03-05
JPH06202052A (en) 1994-07-22
JP3396498B2 (en) 2003-04-14
US5276748A (en) 1994-01-04
DE69224272T2 (en) 1998-07-23
US5367582A (en) 1994-11-22
EP0543369A1 (en) 1993-05-26

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